EP0275306A1 - Multipurpose gaseous detector device for electron microscopes. - Google Patents

Multipurpose gaseous detector device for electron microscopes.

Info

Publication number
EP0275306A1
EP0275306A1 EP87905370A EP87905370A EP0275306A1 EP 0275306 A1 EP0275306 A1 EP 0275306A1 EP 87905370 A EP87905370 A EP 87905370A EP 87905370 A EP87905370 A EP 87905370A EP 0275306 A1 EP0275306 A1 EP 0275306A1
Authority
EP
European Patent Office
Prior art keywords
sample
electron beam
emitted
meters
photons
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
EP87905370A
Other languages
German (de)
French (fr)
Other versions
EP0275306B1 (en
EP0275306A4 (en
Inventor
Gerasimos D Danilatos
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
ElectroScan Corp
Electro Scan Corp
Original Assignee
ElectroScan Corp
Electro Scan Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by ElectroScan Corp, Electro Scan Corp filed Critical ElectroScan Corp
Priority to AT87905370T priority Critical patent/ATE57790T1/en
Publication of EP0275306A1 publication Critical patent/EP0275306A1/en
Publication of EP0275306A4 publication Critical patent/EP0275306A4/en
Application granted granted Critical
Publication of EP0275306B1 publication Critical patent/EP0275306B1/en
Expired legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/26—Electron or ion microscopes; Electron or ion diffraction tubes
    • H01J37/28—Electron or ion microscopes; Electron or ion diffraction tubes with scanning beams

