EP0275306A1 - Multipurpose gaseous detector device for electron microscopes. - Google Patents
Multipurpose gaseous detector device for electron microscopes.Info
- Publication number
- EP0275306A1 EP0275306A1 EP87905370A EP87905370A EP0275306A1 EP 0275306 A1 EP0275306 A1 EP 0275306A1 EP 87905370 A EP87905370 A EP 87905370A EP 87905370 A EP87905370 A EP 87905370A EP 0275306 A1 EP0275306 A1 EP 0275306A1
- Authority
- EP
- European Patent Office
- Prior art keywords
- sample
- electron beam
- emitted
- meters
- photons
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/26—Electron or ion microscopes; Electron or ion diffraction tubes
- H01J37/28—Electron or ion microscopes; Electron or ion diffraction tubes with scanning beams
Definitions
- Scanning electron microscopes and generally instruments employing an electron beam (probe) operate in vacuum (pressure less than about 0.0001 mbar) and the specimens examined by such instruments are also placed in vacuum. Scanning a sample within a vacuum presents many problems. Many biological specimens cannot survive in vacuum. Wet specimens can experience evaporation of their fluid content before an accurate image can be obtained. Nonconducting samples can accumulate a surface charge which obscures the details of the sample's surface and lowers the resolution of the image obtained.
- On object of the present invention is to provide a more general and multiputpose means for environmental scanning electron microscopy.
- the present invention provides a scanning electron microscope for cathodoluminescenct detection of specimens which comprises a vacuum envelope having a pressure limiting aperture.
- An electron beam source is located within the vacuum envelope and is capable of emitting an electron beam.
- Pocusing means are located within the vacuum envelope and are capable of directing an electron beam emitted by the electron beam source through the pressure limiting aperture.
- Electron beam scanning means are also located within the vacuum envelope and are capable of scanning an electron beam emitted by the electron beam source across the diameter of the pressure limiting aperture.
- a sample platform means is disposed outside the vacuum envelope and is capable of maintaining a sample in registration with the pressure limiting aperture such that a surface of the sample may be exposed to an electron beam emitted from the electron beam source and directed through the pressure limiting aperture so as to cause radiation to be emitted from the sample.
- the scanning electron microscope of the present invention further comprises gas containment means capable of maintaining the sample platform means enveloped in a gaseous medium so as to allow radiation emitted from a sample located on the sample platform means and exposed to an electron beam emitted from the electron beam source to come into contact with gas molecules of the gaseous medium and cause the gas molecules to emit photons.
- Detection means are provided which are capable of detecting photons emitted from the gas molecules of the gaseous medium.
- the present invention also provides a method for microscopically imaging the surface of a sample which comprises surrounding the sample with gas molecules and scanning the surface of the sample with an electron beam having sufficient energy so as to cause radiation to be emitted from the surface of the sample. Photons which are emitted from the gas molecules which come into contact with radiation emitted from the surface of the sample are then detected, the photons being emitted from the gas molecules in an amount proportional to the amount of radiation emitted from the surface of the sample. Images of the sample are then formed based on the number of photons detected.
- Fig. 1 is a schematic cross-sectional view of a device which embodies the present invention in a particular form.
- the present invention provides a scanning electron microscope.
- the invention comprises a vacuum envelope 1 having a pressure limiting aperture 2.
- An electron beam source 3 is located within the vacuum envelope and is capable of emitting an electron beam.
- Focusing means 4 are located within the vacuum envelope and are capable of directing an electron beam emitted by the electron beam source through the pressure limiting aperture.
- Electron beam scanning means 5 are also located within the vacuum envelope and are capable of scanning an electron beam emitted by the electron beam source across the diameter of the pressure limiting aperture.
- a sample platform means 6 is disposed outside the vacuum envelope and is capable of maintaining a sample in registration with the pressure limiting aperture such that a surface of the sample may be exposed to an electron beam emitted from the electron beam source and directed through the pressure limiting aperture so as to cause radiation to be emitted from the sample.
- radiation emitted from a sample means electrons or photons emitted from the sample.
