EP0176872A1 - Appliance for the contactless changing of the surfaces of objects - Google Patents

Appliance for the contactless changing of the surfaces of objects Download PDF

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Publication number
EP0176872A1
EP0176872A1 EP85111812A EP85111812A EP0176872A1 EP 0176872 A1 EP0176872 A1 EP 0176872A1 EP 85111812 A EP85111812 A EP 85111812A EP 85111812 A EP85111812 A EP 85111812A EP 0176872 A1 EP0176872 A1 EP 0176872A1
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EP
European Patent Office
Prior art keywords
laser beam
deflection
wobble
deflecting
sweep
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
EP85111812A
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German (de)
French (fr)
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EP0176872B1 (en
Inventor
Antoon Dipl.-Ing. Mattelin
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Siemens AG
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Siemens AG
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Priority to AT85111812T priority Critical patent/ATE43982T1/en
Publication of EP0176872A1 publication Critical patent/EP0176872A1/en
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    • BPERFORMING OPERATIONS; TRANSPORTING
    • B23MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23KSOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00Working by laser beam, e.g. welding, cutting or boring
    • B23K26/08Devices involving relative movement between laser beam and workpiece
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B23MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23KSOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00Working by laser beam, e.g. welding, cutting or boring
    • B23K26/08Devices involving relative movement between laser beam and workpiece
    • B23K26/082Scanning systems, i.e. devices involving movement of the laser beam relative to the laser head
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B23MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23KSOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K2101/00Articles made by soldering, welding or cutting
    • B23K2101/007Marks, e.g. trade marks

