EP0191841A1 - Mos transistors having schottky layer electrode regions and method of their production - Google Patents
Mos transistors having schottky layer electrode regions and method of their productionInfo
- Publication number
- EP0191841A1 EP0191841A1 EP85904352A EP85904352A EP0191841A1 EP 0191841 A1 EP0191841 A1 EP 0191841A1 EP 85904352 A EP85904352 A EP 85904352A EP 85904352 A EP85904352 A EP 85904352A EP 0191841 A1 EP0191841 A1 EP 0191841A1
- Authority
- EP
- European Patent Office
- Prior art keywords
- layer
- silicon
- gate electrode
- metal
- platinum
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Withdrawn
Links
- 238000000034 method Methods 0.000 title claims description 12
- 238000004519 manufacturing process Methods 0.000 title description 3
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims abstract description 29
- 229910052710 silicon Inorganic materials 0.000 claims abstract description 29
- 239000010703 silicon Substances 0.000 claims abstract description 29
- 238000005530 etching Methods 0.000 claims abstract description 12
- BASFCYQUMIYNBI-UHFFFAOYSA-N platinum Chemical compound [Pt] BASFCYQUMIYNBI-UHFFFAOYSA-N 0.000 claims description 63
- 229910052697 platinum Inorganic materials 0.000 claims description 31
- 229910052751 metal Inorganic materials 0.000 claims description 19
- 239000002184 metal Substances 0.000 claims description 19
- 229910021332 silicide Inorganic materials 0.000 claims description 15
- FVBUAEGBCNSCDD-UHFFFAOYSA-N silicide(4-) Chemical compound [Si-4] FVBUAEGBCNSCDD-UHFFFAOYSA-N 0.000 claims description 13
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical group O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims description 10
- 239000004065 semiconductor Substances 0.000 claims description 10
- 229910021420 polycrystalline silicon Inorganic materials 0.000 claims description 7
- 229920005591 polysilicon Polymers 0.000 claims description 6
- 235000012239 silicon dioxide Nutrition 0.000 claims description 5
- 239000000377 silicon dioxide Substances 0.000 claims description 5
- 239000011248 coating agent Substances 0.000 claims 1
- 238000000576 coating method Methods 0.000 claims 1
- 229910021421 monocrystalline silicon Inorganic materials 0.000 claims 1
- ZXEYZECDXFPJRJ-UHFFFAOYSA-N $l^{3}-silane;platinum Chemical compound [SiH3].[Pt] ZXEYZECDXFPJRJ-UHFFFAOYSA-N 0.000 abstract description 17
- 229910021339 platinum silicide Inorganic materials 0.000 abstract description 16
- 230000000694 effects Effects 0.000 abstract 1
- 230000003628 erosive effect Effects 0.000 abstract 1
- 239000010410 layer Substances 0.000 description 51
- 230000004888 barrier function Effects 0.000 description 14
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 description 11
- 239000012535 impurity Substances 0.000 description 10
- 229910052786 argon Inorganic materials 0.000 description 8
- 239000002344 surface layer Substances 0.000 description 8
- 230000008569 process Effects 0.000 description 7
- 238000004544 sputter deposition Methods 0.000 description 7
- -1 fluoride ions Chemical class 0.000 description 6
- 238000000151 deposition Methods 0.000 description 5
- 150000002500 ions Chemical class 0.000 description 5
- 230000008021 deposition Effects 0.000 description 4
- QZPSXPBJTPJTSZ-UHFFFAOYSA-N aqua regia Chemical compound Cl.O[N+]([O-])=O QZPSXPBJTPJTSZ-UHFFFAOYSA-N 0.000 description 3
- 239000000463 material Substances 0.000 description 3
- 238000001039 wet etching Methods 0.000 description 3
- KRHYYFGTRYWZRS-UHFFFAOYSA-N Fluorane Chemical compound F KRHYYFGTRYWZRS-UHFFFAOYSA-N 0.000 description 2
- XPDWGBQVDMORPB-UHFFFAOYSA-N Fluoroform Chemical compound FC(F)F XPDWGBQVDMORPB-UHFFFAOYSA-N 0.000 description 2
- QCWXUUIWCKQGHC-UHFFFAOYSA-N Zirconium Chemical compound [Zr] QCWXUUIWCKQGHC-UHFFFAOYSA-N 0.000 description 2
- 238000009792 diffusion process Methods 0.000 description 2
- 239000002019 doping agent Substances 0.000 description 2
- 239000007789 gas Substances 0.000 description 2
- 230000001771 impaired effect Effects 0.000 description 2
- 238000012986 modification Methods 0.000 description 2
- 230000004048 modification Effects 0.000 description 2
- 230000003647 oxidation Effects 0.000 description 2
- 238000007254 oxidation reaction Methods 0.000 description 2
- 229910021341 titanium silicide Inorganic materials 0.000 description 2
- 230000005641 tunneling Effects 0.000 description 2
