EP0286191A1 - Vakuum-Lichtbogen-Ionenquelle - Google Patents
Vakuum-Lichtbogen-Ionenquelle Download PDFInfo
- Publication number
- EP0286191A1 EP0286191A1 EP88200649A EP88200649A EP0286191A1 EP 0286191 A1 EP0286191 A1 EP 0286191A1 EP 88200649 A EP88200649 A EP 88200649A EP 88200649 A EP88200649 A EP 88200649A EP 0286191 A1 EP0286191 A1 EP 0286191A1
- Authority
- EP
- European Patent Office
- Prior art keywords
- micro
- plasma
- droplets
- receptacles
- cathode
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Images
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J27/00—Ion beam tubes
- H01J27/02—Ion sources; Ion guns
- H01J27/022—Details
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J27/00—Ion beam tubes
- H01J27/02—Ion sources; Ion guns
- H01J27/08—Ion sources; Ion guns using arc discharge
Definitions
- the invention relates to a vacuum arc ion source device comprising a plasma emitting cathode and an anode, polarized at suitable potentials.
- the material of the electrodes When an arc is blown between two electrodes placed under vacuum, the material of the electrodes is locally vaporized under the effect of heating.
- the ionized gas gives rise to a plasma formed by an ion-electron mixture with zero total charge.
- the arc is initiated by the projection of an auxiliary plasma between the anode and the cathode by means of an autonomous trigger for a short time relative to the length of the arc pulse.
- This emission of plasma is accompanied, for certain materials, by a projection of micro-droplets of molten material; this emission is not isotropic and is located mainly in a solid angle close to the surface of the cathode.
- the invention aims at the partial or total elimination of this emission of micro-droplets liable to harm the quality of the desired layer or the proper functioning of the equipment equipped with this source.
- this elimination is carried out by means of recovery of said micro-droplets constituted by receptacles polarized or not, or by means of separation of said micro-droplets from the plasma, each of said means ensuring elimination by tial of micro-projections and their total elimination being ensured by any combination of said means.
- the receptacles are formed by hollow parts arranged in the zone of maximum emission of micro-projections (directions forming a small angle with the plasma emission plane), said hollow parts having undergone an appropriate surface treatment allowing good adhesion of micro-projections, this adhesion being able to be improved by polarization of the receptacles relative to the source.
- the receptacles are in the form of grids arranged at or beyond the anode and so as to avoid a direct view of the cathode from the extraction.
- the means for separating the micro-droplets from the plasma consist of induction coils providing a magnetic field for confining the plasma which limits its radial diffusion along a rectilinear or toroidal path, said plasma expanding again at the outlet of said device, in the absence of magnetic field.
- FIG. 1 shows a plasma 1 emitted by a cathode 2 between said cathode and an anode 3.
- the maximum emission zone 4 of the microdroplets 5, close to the plasma emission plane is limited by this plane on the one hand and by a cone whose trace on the plane of the figure is indicated by dashed lines on the other hand.
- the cathode 2 of cylindrical shape is surrounded by a sleeve of the same shape constituting the anode trigger 6.
- the recovery of the micro-projections is carried out in the maximum emission zone defined in FIG. 1 using receptacles formed by hollow parts 7 isolated from the trigger 6 and the anode 3 by means of parts 8 and 9 respectively.
- These hollow parts serve as a container for projections and allow, by an appropriate surface treatment, a good adhesion which can be improved by a limited polarization of the receptacle relative to the source and in the opposite direction to the electric charge of the micro-droplets.
- a system of receptacles in the form of grids placed in the projection zone of the plasma, as represented at 10 in FIG. grids are arranged at or beyond the anode 3 and so as to avoid a direct view of the cathode from the extraction; they can be weakly polarized to ensure more efficient capture, taking into account the electrical charge of the micro-droplets.
- micro-projections are intercepted by these grids on which they are fixed by bonding if their surface has received a treatment promoting adhesion or maintained by gravity if their section has the shape of a chute (case shown in FIG. 3).
- the arrangement of the coils 12b ensures a toroidal path of the plasma.
- the baffles 14 distributed along the walls along this path ensure the recovery of micro-projections.
