EP0300508A3 - Film thickness-measuring apparatus - Google Patents

Film thickness-measuring apparatus Download PDF

Info

Publication number: EP0300508A3
Authority: EP; European Patent Office
Prior art keywords: film thickness; measuring apparatus; measuring; film; thickness
Prior art date: 1987-07-23
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.): Granted

Application number

EP19880111960

Other versions

EP0300508A2 (en

EP0300508B1 (en

Inventor

Takao c/o Patent & License and Quality Miyazaki

Yoshiro c/o Patent & License and Quality Yamada

Isamu c/o Patent & License and Quality Komine

Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)

JFE Engineering Corp

Original Assignee

NKK Corp

Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)

1987-07-23

Filing date

1988-07-25

Publication date

1990-11-28

1988-07-25 Application filed by NKK Corp filed Critical NKK Corp

1989-01-25 Publication of EP0300508A2 publication Critical patent/EP0300508A2/en

1990-11-28 Publication of EP0300508A3 publication Critical patent/EP0300508A3/en

1994-04-13 Application granted granted Critical

1994-04-13 Publication of EP0300508B1 publication Critical patent/EP0300508B1/en

2008-07-25 Anticipated expiration legal-status Critical

Status Expired - Lifetime legal-status Critical Current

Links

Classifications

- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/02—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness
- G01B11/06—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness for measuring thickness ; e.g. of sheet material
- G01B11/0616—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness for measuring thickness ; e.g. of sheet material of coating
- G01B11/0641—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness for measuring thickness ; e.g. of sheet material of coating with measurement of polarization
- G01B11/065—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness for measuring thickness ; e.g. of sheet material of coating with measurement of polarization using one or more discrete wavelengths
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
- G01N21/21—Polarisation-affecting properties
- G01N21/211—Ellipsometry

Landscapes

Physics & Mathematics (AREA)
General Physics & Mathematics (AREA)
Health & Medical Sciences (AREA)
Life Sciences & Earth Sciences (AREA)
Chemical & Material Sciences (AREA)
Analytical Chemistry (AREA)
Biochemistry (AREA)
General Health & Medical Sciences (AREA)
Immunology (AREA)
Pathology (AREA)
Length Measuring Devices By Optical Means (AREA)
Investigating Or Analysing Materials By Optical Means (AREA)

EP88111960A 1987-07-23 1988-07-25 Film thickness-measuring apparatus Expired - Lifetime EP0300508B1 (en)

Applications Claiming Priority (2)

Application Number	Priority Date	Filing Date	Title
JP62184250A JPS6428509A (en)	1987-07-23	1987-07-23	Apparatus for measuring thickness of film
JP184250/87		1987-07-23

Publications (3)

Publication Number	Publication Date
EP0300508A2 EP0300508A2 (en)	1989-01-25
EP0300508A3 true EP0300508A3 (en)	1990-11-28
EP0300508B1 EP0300508B1 (en)	1994-04-13

Family

ID=16150019

Family Applications (1)

Application Number	Title	Priority Date	Filing Date
EP88111960A Expired - Lifetime EP0300508B1 (en)	1987-07-23	1988-07-25	Film thickness-measuring apparatus

Country Status (4)

Country	Link
US (1)	US4872758A (en)
EP (1)	EP0300508B1 (en)
JP (1)	JPS6428509A (en)
DE (2)	DE3889026T4 (en)