- the scanning electron microscope of the present invention further comprises a gas containment means 7 capable of maintaining the sample platform means enveloped in a gaseous medium so as to allow radiation emitted from a sample located on the sample platform means and exposed to an electron beam emitted from the electron beam source to come into contact with gas molecules, of the gaseous medium and cause the gas molecules to emit photons.
- Detection means 8 are provided which are capable of detecting photons emitted from the gas molecules of the gaseous medium.
- the wavelength of the photons is within the range from about 1x10 -11 meters to about 4x10-8 meters.
- the detection means is a scintillation counter or a lithium drifted silicon detector.
- the wavelength of the photons is within the range from about 4x10 -8 meters to about 7x10-7 meters.
- the detection means is a photomultiplier tube or a photodiode.
- tne wavelength of the photons is within the range from about 7x10 -7 meters to aoout 2x10 -4 meters.
- the detection means is a photomultiplier tube or a photodiode.
- the gaseous medium may comprise a single gas or a mixture of gases.
- the gaseous medium comprises nitrogen.
- the gaseous medium comprises helium.
- the present invention also provides a method for microscopically imaging the surface of a sample which comprises surrounding the sample with gas molecules and scanning the surface of the sample with an electron beam having sufficient energy so as to cause radiation to be emitted from the surface of the sample. Photons which are emitted from gas molecules which come into contact with radiation emitted from the surface of the sample are then detected, the photons being emitted from the gas in an amount proportional to tne amount of radiation emitted from the surface of the sample. Images of the sample are then formed based on the number of photons detected. In one emoodiment of the invention, the wavelength of the photons is within the range from aoout 1x10-11 meters to about 4x10 -8 meters. Preferably within this embodiment of the invention the detection means is a scintillation counter or a lithium drifted silicon detector.
- the wavelength of the photons is within the range from about 4x10 -8 meters to about 7x10-7 meters.
- the detection means is a photomultiplier tube or a photodiode.
- the wavelength of the photons is within the range from aoouc 7x10 -7 meters to about 2x10-4 meters.
- the detection means is a photomultiplier tube or a photodiode.
- the gaseous medium may comprise a single gas or a mixture of gases.
- the gaseous medium comprises nitrogen.
- the gaseous medium comprises helium.
Landscapes
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Analysing Materials By The Use Of Radiation (AREA)
Abstract
Un microscope électronique à balayage détecte des photons produits par contact entre un rayonnement émis de la surface d'un échantillon placé sur des moyens de support d'échantillon (6) et des molécules de gaz d'un milieu gazeux qui entoure l'échantillon. L'invention décrit également un procédé d'imagerie microscopique de la surface d'un échantillon faisant appel au système de détection de photons gazeux.A scanning electron microscope detects photons produced by contact between radiation emitted from the surface of a sample placed on sample support means (6) and gas molecules from a gaseous medium surrounding the sample. The invention also describes a method for microscopic imaging of the surface of a sample using the gas photon detection system.