Definitions

  • Scanning electron microscopes and generally instruments employing an electron beam (probe) operate in vacuum (pressure less than about 0.0001 mbar) and the specimens examined by such instruments are also placed in vacuum. Scanning a sample within a vacuum presents many problems. Many biological specimens cannot survive in vacuum. Wet specimens can experience evaporation of their fluid content before an accurate image can be obtained. Nonconducting samples can accumulate a surface charge which obscures the details of the sample's surface and lowers the resolution of the image obtained.
  • On object of the present invention is to provide a more general and multiputpose means for environmental scanning electron microscopy.
  • the present invention provides a scanning electron microscope for cathodoluminescenct detection of specimens which comprises a vacuum envelope having a pressure limiting aperture.
  • An electron beam source is located within the vacuum envelope and is capable of emitting an electron beam.
  • Pocusing means are located within the vacuum envelope and are capable of directing an electron beam emitted by the electron beam source through the pressure limiting aperture.
  • Electron beam scanning means are also located within the vacuum envelope and are capable of scanning an electron beam emitted by the electron beam source across the diameter of the pressure limiting aperture.
  • a sample platform means is disposed outside the vacuum envelope and is capable of maintaining a sample in registration with the pressure limiting aperture such that a surface of the sample may be exposed to an electron beam emitted from the electron beam source and directed through the pressure limiting aperture so as to cause radiation to be emitted from the sample.
  • the scanning electron microscope of the present invention further comprises gas containment means capable of maintaining the sample platform means enveloped in a gaseous medium so as to allow radiation emitted from a sample located on the sample platform means and exposed to an electron beam emitted from the electron beam source to come into contact with gas molecules of the gaseous medium and cause the gas molecules to emit photons.
  • Detection means are provided which are capable of detecting photons emitted from the gas molecules of the gaseous medium.
  • the present invention also provides a method for microscopically imaging the surface of a sample which comprises surrounding the sample with gas molecules and scanning the surface of the sample with an electron beam having sufficient energy so as to cause radiation to be emitted from the surface of the sample. Photons which are emitted from the gas molecules which come into contact with radiation emitted from the surface of the sample are then detected, the photons being emitted from the gas molecules in an amount proportional to the amount of radiation emitted from the surface of the sample. Images of the sample are then formed based on the number of photons detected.
  • Fig. 1 is a schematic cross-sectional view of a device which embodies the present invention in a particular form.
  • the present invention provides a scanning electron microscope.
  • the invention comprises a vacuum envelope 1 having a pressure limiting aperture 2.
  • An electron beam source 3 is located within the vacuum envelope and is capable of emitting an electron beam.
  • Focusing means 4 are located within the vacuum envelope and are capable of directing an electron beam emitted by the electron beam source through the pressure limiting aperture.
  • Electron beam scanning means 5 are also located within the vacuum envelope and are capable of scanning an electron beam emitted by the electron beam source across the diameter of the pressure limiting aperture.
  • a sample platform means 6 is disposed outside the vacuum envelope and is capable of maintaining a sample in registration with the pressure limiting aperture such that a surface of the sample may be exposed to an electron beam emitted from the electron beam source and directed through the pressure limiting aperture so as to cause radiation to be emitted from the sample.
  • radiation emitted from a sample means electrons or photons emitted from the sample.
  • the scanning electron microscope of the present invention further comprises a gas containment means 7 capable of maintaining the sample platform means enveloped in a gaseous medium so as to allow radiation emitted from a sample located on the sample platform means and exposed to an electron beam emitted from the electron beam source to come into contact with gas molecules, of the gaseous medium and cause the gas molecules to emit photons.
  • Detection means 8 are provided which are capable of detecting photons emitted from the gas molecules of the gaseous medium.
  • the wavelength of the photons is within the range from about 1x10 -11 meters to about 4x10-8 meters.
  • the detection means is a scintillation counter or a lithium drifted silicon detector.
  • the wavelength of the photons is within the range from about 4x10 -8 meters to about 7x10-7 meters.
  • the detection means is a photomultiplier tube or a photodiode.
  • tne wavelength of the photons is within the range from about 7x10 -7 meters to aoout 2x10 -4 meters.
  • the detection means is a photomultiplier tube or a photodiode.
  • the gaseous medium may comprise a single gas or a mixture of gases.
  • the gaseous medium comprises nitrogen.
  • the gaseous medium comprises helium.
  • the present invention also provides a method for microscopically imaging the surface of a sample which comprises surrounding the sample with gas molecules and scanning the surface of the sample with an electron beam having sufficient energy so as to cause radiation to be emitted from the surface of the sample. Photons which are emitted from gas molecules which come into contact with radiation emitted from the surface of the sample are then detected, the photons being emitted from the gas in an amount proportional to tne amount of radiation emitted from the surface of the sample. Images of the sample are then formed based on the number of photons detected. In one emoodiment of the invention, the wavelength of the photons is within the range from aoout 1x10-11 meters to about 4x10 -8 meters. Preferably within this embodiment of the invention the detection means is a scintillation counter or a lithium drifted silicon detector.
  • the wavelength of the photons is within the range from about 4x10 -8 meters to about 7x10-7 meters.
  • the detection means is a photomultiplier tube or a photodiode.
  • the wavelength of the photons is within the range from aoouc 7x10 -7 meters to about 2x10-4 meters.
  • the detection means is a photomultiplier tube or a photodiode.
  • the gaseous medium may comprise a single gas or a mixture of gases.
  • the gaseous medium comprises nitrogen.
  • the gaseous medium comprises helium.

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Analysing Materials By The Use Of Radiation (AREA)

Abstract

Un microscope électronique à balayage détecte des photons produits par contact entre un rayonnement émis de la surface d'un échantillon placé sur des moyens de support d'échantillon (6) et des molécules de gaz d'un milieu gazeux qui entoure l'échantillon. L'invention décrit également un procédé d'imagerie microscopique de la surface d'un échantillon faisant appel au système de détection de photons gazeux.A scanning electron microscope detects photons produced by contact between radiation emitted from the surface of a sample placed on sample support means (6) and gas molecules from a gaseous medium surrounding the sample. The invention also describes a method for microscopic imaging of the surface of a sample using the gas photon detection system.

