EP0178077A1 - Optischer Kopf zur Aufzeichnung und Wiedergabe von Daten von einem Aufzeichnungsmedium - Google Patents

Optischer Kopf zur Aufzeichnung und Wiedergabe von Daten von einem Aufzeichnungsmedium Download PDF

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Publication number
EP0178077A1
EP0178077A1 EP85306415A EP85306415A EP0178077A1 EP 0178077 A1 EP0178077 A1 EP 0178077A1 EP 85306415 A EP85306415 A EP 85306415A EP 85306415 A EP85306415 A EP 85306415A EP 0178077 A1 EP0178077 A1 EP 0178077A1
Authority
EP
European Patent Office
Prior art keywords
optical head
movable body
magnets
coil
coils
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
EP85306415A
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English (en)
French (fr)
Other versions
EP0178077B1 (de
Inventor
Akihiro C/O Patent Division Kasahara
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Original Assignee
Toshiba Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from JP20555284A external-priority patent/JPS6185640A/ja
Priority claimed from JP60059520A external-priority patent/JPH0719388B2/ja
Application filed by Toshiba Corp filed Critical Toshiba Corp
Publication of EP0178077A1 publication Critical patent/EP0178077A1/de
Application granted granted Critical
Publication of EP0178077B1 publication Critical patent/EP0178077B1/de
Expired legal-status Critical Current

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Classifications

    • G—PHYSICS
    • G11—INFORMATION STORAGE
    • G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B7/00—Recording or reproducing by optical means, e.g. recording using a thermal beam of optical radiation by modifying optical properties or the physical structure, reproducing using an optical beam at lower power by sensing optical properties; Record carriers therefor
    • G11B7/08—Disposition or mounting of heads or light sources relatively to record carriers
    • G11B7/09—Disposition or mounting of heads or light sources relatively to record carriers with provision for moving the light beam or focus plane for the purpose of maintaining alignment of the light beam relative to the record carrier during transducing operation, e.g. to compensate for surface irregularities of the latter or for track following
    • G11B7/0925—Electromechanical actuators for lens positioning
    • G11B7/0935—Details of the moving parts
    • G—PHYSICS
    • G11—INFORMATION STORAGE
    • G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B7/00—Recording or reproducing by optical means, e.g. recording using a thermal beam of optical radiation by modifying optical properties or the physical structure, reproducing using an optical beam at lower power by sensing optical properties; Record carriers therefor
    • G11B7/08—Disposition or mounting of heads or light sources relatively to record carriers
    • G11B7/09—Disposition or mounting of heads or light sources relatively to record carriers with provision for moving the light beam or focus plane for the purpose of maintaining alignment of the light beam relative to the record carrier during transducing operation, e.g. to compensate for surface irregularities of the latter or for track following
    • G11B7/0925—Electromechanical actuators for lens positioning
    • G11B7/0932—Details of sprung supports