- 229910021355 zirconium silicide Inorganic materials 0.000 description 2
- WEAMLHXSIBDPGN-UHFFFAOYSA-N (4-hydroxy-3-methylphenyl) thiocyanate Chemical compound CC1=CC(SC#N)=CC=C1O WEAMLHXSIBDPGN-UHFFFAOYSA-N 0.000 description 1
- GRYLNZFGIOXLOG-UHFFFAOYSA-N Nitric acid Chemical compound O[N+]([O-])=O GRYLNZFGIOXLOG-UHFFFAOYSA-N 0.000 description 1
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 description 1
- 229910052787 antimony Inorganic materials 0.000 description 1
- WATWJIUSRGPENY-UHFFFAOYSA-N antimony atom Chemical compound [Sb] WATWJIUSRGPENY-UHFFFAOYSA-N 0.000 description 1
- 229910052785 arsenic Inorganic materials 0.000 description 1
- RQNWIZPPADIBDY-UHFFFAOYSA-N arsenic atom Chemical compound [As] RQNWIZPPADIBDY-UHFFFAOYSA-N 0.000 description 1
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 1
- 230000008901 benefit Effects 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 239000003990 capacitor Substances 0.000 description 1
- 239000002800 charge carrier Substances 0.000 description 1
- 229910017052 cobalt Inorganic materials 0.000 description 1
- 239000010941 cobalt Substances 0.000 description 1
- GUTLYIVDDKVIGB-UHFFFAOYSA-N cobalt atom Chemical compound [Co] GUTLYIVDDKVIGB-UHFFFAOYSA-N 0.000 description 1
- 230000000295 complement effect Effects 0.000 description 1
- 238000007796 conventional method Methods 0.000 description 1
- 238000001312 dry etching Methods 0.000 description 1
- 230000005684 electric field Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 230000005669 field effect Effects 0.000 description 1
- 229910052735 hafnium Inorganic materials 0.000 description 1
- VBJZVLUMGGDVMO-UHFFFAOYSA-N hafnium atom Chemical compound [Hf] VBJZVLUMGGDVMO-UHFFFAOYSA-N 0.000 description 1
- 239000011810 insulating material Substances 0.000 description 1
- 238000005468 ion implantation Methods 0.000 description 1
- 239000007788 liquid Substances 0.000 description 1
- 238000004518 low pressure chemical vapour deposition Methods 0.000 description 1
- 229910044991 metal oxide Inorganic materials 0.000 description 1
- 150000004706 metal oxides Chemical class 0.000 description 1
- 150000002739 metals Chemical class 0.000 description 1
- 239000000203 mixture Substances 0.000 description 1
- 229910017604 nitric acid Inorganic materials 0.000 description 1
- 239000001301 oxygen Substances 0.000 description 1
- 229910052760 oxygen Inorganic materials 0.000 description 1
- 238000001020 plasma etching Methods 0.000 description 1
- 230000001681 protective effect Effects 0.000 description 1
- 238000005204 segregation Methods 0.000 description 1
- 238000005245 sintering Methods 0.000 description 1
- 239000000758 substrate Substances 0.000 description 1
- 229910052719 titanium Inorganic materials 0.000 description 1
- 239000010936 titanium Substances 0.000 description 1
- 229910052723 transition metal Inorganic materials 0.000 description 1
- 150000003624 transition metals Chemical class 0.000 description 1
- 229910052726 zirconium Inorganic materials 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/02—Semiconductor bodies ; Multistep manufacturing processes therefor
- H01L29/06—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by their shape; characterised by the shapes, relative sizes, or dispositions of the semiconductor regions ; characterised by the concentration or distribution of impurities within semiconductor regions
- H01L29/08—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by their shape; characterised by the shapes, relative sizes, or dispositions of the semiconductor regions ; characterised by the concentration or distribution of impurities within semiconductor regions with semiconductor regions connected to an electrode carrying current to be rectified, amplified or switched and such electrode being part of a semiconductor device which comprises three or more electrodes
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
- H01L29/66007—Multistep manufacturing processes
- H01L29/66075—Multistep manufacturing processes of devices having semiconductor bodies comprising group 14 or group 13/15 materials
- H01L29/66227—Multistep manufacturing processes of devices having semiconductor bodies comprising group 14 or group 13/15 materials the devices being controllable only by the electric current supplied or the electric potential applied, to an electrode which does not carry the current to be rectified, amplified or switched, e.g. three-terminal devices