Description
Claims
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
AT87905370T ATE57790T1 (en) | 1986-08-01 | 1987-07-30 | MULTIPURPOSE GAS DETECTOR ASSEMBLY FOR ELECTRON MICROSCOPES. |
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
AU7221/86 | 1986-08-01 | ||
AUPH722186 | 1986-08-01 |
Publications (3)
Publication Number | Publication Date |
---|---|
EP0275306A1 true EP0275306A1 (en) | 1988-07-27 |
EP0275306A4 EP0275306A4 (en) | 1988-12-12 |
EP0275306B1 EP0275306B1 (en) | 1990-10-24 |
Family
ID=3771742
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
EP87905370A Expired EP0275306B1 (en) | 1986-08-01 | 1987-07-30 | Multipurpose gaseous detector device for electron microscopes |
Country Status (5)
Country | Link |
---|---|
US (1) | US4992662A (en) |
EP (1) | EP0275306B1 (en) |
JP (1) | JPH0687410B2 (en) |
CA (1) | CA1284537C (en) |
WO (1) | WO1988001099A1 (en) |
Families Citing this family (32)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH06168695A (en) * | 1992-11-30 | 1994-06-14 | Nikon Corp | Charged particle microscope |
US5362964A (en) * | 1993-07-30 | 1994-11-08 | Electroscan Corporation | Environmental scanning electron microscope |
US5412211A (en) * | 1993-07-30 | 1995-05-02 | Electroscan Corporation | Environmental scanning electron microscope |
US5828064A (en) * | 1995-08-11 | 1998-10-27 | Philips Electronics North America Corporation | Field emission environmental scanning electron microscope |
US6025592A (en) * | 1995-08-11 | 2000-02-15 | Philips Electronics North America | High temperature specimen stage and detector for an environmental scanning electron microscope |
GB9623768D0 (en) * | 1996-11-15 | 1997-01-08 | Leo Electron Microscopy Limite | Scanning electron microscope |
WO1999027559A1 (en) * | 1997-11-24 | 1999-06-03 | Gerasimos Daniel Danilatos | Radiofrequency gaseous detection device (rf-gdd) |
JP4176159B2 (en) * | 1997-12-08 | 2008-11-05 | エフ イー アイ カンパニ | Environmentally controlled SEM using magnetic field for improved secondary electron detection |
EP0958590B1 (en) * | 1997-12-08 | 2003-06-11 | Fei Company | Environmental sem with multipole fields for improved secondary electron detection |
US5945672A (en) * | 1998-01-29 | 1999-08-31 | Fei Company | Gaseous backscattered electron detector for an environmental scanning electron microscope |
JP5143990B2 (en) * | 2000-07-07 | 2013-02-13 | カール・ツァイス・エヌティーエス・ゲーエムベーハー | Detector for changing pressure region and electron microscope equipped with such a detector |
DE10032607B4 (en) | 2000-07-07 | 2004-08-12 | Leo Elektronenmikroskopie Gmbh | Particle beam device with a particle source to be operated in ultra-high vacuum and a cascade-shaped pump arrangement for such a particle beam device |
AUPQ932200A0 (en) * | 2000-08-11 | 2000-08-31 | Danilatos, Gerasimos Daniel | Environmental scanning electron microscope |
CA2436237A1 (en) * | 2000-12-01 | 2002-06-06 | Yeda Research And Development Co. Ltd. | Device and method for the examination of samples in a non-vacuum environment using a scanning electron microscope |
IL150056A0 (en) * | 2002-06-05 | 2002-12-01 | Yeda Res & Dev | Low-pressure chamber for scanning electron microscopy in a wet environment |
WO2003104846A2 (en) | 2002-06-05 | 2003-12-18 | Quantomix Ltd. | A sample enclosure for a scanning electron microscope and methods of use thereof |
US6891363B2 (en) | 2002-09-03 | 2005-05-10 | Credence Systems Corporation | Apparatus and method for detecting photon emissions from transistors |
US6943572B2 (en) * | 2002-09-03 | 2005-09-13 | Credence Systems Corporation | Apparatus and method for detecting photon emissions from transistors |
AU2003276900A1 (en) * | 2002-09-18 | 2004-04-08 | Fei Company | Charged particle beam system |
DE10256718B4 (en) * | 2002-12-04 | 2004-10-28 | Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. | Device for examining samples using an atmospheric or pressure-variable scanning electron microscope |