Description

MULTIPURPOSE GASEOUS DETECTOR DEVICE FOR ELECTRON MICROSCOPES
Background of the Invention
Scanning electron microscopes and generally instruments employing an electron beam (probe) operate in vacuum (pressure less than about 0.0001 mbar) and the specimens examined by such instruments are also placed in vacuum. Scanning a sample within a vacuum presents many problems. Many biological specimens cannot survive in vacuum. Wet specimens can experience evaporation of their fluid content before an accurate image can be obtained. Nonconducting samples can accumulate a surface charge which obscures the details of the sample's surface and lowers the resolution of the image obtained.
An environmental scanning electron microscope (ESEM) which allows the examination of specimens in a gaseous environment is described in U.S. Patent No. 4,596,928. However, the predominant detection mode in the ESEM has utilized various scintillator detectors to detect backscattered electrons. Additionally, an ESEM detection system has been described wherein the ionization of the gaseous environment is used as the detection means for all ionizing signals (Danilatos, Micron. Microsc. Acta 14:307-318, 1983).
On object of the present invention is to provide a more general and multiputpose means for environmental scanning electron microscopy.
Summary of the Invention
The present invention provides a scanning electron microscope for cathodoluminescenct detection of specimens which comprises a vacuum envelope having a pressure limiting aperture. An electron beam source is located within the vacuum envelope and is capable of emitting an electron beam. Pocusing means are located within the vacuum envelope and are capable of directing an electron beam emitted by the electron beam source through the pressure limiting aperture. Electron beam scanning means are also located within the vacuum envelope and are capable of scanning an electron beam emitted by the electron beam source across the diameter of the pressure limiting aperture. A sample platform means is disposed outside the vacuum envelope and is capable of maintaining a sample in registration with the pressure limiting aperture such that a surface of the sample may be exposed to an electron beam emitted from the electron beam source and directed through the pressure limiting aperture so as to cause radiation to be emitted from the sample. The scanning electron microscope of the present invention further comprises gas containment means capable of maintaining the sample platform means enveloped in a gaseous medium so as to allow radiation emitted from a sample located on the sample platform means and exposed to an electron beam emitted from the electron beam source to come into contact with gas molecules of the gaseous medium and cause the gas molecules to emit photons. Detection means are provided which are capable of detecting photons emitted from the gas molecules of the gaseous medium.
The present invention also provides a method for microscopically imaging the surface of a sample which comprises surrounding the sample with gas molecules and scanning the surface of the sample with an electron beam having sufficient energy so as to cause radiation to be emitted from the surface of the sample. Photons which are emitted from the gas molecules which come into contact with radiation emitted from the surface of the sample are then detected, the photons being emitted from the gas molecules in an amount proportional to the amount of radiation emitted from the surface of the sample. Images of the sample are then formed based on the number of photons detected. Brief Description of the Figure
Fig. 1 is a schematic cross-sectional view of a device which embodies the present invention in a particular form.
Detailed Description of the Invention
The present invention provides a scanning electron microscope. Referring in more particularity to Figure