- H01L29/66409—Unipolar field-effect transistors
- H01L29/66477—Unipolar field-effect transistors with an insulated gate, i.e. MISFET
- H01L29/66568—Lateral single gate silicon transistors
- H01L29/66643—Lateral single gate silicon transistors with source or drain regions formed by a Schottky barrier or a conductor-insulator-semiconductor structure
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/40—Electrodes ; Multistep manufacturing processes therefor
- H01L29/41—Electrodes ; Multistep manufacturing processes therefor characterised by their shape, relative sizes or dispositions
- H01L29/417—Electrodes ; Multistep manufacturing processes therefor characterised by their shape, relative sizes or dispositions carrying the current to be rectified, amplified or switched
- H01L29/41725—Source or drain electrodes for field effect devices
- H01L29/41766—Source or drain electrodes for field effect devices with at least part of the source or drain electrode having contact below the semiconductor surface, e.g. the source or drain electrode formed at least partially in a groove or with inclusions of conductor inside the semiconductor
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
- H01L29/66007—Multistep manufacturing processes
- H01L29/66075—Multistep manufacturing processes of devices having semiconductor bodies comprising group 14 or group 13/15 materials
- H01L29/66227—Multistep manufacturing processes of devices having semiconductor bodies comprising group 14 or group 13/15 materials the devices being controllable only by the electric current supplied or the electric potential applied, to an electrode which does not carry the current to be rectified, amplified or switched, e.g. three-terminal devices
- H01L29/66409—Unipolar field-effect transistors
- H01L29/66477—Unipolar field-effect transistors with an insulated gate, i.e. MISFET
- H01L29/66568—Lateral single gate silicon transistors
- H01L29/66636—Lateral single gate silicon transistors with source or drain recessed by etching or first recessed by etching and then refilled
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
- H01L29/68—Types of semiconductor device ; Multistep manufacturing processes therefor controllable by only the electric current supplied, or only the electric potential applied, to an electrode which does not carry the current to be rectified, amplified or switched
- H01L29/76—Unipolar devices, e.g. field effect transistors
- H01L29/772—Field effect transistors
- H01L29/78—Field effect transistors with field effect produced by an insulated gate
- H01L29/7839—Field effect transistors with field effect produced by an insulated gate with Schottky drain or source contact
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/0001—Technical content checked by a classifier
- H01L2924/0002—Not covered by any one of groups H01L24/00, H01L24/00 and H01L2224/00
Landscapes
- Engineering & Computer Science (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Physics & Mathematics (AREA)
- Ceramic Engineering (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Computer Hardware Design (AREA)
- Manufacturing & Machinery (AREA)
- Electrodes Of Semiconductors (AREA)
- Thin Film Transistor (AREA)
- Insulated Gate Type Field-Effect Transistor (AREA)
Abstract
Une structure MOSFET dans un corps de silicium (10), comme le siliciure de platine, qui remplit une cavité sous une couche d'oxyde située sur une paroi latérale (14) de l'électrode de porte. La cavité est obtenue par la gravure isotropique d'une région exposée de la surface du corps de silicium aux régions de source et de drainage à former, pour effectuer l'érosion de la couche d'oxyde sur la paroi latérale. Un rebord de l'électrode à source Schottky formée ultérieurement dans la cavité est essentiellement aligné avec un rebord surjacent de l'électrode de porte.A MOSFET structure in a silicon body (10), such as platinum silicide, which fills a cavity under an oxide layer located on a side wall (14) of the door electrode. The cavity is obtained by isotropic etching of an exposed region from the surface of the silicon body to the source and drainage regions to be formed, to effect the erosion of the oxide layer on the side wall. A rim of the Schottky source electrode subsequently formed in the cavity is essentially aligned with an overlying rim of the door electrode.