Definitions

  • the invention relates to a device for contactlessly changing the surface of an object, in particular for labeling glass, by means of a laser beam which is wobbled by a wobble device, deflectable by a deflection device and focusable on the surface of the object by a lens.
  • a photo shutter In the laser marking of objects, devices are used in which a photo shutter, a deflection device which can be controlled according to the marking task by a process computer or a microprocessor and a lens are arranged in the beam path of a laser beam generated by a laser, and a lens which directs the laser beam onto the surface of an object to be labeled.
  • Objects made of metal, ceramics, semiconductor materials and a variety of plastics can then be labeled with letters, numbers, markings, company symbols or graphic representations using the laser inscription.
  • the Desc f i-tung in Gravierschrift in melting font, font in evaporation or executed by a discoloration of the surface.
  • the deflection device of the known device consists of a first deflection mirror for the horizontal deflection of the laser beam and a second deflection mirror for the vertical deflection of the laser beam, both deflection mirrors being designed as galvanometer mirrors.
  • Such galvanometer mirrors are characterized by low moments of inertia of the moving parts.
  • the deflection device also simultaneously fulfills the task of a wobble device, through which the laser beam is wobbled in the horizontal and vertical directions in such a way that it describes a line determining the line thickness of the lettering on the surface of the object to be labeled
  • the angle a is set so that the laser beam describes a circle on the surface of the object to be labeled.
  • the wobble frequencies achievable with the combined deflection and wobble device are a maximum of 120 to 150 Hz.
  • the invention has for its object to improve a generic device for contactless changing the surface of an object so that letters, numbers, markings, calibration marks, company symbols, graphic representations and omaments can be applied to objects made of glass in a high quality.
  • a wobble device which is separate from the deflection device and is arranged in the beam path of the laser beam in front of the deflection device.
  • the invention is based on the finding that when the surface of an object made of glass is changed without contact, macroscopic splintering in the edge region can only be avoided by increasing the weaving frequencies. Since deflection mirrors with a certain minimum size must be used in the deflection device in order to achieve the required deflection angle of the laser beam, the moments of inertia of the moving parts are so great that the increases in the sweeping frequencies required for glass objects are not achieved with the combined deflection and wobble devices used to date can be.
  • the deflection mirrors and their drives can, however, be reduced so much that significantly higher wobble frequencies can be realized by the corresponding reduction in the moments of inertia of the moving parts and, in particular, resonance operation is made possible .
  • this structural separation of the wobble device and the deflection device also leads to considerable advantages in the case of objects made of materials other than glass.
  • the wobble device can consist of two deflecting mirrors inserted one after the other into the beam path of the laser beam and rotatable in different directions with different wobble frequencies. This wobble device thus corresponds to a reduced embodiment of the usual deflection devices.
  • the wobble device can also consist of a single deflecting mirror which can be rotated independently of one another in two different directions with different wobble frequencies.
  • a second deflection mirror can therefore be omitted here.
  • the wobble frequencies can be set to at least 500 Hz.
  • Such sweeping frequencies of at least 500 Hz enable extremely high-quality laser marking of objects made of glass or comparable brittle materials.
  • the wobble device is preferably adjustable such that the laser beam describes a circle on the surface of the object.
  • This circular shape enables uniform line widths in all directions.
  • the diameter of the circle is preferably at least 0.5 mm set For good legibility of the laser marking, it has proven to be very favorable if the diameter of the circle is set to approx. 1 mm.
  • FIG 1 shows a highly simplified schematic representation of a device for laser inscription of an object G arranged on a work surface Af.
  • This device comprises a laser L which generates a laser beam Ls, in the beam path of which successively a photo shutter Fv, a wobble device We, a deflection device Ae and a lens 0 are arranged, which focuses the laser beam Ls on the surface of the object G to be labeled.
  • the position of the object G on the working surface Af is fixed in relation to a flat, Cartesian x, y coordinate system.
  • the wobble device We has the task of periodically deflecting the laser beam Ls in the horizontal direction x and in the vertical direction y with predeterminable amplitudes so that it describes a circle on the surface of the object G, the diameter of which determines the line width of the lettering Wobble device
  • We consists of two rotatable deflecting mirrors asx and asy inserted one after the other into the beam path of the laser beam Ls, the deflecting mirror asx being rotatable in the x direction in the x direction for deflecting the laser beam Ls, while the deflecting mirror asy for deflecting the laser beam Ls is rotatable in the x direction in the direction of the double arrow y '.
  • the two deflection mirrors asx and asy are extremely small galvanometer mirrors that allow the laser beam to be wobbled with wobble frequencies ⁇ of at least 500 Hz.
  • the coil of the deflection mirror asy is supplied with an alternating voltage Uy-sin ( ⁇ t + a) that is phase-shifted by the angle ⁇ .
  • the angle a is adjusted with the aid of a potentiometer so that the laser beam Ls describes a circle on the surface of the object G, the size of the angle ⁇ required for this to compensate for distortions not being exactly 90 °
  • the deflecting device Ae has the task of deflecting the wobbled laser beam Ls in the horizontal direction x and in the vertical direction y, whereby, however, substantially larger deflection angles than with the wobble device We are required. Accordingly, the deflection device Ae consists of two deflecting mirrors Asx and Asy inserted one after the other into the beam path of the wobbled laser beam Ls, the deflecting mirror Asx being rotatable in the x direction in the direction of the double arrow x "for deflecting the wobbled laser beam Ls, while the deflecting mirror Asy for deflecting the swept laser beam Ls in the y direction in the direction of the double arrow y ', the two deflecting mirrors Asx and Asy are galvanometer mirrors, the size of which is adapted to the required deflecting angles.
  • the control of the deflecting mirrors Asx and Asy according to the respective Labeling is done, for example, by a process computer or by a microprocessor.
  • FIG. 2 shows a highly simplified schematic representation of a device for laser marking, which differs from the device shown in Figure 1 only in the other configurations of the wobble device designated We 'and the deflection device designated Ae'.
  • the wobble device We ' consists of a single deflection mirror asxy, which can be rotated in the direction of the double arrow x 'for deflecting the laser beam Ls in the x direction and independently of it for deflecting the laser beam Ls in the direction of the double arrow y' in the y direction.
  • the wobble of the laser beam Ls takes place via corresponding galvanometer drives of the deflection mirror asxy in the manner already described in connection with FIG. 1.
  • the deflection device Ae ' also consists of a single deflection mirror Asxy, which is used for deflecting the swept laser beam Ls in the x direction in the direction of the double arrow x "and independently thereof for deflecting the swept laser beam Ls in the y direction in the direction of the double arrow y'.
  • Deflection of the swept laser beam Ls takes place via corresponding galvanometer drives of the deflection mirror Asxy, which can be controlled according to the respective labeling task, for example by a process computer or a microprocessor.
  • the structural design of the deflection device Ae 'with the deflection mirror Asxy is shown in FIG.
  • a first rotatable spindle S1 designed as a hollow shaft stub carries a fork Ga in which a holder H is rotatably mounted via pivot Dz.
  • the circular deflecting mirror Asxy is glued to the holder H with its rear side
  • the fork G and the mount H with the two dre Hzappen Dz form a fork joint, which is designed so that the axis A1 of the first spindle S1 and the pivot axis, not shown, are perpendicular to each other.
  • a second rotatable spindle S2 also designed as a hollow shaft stub, is aligned so that its axis A2 is perpendicular to the axis A1 and goes exactly through the intersection of the axis A1 and the pivot axis.
  • the deflection mirror Asxy is articulated to the second spindle S2 via a rotary arm Da and a driver M fastened to the attachment H of the deflection mirror Asxy.
  • the rotary arm Da is a flat rod which is firmly connected to the front end of the second spindle S2 and at an angle of 45 ° to the axis A2 of the second spindle S2 is inclined.
  • a slot Sch which is open toward the front end and whose central plane lies in a plane passing through the axis A2, is introduced into the rotary arm Da.
  • the driver M guided in the slot Sch is formed from a straight prismatic round rod, the diameter of which is only slightly smaller than the width of the slot Sch. Otherwise, the driver M is aligned with the mirror surface of the deflecting mirror Asxy in such a way that its longitudinal axis passes through the common intersection of the axis A1, the axis A2 and the pivot axis.
  • the laser beam Ls to be deflected is oriented such that it strikes the mirror surface of the deflection mirror Asxy in the direction of the axis A2 at the intersection of the axes A1 and A2 and is deflected downward by an angle of 90 ° in the starting position.
  • the driver M moving in the Slit Sch moves without transmitting torque to the spindle S2.
  • the wobble device We 'shown in FIG. 2 with the deflection mirror asxy is constructed in exactly the same way as the deflection device Ae' shown in FIG. 3 with the deflection mirror Asxy, the wobble device We ', however, having a significantly smaller size.
  • FIGS. 4 and 5 show the track and the removal track of the wobbled laser beam Ls when laser-inscribing an object G made of glass with the aid of the device shown in FIG.
  • the laser L shown in FIG. 1 is a pulsed CO 2 laser with an emission wavelength of 10.6 ⁇ m and a total output power of 8 watts.
  • the laser beam Ls generated by this CO, laser is wobbled in the wobble device We in such a way that it describes a circle with a diameter of 1 mm on the surface of the object G, the wobble frequency being 600 Hz. This wobble of the laser beam Ls is then carried out If the deflection device Ae overlaps a writing movement, then a loop curve Sk shown in FIG.
  • This loop curve Sk shown in FIG. 4 expanded in the horizontal writing direction is at the specified wobble frequency of 600 Hz and at a writing speed of 200 mm per second in reality much denser and with so many overlaps that at least the middle areas of the lettering on the surface Of are covered three times within a short time by the laser beam Ls. This multiple strokes is of crucial importance for the quality of the lettering to be created.
  • the removal trace Asp shown in FIG. 5 is formed, which forms the lettering with a line width of 1 mm.
  • the removal trace Asp is formed by a large number of microcracks forming on the surface Of, these microcracks forming a surprisingly sharp edge of the removal trace Asp.
  • the optical appearance of the removal trace Asp shown in FIG. 5 corresponds approximately to the optical appearance of a line etched with the aid of hydrofluoric acid into the surface of an object made of glass.

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  • Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Mechanical Engineering (AREA)
  • Laser Beam Processing (AREA)
  • Cookers (AREA)
  • Massaging Devices (AREA)
  • Table Devices Or Equipment (AREA)
  • Laser Beam Printer (AREA)

Abstract

An apparatus for non-contacting modification of the surface of an article such as for labeling a glass article, characterized by a laser beam, a sweep device for deflecting the laser beam as a swept beam in a given path, a deflection device separate from the sweep device for deflecting the swept beam in a desired path for forming a label on the surface of the article. Due to the separation of the deflection device and sweep device, the sweep device can be constructed as small as possible with a low moment of inertia for the movable parts to enable obtaining significantly higher sweep frequencies. As a result, a high sweep frequency, preferably in amounts of at least 500 Hz, can be obtained and a sharp edge erosion without macroscopic splintering is guaranteed during the labeling of a glass article with the apparatus.

Description

Die Erfindung betrifft eine Einrichtung zum berührungslosen Verändern der Oberfläche eines Gegenstandes, insbesondere zum Beschriften von Glas, mittels eines durch eine Wobbeleinrichtung gewobbelten, durch eine Ablenkeinrichtung ablenkbaren und durch ein Objektiv auf die Oberfläche des Gegenstandes fokussierbaren Laserstrahls.The invention relates to a device for contactlessly changing the surface of an object, in particular for labeling glass, by means of a laser beam which is wobbled by a wobble device, deflectable by a deflection device and focusable on the surface of the object by a lens.

