EP0280892A3 - Vaccum pump with a device for counting the revolutions - Google Patents

Vaccum pump with a device for counting the revolutions Download PDF

Info

Publication number: EP0280892A3
Authority: EP; European Patent Office
Prior art keywords: revolutions; counting; vaccum pump; vaccum; pump
Prior art date: 1987-02-28
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.): Granted

Application number

EP88101450A

Other languages

German (de)

Other versions

EP0280892A2 (en

EP0280892B1 (en

Inventor

Hans Amrath

Zoltan Szocs

Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)

Balzers und Leybold Deutschland Holding AG

Original Assignee

Leybold AG

Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)

1987-02-28

Filing date

1988-02-02

Publication date

1989-04-05

1988-02-02 Application filed by Leybold AG filed Critical Leybold AG

1988-09-07 Publication of EP0280892A2 publication Critical patent/EP0280892A2/en

1989-04-05 Publication of EP0280892A3 publication Critical patent/EP0280892A3/en

1992-10-28 Application granted granted Critical

1992-10-28 Publication of EP0280892B1 publication Critical patent/EP0280892B1/en

2008-02-02 Anticipated expiration legal-status Critical

Status Expired - Lifetime legal-status Critical Current

Links

Classifications

- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
- F04C28/00—Control of, monitoring of, or safety arrangements for, pumps or pumping installations specially adapted for elastic fluids
- F04C28/28—Safety arrangements; Monitoring
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04D—NON-POSITIVE-DISPLACEMENT PUMPS
- F04D15/00—Control, e.g. regulation, of pumps, pumping installations or systems
- F04D15/0094—Indicators of rotational movement
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
- F04C2270/00—Control; Monitoring or safety arrangements
- F04C2270/86—Detection

Landscapes

Engineering & Computer Science (AREA)
Mechanical Engineering (AREA)
General Engineering & Computer Science (AREA)
Non-Positive Displacement Air Blowers (AREA)
Compressor (AREA)
Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
Measuring Volume Flow (AREA)

EP88101450A 1987-02-28 1988-02-02 Vaccum pump with a device for counting the revolutions Expired - Lifetime EP0280892B1 (en)

Applications Claiming Priority (2)

Application Number	Priority Date	Filing Date	Title
DE8703108U		1987-02-28
DE8703108U DE8703108U1 (en)	1987-02-28	1987-02-28	Vacuum pump with a device for measuring speed

Publications (3)

Publication Number	Publication Date
EP0280892A2 EP0280892A2 (en)	1988-09-07
EP0280892A3 true EP0280892A3 (en)	1989-04-05
EP0280892B1 EP0280892B1 (en)	1992-10-28

Family

ID=6805337

Family Applications (1)

Application Number	Title	Priority Date	Filing Date
EP88101450A Expired - Lifetime EP0280892B1 (en)	1987-02-28	1988-02-02	Vaccum pump with a device for counting the revolutions

Country Status (4)

Country	Link
US (1)	US4822251A (en)
EP (1)	EP0280892B1 (en)
JP (1)	JPS63215887A (en)
DE (2)	DE8703108U1 (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
CN107061286A (en) *	2016-12-12	2017-08-18	无锡吴创环境科技有限公司	Roots blower bearing clearance is eliminated and end clearance adjustment structure

