EP0270968A3 - Roentgen microscope - Google Patents
Roentgen microscope Download PDFInfo
- Publication number
- EP0270968A3 EP0270968A3 EP87117658A EP87117658A EP0270968A3 EP 0270968 A3 EP0270968 A3 EP 0270968A3 EP 87117658 A EP87117658 A EP 87117658A EP 87117658 A EP87117658 A EP 87117658A EP 0270968 A3 EP0270968 A3 EP 0270968A3
- Authority
- EP
- European Patent Office
- Prior art keywords
- roentgen
- microscope
- roentgen microscope
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Classifications
-
- G—PHYSICS
- G21—NUCLEAR PHYSICS; NUCLEAR ENGINEERING
- G21K—TECHNIQUES FOR HANDLING PARTICLES OR IONISING RADIATION NOT OTHERWISE PROVIDED FOR; IRRADIATION DEVICES; GAMMA RAY OR X-RAY MICROSCOPES
- G21K7/00—Gamma- or X-ray microscopes
Landscapes
- Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- General Engineering & Computer Science (AREA)
- High Energy & Nuclear Physics (AREA)
- Analysing Materials By The Use Of Radiation (AREA)
- Microscoopes, Condenser (AREA)
- Transition And Organic Metals Composition Catalysts For Addition Polymerization (AREA)
- Liquid Crystal Substances (AREA)
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
DE19863642457 DE3642457A1 (en) | 1986-12-12 | 1986-12-12 | ROENTGEN MICROSCOPE |
DE3642457 | 1986-12-12 |
Publications (3)
Publication Number | Publication Date |
---|---|
EP0270968A2 EP0270968A2 (en) | 1988-06-15 |
EP0270968A3 true EP0270968A3 (en) | 1989-08-02 |
EP0270968B1 EP0270968B1 (en) | 1993-12-15 |
Family
ID=6316038
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
EP87117658A Expired - Lifetime EP0270968B1 (en) | 1986-12-12 | 1987-11-28 | Roentgen microscope |
Country Status (5)
Country | Link |
---|---|
US (1) | US4870674A (en) |
EP (1) | EP0270968B1 (en) |
JP (1) | JPH0814640B2 (en) |
DE (2) | DE3642457A1 (en) |
DK (1) | DK174016B1 (en) |
Families Citing this family (25)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CH678663A5 (en) * | 1988-06-09 | 1991-10-15 | Zeiss Carl Fa | |
US5199057A (en) * | 1989-08-09 | 1993-03-30 | Nikon Corporation | Image formation-type soft X-ray microscopic apparatus |
JP2775949B2 (en) * | 1990-01-10 | 1998-07-16 | 株式会社ニコン | X-ray optical element holding frame |
US5022061A (en) * | 1990-04-30 | 1991-06-04 | The United States Of America As Represented By The United States Department Of Energy | An image focusing means by using an opaque object to diffract x-rays |
US5204887A (en) * | 1990-06-01 | 1993-04-20 | Canon Kabushiki Kaisha | X-ray microscope |
DE4027285A1 (en) * | 1990-08-29 | 1992-03-05 | Zeiss Carl Fa | X-RAY MICROSCOPE |
US5432607A (en) * | 1993-02-22 | 1995-07-11 | International Business Machines Corporation | Method and apparatus for inspecting patterned thin films using diffracted beam ellipsometry |
US5432349A (en) * | 1993-03-15 | 1995-07-11 | The United State Of America As Represented By The Secretary Of The Navy | Fourier transform microscope for x-ray and/or gamma-ray imaging |
JP3703483B2 (en) * | 1993-09-15 | 2005-10-05 | カール−ツァイス−スチフツング | Phase contrast-X-ray microscope |
JP3741411B2 (en) * | 1999-10-01 | 2006-02-01 | 株式会社リガク | X-ray focusing apparatus and X-ray apparatus |
CN1280835C (en) * | 2002-03-05 | 2006-10-18 | 姆拉丁·阿布比奇罗维奇·库马科夫 | X-ray microscope |
US7245696B2 (en) * | 2002-05-29 | 2007-07-17 | Xradia, Inc. | Element-specific X-ray fluorescence microscope and method of operation |
US7365909B2 (en) * | 2002-10-17 | 2008-04-29 | Xradia, Inc. | Fabrication methods for micro compounds optics |