Bei der Laser-Beschriftung von Gegenständen werden Einrichtungen verwendet, bei welchen in den Strahlengang eines von einem Laser erzeugten Laserstrahls nacheinander ein Fotoverschluß, eine entsprechend der Beschriftungsaufgabe durch einen Prozeßrechner oder einen Mikroprozessor steuerbare Ablenkeinrichtung und ein Objektiv angeordnet sind, welches den Laserstrahl auf die Oberfläche eines zu beschriftenden Gegenstandes fokussiert. Mit der Laser-Beschriftung können dann Gegenstände aus Metall, Keramik, Halbleitermaterialien und einer vielzahl von Kunststoffen entsprechend der Beschriftungsaufgabe mit Buchstaben, Ziffern, Markierungen, Firmensymbolen oder grafischen Darstellungen beschriftet werden. Dabei kann die Beschrif-tung in Gravierschrift, in Schmelzschrift, in Verdampfungsschrift oder durch eine Verfärbung der Oberfläche ausgeführt werden. Die Ablenkeinrichtung der bekannten Einrichtung besteht aus einem ersten Ablenkspiegel für die horizontale Ablenkung des Laserstrahls und einem zweiten Ablenkspiegel für die vertikale Ablenkung des Laserstrahls, wobei beide Ablenkspiegel als Galvanometerspiegel ausgebildet sind. Derartige Galvanometerspiegel zeichnen sich durch geringe Trägheitsmomente der beweglichen Teile aus. Die Ablenkeinrichtung erfüllt auch noch gleichzeitig die Aufgabe einer Wobbeleinrichtung, durch welche der Laserstrahl in horizontaler und vertikaler Richtung derart gewobbelt wird, daß er auf der Oberfläche des zu beschriftenden Gegenstandes einen die Strichstärke der Beschriftung bestimmenden Kreis beschreibt Hierzu wird der Spule des Galvanometerspiegels für die horizontale Ablenkung eine Spannung Ux = sin ωt zugeführt, während der Spule des Gaivanometerspiegels für die vertikale Ablenkung eine Spannung Uy = sin (ωt + a) zugeführt wird, wobei, mit M die Wobbelfrequenz, mit t die Zeit und mit α der Winkel der Phasenverschiebung bezeichnet sind. Der Winkel a wird dabei so eingestellt, daß der Laserstrahl auf der Oberfläche des zu beschriftenden Gegenstandes einen Kreis beschreibt Die mit der kombinierten Ablenk- und Wobbeleinrichtung erzielbaren Wobbelfrequenzen liegen maximal bei 120 bis 150 Hz.In the laser marking of objects, devices are used in which a photo shutter, a deflection device which can be controlled according to the marking task by a process computer or a microprocessor and a lens are arranged in the beam path of a laser beam generated by a laser, and a lens which directs the laser beam onto the surface of an object to be labeled. Objects made of metal, ceramics, semiconductor materials and a variety of plastics can then be labeled with letters, numbers, markings, company symbols or graphic representations using the laser inscription. Here, the Desc f i-tung in Gravierschrift, in melting font, font in evaporation or executed by a discoloration of the surface. The deflection device of the known device consists of a first deflection mirror for the horizontal deflection of the laser beam and a second deflection mirror for the vertical deflection of the laser beam, both deflection mirrors being designed as galvanometer mirrors. Such galvanometer mirrors are characterized by low moments of inertia of the moving parts. The deflection device also simultaneously fulfills the task of a wobble device, through which the laser beam is wobbled in the horizontal and vertical directions in such a way that it describes a line determining the line thickness of the lettering on the surface of the object to be labeled A voltage Ux = sin ωt is fed to the deflection, while a voltage Uy = sin (ωt + a) is fed to the coil of the Gaivanometer mirror for the vertical deflection, where, M denotes the wobble frequency, t the time and α the angle of the phase shift are. The angle a is set so that the laser beam describes a circle on the surface of the object to be labeled. The wobble frequencies achievable with the combined deflection and wobble device are a maximum of 120 to 150 Hz.

Bei einem Einsatz der bekannten Einrichtung zum Beschriften, Dekorieren oder Markieren von Glas kommt es im Randbereich des gewobbelten Laserstrahls zu makroskopischen Aussplitterungen, die das optische Erscheinungsbild erheblich beeinträchtigen und ggf. zu Verletzungen führen.When using the known device for labeling, decorating or marking glass, macroscopic splintering occurs in the edge region of the wobbled laser beam, which significantly impair the visual appearance and possibly lead to injuries.

Um auf Gegenstände aus Glas mittels eines Laserstrahls Buchstaben, Ziffern, Markierungen, Eichstriche, Firmensymbole, grafische Darstellungen und Omamente in einer hochwertigen Qualität aufbringen zu können, wurde daher nach anderen Wegen gesucht. Aus der DE-OS 3145278 ist ein Verfahren zum berührungslosen Abtragen von Material von der Oberfläche eines Gegenstandes aus Glas bekannt, bei weichem der Laserstrahl zur Erzielung eines randscharfen Abtrages ohne Absplitterungen durch eine teilweise absorbierende Matrix geführt und in eine Vielzahl von Einzelstrahlen aufgeteilt wird. Hierdurch wird die im Laserstrahl zur Verfügung stehen de Energie im Strahlquerschnitt aufgeteilt, und die Einzelstrahlen können an eine gewünschte Abtragung angepaßt werden, zwischen dem Laser und dem Werkstück muß jedoch eine Maske angeordnet werden, welche die Form der Beschriftung, Markierung usw. bestimmt. Die hohe Flexibilität von Einrichtungen mit einem entsprechend der Beschriftungsaufgabe steuerbaren Laserstrahl kann daher nicht erreicht werden.In order to be able to apply letters, numbers, markings, calibration lines, company symbols, graphic representations and omaments in high quality to objects made of glass using a laser beam, other ways were therefore sought. From DE-OS 3145278 a method for the contactless removal of material from the surface of an object made of glass is known, in which the laser beam is guided through a partially absorbing matrix to achieve a sharp removal without splintering and split into a plurality of individual beams. As a result, the energy available in the laser beam is divided into the beam cross section, and the individual beams can be adapted to a desired ablation, but a mask must be arranged between the laser and the workpiece, which determines the shape of the lettering, marking, etc. The high flexibility of facilities with a laser beam that can be controlled according to the labeling task can therefore not be achieved.