Description
MOS TRANSISTORS HAVING SCHOTTKY LAYER ELECTRODE REGIONS Field - of the-Invention This invention relates to semiconductor devices and particularly to MOS (metal oxide semiconductor) field effect transistors including Schottky layer electrode regions. Background of the-Invention It is known that layers composed of certain metals and metal-like materials ("Schottky layers") have the property of forming Schottky barriers at their interfaces with a semiconductor body, and that these Schottky layers can be used as source and/or drain electrodes in p-channel MOS transistors, such transistors having certain desired characteristics, e.g., low leakage currents. A problem with such Schottky layer transitors, however, is that of providing close alignment of the source and/or drain regions with edges of the gate electrode. This problem is solved by this invention. Summary-of the-Invention This invention in one embodiment involves a MOSFET device structure located at a major surface of a silicon semiconductor body, having a Schottky source and/or drain electrode layer, and a gate electrode overcoated with an insulating material layer. The source and/or drain electrode layers each extends into a cavity in the body which extends under the insulated gate electrode structure thereby providing alignment of the source and/or drain regions with edges of the gate electrode. Whether the Schottky electrodes make a Schottky barrier or ohmic contact depends upon the conductivity of the contacted semiconductor material, as described hereinafter. Brief Description of-the-Drawing FIGS. 1-10 illustrate in cross section various successive stages in the manufacture of an illustrative portion of a p-channel MOSFET structure in accordance with a specific embodiment of the invention; FIG. 11 illustrates in cross section a stage in the manufacture of an illustrative portion of a p-channel MOSFET structure in accordance with another specific embodiment of the invention; and FIG. 12 illustrates in cross section an n-channel MOSFET structure in accordance with yet another specific embodiment of the invention. FIGS. 5-8 show, on an enlarged scale, a left-hand portion of the structure shown in FIGS. 1-4 and 9-10. Detailed-Description The workpiece shown in FIG. 1 fabricated by known processes is and comprises a silicon substrate 9 having an n type epitaxial surface layer 10 thereon, a thick oxide layer 11 known as a "field" oxide, a thin oxide layer 12 eventually to form the gate dielectric layer, and a gate electrode layer 13 of polysilicon. Next (FIG. 2), the exposed top and side surfaces of the polysilicon layer 13 are subjected to a conventional oxidation step to provide the layer with a thin silicon dioxide covering layer 14. Typically, this thin oxide layer 14 has a thickness of about 300 Angstroms. As a result of the oxidation of the polysilicon, the thickness of the original thin oxide layer 12 (FIG. 1) is increased somewhat, as indicated by the designation of oxide layer 121 (FIG. 2), except in regions thereof (still denoted by reference numeral 12 in FIG. 2) underlying the polysilicon layer 13. Then the exposed portions of the thin oxide layer 121 and the top portion (but not the sidewall portions) of the thin oxide layer 14 are completely removed (FIG. 3) by an anisotropic etching step, such as by the known chemically reactive back-sputtering (reactive ion etching) with fluoride ions (F+) in a plasma produced by CHF3 (Freon 23). By "anisotropic" etching is meant that the removal of material during etching is preferential in that only those surfaces which are parallel to the top surface of the layer 10 are attacked and removed by the etching process. Next, as indicated in FIG. 4, the then exposed top surface of the n-type surface layer 10 is subjected to an isotropic etching step to remove typically a thickness of about 95 Angstroms of silicon and thus to undercut the remaining sidewall oxide layer 14 and to form cavities located between the bottom of this sidewall oxide and the top surface of the n-type surface layer 10. By "isotropic" etching is meant that the etch removal rate is substantially the same in all directions, although there can also be some crystallographic preferences, for example, as indicated by the slanting wall portions 101.1 and 102.1 of the exposed top surface portions 101 and 102 of the ntype silicon layer 10. This isotropic etching can be either a wet etching, typically with a liquid mixture of hydrofluoric acid and nitric acid, or a dry etching, typically with argon or other suitable etchant gas, at a sufficiently high pressure of about one mm Hg to result in substantially isotropic etching, for