EP0270968A3 - Roentgen microscope - Google Patents

Roentgen microscope Download PDF

Info

Publication number
EP0270968A3
EP0270968A3 EP87117658A EP87117658A EP0270968A3 EP 0270968 A3 EP0270968 A3 EP 0270968A3 EP 87117658 A EP87117658 A EP 87117658A EP 87117658 A EP87117658 A EP 87117658A EP 0270968 A3 EP0270968 A3 EP 0270968A3
Authority
EP
European Patent Office
Prior art keywords
roentgen
microscope
roentgen microscope
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
EP87117658A
Other languages
German (de)
Other versions
EP0270968A2 (en
EP0270968B1 (en
Inventor
Gunter Prof. Dr. Schmahl
Dietbert Dr. Rudolph
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Carl Zeiss SMT GmbH
Carl Zeiss AG
Original Assignee
Carl Zeiss SMT GmbH
Carl Zeiss AG
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Carl Zeiss SMT GmbH, Carl Zeiss AG filed Critical Carl Zeiss SMT GmbH
Publication of EP0270968A2 publication Critical patent/EP0270968A2/en
Publication of EP0270968A3 publication Critical patent/EP0270968A3/en
Application granted granted Critical
Publication of EP0270968B1 publication Critical patent/EP0270968B1/en
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • GPHYSICS
    • G21NUCLEAR PHYSICS; NUCLEAR ENGINEERING
    • G21KTECHNIQUES FOR HANDLING PARTICLES OR IONISING RADIATION NOT OTHERWISE PROVIDED FOR; IRRADIATION DEVICES; GAMMA RAY OR X-RAY MICROSCOPES
    • G21K7/00Gamma- or X-ray microscopes

Landscapes

  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • General Engineering & Computer Science (AREA)
  • High Energy & Nuclear Physics (AREA)
  • Analysing Materials By The Use Of Radiation (AREA)
  • Microscoopes, Condenser (AREA)
  • Transition And Organic Metals Composition Catalysts For Addition Polymerization (AREA)
  • Liquid Crystal Substances (AREA)
EP87117658A 1986-12-12 1987-11-28 Roentgen microscope Expired - Lifetime EP0270968B1 (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE19863642457 DE3642457A1 (en) 1986-12-12 1986-12-12 ROENTGEN MICROSCOPE
DE3642457 1986-12-12

Publications (3)

Publication Number Publication Date
EP0270968A2 EP0270968A2 (en) 1988-06-15
EP0270968A3 true EP0270968A3 (en) 1989-08-02
EP0270968B1 EP0270968B1 (en) 1993-12-15

Family

ID=6316038

Family Applications (1)

Application Number Title Priority Date Filing Date
EP87117658A Expired - Lifetime EP0270968B1 (en) 1986-12-12 1987-11-28 Roentgen microscope

Country Status (5)

Country Link
US (1) US4870674A (en)
EP (1) EP0270968B1 (en)
JP (1) JPH0814640B2 (en)
DE (2) DE3642457A1 (en)
DK (1) DK174016B1 (en)