Der Erfindung liegt die Aufgabe zugrunde, eine gattungsgemäße Einrichtung zum berührungslosen Verändern der Oberfläche eines Gegenstandes so verbessem, daß auch auf Gegenstände aus Glas Buchstaben, Ziffern, Markierungen, Eichstriche, Firmensymbole, grafische Darstellungen und Omamente in einer hochwertigen Qualität aufgebracht werden können.The invention has for its object to improve a generic device for contactless changing the surface of an object so that letters, numbers, markings, calibration marks, company symbols, graphic representations and omaments can be applied to objects made of glass in a high quality.

Diese Aufgabe wird erfindungsgemäß durch eine von der Ablenkeinrichtung getrennte und im Strahlengang des Laserstrahls vor der Ablenkeinrichtung angeordnete Wobbeleinrichtung gelöst.This object is achieved according to the invention by a wobble device which is separate from the deflection device and is arranged in the beam path of the laser beam in front of the deflection device.

Der Erfindung liegt die Erkenntnis zugrunde, daß beim berührungslosen Verändern der Oberfläche eines Gegenstandes aus Glas makroskopische Aussplitterungen im Randbereich nur durch eine Erhöhung der Wobbeffrequenzen vermieden werden können. Da in der Ablenkeinrichtung zur Erzielung der erforderlichen Ablenkwinkel des Laserstrahls Ablenkspiegel mit einer gewissen Mindestgröße eingesetzt werden müssen, sind die Trägheitsmomente der beweglichen Teile so groß, daß mit den bisher verwendeten kombinierten Ablenk- und Wobbeleinrichtungen die für Gegenstände aus Glas erforderlichen Erhöhungen der Wobbelfrequenzen nicht erreicht werden können. Durch die Verwendung von separaten Wobbeleinrichtungen, die nur sehr kleine Ablenkwinkel erfordern, können die Ablenk spiegel und deren Antriebe jedoch so stark verkleinert werden, daß durch die entsprechende Reduzierung der Trägheitsmomente der beweglichen Teile wesentlich höhere Wobbelfrequenzen realisiert werden können und insbesondere auch ein Resonanzbetrieb ermöglicht wird. Diese bauliche Trennung von Wobbeleinrichtung und Ablenkeinrichtung führt dann aber auch bei Gegenständen aus anderen Materialien als Glas zu erheblichen Vorteilen. So kann durch die Erhöhung der Wobbelfrequenzen beispielsweise bei der Beschriftung von Gegenständen aus Kunststoffen eine solche Dichte und eine solche Überlappung der resultierenden Schleifenkurve erzielt werden, die eine Steigerung der Beschriftungsgeschwindigkeit und zugleich eine Realisierung größerer Strichstärken ermöglicht.The invention is based on the finding that when the surface of an object made of glass is changed without contact, macroscopic splintering in the edge region can only be avoided by increasing the weaving frequencies. Since deflection mirrors with a certain minimum size must be used in the deflection device in order to achieve the required deflection angle of the laser beam, the moments of inertia of the moving parts are so great that the increases in the sweeping frequencies required for glass objects are not achieved with the combined deflection and wobble devices used to date can be. By using separate wobble devices that only require very small deflection angles, the deflection mirrors and their drives can, however, be reduced so much that significantly higher wobble frequencies can be realized by the corresponding reduction in the moments of inertia of the moving parts and, in particular, resonance operation is made possible . However, this structural separation of the wobble device and the deflection device also leads to considerable advantages in the case of objects made of materials other than glass. By increasing the wobble frequencies, for example when inscribing objects made of plastics, such a density and such an overlap of the resulting loop curve can be achieved that an increase in the inscription speed and at the same time a realization of larger line widths can be achieved.

Die Wobbeleinrichtung kann aus zwei nacheinander in den Strahlengang des Laserstrahls eingefügten und in verschiedenen Richtungen mit verschiedenen Wobbelfrequenzen drehbaren Ablenkspiegel bestehen. Diese Wobbeleinrichtung entspricht damit einer verkleinerten Ausführungsform der üblichen Ablenkeinrichtungen.The wobble device can consist of two deflecting mirrors inserted one after the other into the beam path of the laser beam and rotatable in different directions with different wobble frequencies. This wobble device thus corresponds to a reduced embodiment of the usual deflection devices.

Die Wobbeleinrichtung kann aber auch aus einem einzigen, unabhängig voneinander in zwei verschiedenen Richtungen mit verschiedenen Wobbelfrequenzen drehbaren Ablenkspiegel bestehen. Ein zweiter Ablenkspiegel kann hier also entfallen.However, the wobble device can also consist of a single deflecting mirror which can be rotated independently of one another in two different directions with different wobble frequencies. A second deflection mirror can therefore be omitted here.

Gemäß einer bevorzugten Ausgestaltung der Erfindung sind die Wobbelfrequenzen auf mindestens 500 Hz einstellbar. Derartige Wobbelfrequenzen von mindestens 500 Hz ermöglichen eine qualitativ äußerst hochwertige Laser-Beschriftung von Gegenständen aus Glas oder vergleichbar spröden Materialien.According to a preferred embodiment of the invention, the wobble frequencies can be set to at least 500 Hz. Such sweeping frequencies of at least 500 Hz enable extremely high-quality laser marking of objects made of glass or comparable brittle materials.

Vorzugsweise ist die Wobbeleinrichtung derart einstellbar, daß der Laserstrahl auf der Oberfläche des Gegenstandes einen Kreis beschreibt. Diese Kreisform ermöglicht gleich mäßige Strichstärken in sämtlichen Richtungen. Bei der Laser-Beschriftung von Gegenständen aus Glas wird der Durchmesser des Kreises vorzugsweise auf mindestens 0,5 mm eingestellt Für eine gute Lesbarkeit der Laser-Beschriftung hat es sich als sehr günstig herausgestellt, wenn der Durchmesser des Kreises auf ca. 1 mm eingestellt wird.The wobble device is preferably adjustable such that the laser beam describes a circle on the surface of the object. This circular shape enables uniform line widths in all directions. When laser marking objects made of glass, the diameter of the circle is preferably at least 0.5 mm set For good legibility of the laser marking, it has proven to be very favorable if the diameter of the circle is set to approx. 1 mm.

Im folgenden werden Ausführungsbeispiele der Erfindung anhand der Zeichnung näher erläutert. Es zeigen:

  • Figur 1 eine erste Einrichtung zur Laser-Beschriftung in stark vereinfachter schematischer Darstellung,
  • Figur 2 eine zweite Einrichtung zur Laser-Beschriftung in stark vereinfachter schematischer Darstellung,
  • Figur 3 die konstruktive Ausführung der in Figur 2 dargestellten Ablenkeinrichtung,
  • Figur 4 die Spur des gewobbelten Laserstrahls auf der Oberfläche eines zu beschriftenden Gegenstandes und
  • Figur 5 die Abtragsspur des Laserstrahls auf der Oberfläche eines Gegenstandes aus Glas.
Exemplary embodiments of the invention are explained in more detail below with reference to the drawing. Show it:
  • FIG. 1 shows a first device for laser marking in a highly simplified schematic representation,
  • FIG. 2 shows a second device for laser marking in a highly simplified schematic representation,
  • FIG. 3 shows the structural design of the deflection device shown in FIG. 2,
  • Figure 4 shows the trace of the wobbled laser beam on the surface of an object to be labeled and
  • Figure 5 shows the removal trace of the laser beam on the surface of an object made of glass.