Families Citing this family (19)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
JPH03222895A (en) *	1990-01-26	1991-10-01	Hitachi Koki Co Ltd	Thread-grooved vacuum pump
US5238362A (en) *	1990-03-09	1993-08-24	Varian Associates, Inc.	Turbomolecular pump
JPH04219493A (en) *	1990-08-10	1992-08-10	Ebara Corp	Turbo-molecular pump
JP3408309B2 (en) *	1994-02-10	2003-05-19	株式会社東芝	Hermetic compressor and refrigeration system using this compressor
JP3010529B1 (en) *	1998-08-28	2000-02-21	セイコー精機株式会社	Vacuum pump and vacuum device
JP3047292B1 (en) *	1998-11-24	2000-05-29	セイコー精機株式会社	Turbo molecular pump and vacuum device
US6491829B2 (en) *	1999-12-24	2002-12-10	Takashi Nishimoto	Method and unit for processing contaminated liquid
JP2002070787A (en) *	2000-08-25	2002-03-08	Kashiyama Kogyo Kk	Vacuum pump
JP2002295398A (en) *	2001-03-28	2002-10-09	Boc Edwards Technologies Ltd	Device and method for protecting turbo molecular pump
DE10150015A1 (en) *	2001-10-11	2003-04-17	Leybold Vakuum Gmbh	Multiple chamber plant used for degassing, coating or etching substrates comprises an evacuating system connected to chambers
DE102004024554B4 (en) *	2004-05-18	2018-01-25	Pfeiffer Vacuum Gmbh	Oil-sealed rotary vane vacuum pump
FR2925592A3 (en) *	2007-12-19	2009-06-26	Renault Sas	Vacuum pump for use as braking assistance device in motor vehicle, has drive shaft freely rotated in pump casing and connected to rotatable cam shaft of combustion engine of motor vehicle, and sensor detecting rotation of shaft
JP5719592B2 (en) *	2008-07-14	2015-05-20	エドワーズ株式会社	Vacuum pump
DE102010012850A1 (en) *	2010-03-25	2011-09-29	Sauer-Danfoss Aps	Fluid rotary machine with a sensor arrangement
JP5901613B2 (en) *	2010-04-30	2016-04-13	シェフラーテクノロジーズアー・ゲーウントコー．カー・ゲーＳｃｈａｅｆｆｌｅｒＴｅｃｈｎｏｌｏｇｉｅｓＡＧ＆Ｃｏ．ＫＧ	Hydraulic pressure feeder and electrohydraulic control module
US9336990B2 (en) *	2013-08-29	2016-05-10	Varian Semiconductor Equipment Associates, Inc.	Semiconductor process pumping arrangements
CN104295358A (en) *	2014-10-20	2015-01-21	广西玉柴机器股份有限公司	Water pump of engine
US11619224B2 (en) *	2016-10-31	2023-04-04	Mitsubishi Electric Corporation	Degradation diagnostic device and air-conditioning apparatus
WO2020095768A1 (en) *	2018-11-09	2020-05-14	Ｋｙｂ株式会社	Electric pump

Citations (4)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
FR1142139A (en) *	1955-03-12	1957-09-13	Charmilles Sa Ateliers	Circulator comprising a device for indicating its direction of rotation
DE3335864A1 (en) *	1983-10-03	1985-04-11	Robert Bosch Gmbh, 7000 Stuttgart	Inductive rod sensor having an electric coil
EP0194213A1 (en) *	1985-02-26	1986-09-10	Société à Responsabilité Limitée L'ELECTRICFIL INDUSTRIE	Electromagnetic sensors
GB2183847A (en) *	1985-12-05	1987-06-10	Teves Metallwaren Alfred	Inductive pulse generator

Family Cites Families (10)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
US1927799A (en) *	1932-03-07	1933-09-19	Goulds Pumps	Rotary pump
US4180375A (en) *	1977-01-21	1979-12-25	Altex Scientific, Inc.	Liquid chromatography pump
US4328824A (en) *	1979-12-10	1982-05-11	General Electric Company	Flow divider with plural metering gears, unrestrained spacers there-between and lubricated end roller bearings
US4384825A (en) *	1980-10-31	1983-05-24	The Bendix Corporation	Personal sampling pump
DE3047699A1 (en) *	1980-12-18	1982-07-01	Arthur Pfeiffer Vakuumtechnik Wetzlar Gmbh, 6334 Asslar	ROLLING PISTON PUMP WITH PRESSURE COMPENSATION CHAMBER
US4500268A (en) *	1982-09-30	1985-02-19	Chandler Evans Inc	Rotary pump having brake means with thermal fuse
JPS5963709U (en) *	1982-10-21	1984-04-26	三菱電機株式会社	Control equipment for pressure equipment
JPS59131061U (en) *	1983-02-22	1984-09-03	株式会社ボッシュオートモーティブ　システム	Vane compressor rotation detector
JPS60178985A (en) *	1984-02-24	1985-09-12	Sanden Corp	Compressor having rotation detecting function
DE3410905A1 (en) *	1984-03-24	1985-10-03	Leybold-Heraeus GmbH, 5000 Köln	DEVICE FOR CONVEYING GASES IN SUBATMOSPHAERIC PRESSURES