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JP2502443B2 (en) *	1991-01-30	1996-05-29	日本鋼管株式会社	Ellipsometer and coating thickness control method using the same
EP0527230B1 (en) *	1991-01-30	1996-06-05	Nkk Corporation	Ellipsometer
JPH05157521A (en) *	1991-08-29	1993-06-22	Nkk Corp	Measuring method of ellipso parameter and ellipsometer
JPH05113371A (en) *	1991-08-29	1993-05-07	Nkk Corp	Ellipsoparameter measuring method and ellipsometer
US5232547A (en) *	1992-07-01	1993-08-03	Motorola, Inc.	Simultaneously measuring thickness and composition of a film
US5416588A (en) *	1992-12-21	1995-05-16	The Board Of Regents Of The University Of Nebraska	Small modulation ellipsometry
US5657126A (en) *	1992-12-21	1997-08-12	The Board Of Regents Of The University Of Nebraska	Ellipsometer
US5412473A (en) *	1993-07-16	1995-05-02	Therma-Wave, Inc.	Multiple angle spectroscopic analyzer utilizing interferometric and ellipsometric devices
KR19990022929A (en) *	1995-06-15	1999-03-25	데릭 제임스 코이맥	Object surface irradiation method and apparatus
GB9514487D0 (en) *	1995-07-14	1995-09-13	Univ Sheffield	Optical collector head etc
US5717490A (en) *	1996-10-17	1998-02-10	Lsi Logic Corporation	Method for identifying order skipping in spectroreflective film measurement equipment
US6278519B1 (en)	1998-01-29	2001-08-21	Therma-Wave, Inc.	Apparatus for analyzing multi-layer thin film stacks on semiconductors
US5798837A (en)	1997-07-11	1998-08-25	Therma-Wave, Inc.	Thin film optical measurement system and method with calibrating ellipsometer
DE19734646A1 (en) *	1997-08-11	1999-03-04	Bosch Gmbh Robert	Ellipsometer measuring device
US6134011A (en)	1997-09-22	2000-10-17	Hdi Instrumentation	Optical measurement system using polarized light
US6483580B1 (en)	1998-03-06	2002-11-19	Kla-Tencor Technologies Corporation	Spectroscopic scatterometer system
US6370395B1 (en) *	1999-03-19	2002-04-09	Ericsson Inc.	Interactive office nameplate
DE19943312A1 (en) *	1999-09-10	2001-03-15	Haverkamp Mark	Procedure and device for on-line thickness measurement of transparent layers or media using transmission ellipsometry, which yields much more accurate results for transparent media than reflection ellipsometry
KR100574776B1 (en) *	2004-01-15	2006-04-28	한국표준과학연구원	An Ellipsometry Device Using Spectral Imaging And Ellipsometry Method Thereof
US7206066B2 (en) *	2004-03-19	2007-04-17	Kla-Tencor Technologies Corporation	Reflectance surface analyzer
ES2346004T3 (en)	2006-03-14	2010-10-07	Betriebsforschungsinstitut Vdeh Institut Fur Angewandte Forschung Gmbh	PROCEDURE FOR THE DETERMINATION OF A COATING ON A MOBILE METAL BAND.
EP2251455B1 (en)	2009-05-13	2017-09-06	SiO2 Medical Products, Inc.	PECVD coating using an organosilicon precursor
JP5410806B2 (en) *	2009-03-27	2014-02-05	浜松ホトニクス株式会社	Film thickness measuring apparatus and measuring method
US7985188B2 (en) *	2009-05-13	2011-07-26	Cv Holdings Llc	Vessel, coating, inspection and processing apparatus
WO2013170052A1 (en)	2012-05-09	2013-11-14	Sio2 Medical Products, Inc.	Saccharide protective coating for pharmaceutical package
US9458536B2 (en)	2009-07-02	2016-10-04	Sio2 Medical Products, Inc.	PECVD coating methods for capped syringes, cartridges and other articles
WO2011045967A1 (en)	2009-10-13	2011-04-21	浜松ホトニクス株式会社	Film thickness measurement device and film thickness measurement method