Figur 1 zeigt in stark vereinfachter schematischer Darstellung eine Einrichtung zur Laser-Beschriftung eines auf einer Arbeitsfläche Af angeordneten Gegenstandes G. Diese Einrichtung umfaßt einen Laser L, welcher einen Laserstrahl Ls erzeugt, in dessen Strahlengang aufeinanderfolgend ein Fotoverschluß Fv, eine Wobbeleinrichtung We, eine Ablenkeinrichtung Ae und ein Objektiv 0 angeordnet sind, welches den Laserstrahl Ls auf die Oberfläche des zu beschriftenden Gegenstandes G fokussiert Die Lage des Gegenstandes G auf der Arbeitsfläche Af ist dabei in bezug auf ein ebenes, kartesisches x, y-Koordinatensystem festgelegt.Figure 1 shows a highly simplified schematic representation of a device for laser inscription of an object G arranged on a work surface Af. This device comprises a laser L which generates a laser beam Ls, in the beam path of which successively a photo shutter Fv, a wobble device We, a deflection device Ae and a lens 0 are arranged, which focuses the laser beam Ls on the surface of the object G to be labeled. The position of the object G on the working surface Af is fixed in relation to a flat, Cartesian x, y coordinate system.

Die Wobbeleinrichtung We hat die Aufgabe, den Laserstrahl Ls in der horizontalen Richtung x und in der vertikalen Richtung y mit vorgebbaren Amplituden periodisch so auszulenken, daß er auf der Oberfläche des Gegenstandes G einen Kreis beschreibt, dessen Durchmesser die Strichstärke der Beschriftung bestimmt Dementsprechend besteht die Wobbeleinrichtung We aus zwei nacheinander in den Strahlengang des Laserstrahls Ls eingefügten drehbaren Ablenkspiegeln asx und asy, wobei der Ablenkspiegel asx zur Auslenkung des Laserstrahls Ls in der x-Richtung in Richtung des Doppelpfeiles x' drehbar ist, während der Ablenkspiegel asy zur Auslenkung des Laserstrahls Ls in der x-Richtung in Richtung des Doppelpfeiles y' drehbar ist. Bei den beiden Ablenkspiegeln asx und asy handelt es sich um extrem kleine Galvanometerspiegel, die eine Wobbelung des Laserstrahis mit Wobbelfrequenzen ω von mindestens 500 Hz erlauben. Hierzu wird der Spule des Ablenkspiegels asx eine Wechselspannung Ux = sinωt zugeführt, während der Spule des Ablenkspiegels asy eine dazu um den Winkel α phasenverschobene Wechselspannung Uy-sin(ωt + a) zugeführt wird. Der Winkel a wird mit Hilfe eines Potentiometers so eingestellt, daß der Laserstrahl Ls auf der Oberfläche des Gegenstandes G einen Kreis beschreibt, wobei die hierzu erforderliche Größe des Winkels α zur Kompensation von Verzeichnungen nicht genau 90° beträgtThe wobble device We has the task of periodically deflecting the laser beam Ls in the horizontal direction x and in the vertical direction y with predeterminable amplitudes so that it describes a circle on the surface of the object G, the diameter of which determines the line width of the lettering Wobble device We consists of two rotatable deflecting mirrors asx and asy inserted one after the other into the beam path of the laser beam Ls, the deflecting mirror asx being rotatable in the x direction in the x direction for deflecting the laser beam Ls, while the deflecting mirror asy for deflecting the laser beam Ls is rotatable in the x direction in the direction of the double arrow y '. The two deflection mirrors asx and asy are extremely small galvanometer mirrors that allow the laser beam to be wobbled with wobble frequencies ω of at least 500 Hz. For this purpose, the coil of the deflection mirror asx is supplied with an alternating voltage Ux = sinωt, while the coil of the deflection mirror asy is supplied with an alternating voltage Uy-sin (ωt + a) that is phase-shifted by the angle α. The angle a is adjusted with the aid of a potentiometer so that the laser beam Ls describes a circle on the surface of the object G, the size of the angle α required for this to compensate for distortions not being exactly 90 °

Die Ablenkeinrichtung Ae hat die Aufgabe, den gewobbelten Laserstrahl Ls in der horizontalen Richtung x und in der vertikalen Richtung y abzulenken, wobei jedoch wesentlich größere Ablenkwinkel als bei der Wobbeleinrichtung We gefordert werden. Dementsprechend besteht die Ablenkeinrichtung Ae aus zwei nacheinander in den Strahlengang des ge wobbelten Laserstrahls Ls eingefügten Ablenkspiegeln Asx und Asy, wobei der Ablenkspiegel Asx zur Ablenkung des gewobbelten Laserstrahls Ls in der x-Richtung in Richtung des Doppelpfeiles x" drehbar ist, während der Ablenkspiegel Asy zur Ablenkung des gewobbelten Laserstrahls Ls in der y-Richtung in Richtung des Doppelpfeiles y' drehbar ist Bei den beiden Ablenkspiegeln Asx und Asy handelt es sich um Galvanometerspiegel, deren Größe der erforderlichen Ablenkwinkeln angepaßt ist. Die Steuerung der Ablenkspiegel Asx und Asy entsprechend der jeweiligen Beschriftungsaufgabe erfolgt beispielsweise durch einen Prozeßrechner oder durch einen Mikroprozessor.The deflecting device Ae has the task of deflecting the wobbled laser beam Ls in the horizontal direction x and in the vertical direction y, whereby, however, substantially larger deflection angles than with the wobble device We are required. Accordingly, the deflection device Ae consists of two deflecting mirrors Asx and Asy inserted one after the other into the beam path of the wobbled laser beam Ls, the deflecting mirror Asx being rotatable in the x direction in the direction of the double arrow x "for deflecting the wobbled laser beam Ls, while the deflecting mirror Asy for deflecting the swept laser beam Ls in the y direction in the direction of the double arrow y ', the two deflecting mirrors Asx and Asy are galvanometer mirrors, the size of which is adapted to the required deflecting angles. The control of the deflecting mirrors Asx and Asy according to the respective Labeling is done, for example, by a process computer or by a microprocessor.