US20070125947A1 (en) * | 2003-02-20 | 2007-06-07 | David Sprinzak | Sample enclosure for a scanning electron microscope and methods of use thereof |
EP1515359A1 (en) * | 2003-09-12 | 2005-03-16 | ICT Integrated Circuit Testing Gesellschaft für Halbleiterprüftechnik mbH | Chamber with low electron stimulated desorption |
US8912506B2 (en) * | 2006-02-02 | 2014-12-16 | Cebt Co., Ltd. | Device for sustaining differential vacuum degrees for electron column |
EP2080014B1 (en) | 2006-10-24 | 2016-08-31 | B-Nano Ltd. | An interface, a method for observing an object within a non-vacuum environment and a scanning electron microscope |
EP2105944A1 (en) | 2008-03-28 | 2009-09-30 | FEI Company | Environmental cell for a particle-optical apparatus |
US7791020B2 (en) * | 2008-03-31 | 2010-09-07 | Fei Company | Multistage gas cascade amplifier |
US8981294B2 (en) | 2008-07-03 | 2015-03-17 | B-Nano Ltd. | Scanning electron microscope, an interface and a method for observing an object within a non-vacuum environment |
PL217173B1 (en) * | 2008-07-14 | 2014-06-30 | Politechnika Wroclawska | System for detection of electrones and scanning electrone microscope |
CN102197301B (en) * | 2008-09-28 | 2015-05-06 | B-纳诺有限公司 | A vacuumed device and a scanning electron microscope |
US8299432B2 (en) * | 2008-11-04 | 2012-10-30 | Fei Company | Scanning transmission electron microscope using gas amplification |
JP2016513349A (en) | 2013-02-20 | 2016-05-12 | ビー−ナノ リミテッド | Scanning electron microscope |
US9842724B2 (en) | 2015-02-03 | 2017-12-12 | Kla-Tencor Corporation | Method and system for imaging of a photomask through a pellicle |
Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US2884529A (en) * | 1955-04-18 | 1959-04-28 | Eggler Charles | Gaseous scintillation counter |
Family Cites Families (11)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3612859A (en) * | 1968-01-31 | 1971-10-12 | Westinghouse Electric Corp | Method for measuring and controlling the density of a metallic vapor |
US3909612A (en) * | 1971-04-20 | 1975-09-30 | Image Analysing Computers Ltd | Electron beam specimen analysis |
US3842271A (en) * | 1973-04-24 | 1974-10-15 | American Optical Corp | Scanning electron microscope |
US3984683A (en) * | 1975-05-27 | 1976-10-05 | Rca Corporation | Apparatus and method for analyzing biological cells for malignancy |
US4365339A (en) * | 1975-12-23 | 1982-12-21 | General Electric Company | Tomographic apparatus and method for reconstructing planar slices from non-absorbed and non-scattered radiation |
US4139773A (en) * | 1977-11-04 | 1979-02-13 | Oregon Graduate Center | Method and apparatus for producing bright high resolution ion beams |
US4249077A (en) * | 1978-08-04 | 1981-02-03 | Crawford Charles K | Ion charge neutralization for electron beam devices |
AU534811B2 (en) * | 1979-07-03 | 1984-02-16 | Unisearch Limited | Atmospheric scanning electron microscope |
EP0129508B1 (en) * | 1983-05-25 | 1987-01-21 | Battelle Memorial Institute | Examining and testing method of an electric device of the integrated or printed circuit type |
US4720633A (en) * | 1986-01-17 | 1988-01-19 | Electro-Scan Corporation | Scanning electron microscope for visualization of wet samples |
US4785182A (en) * | 1987-05-21 | 1988-11-15 | Electroscan Corporation | Secondary electron detector for use in a gaseous atmosphere |
-
1987
- 1987-07-30 WO PCT/US1987/001848 patent/WO1988001099A1/en active IP Right Grant
- 1987-07-30 EP EP87905370A patent/EP0275306B1/en not_active Expired
- 1987-07-30 JP JP62504823A patent/JPH0687410B2/en not_active Expired - Lifetime
- 1987-07-31 CA CA000543532A patent/CA1284537C/en not_active Expired - Fee Related
-
1989
- 1989-09-13 US US07/406,193 patent/US4992662A/en not_active Expired - Lifetime
Patent Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US2884529A (en) * | 1955-04-18 | 1959-04-28 | Eggler Charles | Gaseous scintillation counter |
Non-Patent Citations (3)
Title |
---|
MICRON AND MICROSCOPICA ACTA, vol. 14, no. 4, 1983, pages 307-318, Pergamon Press Ltd, GB; G.D. DANILATOS: "A gaseous detector device for an environmental SEM" * |