1987
- 1987-02-28 DE DE8703108U patent/DE8703108U1/en not_active Expired
1988
- 1988-02-02 EP EP88101450A patent/EP0280892B1/en not_active Expired - Lifetime
- 1988-02-02 DE DE8888101450T patent/DE3875499D1/en not_active Expired - Fee Related
- 1988-02-17 JP JP63032984A patent/JPS63215887A/en active Pending
- 1988-02-29 US US07/162,222 patent/US4822251A/en not_active Expired - Fee Related

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
FR1142139A (en) *	1955-03-12	1957-09-13	Charmilles Sa Ateliers	Circulator comprising a device for indicating its direction of rotation
DE3335864A1 (en) *	1983-10-03	1985-04-11	Robert Bosch Gmbh, 7000 Stuttgart	Inductive rod sensor having an electric coil
EP0194213A1 (en) *	1985-02-26	1986-09-10	Société à Responsabilité Limitée L'ELECTRICFIL INDUSTRIE	Electromagnetic sensors
GB2183847A (en) *	1985-12-05	1987-06-10	Teves Metallwaren Alfred	Inductive pulse generator

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
CN107061286A (en) *	2016-12-12	2017-08-18	无锡吴创环境科技有限公司	Roots blower bearing clearance is eliminated and end clearance adjustment structure

Also Published As

Publication number	Publication date
EP0280892A2 (en)	1988-09-07
DE8703108U1 (en)	1988-03-31
DE3875499D1 (en)	1992-12-03
JPS63215887A (en)	1988-09-08
EP0280892B1 (en)	1992-10-28
US4822251A (en)	1989-04-18