Figur 2 zeigt in stark vereinfachter schematischer Darstellung eine Einrichtung zur Laser-Beschriftung, die sich von der in Figur 1 dargestellten Einrichtung nur durch die anderen Ausgestaltungen der mit We' bezeichneten Wobbeleinrichtung und der mit Ae' bezeichneten Ablenkeinrichtung unterscheidet Die Wobbeleinrichtung We' besteht aus einem einzigen Ablenkspiegel asxy, der zur Auslenkung des Laserstrahls Ls in der x-Richtung in Richtung des Doppelpfeiles x' und unabhängig davon zur Auslenkung des Laserstrahls Ls in der y-Richtung in Richtung des Doppelpfeiles y' drehbar ist. Die Wobbelung des Laserstrahls Ls erfolgt über entsprechende Galvanometerantriebe des Ablenkspiegels asxy auf die bereits im Zusammenhang mit Figur 1 beschriebene Weise. Auch die Ablenkeinrichtung Ae' besteht aus einem einzigen Ablenkspiegel Asxy, der zur Ablenkung des gewobbelten Laserstrahls Ls in der x-Richtung in Richtung des Doppelpfeiles x" und unabhängig davon zur Auslenkung des gewobbelten Laserstrahls Ls in der y-Richtung in Richtung des Doppelpfeiles y' drehbar ist. Die Ablenkung des gewobbelten Laserstrahls Ls erfolgt über entsprechende Galvanometerantriebe des Ablenkspiegels Asxy, die entsprechend der jeweiligen Be schriftungsaufgabe beispielsweise durch einen Prozeßrechner oder einen Mikroprozessor steuerbar sind. Die konstruktive Ausgestaltung der Ablenkeinrichtung Ae' mit dem Ablenkspiegel Asxy geht aus Figur 3 hervor. Dort ist zu erkennen, daß eine als Hohlwellenstummel ausgebildete erste drehbare Spindel S1 eine Gabel Ga trägt, in welcher eine Halterung H über Drehzapfen Dz drehbar gelagert ist. Auf die Halterung H ist der kreisförmige Abtenkspiegel Asxy mit seiner Rückseite aufgeklebt Die Gabel G und die Hatterung H mit den beiden Drehzapfen Dz bilden ein Gabelgelenk, welches so ausgebildet ist, daß die Achse A1 der ersten Spindel S1 und die nicht näher dargestellte Drehzapfenachse senkrecht aufeinanderstehen.Figure 2 shows a highly simplified schematic representation of a device for laser marking, which differs from the device shown in Figure 1 only in the other configurations of the wobble device designated We 'and the deflection device designated Ae'. The wobble device We 'consists of a single deflection mirror asxy, which can be rotated in the direction of the double arrow x 'for deflecting the laser beam Ls in the x direction and independently of it for deflecting the laser beam Ls in the direction of the double arrow y' in the y direction. The wobble of the laser beam Ls takes place via corresponding galvanometer drives of the deflection mirror asxy in the manner already described in connection with FIG. 1. The deflection device Ae 'also consists of a single deflection mirror Asxy, which is used for deflecting the swept laser beam Ls in the x direction in the direction of the double arrow x "and independently thereof for deflecting the swept laser beam Ls in the y direction in the direction of the double arrow y'. Deflection of the swept laser beam Ls takes place via corresponding galvanometer drives of the deflection mirror Asxy, which can be controlled according to the respective labeling task, for example by a process computer or a microprocessor. The structural design of the deflection device Ae 'with the deflection mirror Asxy is shown in FIG. It can be seen there that a first rotatable spindle S1 designed as a hollow shaft stub carries a fork Ga in which a holder H is rotatably mounted via pivot Dz. The circular deflecting mirror Asxy is glued to the holder H with its rear side The fork G and the mount H with the two dre Hzappen Dz form a fork joint, which is designed so that the axis A1 of the first spindle S1 and the pivot axis, not shown, are perpendicular to each other.

Eine ebenfalls als Hohlwellenstummel ausgebildete zweite drehbare Spindel S2 ist so ausgerichtet, daß ihre Achse A2 senkrecht auf der Achse A1 steht und genau durch den Schnittpunkt der Achse A1 und der Drehzapfenachse geht Die Anlenkung des Ablenkspiegels Asxy an die zweite Spindel S2 erfolgt über einen Dreharm Da und einen an der Hafterung H des Ablenkspiegels Asxy befestigten Mitnehmer M. Bei dem Dreharm Da handelt es sich um einen Flachstab, der mit dem vorderen Ende der zweiten Spindel S2 fest verbunden ist und um einen Winkel von 45° zur Achse A2 der zweiten Spindel S2 geneigt ist. In den Dreharm Da ist ein zum vordem Ende hin offener Schlitz Sch eingebracht, dessen Mittelebene in einer durch die Achse A2 gehenden Ebene liegt. Der in dem Schlitz Sch geführte Mitnehmer M ist aus einem geraden prismatischen Rundstab gebildet, dessen Durchmesser nur geringfügig kleiner ist als die Breite des Schlitzes Sch. Im übrigen ist der Mitnehmer M zur Spiegelfläche des Ablenkspiegels Asxy derart ausgerichtet, daß seine Längsachse durch den gemeinsamen Schnittpunkt der Achse A1, der Achse A2 und der Drehzapfenachse geht.A second rotatable spindle S2, also designed as a hollow shaft stub, is aligned so that its axis A2 is perpendicular to the axis A1 and goes exactly through the intersection of the axis A1 and the pivot axis. The deflection mirror Asxy is articulated to the second spindle S2 via a rotary arm Da and a driver M fastened to the attachment H of the deflection mirror Asxy. The rotary arm Da is a flat rod which is firmly connected to the front end of the second spindle S2 and at an angle of 45 ° to the axis A2 of the second spindle S2 is inclined. A slot Sch, which is open toward the front end and whose central plane lies in a plane passing through the axis A2, is introduced into the rotary arm Da. The driver M guided in the slot Sch is formed from a straight prismatic round rod, the diameter of which is only slightly smaller than the width of the slot Sch. Otherwise, the driver M is aligned with the mirror surface of the deflecting mirror Asxy in such a way that its longitudinal axis passes through the common intersection of the axis A1, the axis A2 and the pivot axis.