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Combustion & Propulsion (AREA)
- Plasma Technology (AREA)
- Electron Sources, Ion Sources (AREA)
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
FR8705120A FR2613897B1 (fr) | 1987-04-10 | 1987-04-10 | Dispositif de suppression des micro-projections dans une source d'ions a arc sous vide |
FR8705120 | 1987-04-10 |
Publications (2)
Publication Number | Publication Date |
---|---|
EP0286191A1 true EP0286191A1 (de) | 1988-10-12 |
EP0286191B1 EP0286191B1 (de) | 1992-09-09 |
Family
ID=9350012
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
EP88200649A Expired - Lifetime EP0286191B1 (de) | 1987-04-10 | 1988-04-06 | Vakuum-Lichtbogen-Ionenquelle |
Country Status (5)
Country | Link |
---|---|
US (1) | US4924138A (de) |
EP (1) | EP0286191B1 (de) |
JP (1) | JPS63279543A (de) |
DE (1) | DE3874386T2 (de) |
FR (1) | FR2613897B1 (de) |
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4929321A (en) * | 1988-03-23 | 1990-05-29 | Balzers Aktiengesellschaft | Method and apparatus for coating workpieces |
AU604856B2 (en) * | 1987-03-13 | 1991-01-03 | Ian Gordon Brown | Multi-cathode metal vapor arc ion source |
EP0480518A1 (de) * | 1990-10-12 | 1992-04-15 | Societe Anonyme D'etudes Et Realisations Nucleaires S.O.D.E.R.N. | Elektronenquelle mit teilchenhaltender Anordnung |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO1993010552A1 (en) * | 1991-11-11 | 1993-05-27 | Nauchno-Proizvodstvennoe Predpriyatie 'novatekh' | Method and device for generation of ion beam |
Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4191888A (en) * | 1978-11-17 | 1980-03-04 | Communications Satellite Corporation | Self-shielding small hole accel grid |
EP0094473A2 (de) * | 1982-03-08 | 1983-11-23 | International Business Machines Corporation | Verfahren und Vorrichtung zur Erzeugung eines Ionenstrahles |
Family Cites Families (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
NL85805C (de) * | 1950-04-12 | |||
BE526615A (de) * | 1953-02-19 | |||
DE1074163B (de) * | 1953-05-30 | 1960-01-28 | Standard Elektrik Lorenz Aktiengesellschaft, Stuttgart-Zuffenhausen | Kathodenstrahlröhre mit einem Strahlerzeugungssystem mit Ionenfalle |
GB1064101A (en) * | 1964-07-13 | 1967-04-05 | Atomic Energy Authority Uk | Improvements in or relating to ion sources |
JPS5711447A (en) * | 1980-06-23 | 1982-01-21 | Toshiba Corp | Hollow cathode discharge device |
JPS59165356A (ja) * | 1983-03-09 | 1984-09-18 | Hitachi Ltd | イオン源 |
JPS6122548A (ja) * | 1984-07-09 | 1986-01-31 | Hitachi Ltd | 荷電粒子引出系 |
-
1987
- 1987-04-10 FR FR8705120A patent/FR2613897B1/fr not_active Expired - Fee Related
-
1988
- 1988-04-06 EP EP88200649A patent/EP0286191B1/de not_active Expired - Lifetime
- 1988-04-06 DE DE8888200649T patent/DE3874386T2/de not_active Expired - Fee Related
- 1988-04-07 JP JP63084215A patent/JPS63279543A/ja active Pending
- 1988-04-11 US US07/179,610 patent/US4924138A/en not_active Expired - Fee Related
Patent Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4191888A (en) * | 1978-11-17 | 1980-03-04 | Communications Satellite Corporation | Self-shielding small hole accel grid |
EP0094473A2 (de) * | 1982-03-08 | 1983-11-23 | International Business Machines Corporation | Verfahren und Vorrichtung zur Erzeugung eines Ionenstrahles |
Non-Patent Citations (4)
Title |
---|
NUCLEAR INSTRUMENTS AND METHODS, vol. 185, nos. 1-3, juin 1981, pages 25-27, North-Holland Publ. Co., Amsterdam, NL; J.H. WHEALTON: "Improvement of gas efficiency of negative ion sources" * |
PATENT ABSTRACTS OF JAPAN, vol. 10, no. 170 (E-412)[2226], 17 juin 1986; & JP-A-61 022 548 (HITACHI SEISAKUSHO K.K.) 31-01-986 * |
PATENT ABSTRACTS OF JAPAN, vol. 4, no. 170 (E-35)[652], 22 novembre 1980; & JP-A-55 117 856 (HITACHI SEISAKUSHO K.K.) 10-09-1980 * |
PATENT ABSTRACTS OF JAPAN, vol. 6, no. 72 (E-105)[950], 7 mai 1982; & JP-A-57 011 447 (TOKYO SHIBAURA DENKI K.K.) 21-01-1982 * |
Cited By (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
AU604856B2 (en) * | 1987-03-13 | 1991-01-03 | Ian Gordon Brown | Multi-cathode metal vapor arc ion source |
US4929321A (en) * | 1988-03-23 | 1990-05-29 | Balzers Aktiengesellschaft | Method and apparatus for coating workpieces |
EP0480518A1 (de) * | 1990-10-12 | 1992-04-15 | Societe Anonyme D'etudes Et Realisations Nucleaires S.O.D.E.R.N. | Elektronenquelle mit teilchenhaltender Anordnung |
FR2667980A1 (fr) * | 1990-10-12 | 1992-04-17 | Sodern | Source d'electrons presentant un dispositif de retention de matieres. |
US5256931A (en) * | 1990-10-12 | 1993-10-26 | U.S. Philips Corp. | Electron source having a material-retaining device |
Also Published As
Publication number | Publication date |
---|---|
DE3874386D1 (de) | 1992-10-15 |
DE3874386T2 (de) | 1993-04-08 |
FR2613897B1 (fr) | 1990-11-09 |
FR2613897A1 (fr) | 1988-10-14 |
JPS63279543A (ja) | 1988-11-16 |
US4924138A (en) | 1990-05-08 |
EP0286191B1 (de) | 1992-09-09 |
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