Definitions

  • This invention relates to an optical head for recording data on and reproducing data from an optical recording medium.
  • the diameter of the pits should be formed less than about 1.0 ⁇ m across and the track pitch should be 1.0 to 2.0 ⁇ m according to increases in density.
  • Light is used to form the pits recording the data and to detect the presence and absence of the pits for reproduction.
  • the optical head used for recording and reproducing should have excellent tracking and focusing control functions.
  • the optical head In practice, when a 5 V power source used, for example, the optical head must have a drive sensitivity such that the optical head acceleration of about 36 m/s 2 in both tracking and focusing directions can be obtained with a low power consumption of 1/3 watt.
  • ordinary variable coil or variable magnet systems In order to produce this kind of function, ordinary variable coil or variable magnet systems have been considered for the optical head drive system.
  • variable coil system There is a tendency to use the variable coil system based on prior art high acceleration one-dimensional drive system, such as the voice coils of speakers, in recent years.
  • variable coil systems it is necessary to attach a lead wire to the coil for supplying power from the stationary section, resulting in deterioration of the optical head's vibration characteristics under the influence of the lead wire and making precise positioning of the head impossible.
  • the terminal board required for attaching the lead wire increases the weight of the optical head, reducing the drive sensitivity.
  • variable magnet optical head shown in Japanese Patent Laid-Open Publication 58-12145.
  • a force acting on a portion of the focus coil facing the magnet and force acting on the other portions of the focusing coil act in opposite directions each other, resulting in mutual cancellation of the magnetic force. Consequently, the reaction force for the magnet is extremely weak and the drive sensitivity of the optical head is insufficient.
  • the variable magnet system is known for its superlative vibration characteristics, it lacks practicability.
  • the object of the invention is to provide a variable magnet type optical head apparatus, which is small, has low power consumption and high drive sensitivity, and can control the focusing and the tracking with great precision and good vibration characteristics.
  • the optical head apparatus of this invention comprises:
  • movable magnet 10 is supported by the support structure such that it can move in the focusing and tracking directions F and T, which are 90° to each other.
  • Movable magnet 10 is magnetized in a direction V perpendicular to both the F and T directions and the ends 12 have an N and S polarity, respectively.
  • First coil 14 and second coil 16 are fastened to fixed stud 18 with set gap between the coils 14, 16 and ends 12 in the direction of magnetization of movable magnet 10, respectively.
  • First and second coils 14, 16 are formed into a substantially rectangular shape with a flat vertical surface in the direction of magnetization of movable magnet 10 by winding a pair of coil elements 14a, 14b and 16a, 16b.
  • surfaces formed by loops of the coils are vertical to direction of magnetization of the magnets 10.
  • Side portions 20a of coil elements 14a, 14b of * first coil 14, which are in contact with each other, are arranged opposing ends 12 of movable magnet 10, respectively and parallel to direction T.
  • Side portions 22a of coil elements 16a, 16b of second coil 16, which are in contact with each other, are arranged opposing ends 12 of movable magnet 10 and parallel to direction F.
  • Objective lens 30 for converging the light into a spot on the disk surface is mounted on movable body 32, which has a rigid construction.
  • the ends of one side of focusing springs 34 which are formed of metal parallel leaf springs positioned perpendicular to the optical axis, for example, are fastened to movable body 32 to move the entire structure parallel to the focusing direction without any distortion.
  • a pair of permanent magnets 36 are coaxially mounted on the two ends of movable body 32 to thereby form a single unit with objective lens 30.
  • the direction of magnetization of permanent magnets 36 is perpendicular to the optical axis of objective lens 30 and perpendicular to the tracking direction.
  • the other ends of focusing springs 34 are mounted on the parallel surfaces, i.e., the upper and lower surfaces, of intermediate support 38, which is made of a material that is both rigid and light in weight. This then constitutes the support mechanism in the focusing direction.
  • tracking springs 40 which comprise two parallel leaf springs, are mounted to the mutually parallel surfaces, which are at 90° to the upper and lower surfaces of intermediate support 38, i.e., the front and rear surfaces.
  • the other ends of tracking springs 40 are mounted to fixed support 42. This then constitutes the tracking support mechanism in the tracking direction.
  • Focusing spring 34 and tracking spring 40 have their shapes and positions not to intercept an optical path within movable range of objective lens 30.