US7119953B2 (en) * | 2002-12-27 | 2006-10-10 | Xradia, Inc. | Phase contrast microscope for short wavelength radiation and imaging method |
DE10352741B4 (en) * | 2003-11-12 | 2012-08-16 | Austriamicrosystems Ag | Radiation-detecting optoelectronic component, process for its production and use |
WO2005094318A2 (en) * | 2004-03-29 | 2005-10-13 | Jmar Research, Inc. | Morphology and spectroscopy of nanoscale regions using x-rays generated by laser produced plasma |
GB0409572D0 (en) * | 2004-04-29 | 2004-06-02 | Univ Sheffield | High resolution imaging |
US7302043B2 (en) * | 2004-07-27 | 2007-11-27 | Gatan, Inc. | Rotating shutter for laser-produced plasma debris mitigation |
US7452820B2 (en) * | 2004-08-05 | 2008-11-18 | Gatan, Inc. | Radiation-resistant zone plates and method of manufacturing thereof |
US7466796B2 (en) * | 2004-08-05 | 2008-12-16 | Gatan, Inc. | Condenser zone plate illumination for point X-ray sources |
US8001862B2 (en) * | 2007-11-20 | 2011-08-23 | Harley-Davidson Motor Company Group, Inc. | Reverse drive assembly for a motorcycle |
WO2010109368A1 (en) * | 2009-03-27 | 2010-09-30 | Koninklijke Philips Electronics N.V. | Differential phase-contrast imaging with circular gratings |
US9291578B2 (en) | 2012-08-03 | 2016-03-22 | David L. Adler | X-ray photoemission microscope for integrated devices |
US9129715B2 (en) | 2012-09-05 | 2015-09-08 | SVXR, Inc. | High speed x-ray inspection microscope |
JP2022069273A (en) * | 2020-10-23 | 2022-05-11 | 株式会社リガク | Image forming type x-ray microscope |
Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4105289A (en) * | 1976-04-29 | 1978-08-08 | University Patents, Inc. | Apparatus and method for image sampling |
Family Cites Families (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS49300A (en) * | 1972-03-15 | 1974-01-05 | ||
JPS6049300A (en) * | 1983-08-29 | 1985-03-18 | 日本電子株式会社 | X-ray microscope |
-
1986
- 1986-12-12 DE DE19863642457 patent/DE3642457A1/en not_active Withdrawn
-
1987
- 1987-11-28 EP EP87117658A patent/EP0270968B1/en not_active Expired - Lifetime
- 1987-11-28 DE DE87117658T patent/DE3788508D1/en not_active Expired - Fee Related
- 1987-12-08 JP JP62308806A patent/JPH0814640B2/en not_active Expired - Fee Related
- 1987-12-09 US US07/130,755 patent/US4870674A/en not_active Expired - Lifetime
- 1987-12-11 DK DK198706522A patent/DK174016B1/en not_active IP Right Cessation
Patent Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4105289A (en) * | 1976-04-29 | 1978-08-08 | University Patents, Inc. | Apparatus and method for image sampling |
Non-Patent Citations (2)
Title |
---|
JOURNAL OF THE OPTICAL SOCIETY OF AMERICA, Band 64, Nr. 3, März 1974, Seiten 301-309, New York, US; J. KIRZ: "Phase zone plates for X rays and the extreme UV" * |
NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH, Sektion A, Band A246, Nr. 1/3, Mai 1986, Seiten 698-701, Elsevier Science Publishers B.V., Amsterdam, NL; X.-S. XIE et al.: "Soft X-ray microscopy at the hefei synchrotron radiation laboratory" * |
Also Published As
Publication number | Publication date |
---|---|
DK174016B1 (en) | 2002-04-15 |
DE3642457A1 (en) | 1988-06-30 |
JPH0814640B2 (en) | 1996-02-14 |
EP0270968A2 (en) | 1988-06-15 |
US4870674A (en) | 1989-09-26 |
EP0270968B1 (en) | 1993-12-15 |
DE3788508D1 (en) | 1994-01-27 |
JPS63163300A (en) | 1988-07-06 |
DK652287D0 (en) | 1987-12-11 |
DK652287A (en) | 1988-06-13 |
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