a time interval sufficient for undercutting the sidewall oxide 14 by the distance of 95 Angstroms with an accuracy to within 10 Angstroms. Then, as indicated in FIG. 5, positively charged argon ions are directed upon a platinum cathode target 31, whereby the top surface of the structure being manufactured is subjected to an anisotropic deposition of platinum layers 32, 33, and 34. More specifically, the structure being manufactured is placed in proximity to a platinum target from which platinum atoms are removed by sputtering due to the positively charged argon ions. These ions arrive at the platinum target 31 with considerable momentum, acquired by the ions under the influence of an ion accelerating dc electric field produced by a dc voltage E1 of negative polarity applied to the target 31 and an ion accelerating ac field produced by an RF voltage E2 applied through a capacitor C2 to the surface layer 10. Typically, E1 is about 1,000 volts; and E2 is about 500 volts peak-to-peak (twice the ac amplitude) at a frequency of about 13 MHz. Consequently, relatively very little (if any) argon strikes (with any considerable momentum) the structure as compared with the target 31. In this way, the platinum is not removed from the layers 32, 33, and 34. The temperature of the structure is, or is maintained, advantageously at about 200 degrees C or less during this anisotropic platinum deposition of the layers 32, 33, and 34, in order to ensure that the deposited platinum does not become platinum silicide. Next, the sputtering process is repeated, but under conditions resulting in the platinum layers 32, 33 and 34 being removed and redistributed as deposits 35 and 36 (FIG. 6) within the cavities underlying the oxide layers 11 and 14. This is accomplished by increasing the ac voltage E2 to a higher voltage, e.g., 1000 volts, whereby the argon ions strike the top surfaces of the workpiece to remove the platinum layers 32, 33 and 34. The platinum from those layers, as well as some from the target 31, is scattered in all directions including directions into the cavities. Once deposited in the cavities, however, the overlying edges of the oxide layers 11 and 14 protect the deposits 35 and 36 from the bombarding argon ions whereby these deposits are both formed and maintained in the sputtering process. Typically, the structure is maintained at about 200 degrees C or less, again to ensure that platinum silicide (which is more resistant to sputter-removal than is platinum) does not form. While the presence of the layers 32, 33 and 34 (FIG. 5) is generally preferred to ensure complete filling of the cavities, these layers need not be prior formed, and all the platinum for the cavities can be obtained in a single sputtering process directly from the target 31. Then, as indicated in FIG. 7, the ac voltage E2 is reduced, typically back to about 500 volts peak-to-peak, whereby platinum layers 41, 42, and 43 are anisotropically deposited upon the top surfaces of the structure being manufactured. Again, the temperature of the structure is below about 200 degrees C, so that platinum silicide does not form. Next, to sinter the platinum and thereby form platinum silicide, the structure is heat-treated in a suitable atmosphere, such as argon gas mixed with about 15 percent oxygen, at a temperature of typically about 625 degrees C. The platinum in the layers 42 and 43 thereby become platinum silicide layers 15 and 16 (FIG. 8), because they overlie silicon. However, the extreme lefthand portion of the layer 42, which does not overlie silicon, remains essentially platinum. Then the platinum, but not the platinum silicide, is removed, as by a wet etching with aqua regia typically at about 80 degrees C, whereby the platinum silicide layers 15 and 16 remain. During the silicide forming process, the layer 43 (16) expands into the surrounding silicon. By proper selection of dimensions and processing parameters, such expansion results in the right-hand edge of the layer 16 (the source region) being in close alignment with the lefthand edge of the gate electrode 13. The same result, if desired, is obtainable with the drain region 17 (FIG. 9) of the device. Obtaining such alignments is a principal advantage of the invention. After the formation of the platinum silicide layers 15, 16, and hence 17, the top surface of the structure being fabricated is coated at selected areas with a known insulating layer 22 (FIG. 9) having an opening therethrough to expose the underlying platinum silicide layer 15. Known means are then used to provide contacts 18, 19, and 20 to the gate electrode and source and drain regions, respectively, as shown in FIG. 