Legal Events

Date	Code	Title	Description
1988-07-23	PUAI	Public reference made under article 153(3) epc to a published international application that has entered the european phase	Free format text: ORIGINAL CODE: 0009012
1988-09-07	AK	Designated contracting states	Kind code of ref document: A2 Designated state(s): CH DE FR GB IT LI
1989-02-14	PUAL	Search report despatched	Free format text: ORIGINAL CODE: 0009013
1989-04-05	AK	Designated contracting states	Kind code of ref document: A3 Designated state(s): CH DE FR GB IT LI
1989-05-03	17P	Request for examination filed	Effective date: 19890301
1990-01-17	17Q	First examination report despatched	Effective date: 19891204
1992-07-02	ITF	It: translation for a ep patent filed	Owner name: DE DOMINICIS & MAYER S.R.L.
1992-09-11	GRAA	(expected) grant	Free format text: ORIGINAL CODE: 0009210
1992-10-28	AK	Designated contracting states	Kind code of ref document: B1 Designated state(s): CH DE FR GB IT LI
1992-12-02	GBT	Gb: translation of ep patent filed (gb section 77(6)(a)/1977)
1992-12-03	REF	Corresponds to:	Ref document number: 3875499 Country of ref document: DE Date of ref document: 19921203
1993-02-05	ET	Fr: translation filed
1993-08-28	PLBE	No opposition filed within time limit	Free format text: ORIGINAL CODE: 0009261
1993-08-28	STAA	Information on the status of an ep patent application or granted ep patent	Free format text: STATUS: NO OPPOSITION FILED WITHIN TIME LIMIT
1993-10-20	26N	No opposition filed
1994-01-14	PGFP	Annual fee paid to national office [announced via postgrant information from national office to epo]	Ref country code: FR Payment date: 19940114 Year of fee payment: 7 Ref country code: CH Payment date: 19940114 Year of fee payment: 7
1994-01-18	PGFP	Annual fee paid to national office [announced via postgrant information from national office to epo]	Ref country code: GB Payment date: 19940118 Year of fee payment: 7
1994-01-19	PGFP	Annual fee paid to national office [announced via postgrant information from national office to epo]	Ref country code: DE Payment date: 19940119 Year of fee payment: 7
1995-02-02	PG25	Lapsed in a contracting state [announced via postgrant information from national office to epo]	Ref country code: GB Effective date: 19950202
1995-02-28	PG25	Lapsed in a contracting state [announced via postgrant information from national office to epo]	Ref country code: LI Effective date: 19950228 Ref country code: CH Effective date: 19950228
1995-09-27	GBPC	Gb: european patent ceased through non-payment of renewal fee	Effective date: 19950202
1995-10-31	PG25	Lapsed in a contracting state [announced via postgrant information from national office to epo]	Ref country code: FR Effective date: 19951031
1995-11-01	PG25	Lapsed in a contracting state [announced via postgrant information from national office to epo]	Ref country code: DE Effective date: 19951101
1995-12-29	REG	Reference to a national code	Ref country code: FR Ref legal event code: ST
2005-02-02	PG25	Lapsed in a contracting state [announced via postgrant information from national office to epo]	Ref country code: IT Free format text: LAPSE BECAUSE OF NON-PAYMENT OF DUE FEES;WARNING: LAPSES OF ITALIAN PATENTS WITH EFFECTIVE DATE BEFORE 2007 MAY HAVE OCCURRED AT ANY TIME BEFORE 2007. THE CORRECT EFFECTIVE DATE MAY BE DIFFERENT FROM THE ONE RECORDED. Effective date: 20050202

Publication	Publication Date	Title
EP0280892A3 (en)	1989-04-05	Vaccum pump with a device for counting the revolutions
GB8924766D0 (en)	1989-12-20	Pumping device
GB2208241B (en)	1992-01-08	Drive device for pumps.
EP0365230A3 (en)	1990-12-19	Suction device
GB2101097B (en)	1984-10-24	A materials-handling device
DE3853890D1 (en)	1995-07-06	Device working with a plasma.
EP0614632A3 (en)	1996-04-10	A positioning device.
GB8915561D0 (en)	1989-08-23	A drive device
EP0286982A3 (en)	1989-11-29	Registering device
GB2202008B (en)	1991-11-20	A fan unit.
GB8914480D0 (en)	1989-08-09	Suction device
GB2210643B (en)	1992-01-22	Device on a carding machine, cleaner or the like
ES2009749B3 (en)	1990-08-01	DEVICE AGAINST HANDLING A VOLUME METER.
GB8918604D0 (en)	1989-09-27	Driving device for pumps or the like
GB2201730B (en)	1991-01-16	A positioning device
DE3277467D1 (en)	1987-11-19	Analogue indicating device, particularly a tachometer
AU103896S (en)	1989-05-18	A display device
GB8822291D0 (en)	1988-10-26	Suction device
ZA877239B (en)	1988-03-25	A monotoring device
GB2207276B (en)	1991-07-31	A display device.
GB2214691B (en)	1991-10-23	A display device
EP0285407A3 (en)	1990-09-05	A speed-shifting device
GB2226405B (en)	1993-01-13	A device for indicating angles
EP0287924A3 (en)	1990-03-21	A pump by vessel revolution
AR241866A1 (en)	1993-01-29	A magneto-therapy device.

EP0280892A3 - Vaccum pump with a device for counting the revolutions - Google Patents

Info

Links

Classifications

Landscapes

Applications Claiming Priority (2)

Publications (3)

Family

ID=6805337

Family Applications (1)

Country Status (4)

Cited By (1)

Families Citing this family (19)

Citations (4)

Family Cites Families (10)

Patent Citations (4)

Cited By (1)

Also Published As

Similar Documents

Legal Events