SCANNING, vol. 8, no. 6, November/December 1986, pages 279-284, FACM, Inc., Mahwah, N.J., US; G.D. DANILATOS: "Cathodoluminescence and gaseous scintillation in the environmental SEM" * |
See also references of WO8801099A1 * |
Also Published As
Publication number | Publication date |
---|---|
EP0275306B1 (en) | 1990-10-24 |
JPH0687410B2 (en) | 1994-11-02 |
CA1284537C (en) | 1991-05-28 |
WO1988001099A1 (en) | 1988-02-11 |
EP0275306A4 (en) | 1988-12-12 |
JPH01500940A (en) | 1989-03-30 |
US4992662A (en) | 1991-02-12 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
EP0275306A1 (en) | Multipurpose gaseous detector device for electron microscopes. | |
KR940009764B1 (en) | Electron detector for use in a gaseous environment | |
US4785182A (en) | Secondary electron detector for use in a gaseous atmosphere | |
US4720633A (en) | Scanning electron microscope for visualization of wet samples | |
EP1340241B1 (en) | Device and method for the examination of samples in a non-vacuum environment using a scanning electron microscope | |
US5044001A (en) | Method and apparatus for investigating materials with X-rays | |
US7718979B2 (en) | Particle-optical apparatus for simultaneous observing a sample with particles and photons | |
US5945672A (en) | Gaseous backscattered electron detector for an environmental scanning electron microscope | |
EP2388575A1 (en) | Sample holder, inspection apparatus and inspection method | |
US4880976A (en) | Secondary electron detector for use in a gaseous atmosphere | |
JP6169506B2 (en) | Specimen holder, observation system, and image generation method | |
EP1956632A1 (en) | Particle-optical apparatus for simultaneous observing a sample with particles and photons | |
JPS6334588B2 (en) | ||
KR102029869B1 (en) | Detachable Sample Chamber for Electron Microscope and Electron Microscope Comprising The Same | |
JP4565168B2 (en) | Scanning X-ray microscope and observation method of scanning X-ray microscope image | |
CZ77097A3 (en) | Detection system of raster electron microscope | |
AU7802387A (en) | Scanning electron microscope | |
JPH0982261A (en) | Electron microscope | |
EP0324213A1 (en) | Scanning electron microscope for visualization of wet samples | |
JPH0665014B2 (en) | Scanning electron microscope capable of observing natural state samples | |
KR960011065B1 (en) | Scanning electron microscope for visualization of wet sample | |
CA1295056C (en) | Scanning electron microscope for visualization of wet samples | |
JPH0329256A (en) | Radiation detector |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
PUAI | Public reference made under article 153(3) epc to a published international application that has entered the european phase |
Free format text: ORIGINAL CODE: 0009012 |
|
17P | Request for examination filed |
Effective date: 19880330 |
|
AK | Designated contracting states |
Kind code of ref document: A1 Designated state(s): AT BE CH DE FR GB IT LI LU NL SE |
|
A4 | Supplementary search report drawn up and despatched |
Effective date: 19881212 |
|
17Q | First examination report despatched |
Effective date: 19891213 |
|
GRAA | (expected) grant |
Free format text: ORIGINAL CODE: 0009210 |
|
AK | Designated contracting states |
Kind code of ref document: B1 Designated state(s): AT BE CH DE FR GB IT LI LU NL SE |
|
REF | Corresponds to: |
Ref document number: 57790 Country of ref document: AT Date of ref document: 19901115 Kind code of ref document: T |
|
ITF | It: translation for a ep patent filed |
Owner name: ING. A. GIAMBROCONO & C. S.R.L. |
|
REF | Corresponds to: |
Ref document number: 3765767 Country of ref document: DE Date of ref document: 19901129 |
|
ET | Fr: translation filed | ||
PLBE | No opposition filed within time limit |
Free format text: ORIGINAL CODE: 0009261 |
|
STAA | Information on the status of an ep patent application or granted ep patent |
Free format text: STATUS: NO OPPOSITION FILED WITHIN TIME LIMIT |
|
26N | No opposition filed | ||
EPTA | Lu: last paid annual fee | ||