Families Citing this family (25)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CH678663A5 (en) * 1988-06-09 1991-10-15 Zeiss Carl Fa
US5199057A (en) * 1989-08-09 1993-03-30 Nikon Corporation Image formation-type soft X-ray microscopic apparatus
JP2775949B2 (en) * 1990-01-10 1998-07-16 株式会社ニコン X-ray optical element holding frame
US5022061A (en) * 1990-04-30 1991-06-04 The United States Of America As Represented By The United States Department Of Energy An image focusing means by using an opaque object to diffract x-rays
US5204887A (en) * 1990-06-01 1993-04-20 Canon Kabushiki Kaisha X-ray microscope
DE4027285A1 (en) * 1990-08-29 1992-03-05 Zeiss Carl Fa X-RAY MICROSCOPE
US5432607A (en) * 1993-02-22 1995-07-11 International Business Machines Corporation Method and apparatus for inspecting patterned thin films using diffracted beam ellipsometry
US5432349A (en) * 1993-03-15 1995-07-11 The United State Of America As Represented By The Secretary Of The Navy Fourier transform microscope for x-ray and/or gamma-ray imaging
JP3703483B2 (en) * 1993-09-15 2005-10-05 カール−ツァイス−スチフツング Phase contrast-X-ray microscope
JP3741411B2 (en) * 1999-10-01 2006-02-01 株式会社リガク X-ray focusing apparatus and X-ray apparatus
CN1280835C (en) * 2002-03-05 2006-10-18 姆拉丁·阿布比奇罗维奇·库马科夫 X-ray microscope
US7245696B2 (en) * 2002-05-29 2007-07-17 Xradia, Inc. Element-specific X-ray fluorescence microscope and method of operation
US7365909B2 (en) * 2002-10-17 2008-04-29 Xradia, Inc. Fabrication methods for micro compounds optics
US7119953B2 (en) * 2002-12-27 2006-10-10 Xradia, Inc. Phase contrast microscope for short wavelength radiation and imaging method
DE10352741B4 (en) * 2003-11-12 2012-08-16 Austriamicrosystems Ag Radiation-detecting optoelectronic component, process for its production and use
WO2005094318A2 (en) * 2004-03-29 2005-10-13 Jmar Research, Inc. Morphology and spectroscopy of nanoscale regions using x-rays generated by laser produced plasma
GB0409572D0 (en) * 2004-04-29 2004-06-02 Univ Sheffield High resolution imaging
US7302043B2 (en) * 2004-07-27 2007-11-27 Gatan, Inc. Rotating shutter for laser-produced plasma debris mitigation
US7452820B2 (en) * 2004-08-05 2008-11-18 Gatan, Inc. Radiation-resistant zone plates and method of manufacturing thereof
US7466796B2 (en) * 2004-08-05 2008-12-16 Gatan, Inc. Condenser zone plate illumination for point X-ray sources
US8001862B2 (en) * 2007-11-20 2011-08-23 Harley-Davidson Motor Company Group, Inc. Reverse drive assembly for a motorcycle
WO2010109368A1 (en) * 2009-03-27 2010-09-30 Koninklijke Philips Electronics N.V. Differential phase-contrast imaging with circular gratings
US9291578B2 (en) 2012-08-03 2016-03-22 David L. Adler X-ray photoemission microscope for integrated devices
US9129715B2 (en) 2012-09-05 2015-09-08 SVXR, Inc. High speed x-ray inspection microscope
JP2022069273A (en) * 2020-10-23 2022-05-11 株式会社リガク Image forming type x-ray microscope

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4105289A (en) * 1976-04-29 1978-08-08 University Patents, Inc. Apparatus and method for image sampling

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS49300A (en) * 1972-03-15 1974-01-05
JPS6049300A (en) * 1983-08-29 1985-03-18 日本電子株式会社 X-ray microscope

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4105289A (en) * 1976-04-29 1978-08-08 University Patents, Inc. Apparatus and method for image sampling

Non-Patent Citations (2)

* Cited by examiner, † Cited by third party
Title
JOURNAL OF THE OPTICAL SOCIETY OF AMERICA, Band 64, Nr. 3, März 1974, Seiten 301-309, New York, US; J. KIRZ: "Phase zone plates for X rays and the extreme UV" *
NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH, Sektion A, Band A246, Nr. 1/3, Mai 1986, Seiten 698-701, Elsevier Science Publishers B.V., Amsterdam, NL; X.-S. XIE et al.: "Soft X-ray microscopy at the hefei synchrotron radiation laboratory" *

Also Published As

Publication number Publication date
DK174016B1 (en) 2002-04-15
DE3642457A1 (en) 1988-06-30
JPH0814640B2 (en) 1996-02-14
EP0270968A2 (en) 1988-06-15
US4870674A (en) 1989-09-26
EP0270968B1 (en) 1993-12-15
DE3788508D1 (en) 1994-01-27
JPS63163300A (en) 1988-07-06
DK652287D0 (en) 1987-12-11
DK652287A (en) 1988-06-13

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