US11624115B2 (en)	2010-05-12	2023-04-11	Sio2 Medical Products, Inc.	Syringe with PECVD lubrication
US9878101B2 (en)	2010-11-12	2018-01-30	Sio2 Medical Products, Inc.	Cyclic olefin polymer vessels and vessel coating methods
US8997572B2 (en) *	2011-02-11	2015-04-07	Washington University	Multi-focus optical-resolution photoacoustic microscopy with ultrasonic array detection
US9272095B2 (en)	2011-04-01	2016-03-01	Sio2 Medical Products, Inc.	Vessels, contact surfaces, and coating and inspection apparatus and methods
US11116695B2 (en)	2011-11-11	2021-09-14	Sio2 Medical Products, Inc.	Blood sample collection tube
WO2013071138A1 (en)	2011-11-11	2013-05-16	Sio2 Medical Products, Inc.	PASSIVATION, pH PROTECTIVE OR LUBRICITY COATING FOR PHARMACEUTICAL PACKAGE, COATING PROCESS AND APPARATUS
US11020006B2 (en)	2012-10-18	2021-06-01	California Institute Of Technology	Transcranial photoacoustic/thermoacoustic tomography brain imaging informed by adjunct image data
US9664626B2 (en)	2012-11-01	2017-05-30	Sio2 Medical Products, Inc.	Coating inspection method
WO2014078666A1 (en)	2012-11-16	2014-05-22	Sio2 Medical Products, Inc.	Method and apparatus for detecting rapid barrier coating integrity characteristics
BR112015012470B1 (en)	2012-11-30	2022-08-02	Sio2 Medical Products, Inc	PRODUCTION METHOD OF A MEDICAL DRUM FOR A MEDICAL CARTRIDGE OR SYRINGE
US9764093B2 (en)	2012-11-30	2017-09-19	Sio2 Medical Products, Inc.	Controlling the uniformity of PECVD deposition
EP2961858B1 (en)	2013-03-01	2022-09-07	Si02 Medical Products, Inc.	Coated syringe.
CN105392916B (en)	2013-03-11	2019-03-08	Sio2医药产品公司	Coat packaging materials
US9937099B2 (en)	2013-03-11	2018-04-10	Sio2 Medical Products, Inc.	Trilayer coated pharmaceutical packaging with low oxygen transmission rate
EP2971227B1 (en)	2013-03-15	2017-11-15	Si02 Medical Products, Inc.	Coating method.
WO2014143838A1 (en) *	2013-03-15	2014-09-18	Sensory Analytics	Method and system for real-time in-process measurement of coating thickness
US11137375B2 (en)	2013-11-19	2021-10-05	California Institute Of Technology	Systems and methods of grueneisen-relaxation photoacoustic microscopy and photoacoustic wavefront shaping
US11066745B2 (en)	2014-03-28	2021-07-20	Sio2 Medical Products, Inc.	Antistatic coatings for plastic vessels
US11077233B2 (en)	2015-08-18	2021-08-03	Sio2 Medical Products, Inc.	Pharmaceutical and other packaging with low oxygen transmission rate
JP6387952B2 (en) *	2015-12-21	2018-09-12	横河電機株式会社	Polarization inspection equipment
US11672426B2 (en)	2017-05-10	2023-06-13	California Institute Of Technology	Snapshot photoacoustic photography using an ergodic relay
US11530979B2 (en)	2018-08-14	2022-12-20	California Institute Of Technology	Multifocal photoacoustic microscopy through an ergodic relay
EP3847453A4 (en)	2018-09-04	2022-06-22	California Institute of Technology	Enhanced-resolution infrared photoacoustic microscopy and spectroscopy
US11369280B2 (en)	2019-03-01	2022-06-28	California Institute Of Technology	Velocity-matched ultrasonic tagging in photoacoustic flowgraphy
WO2021092250A1 (en)	2019-11-05	2021-05-14	California Institute Of Technology	Spatiotemporal antialiasing in photoacoustic computed tomography
US11193882B2 (en) *	2019-11-26	2021-12-07	Samsung Electronics Co., Ltd.	Ellipsometer and inspection device for semiconductor device