EAL | Se: european patent in force in sweden |
Ref document number: 87905370.0 |
|
PGFP | Annual fee paid to national office [announced via postgrant information from national office to epo] |
Ref country code: LU Payment date: 19960601 Year of fee payment: 10 |
|
PGFP | Annual fee paid to national office [announced via postgrant information from national office to epo] |
Ref country code: SE Payment date: 19960618 Year of fee payment: 10 |
|
PGFP | Annual fee paid to national office [announced via postgrant information from national office to epo] |
Ref country code: AT Payment date: 19960620 Year of fee payment: 10 |
|
PGFP | Annual fee paid to national office [announced via postgrant information from national office to epo] |
Ref country code: CH Payment date: 19960624 Year of fee payment: 10 Ref country code: NL Payment date: 19960624 Year of fee payment: 10 |
|
PGFP | Annual fee paid to national office [announced via postgrant information from national office to epo] |
Ref country code: BE Payment date: 19960625 Year of fee payment: 10 |
|
PG25 | Lapsed in a contracting state [announced via postgrant information from national office to epo] |
Ref country code: AT Free format text: LAPSE BECAUSE OF NON-PAYMENT OF DUE FEES Effective date: 19970730 Ref country code: LU Free format text: LAPSE BECAUSE OF NON-PAYMENT OF DUE FEES Effective date: 19970730 |
|
PG25 | Lapsed in a contracting state [announced via postgrant information from national office to epo] |
Ref country code: SE Effective date: 19970731 Ref country code: LI Free format text: LAPSE BECAUSE OF NON-PAYMENT OF DUE FEES Effective date: 19970731 Ref country code: CH Free format text: LAPSE BECAUSE OF NON-PAYMENT OF DUE FEES Effective date: 19970731 Ref country code: BE Free format text: LAPSE BECAUSE OF NON-PAYMENT OF DUE FEES Effective date: 19970731 |
|
REG | Reference to a national code |
Ref country code: GB Ref legal event code: 732E |
|
BERE | Be: lapsed |
Owner name: ELECTRO-SCAN CORP. Effective date: 19970731 |
|
PG25 | Lapsed in a contracting state [announced via postgrant information from national office to epo] |
Ref country code: NL Free format text: LAPSE BECAUSE OF NON-PAYMENT OF DUE FEES Effective date: 19980201 |
|
REG | Reference to a national code |
Ref country code: FR Ref legal event code: TP |
|
REG | Reference to a national code |
Ref country code: CH Ref legal event code: PL |
|
NLV4 | Nl: lapsed or anulled due to non-payment of the annual fee |
Effective date: 19980201 |
|
EUG | Se: european patent has lapsed |
Ref document number: 87905370.0 |
|
REG | Reference to a national code |
Ref country code: GB Ref legal event code: IF02 |
|
REG | Reference to a national code |
Ref country code: FR Ref legal event code: TP |
|
PG25 | Lapsed in a contracting state [announced via postgrant information from national office to epo] |
Ref country code: IT Free format text: LAPSE BECAUSE OF NON-PAYMENT OF DUE FEES;WARNING: LAPSES OF ITALIAN PATENTS WITH EFFECTIVE DATE BEFORE 2007 MAY HAVE OCCURRED AT ANY TIME BEFORE 2007. THE CORRECT EFFECTIVE DATE MAY BE DIFFERENT FROM THE ONE RECORDED. Effective date: 20050730 |
|
PGFP | Annual fee paid to national office [announced via postgrant information from national office to epo] |
Ref country code: FR Payment date: 20060717 Year of fee payment: 20 |
|
PGFP | Annual fee paid to national office [announced via postgrant information from national office to epo] |
Ref country code: GB Payment date: 20060726 Year of fee payment: 20 |
|
PGFP | Annual fee paid to national office [announced via postgrant information from national office to epo] |
Ref country code: DE Payment date: 20060831 Year of fee payment: 20 |
|
REG | Reference to a national code |
Ref country code: GB Ref legal event code: PE20 |
|
PG25 | Lapsed in a contracting state [announced via postgrant information from national office to epo] |
Ref country code: GB Free format text: LAPSE BECAUSE OF EXPIRATION OF PROTECTION Effective date: 20070729 |