  • focusing springs 34 and tracking springs 40 always maintain a parallelogram relationship when changing shapes, so the optical axis of objective lens 30 itself is always perpendicular to the disk regardless of the direction of movement.
  • Focusing and tracking coils 44 and 46 which are wound into a substantially rectangular shape that forms a flat vertical surface in the direction of magnetization of permanent magnets 36, are fastened to coil stud 48 such that a constant gap is formed between the coils and the end of permanent magnet 36.
  • the part area of the focusing and tracking coils 44, 46 facing the magnets 36 is not more than half of the total area of the coils.
  • Coil stud 48 and support member 42 connected to the leaf springs are mounted on base 50 to form a single unit.
  • objective lens 30 faces the surface of the disk and a light spot for reading out data is projected on the tracks through objective lens 30. Then, the reflected light passes through objective lens 30 and into the detection means (not shown) located under base 50 to read out the data recorded on the optical disk.
  • the drive system of the invention namely, focusing coil 44 and focusing spring 34
  • focusing coil 44 and focusing spring 34 is used only for the focusing drive.
  • another driving system may be used for the drive in the tracking direction.
  • the rest of the structure is the same as that in the first embodiment so the same reference numerals have been used for the same parts, and a description of which has been omitted.
  • Base 100 is formed of non-magnetic metals, e.g., aluminum or engineering plastics having high rigidity such as polyphenylen sulfide (PPS), etc.
  • Base 100 has a hole 102 and coil plates 104a, 104b, which project upward, are symmetrically positioned with hole 102 in the center. Stopper pin 106 is provided projecting upward between hole 102 and coil plate 104b.
  • Coil unit positioning holes 108 are provided in coil plates 104a, 104b.
  • a hole 110 for allowing a laser beam generated from a laser diode (not shown) to pass is provided in coil plate 104a.
  • Damper member mounts 112a, 112b are provided on base 100 projecting upward and symmetrically positioned around hole 102 in a direction intersecting the line between coil plates 104a, 104b.
  • Mirror 114 for changing the direction of the laser beam from the X axis to the Z axis is fastened to base 100 between coil plates 104a and hole 102.
  • Support shaft 116 (hereinafter simply referred to as a shaft) is inserted into hole 102 and fastened with adhesive, screws or by press fitting to be implanted in the base 100.
  • Movable member 118 which is formed of dimensionally stable non-magnetic engineering plastic having high rigidity such as polyphenylen sulfide, is fitted to shaft 116.
  • Movable member 118 is provided symmetrically with shaft 116 and has a bushing 120 which is formed of a sliding bearing fitted over shaft 116. Based on the fitting between bushing 120 and shaft 116, movable member 118 rotates and slides along the shaft 116. Movable member 118 is arranged such that its lengthwise direction is in a straight line between coil plates 104a, 104b, and a hole 122 is provided on the end of the coil plate 104a side of movable member 118. Objective lens 124 is fastened to movable body 118 in hole 120 to make the optical axis parallel to shaft 116.
  • a balance hole 126 which does not extend all the way through, is provided on the other lengthwise end of movable body 118 for arranging the center of gravity of movable body 118, which includes a magnet (to be described later), along the axis of shaft 116.
  • the crown of stopper pin 106 which prevents objective lens 124 from moving too much in the tracking direction Y and focusing direction Z, is inserted without touching into balance hole 126 with enough of a gap for objective lens 124 to move.
  • Magnet positioning grooves 128a, 128b are provided in the side surfaces of the two ends of movable body 118 facing coil plates 104a, 104b. Magnets 130a, 130b, which have a substantially rectangular parallelepiped shape, are fastened to movable body 118 using these grooves 128a, 128b, and arranged with the lengthwise direction of the surfaces facing coil plates 104a, 104b in the tracking direction corresponding to the Y axis in Fig. 9, as is shown in Figs. 9 and 10.
  • the surfaces of magnets 130a, 130b facing coil plates 104a, 104b are convex and the direction of magnetization is perpendicular to the surfaces of coil plates 104a, 104b facing magnets 130a, 130b.
  • Damper groove 132a, 132b are provided in the bottom surface of magnet positioning grooves 128a, 128b in which magnets 130a, 130b are fastened.
  • the damper members 134 which are formed of rubber such as silicone, engage with damper grooves 132a, 132b and magnets 130a, 130b are fastened over them.
  • Sections 136a, 136b which have parts of different widths, are provided in damper grooves 132a, 132b, and sections 138a, 138b, which have widths that vary similarly to sections 136a, 136b, are provided in corresponding positions of damper member 134.
  • the relative position of movable member 118 is determined by damper member 134 and sections 136a, 136b of damper grooves 132a, 132b. Damper member 134 engages with damper mounts 112a, 112b to be fastened to base 100.
  • Coil unit 140 is fastened to the surfaces of coil plates 104a, 104b facing movable body 118.