10. As an alternative to the above steps, and as indicated in FIG. 11, positively charged argon ions are directed upon a platinum cathode target 31, whereby, in one step, platinum is simultaneously deposited on the workpiece and converted to platinum silicide where it contacts silicon. In this process, the workpiece is maintained at a temperture of around 6250C to form the silicide. As another alternative to the platinum deposition, a low pressure chemical vapor deposition of the platinum can be used, followed by sintering the deposited platinum to form platinum silicide in the regions underlain by silicon and by removal of the platinum underlain by silicon dioxide (but not of the platinum silicide) by means of a wet etching with aqua regia, for example. FIG. 12 illustrates in cross section an n-channel MOSFET device structure 100 in accordance with another embodiment of the invention. Here platinum silicide source and drain electrodes 86 and 87 make essentially ohmic (rather than Schottky barrier) contact with underlying n+ doped silicon regions 81 and 82 in a p-type surface layer 80. Instead of aligning the edges of the gate electrode with corresponding edges of the platinum silicide electrodes, as in the previously described structures, each edge of the gate electrode 18 in the structure 100 is aligned with the corresponding underlying proximate edge (pn junction) of the n+ doped silicon region 81 or 82. The structure 100 can be fabricated as described above but with the following modifications: (1) forming the n+ regions 81 and 82 in the p-type layer 80, (2) making the depth of the cavity (formed by isotropic etching) somewhat less (for alignment purposes), and (3) depositing correspondingly less platinum. More specifically, the n+ regions 81 and 82 can be formed during the sputtering of the platinum by adding the donor impurity dopant arsenic or antimony (or both) to the target 31 (FIG. 7 or FIG. 11) whereby these n+ regions 81 and 82 are simultaneously formed ("cosputtered") during the bombardment of the platinum. These n+ regions are thus formed by rejection from the platinum of the impurity dopant into the silicon ("segregation coefficient"). Because all subsequent processing temperatures are well below the temperature at which significant diffusion of impurities in silicon can occur, the thickness of the n+ regions 81 and 82 can be as little as about 100 Angstroms (or less). Alternatively, the n+ regions 81 and 82 can be formed at an earlier stage of the fabrication--for example, by means of conventional techniques as ion implantation and diffusion of donor impurities using the gate electrode layer 13 together with sidewall oxide layer (FIG. 4) as a protective mask which is impervious to these impurities. In any event, at their extremities the n+ regions 81 and 82 form pn junctions 91 and 92 in the p-type layer 80. Advantageously, the pn junction 91 has its right-hand extremity substantially aligned with the left-hand edge of the gate electrode layer 13. This alignment can be obtained, for example, by making the initial depth of the cavity (FIG. 4) equal to about 63 Angstroms and the thickness of the n+ region 81 equal to about 100 Angstroms, whereby after a (net) deposition of about 100 Angstroms of platinum the thickness of the platinum silicide layer 81 is about 200 Angstroms. As known in the art (for example, see M. P. Lepselter and J. M. Andrews, "Ohmic Contacts to Silicon," printed in Ohmic Contacts to Semiconductors, edited by B. Schwartz, published by The Electrochemical Society, 1969, pp. 159-186, Table 1 at p. 173), platinum silicide forms a Schottky barrier with n-type silicon having a barrier height of 0.85 volts as compared with a barrier height of only 0.25 volts with p-type silicon. Because of this relatively high barrier height with n-type silicon, which would seriously impair the transconductance of the MOSFET structure, the n+ regions 81 and 82 were formed in the n-channel structure 100. In this way, the effective barrier is reduced to acceptable levels by virtue of quantum mechanical tunneling of charge carriers through the barrier, whereby the MOSFET transconductance is not seriously impaired by the Schottky barrier. It should be understood that both p-channel and n-channel MOSFET structures 20 and 100 can thus be formed upon the same silicon bulk 9, thereby to provide complementary MOS (CMOS) technology, in which the n-type surface layer 10 is the "n-tub" and the p-type surface layer 80 is the "p-tub" in CMOS terminology. Instead of platinum, titanium or zirconium can be used to form the metal silicide source and drain electrodes. Moreover, since titanium silicide and zirconium