1, the invention comprises a vacuum envelope 1 having a pressure limiting aperture 2. An electron beam source 3 is located within the vacuum envelope and is capable of emitting an electron beam. Focusing means 4 are located within the vacuum envelope and are capable of directing an electron beam emitted by the electron beam source through the pressure limiting aperture. Electron beam scanning means 5 are also located within the vacuum envelope and are capable of scanning an electron beam emitted by the electron beam source across the diameter of the pressure limiting aperture. A sample platform means 6 is disposed outside the vacuum envelope and is capable of maintaining a sample in registration with the pressure limiting aperture such that a surface of the sample may be exposed to an electron beam emitted from the electron beam source and directed through the pressure limiting aperture so as to cause radiation to be emitted from the sample. Within this application, "radiation" emitted from a sample means electrons or photons emitted from the sample. The scanning electron microscope of the present invention further comprises a gas containment means 7 capable of maintaining the sample platform means enveloped in a gaseous medium so as to allow radiation emitted from a sample located on the sample platform means and exposed to an electron beam emitted from the electron beam source to come into contact with gas molecules, of the gaseous medium and cause the gas molecules to emit photons. Detection means 8 are provided which are capable of detecting photons emitted from the gas molecules of the gaseous medium.
In one embodiment of the invention, the wavelength of the photons is within the range from about 1x10-11 meters to about 4x10-8 meters. Preferably within this embodiment of the invention the detection means is a scintillation counter or a lithium drifted silicon detector.
In another embodiment of the invention, the wavelength of the photons is within the range from about 4x10-8 meters to about 7x10-7 meters. Preferably within this embodiment of the invention the detection means is a photomultiplier tube or a photodiode. In yet another embodiment of the invention, tne wavelength of the photons is within the range from about 7x10-7 meters to aoout 2x10-4 meters. Preferably within this embodiment of the invention the detection means is a photomultiplier tube or a photodiode.
The gaseous medium may comprise a single gas or a mixture of gases. In one embodiment of the invention the gaseous medium comprises nitrogen. In another embodiment of the invention the gaseous medium comprises helium.
The present invention also provides a method for microscopically imaging the surface of a sample which comprises surrounding the sample with gas molecules and scanning the surface of the sample with an electron beam having sufficient energy so as to cause radiation to be emitted from the surface of the sample. Photons which are emitted from gas molecules which come into contact with radiation emitted from the surface of the sample are then detected, the photons being emitted from the gas in an amount proportional to tne amount of radiation emitted from the surface of the sample. Images of the sample are then formed based on the number of photons detected. In one emoodiment of the invention, the wavelength of the photons is within the range from aoout 1x10-11 meters to about 4x10-8 meters. Preferably within this embodiment of the invention the detection means is a scintillation counter or a lithium drifted silicon detector.
In another embodiment of the invention, the wavelength of the photons is within the range from about 4x10-8 meters to about 7x10-7 meters. Preferably within this embodiment of the invention the detection means is a photomultiplier tube or a photodiode.
In yet a further embodiment of the invention, the wavelength of the photons is within the range from aoouc 7x10-7 meters to about 2x10-4 meters. Preferably within this embodiment of the invention the detection means is a photomultiplier tube or a photodiode.
The gaseous medium may comprise a single gas or a mixture of gases. In one emoodiment of the invention, the gaseous medium comprises nitrogen. In yet another embodiment of the invention, the gaseous medium comprises helium.