Der abzulenkende Laserstrahl Ls ist so ausgerichtet, daß er in Richtung der Achse A2 im Schnittpunkt der Achsen A1 und A2 auf die Spiegelfläche des Ablenkspiegels Asxy auftrifft und in der Ausgangsstellung um einen Winkel von 90° nach unten abgelenkt wird. Bei einer Verdrehung der ersten Spindel S1 in Richtung des Doppelpfeiles x" ergibt sich eine entsprechende Ablenkung in y-Richtung (vgl. Figur 2), wobei sich der Mitnehmer M in dem Schlitz Sch bewegt, ohne auf die Spindel S2 ein Drehmoment zu übertragen. Bei einer Verdrehung der zweiten Spindel S2 in Richtung des Doppelpfeiles x" ergibt sich über den Dreharm Da und den Mitnehmer M eine Drehung der Ablenkspiegels Asxy um die Drehzapfenachse mit einer entsprechenden Auslenkung des Laserstrahls Ls in der x-Richtung (vgl. Figur 2), wobei auch bei diesem Vorgang kein Drehmoment auf die Spindel S1 übertragen wird. Eine gleichzeitige Verdrehung der Spindeln S1 und S2 führt zu entsprechenden x-, y-Kurven in der Ebene der Arbeitsfläche Af (vgl. Figur 2). Die gesteuerte Drehung der Spindeln S1 und S2 erfolgt dabei über in Figur 3 nicht dargestellte Galvanometerantriebe.The laser beam Ls to be deflected is oriented such that it strikes the mirror surface of the deflection mirror Asxy in the direction of the axis A2 at the intersection of the axes A1 and A2 and is deflected downward by an angle of 90 ° in the starting position. When the first spindle S1 is rotated in the direction of the double arrow x ", there is a corresponding deflection in the y direction (cf. FIG. 2), the driver M moving in the Slit Sch moves without transmitting torque to the spindle S2. When the second spindle S2 is rotated in the direction of the double arrow x ", the deflection mirror Asxy is rotated about the pivot axis with a corresponding deflection of the laser beam Ls in the x direction (see FIG. 2) via the pivot arm Da and the driver M. whereby no torque is transmitted to the spindle S1 in this process either: simultaneous rotation of the spindles S1 and S2 leads to corresponding x, y curves in the plane of the working surface Af (cf. FIG. 2). The controlled rotation of the spindles S1 and S2 takes place via galvanometer drives, not shown in FIG. 3.

Die in Figur 2 dargestellte Wobbeleinrichtung We' mit dem Ablenkspiegel asxy ist konstruktiv genau so ausgebildet, wie die in Figur 3 dargestellte Ablenkeinrichtung Ae' mit dem Ablenkspiegel Asxy, wobei die Wobbeleinrichtung We' jedoch eine wesentlich kleinere Baugröße aufweist.The wobble device We 'shown in FIG. 2 with the deflection mirror asxy is constructed in exactly the same way as the deflection device Ae' shown in FIG. 3 with the deflection mirror Asxy, the wobble device We ', however, having a significantly smaller size.

Die Figuren 4 und 5 zeigen die Spur und die Abtragsspur des gewobbetten Laserstrahls Ls bei der Laser-Beschriftung eines Gegenstandes G aus Glas mit Hilfe der in Figur 1 dargestellten Einrichtung. Bei dem in Figur 1 dargestellten Laser L handelt es sich um einen gepulsten CO2-Laser mit einer Emissionswellenlänge von 10,6 um und einer Gesamtausgangsleistung von 8 Watt. Der von diesem CO,-Laser erzeugte Laserstrahl Ls wird in der Wobbeleinrichtung We derart gewobbelt, daß er auf der Oberfläche des Gegenstandes G einen Kreis mit einem Durchmesser von 1 mm beschreibt, wobei die Wobbelfrequenz 600 Hz beträgt Wird dieser Wobbelung des Laserstrahls Ls dann durch die Ablenkeinrichtung Ae eine Schreibbewegung überlagert, so entsteht auf der Oberfläche Of des Gegenstandes G als Spur des Laserstrahls Ls eine in Figur 4 dargestellte Schleifenkurve Sk. Diese in Figur 4 in der horizontalen Schreibrichtung auseinandergezogen dargestellte Schleifenkurve Sk ist bei der angegebenen Wobbelfrequenz von 600 Hz und bei einer Schreibgeschwindigkeit von 200 mm pro Sekunde in Wirklichkeit wesentlich dichter und mit so vielen Überlappungen ausgebildet, daß zumindest die mittleren Bereiche des Schriftzuges auf der Oberfläche Of vom Laserstrahl Ls innerhalb kurzer Zeit dreifach überstrichen werden. Dabei ist diese mehrfache Überstreichung von entscheidender Bedeutung für die Qualität des zu erzeugenden Schriftzuges. Durch die Einwirkung des Laserstrahls Ls auf die Oberfläche Of entsteht dann die in Figur 5 dargestellte Abtragsspur Asp, welche den Schriftzug mit einer Strichstärke von 1 mm bildet. Wie zu erkennen ist, wird die Abtragsspur Asp dadurch gebildet, daß auf der Oberfläche Of eine Vielzahl von Mikrorissen entstehen, wobei diese Mikrorisse einen überraschend scharfen Rand der Abtragsspur Asp bilden. Das optische Erscheinungsbild der in Figur 5 dargestellten Abtragsspur Asp entspricht etwa dem optischen Erscheinungsbild eines mit Hilfe von Flußsäure in die Oberfläche eines Gegenstandes aus Glas geätzten Striches.FIGS. 4 and 5 show the track and the removal track of the wobbled laser beam Ls when laser-inscribing an object G made of glass with the aid of the device shown in FIG. The laser L shown in FIG. 1 is a pulsed CO 2 laser with an emission wavelength of 10.6 μm and a total output power of 8 watts. The laser beam Ls generated by this CO, laser is wobbled in the wobble device We in such a way that it describes a circle with a diameter of 1 mm on the surface of the object G, the wobble frequency being 600 Hz. This wobble of the laser beam Ls is then carried out If the deflection device Ae overlaps a writing movement, then a loop curve Sk shown in FIG. 4 is formed on the surface Of of the object G as a trace of the laser beam Ls. This loop curve Sk shown in FIG. 4 expanded in the horizontal writing direction is at the specified wobble frequency of 600 Hz and at a writing speed of 200 mm per second in reality much denser and with so many overlaps that at least the middle areas of the lettering on the surface Of are covered three times within a short time by the laser beam Ls. This multiple strokes is of crucial importance for the quality of the lettering to be created. Through the action of the laser beam Ls on the surface Of, the removal trace Asp shown in FIG. 5 is formed, which forms the lettering with a line width of 1 mm. As can be seen, the removal trace Asp is formed by a large number of microcracks forming on the surface Of, these microcracks forming a surprisingly sharp edge of the removal trace Asp. The optical appearance of the removal trace Asp shown in FIG. 5 corresponds approximately to the optical appearance of a line etched with the aid of hydrofluoric acid into the surface of an object made of glass.