  • coil unit 140 comprises reinforcing plates 142a, 142b, which are made of a material such as glass fiber reinforced plastic (GFRP), flexible printed circuit board 144, which is made of a resin material such as a polyimide and is fastened to reinforcing plates 142a, 142b, tracking position adjustment coils 146a, 146b, which are oval shaped and fastened to flexible printed circuit board 144 such that their lengthwise directions are in the direction of the optical axis of objective lens 124, and focusing position adjustment coils 148a, 148b, which are oval shaped and fastened to tracking position adjustment coils 146a, 146b such that their lengthwise directions are in a direction intersecting the optical axis of objective lens 124, which is direction Y.
  • GFRP glass fiber reinforced plastic
  • tracking position adjustment coils 146a, 146b and focusing position adjustment coils 148a, 148b are arranged such that the long sides 146ax, 146bx, 148ax, 148bx face magnets 130a and 130b, respectively.
  • the other long sides 146ay, 146by, 148ay, 148by do not face magnets 130a and 130b.
  • Tracking position adjustment coils 146a, 146b and focusing position adjustment coils 148a, 148b are comprised of two serially connected coils 146aI, 146aII and 148bI, 148bII, respectively. All these coils are constructed using conductive wiring having rectangular cross sections. The long side of these cross sections of conductive wiring is in the same direction as the direction of magnetization of magnets 130a, 130b, which are in the X axis.
  • Coil positioning holes 150a, 150b are provided in reinforcing plates 142a, 142b.
  • the position of coil unit 140 on coil plates 104a, 104b is determined by coil positioning holes 150a, 150b and coil unit positioning hole 108, which is provided in coil plates 104a, 104b.
  • movable body 118 is moved in direction Z of Fig. 11 by the electromagnetic force generated when current is supplied to focusing position adjustment coils 148a, 148b, to thereby effect the focusing control.
  • Movable body 118 is rotated in direction Y of Fig. 11 by the electromagnetic force generated when current is supplied to tracking position adjustment coils 146a, 146b, to thereby effect the tracking control.
  • This apparatus has the following advantages.
  • the surfaces of magnets 130a, 130b, which face focusing coils 148a, 148b, are rectangular in shape so, by changing the side/length ratio, it is possible to distribute the desired driving force in the two intersecting directions.
  • a highly efficient driving system can be designed and power consumption can be decreased.
  • a larger driving force is required for the focusing direction than for the tracking direction. Consequently, in this invention it is possible to increase the driving force in the focusing direction by causing the long sides of magnets 130a, 130b to face the long sides of the focusing coils 148a, 148b that are nearest to magnets 130a, 130b in the 2-layer position adjustment coils.
  • the surfaces of magnets 130a, 130b facing focusing coils 148a, 148b are convex. If shown as radius R in Fig. 9, the radius would in reality be 10-30 mm. If the surface is not curved in this way, the left and right edges of magnets 130a, 130b will strike focusing coils 148a, 148b, which are arranged with very small gaps, when movable body 118 to which the magnets are attached are rotated for tracking control, making it impossible to position magnets 130a, 130b close to focusing coils 148a, 148b or tracking coils 146a, 146b. However, in order to improve driving sensitivity, the closer the magnets are positioned to the coils the better.
  • the gap between magnets 130a, 130b and focusing coils 148a, 148b is about 0.1 to 0.3 mm. Accordingly, by making the surfaces of magnets 130a, 130b facing focusing coils 148a, 148b convex, it is possible to decrease the size of the gap between magnets 130a, 130b and focusing coils 148a, 148b, making it possible to effectively utilize the strongest portion of the magnetic field in the magnetic space generated by magnets 130a, 130b, thereby improving the drive sensitivity.
  • magnet positioning grooves 128a, 128b are provided in the side surfaces of movable body 118 and damper grooves 132a, 132b are provided at the bottom of magnet positioning grooves 128a, 128b.
  • Damper member 134 is fitted into damper grooves 132a, 132b and the magnets are bonded into magnet positioning grooves 128a, 128b above them. Accordingly, it is possible to reliably attach damper member 134 to movable member 118 without bonding. Also, movable body 118 is made lighter and power consumption is reduced.
  • Movable body 118 and bushing 120 are formed as one unit of a resin material having high rigidity, such as a polyimide or polyphenylen sulfide, so the production cost is low.
  • a resin material having high rigidity such as a polyimide or polyphenylen sulfide
  • the sliding characteristics of the bearing is increased according to a lubricating action of the resin material, so that application of lubricants such as a solid lubricant is unnecessary.
  • Position adjustment coils 146a, 146b, 148a, 148b are formed of flat conduction wires which have a rectangular cross section. The long side of the cross section is in the direction of magnetization of magnets 130a, 130b, shown by X axis. This results in an increase in the space utilizable in direction X, improving the utilization efficiency of the magnetic field space generated by magnets 130a and 130b and increasing the drive sensitivity.