Claims

What is claimed is:
1. A scanning electron microscope which comprises:
a) a vacuum envelope having a pressure limiting aperture;
b) an electron beam source located within the vacuum envelope and capable of emitting an electron beam;
c) focusing means located within the vacuum envelope and capable of directing an electron beam emitted by the electron beam source through the pressure limiting aperture;
d) electron beam scanning means located within the vacuum envelope and capable of scanning an electron beam emitted by the electron beam source across the diameter of the pressure limiting aperture;
e) sample platform means, disposed outside the vacuum envelope, capable of maintaining a sample in registration with the pressure lim iting aperture such that a surface of the sample may be exposed to an electron beam emitted from the electron beam source and directed through the pressure limiting aperture so as to cause radiation to be emitted from the sample;
f) gas containment means capable of maintaining the sample platform means enveloped in a gaseous medium so as to allow radiation emitted from a sample located on the sample platform means and exposed to an electron beam emitted from the electron beam source to come into contact with gas molecules of the gaseous medium and cause the gas molecules to emit photons; and
g) detection means capable of detecting photons emitted from the gas molecules of the gaseous medium.
2. A device of claim 1 wherein the wavelength of the photons is within the range from about 1 x 10-11 meters to about 4 x 10-8 meters.
3. A device of claim 2 wherein the detection means is a scintillation counter.
4. A device of claim 2 wherein the detection means is a lithium drifted silicon detector.
5. A device of in claim 1 wherein the wavelength of the photons is within the range from about 4 x
10-8 meters to about 7 x 10-7 meters.
6. A device of claim 5 wherein the detection means is a photomultiplier tube.
7. A device of claim 5 wherein the detection means is a photodiode.
8. A device of claim 1 wherein the wavelength of the photons is within the range from about 7 x 10-7 meters to about 2 x 10-4 meters.
9. A device of claim 8 wherein the detection means is a photomultiplier tube.
10. A device of claim 8 wherein the detection means is a photodiode.
11. A device of claim 1 wherein the gaseous medium comprises a single gas.
12. A device of claim 1 wherein the gaseous medium comprises a mixture of gases.
13. A device of claim 1 wherein the gaseous medium comprises nitrogen.
14. A device of claim 1 wherein the gaseous medium comprises helium.
15. A method for microscopically imaging the surface of a sample which comprises:
a) surrounding the sample with gas molecules;
b) scanning the surface of the sample with an electron beam having sufficient energy so as to cause radiation to be emitted from the surface of the sample;
c) detecting photons emitted from gas molecules which come into contact with radiation emitted from the surface of the sample, the photons being emitted from the gas molecules in an amount proportional to the amount of radiation emitted from the surface of the sample; and
d) forming images of the sample based on the number of photons detected.
16. A method of claim 15 wherein the wavelength of the photons is within the range from about 1 x 10-11 meters to about 4 x 10-8 raeters.
17. A method of claim 15 wherein the wavelength of the photons is within the range from about 4 x 10-8 meters to about 7 x 10-7 meters.
18. A method of claim 15 wherein the wavelength of the photons is within the range from about 7 x 10-7 meters to about 2 x 10-4 meters.
19. A method of claim 15 wherein the gaseous medium comprises a single gas.
20. A method of claim 15 wherein the gaseous medium comprises a mixture of gases.
21. A method of claim 15 wherein the gaseous medium comprises. nitrogen.
22. A method of claim 15 wherein the gaseous medium comprises. helium.
EP87905370A 1986-08-01 1987-07-30 Multipurpose gaseous detector device for electron microscopes Expired EP0275306B1 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
AT87905370T ATE57790T1 (en) 1986-08-01 1987-07-30 MULTIPURPOSE GAS DETECTOR ASSEMBLY FOR ELECTRON MICROSCOPES.

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
AU7221/86 1986-08-01
AUPH722186 1986-08-01

Publications (3)

Publication Number Publication Date
EP0275306A1 true EP0275306A1 (en) 1988-07-27
EP0275306A4 EP0275306A4 (en) 1988-12-12
EP0275306B1 EP0275306B1 (en) 1990-10-24

Family

ID=3771742

Family Applications (1)

Application Number Title Priority Date Filing Date
EP87905370A Expired EP0275306B1 (en) 1986-08-01 1987-07-30 Multipurpose gaseous detector device for electron microscopes

Country Status (5)

Country Link
US (1) US4992662A (en)
EP (1) EP0275306B1 (en)
JP (1) JPH0687410B2 (en)
CA (1) CA1284537C (en)
WO (1) WO1988001099A1 (en)

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JP5143990B2 (en) * 2000-07-07 2013-02-13 カール・ツァイス・エヌティーエス・ゲーエムベーハー Detector for changing pressure region and electron microscope equipped with such a detector
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Also Published As

Publication number Publication date
EP0275306B1 (en) 1990-10-24
JPH0687410B2 (en) 1994-11-02
CA1284537C (en) 1991-05-28
WO1988001099A1 (en) 1988-02-11
EP0275306A4 (en) 1988-12-12
JPH01500940A (en) 1989-03-30
US4992662A (en) 1991-02-12

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