silicide both have approximately the same barrier height or 0.55 volts with respect to both p-type and ntype silicon, a symmetrical structure can be used for these silicides. That is, p-channel and n-channel transistors with zirconium or titanium silicide electrodes are advantageously supplied with highly doped p+ and n+ impurity regions, respectively, intervening between the silicide electrodes and the n-type and p-type surface layers 10 and 80, respectively. Typically, the thicknesses of these p+ and n+ regions are both about 100 Angstroms (or less). The doping concentration, in terms of impurity atoms (or ions) per square centimeter (i.e., the "surface concentration") in these p+ and n+ impurity regions can and should be made sufficiently low to avoid reintroduction of the latchup problem, typically of the order of 1013 or less per square centimeter for a tub of the doping level of the order of 1013 or more per square centimeter, but at the same time the volume concentration is sufficiently high, typically of the order 5 x 1019 per cubic centimeter, to lower the effective barrier (by virtue of tunneling) so that the transconductance of the resulting MOS transistor structure is not seriously impaired. On the other hand, somewhat higher surface concentrations of impurities in, and hence greater thicknesses of, the n+ and p+ impurity regions for lowering the effective barrier can be tolerated without running too much risk of latchup during operation with ordinary power supply current limitations. Further modifications are possible. For example, for forming the metal silicide electrodes, other transition metals can be used--such as cobalt, hafnium, or tantalum-which form metal silicides suitable for Schottky barriers with silicon. Instead of forming the platinum or other metal silicide by sputtering, the metal can be first evaporated all over the top surface of the structure being fabricated and then converted (on the silicon regions) into the metal silicide by means of a temperature pulse ("spike") treatment, typically of about 400 to 650 degrees C for about 2 to 6 minutes; the metal remaining as such on the oxide can thereafter be removed by etching with hot aqua regia.
Claims
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US64395684A | 1984-08-24 | 1984-08-24 | |
US643956 | 1984-08-24 |
Publications (1)
Publication Number | Publication Date |
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EP0191841A1 true EP0191841A1 (en) | 1986-08-27 |
Family
ID=24582832
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
EP85904352A Withdrawn EP0191841A1 (en) | 1984-08-24 | 1985-08-20 | Mos transistors having schottky layer electrode regions and method of their production |
Country Status (5)
Country | Link |
---|---|
EP (1) | EP0191841A1 (en) |
JP (1) | JPS62500061A (en) |
KR (1) | KR870002659A (en) |
ES (1) | ES8704037A1 (en) |
WO (1) | WO1986001641A1 (en) |
Families Citing this family (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5663584A (en) * | 1994-05-31 | 1997-09-02 | Welch; James D. | Schottky barrier MOSFET systems and fabrication thereof |
US6303479B1 (en) * | 1999-12-16 | 2001-10-16 | Spinnaker Semiconductor, Inc. | Method of manufacturing a short-channel FET with Schottky-barrier source and drain contacts |
JP3833903B2 (en) * | 2000-07-11 | 2006-10-18 | 株式会社東芝 | Manufacturing method of semiconductor device |
JP2002184716A (en) * | 2000-12-11 | 2002-06-28 | Sharp Corp | Method of manufacturing semiconductor device |
Family Cites Families (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4141022A (en) * | 1977-09-12 | 1979-02-20 | Signetics Corporation | Refractory metal contacts for IGFETS |
FR2480371A1 (en) * | 1980-04-15 | 1981-10-16 | Ferodo Sa | ASSISTED HYDRAULIC CONTROL, IN PARTICULAR FOR CLUTCHES AND BRAKES |
US4485550A (en) * | 1982-07-23 | 1984-12-04 | At&T Bell Laboratories | Fabrication of schottky-barrier MOS FETs |
-
1985
- 1985-08-20 JP JP60503826A patent/JPS62500061A/en active Pending
- 1985-08-20 WO PCT/US1985/001589 patent/WO1986001641A1/en not_active Application Discontinuation
- 1985-08-20 EP EP85904352A patent/EP0191841A1/en not_active Withdrawn
- 1985-08-22 ES ES546353A patent/ES8704037A1/en not_active Expired
- 1985-08-22 KR KR1019850006056A patent/KR870002659A/en not_active Application Discontinuation
Non-Patent Citations (1)
Title |
---|
See references of WO8601641A1 * |
Also Published As
Publication number | Publication date |
---|---|
KR870002659A (en) | 1987-04-06 |
JPS62500061A (en) | 1987-01-08 |
ES8704037A1 (en) | 1987-03-01 |
ES546353A0 (en) | 1987-03-01 |
WO1986001641A1 (en) | 1986-03-13 |
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