  • Position adjustment coils 146a, 146b, 148a, 148b are substantially oval in shape and the long sides 146ax, 146bx, 148ax, 148bx face magnets 130a, 130b.
  • the other long sides 146ay, 146by, 148ay, 148by do not face magnets 130a, 130b. Therefore, the magnetic flux direction of portions 146ax, 146bx, 148ax, 148bx of the position adjustment coils facing magnets 130a, 130b and the magnetic fiux direction of portions l46ay, 146by, 148ay, 148by of the position adjustment coils not facing magnets 130a, 130b are in opposite directions.
  • the direction of current is opposite for the parts facing and the parts not facing magnets 130a, 130b. Consequently, the direction of force is the same for the parts facing and the parts not facing magnets 130a, 130b, resulting in a more effective force from position adjustment coils 146a, 146b, 148a, 148b and a reduction in power consumption.
  • the lengthwise directions of position adjustment coils 146a, 148a or 146b, 148b are perpendicular to each other and are stacked into two layers, so one or the other of magnets 130a, 130b can apply an independent force toward two intersecting directions. Therefore, movable body 118 is lighter and more compact.
  • Each layer of position adjustment coil 146a, 146b, 148a, 148b is constructed of coils 146aI and 146aII, 146bI and 146bII, 148aI and 148aII, 148bI and I48bII being serially connected into pairs.
  • the coils being substantially rectangular or oval in shape together with the above-mentioned construction of the coils 146a, 146b, 148a, 148b mean that coils 146a, 146b, 148a, 148b can be arranged, in the symmetrical positional relationship in regards to magnets 130a, 130b, such that the current in the portion with opposing magnetic flux flows in the opposite direction.
  • fluctuations in drive sensitivity do not depend on the direction of movement of movable body 118, resulting in a stable servo system.
  • the lengthwise direction of focusing position adjustment coils 148a, 148b intersects optical axis of objective lens 124 and the coils are positioned nearer to the magnets than tracking position adjustment coils 146a, 146b.
  • Position adjustment coils 148a, 148b which provide a force in the focusing direction, are arranged in a stronger field of the magnetic field space generated by magnets 130a, 130b than the field in which tracking position adjustment coils 146a, 146b are arranged. Accordingly, the force in the focusing direction must be stronger than the force in the tracking direction, resulting in an efficient well balanced optical head apparatus, which in turn makes it possible to reduce the power consumption.
  • Position adjustment coils 146a, 146b, 148a, 148b are fastened to the top of non-conductive printed circuit board 144. Therefore, no induced electromotive force is generated, even if an alternating current is supplied. Futhermore, even in the high frequency region, it is possible to reduce the phase delay between the impressed voltage of the coil and the force acting on movable body 118, which is generated when position adjustment coils are directly fastened to a conductor such as aluminum, resulting in stable control.
  • Coil positioning holes 150a, 150b are provided in flexible printed circuit board 144 so that it is easy to fasten coil unit 140 to the board accurately, thereby improving its mass productivity.
  • the shape of magnets 130a, 130b is not limited to that described in the above embodiments.
  • the side of magnet 130a, in its plan view, facing focusing coil 148a may be triangular or trapezoidal. In fact any shape is possible provided movable body 118 does not strike focusing coil 148a.
  • damper grooves 132a, 132b may have a uniform width. Accordingly, the damper may have a uniform width as shown in Fig. 21. Damper grooves 132a, 132b may have a portion which is deeper than the rest. Accordingly, the damper may have a portion that is thicker than the rest.
  • damper grooves 132a, 132b directly in the side surface of movable body 118 instead of providing magnet positioning grooves 128a, 128b in the side surface of movable body 118.
  • magnets 130a and 130b are directly bonded to the side surface of movable body 118 after damper member 134 has been fitted into grooves 132a, 132b.
  • Damper member 134 is able to carry out its function with only a portion of the member or with a combination of portions of the damper member as shown in Figs. 22 to 25. This allows the weight and power consumption to be further reduced, thereby improving the drive sensitivity.
  • the shaft may be arranged on the movable body side and the bearing on the base side.
  • the surface of the magnet facing the coil is convex, it is also possible to reduce the size of the gap between the magnet and the coil and to effectively utilize the magnetic field space generated by the magnets. Accordingly, it is possible to provide an optical head apparatus that has high drive sensitivity with low power consumption.
  • the damper member engages with the damper groove provided in the movable member and the magnet is fastened over top by bonding. Accordingly, the attachment of the damper to the movable body is simplified and reliable. Also, the movable body is reduced in weight so power consumption can be reduced.