Claims (7)

1. Einrichtung zum berührungslosen Verändern der Oberfläche eines Gegenstandes, insbesondere zum Beschrif-ten von Glas, mittels eines durch eine Wobbeleinrichtung gewobbelten, durch eine Ablenkeinrichtung ablenkbaren und durch ein Objektiv auf die Oberfläche des Gegenstandes fokussierbaren Laserstrahls, gekennzeichnet durch eine von der Ablenkeinrichtung (Ae; Ae') getrennte und im Strahlengang des Laserstrahls (Ls) vor der Ablenkeinrichtung (Ae; Ae') angeordnete Wobbeieinrichtung (We; We').Wobbled 1. A device for the contactless modifying the surface of an object, in particular for Desc i f th of glass, by means of a by a sweep means, deflectable by a deflection device and a lens on the surface of the object focusable laser beam, characterized by the deflector (Ae; Ae ') separate and arranged in the beam path of the laser beam (Ls) in front of the deflection device (Ae; Ae') Wobbeieinrichtung (We; We '). 2. Einrichtung nach Anspruch 1, dadurch gekennzeichnet, daß die Wobbeleinrichtung (We) aus zwei nacheinander in den Strahlengang des Laserstrahls (Ls) eingefügten und in verschiedenen Richtungen (x', y') mit verschiedenen Wobbelfrequenzen drehbaren Ablenkspiegeln (Asx, Asy) besteht.2. Device according to claim 1, characterized in that the wobble device (We) consists of two successively inserted into the beam path of the laser beam (Ls) and in different directions (x ', y') with different wobble frequencies rotatable deflecting mirrors (Asx, Asy) . 3. Einrichtung nach Anspruch 1, dadurch gekennzeichnet, daß die Wobbeleinrichtung (We') aus einemeinzigen, unabhängig voneinander in zwei verschiedenen Richtungen (x', y') mit verschiedenen Wobbelfrequenzen drehbaren Ablenkspiegel (Asxy) besteht3. Device according to claim 1, characterized in that the wobble device (We ') consists of a single deflecting mirror (Asxy) which can be rotated independently of one another in two different directions (x', y ') with different wobble frequencies 4. Einrichtung nach Anspruch 2 oder 3, dadurch gekennzeichnet, daß die Wobbelfrequenzen auf mindestens 500 Hz einstellbar sind. 4th Device according to claim 2 or 3, characterized in that the wobble frequencies can be set to at least 500 Hz. 5. Einrichtung nach einem der vorhergehenden Ansprüche, dadurch gekennzeichnet, daß die Wobbeleinrichtung (We; We') derart einstellbar ist, daß der Laserstrahl (Ls) auf der Oberfläche des Gegenstandes (G) einen Kreis beschreibt5. Device according to one of the preceding claims, characterized in that the wobble device (We; We ') is adjustable such that the laser beam (Ls) on the surface of the object (G) describes a circle 6. Einrichtung nach Anspruch 5, dadurch gekennzeichnet, daß der Durchmesser des Kreises auf mindestens 0,5 mm einstellbar ist6. Device according to claim 5, characterized in that the diameter of the circle is adjustable to at least 0.5 mm 7. Einrichtung nach Anspruch 6, dadurch gekennzeichnet, daß der Durchmesser des Kreises auf ca. 1 mm einstellbar ist.7. Device according to claim 6, characterized in that the diameter of the circle is adjustable to approximately 1 mm.
EP85111812A 1984-09-25 1985-09-18 Appliance for the contactless changing of the surfaces of objects Expired EP0176872B1 (en)

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Cited By (18)

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EP0495647A1 (en) * 1991-01-17 1992-07-22 United Distillers Plc Dynamic laser marking
WO1992012820A1 (en) * 1991-01-17 1992-08-06 United Distillers Plc Dynamic laser marking
US5653900A (en) * 1991-01-17 1997-08-05 United Distillers Plc Dynamic laser marking
EP0661127A1 (en) * 1993-12-28 1995-07-05 Toyota Jidosha Kabushiki Kaisha Method and system for processing workpiece with laser beam, with oscillation of beam spot on the workpiece and beam oscillating apparatus
US5571430A (en) * 1993-12-28 1996-11-05 Toyota Jidosha Kabushiki Kaisha Method and system for processing workpiece with laser seam, with oscillation of beam spot on the workpeiece and beam oscillating apparatus
EP0872303A2 (en) * 1997-04-14 1998-10-21 Schott Glas Process and apparatus for splitting flat pieces of brittle material, particularly of glass
EP0872303A3 (en) * 1997-04-14 1999-12-01 Schott Glas Process and apparatus for splitting flat pieces of brittle material, particularly of glass
US6112967A (en) * 1997-04-14 2000-09-05 Schott Glas Method and apparatus for cutting through a flat workpiece made of brittle material, especially glass
US6791592B2 (en) 2000-04-18 2004-09-14 Laserink Printing a code on a product
US6829000B2 (en) 2000-04-18 2004-12-07 Laserink Printing a code on a product
EP2412342A1 (en) * 2010-07-29 2012-02-01 SIE AG, Surgical Instrument Engineering Device for machining eye tissue using femtosecond laser pulses
EP2412341A1 (en) * 2010-07-29 2012-02-01 SIE AG, Surgical Instrument Engineering Device for machining eye tissue using femtosecond laser pulses
US8746881B2 (en) 2010-07-29 2014-06-10 Sie Ag, Surgical Instrument Engineering Device for processing eye tissue by a means of femtosecond laser pulses
US9017315B2 (en) 2010-07-29 2015-04-28 Sie Ag, Surgical Instrument Engineering Device for processing eye tissue by means of femtosecond laser pulses
EP2921146A1 (en) * 2010-07-29 2015-09-23 SIE AG, Surgical Instrument Engineering Device for processing eye tissue using femtosecond laser pulses
DE102013110523A1 (en) * 2013-09-24 2015-03-26 Scansonic Mi Gmbh Apparatus and method for joining workpieces by means of a laser beam
DE102013110523B4 (en) * 2013-09-24 2016-08-18 Scansonic Mi Gmbh Apparatus and method for joining workpieces by means of a laser beam
US10583668B2 (en) 2018-08-07 2020-03-10 Markem-Imaje Corporation Symbol grouping and striping for wide field matrix laser marking

Also Published As

Publication number Publication date
EP0176872B1 (en) 1989-06-14
ATE43982T1 (en) 1989-06-15
US4725709A (en) 1988-02-16
DE3570995D1 (en) 1989-07-20
JPS6178587A (en) 1986-04-22

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