Citations (5)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
US3985447A (en) *	1975-08-29	1976-10-12	Bell Telephone Laboratories, Incorporated	Measurement of thin films by polarized light
DE2616141A1 (en) *	1975-04-28	1976-11-11	Ibm	ELLIPSOMETRIC MEASURING METHOD
EP0139186A1 (en) *	1983-08-31	1985-05-02	Nippon Kokan Kabushiki Kaisha	Apparatus for measuring film thickness
EP0165722A2 (en) *	1984-05-24	1985-12-27	Victor Company Of Japan, Limited	Film thickness measuring apparatus
EP0249235A2 (en) *	1986-06-13	1987-12-16	Nippon Kokan Kabushiki Kaisha	Film thickness-measuring apparatus using linearly polarized light

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
JPS58103604A (en) *	1981-12-16	1983-06-20	Teijin Ltd	Method and device for measuring thickness of film

1987
- 1987-07-23 JP JP62184250A patent/JPS6428509A/en active Granted
1988
- 1988-07-22 US US07/223,275 patent/US4872758A/en not_active Expired - Lifetime
- 1988-07-25 EP EP88111960A patent/EP0300508B1/en not_active Expired - Lifetime
- 1988-07-25 DE DE3889026T patent/DE3889026T4/en not_active Expired - Lifetime
- 1988-07-25 DE DE3889026A patent/DE3889026D1/en not_active Expired - Fee Related

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
DE2616141A1 (en) *	1975-04-28	1976-11-11	Ibm	ELLIPSOMETRIC MEASURING METHOD
US3985447A (en) *	1975-08-29	1976-10-12	Bell Telephone Laboratories, Incorporated	Measurement of thin films by polarized light
EP0139186A1 (en) *	1983-08-31	1985-05-02	Nippon Kokan Kabushiki Kaisha	Apparatus for measuring film thickness
EP0165722A2 (en) *	1984-05-24	1985-12-27	Victor Company Of Japan, Limited	Film thickness measuring apparatus
EP0249235A2 (en) *	1986-06-13	1987-12-16	Nippon Kokan Kabushiki Kaisha	Film thickness-measuring apparatus using linearly polarized light

Also Published As

Publication number	Publication date
EP0300508A2 (en)	1989-01-25
EP0300508B1 (en)	1994-04-13
JPS6428509A (en)	1989-01-31
US4872758A (en)	1989-10-10
DE3889026T2 (en)	1994-10-13
DE3889026T4 (en)	1995-01-12
DE3889026D1 (en)	1994-05-19
JPH054606B2 (en)	1993-01-20

Legal Events

Date	Code	Title	Description
1988-12-10	PUAI	Public reference made under article 153(3) epc to a published international application that has entered the european phase	Free format text: ORIGINAL CODE: 0009012
1989-01-25	AK	Designated contracting states	Kind code of ref document: A2 Designated state(s): DE FR GB
1990-10-10	PUAL	Search report despatched	Free format text: ORIGINAL CODE: 0009013
1990-11-28	AK	Designated contracting states	Kind code of ref document: A3 Designated state(s): DE FR GB
1991-03-06	17P	Request for examination filed	Effective date: 19901228
1991-11-21	17Q	First examination report despatched	Effective date: 19911009
1994-02-25	GRAA	(expected) grant	Free format text: ORIGINAL CODE: 0009210
1994-04-13	AK	Designated contracting states	Kind code of ref document: B1 Designated state(s): DE FR GB
1994-04-13	PG25	Lapsed in a contracting state [announced via postgrant information from national office to epo]	Ref country code: FR Effective date: 19940413
1994-05-19	REF	Corresponds to:	Ref document number: 3889026 Country of ref document: DE Date of ref document: 19940519
1994-09-09	EN	Fr: translation not filed
1995-02-16	PLBE	No opposition filed within time limit	Free format text: ORIGINAL CODE: 0009261
1995-02-16	STAA	Information on the status of an ep patent application or granted ep patent	Free format text: STATUS: NO OPPOSITION FILED WITHIN TIME LIMIT
1995-04-05	26N	No opposition filed
2001-07-16	PGFP	Annual fee paid to national office [announced via postgrant information from national office to epo]	Ref country code: DE Payment date: 20010716 Year of fee payment: 14
2001-07-25	PGFP	Annual fee paid to national office [announced via postgrant information from national office to epo]	Ref country code: GB Payment date: 20010725 Year of fee payment: 14
2002-01-01	REG	Reference to a national code	Ref country code: GB Ref legal event code: IF02
2002-07-25	PG25	Lapsed in a contracting state [announced via postgrant information from national office to epo]	Ref country code: GB Free format text: LAPSE BECAUSE OF NON-PAYMENT OF DUE FEES Effective date: 20020725
2003-02-01	PG25	Lapsed in a contracting state [announced via postgrant information from national office to epo]	Ref country code: DE Free format text: LAPSE BECAUSE OF NON-PAYMENT OF DUE FEES Effective date: 20030201
2003-03-19	GBPC	Gb: european patent ceased through non-payment of renewal fee	Effective date: 20020725

Publication	Publication Date	Title
EP0300508A3 (en)	1990-11-28	Film thickness-measuring apparatus
GB2229739B (en)	1993-08-25	Thin film forming apparatus
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