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  • Optical Recording Or Reproduction (AREA)
EP85306415A 1984-10-02 1985-09-10 Optischer Kopf zur Aufzeichnung und Wiedergabe von Daten von einem Aufzeichnungsmedium Expired EP0178077B1 (de)

Applications Claiming Priority (4)

Application Number Priority Date Filing Date Title
JP205552/84 1984-10-02
JP20555284A JPS6185640A (ja) 1984-10-02 1984-10-02 光学ヘツド装置
JP59520/85 1985-03-26
JP60059520A JPH0719388B2 (ja) 1985-03-26 1985-03-26 光学ヘツド装置

Publications (2)

Publication Number Publication Date
EP0178077A1 true EP0178077A1 (de) 1986-04-16
EP0178077B1 EP0178077B1 (de) 1989-11-15

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Family Applications (1)

Application Number Title Priority Date Filing Date
EP85306415A Expired EP0178077B1 (de) 1984-10-02 1985-09-10 Optischer Kopf zur Aufzeichnung und Wiedergabe von Daten von einem Aufzeichnungsmedium

Country Status (3)

Country Link
US (1) US4759005A (de)
EP (1) EP0178077B1 (de)
DE (1) DE3574302D1 (de)

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DE10002137B4 (de) * 1999-01-19 2006-02-02 Kabushiki Kaisha Sankyo Seiki Seisakusho Strahlabtastvorrichtung
DE102004042913A1 (de) * 2004-09-02 2006-03-30 Westfälische-Wilhelms Universität Münster Scanneranordnung und Verfahren zum optischen Abtasten eines Objektes
DE19751378B4 (de) * 1997-11-20 2009-03-19 Deutsche Thomson-Brandt Gmbh Verfahren und Vorrichtung zum Herstellen einer Abtasteinrichtung für optische Aufzeichnungsträger

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US5729510A (en) * 1994-01-19 1998-03-17 Kabushiki Kaisha Toshiba Optical head used for recording on optical recording medium having various thicknesses, warpage and the like
US5870373A (en) * 1994-10-04 1999-02-09 Lg Electronics Inc. Optical pick-up driving apparatus
US5721723A (en) * 1994-11-18 1998-02-24 Kabushiki Kaisha Toshiba Objective lens driving device, data recording device, and data reproducing device, all having driver force selectively 120 tutine and positioning the objective lenses
US6434087B1 (en) 1995-01-25 2002-08-13 Discovision Associates Optical disc system and method for controlling bias coil and light source to process information on a storage medium
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EP1783757A1 (de) * 2005-11-07 2007-05-09 Deutsche Thomson-Brandt Gmbh Gerät zum Lesen und/oder Beschreiben optischer Aufzeichnungsträger
EP1783760B1 (de) * 2005-11-07 2009-05-06 Thomson Licensing S.A. Vorrichtung zum Lesen von und/oder Schreiben auf optischen Aufzeichnungsmedien

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US4507764A (en) * 1981-08-25 1985-03-26 Olympus Optical Co., Ltd. Objective lens drive device with tracking error correction with flux of opposite direction
EP0092997A2 (de) * 1982-04-23 1983-11-02 Kabushiki Kaisha Toshiba Optischer Aufnahmekopf
FR2556121A1 (fr) * 1983-12-01 1985-06-07 Philips Nv Dispositif electro-optique pour le reglage electrodynamique de la position d'un spot de rayonnement

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DE19751378B4 (de) * 1997-11-20 2009-03-19 Deutsche Thomson-Brandt Gmbh Verfahren und Vorrichtung zum Herstellen einer Abtasteinrichtung für optische Aufzeichnungsträger
DE10002137B4 (de) * 1999-01-19 2006-02-02 Kabushiki Kaisha Sankyo Seiki Seisakusho Strahlabtastvorrichtung
DE102004042913A1 (de) * 2004-09-02 2006-03-30 Westfälische-Wilhelms Universität Münster Scanneranordnung und Verfahren zum optischen Abtasten eines Objektes
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DE3574302D1 (en) 1989-12-21
US4759005A (en) 1988-07-19
EP0178077B1 (de) 1989-11-15

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