EP0110534B1 - Monolithische Tintenstrahldüsenöffnungsplatten/Widerstandskombination - Google Patents

Monolithische Tintenstrahldüsenöffnungsplatten/Widerstandskombination Download PDF

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Publication number
EP0110534B1
EP0110534B1 EP19830306269 EP83306269A EP0110534B1 EP 0110534 B1 EP0110534 B1 EP 0110534B1 EP 19830306269 EP19830306269 EP 19830306269 EP 83306269 A EP83306269 A EP 83306269A EP 0110534 B1 EP0110534 B1 EP 0110534B1
Authority
EP
European Patent Office
Prior art keywords
orifice plate
orifice
resistor
ink
resistors
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
EP19830306269
Other languages
English (en)
French (fr)
Other versions
EP0110534A2 (de
EP0110534A3 (en
Inventor
Frank L. Cloutier
Robert N. Low
Paul H. Mcclelland
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
HP Inc
Original Assignee
Hewlett Packard Co
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hewlett Packard Co filed Critical Hewlett Packard Co
Publication of EP0110534A2 publication Critical patent/EP0110534A2/de
Publication of EP0110534A3 publication Critical patent/EP0110534A3/en
Application granted granted Critical
Publication of EP0110534B1 publication Critical patent/EP0110534B1/de
Expired legal-status Critical Current

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Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/14—Structure thereof only for on-demand ink jet heads
    • B41J2/1433—Structure of nozzle plates
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/14—Structure thereof only for on-demand ink jet heads
    • B41J2/14016—Structure of bubble jet print heads
    • B41J2/14032—Structure of the pressure chamber
    • B41J2/1404—Geometrical characteristics
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/14—Structure thereof only for on-demand ink jet heads
    • B41J2002/1437—Back shooter

Definitions

  • This invention relates to a new type of orifice plate/resistor combination for use in bubble-driven ink jet print heads and a method of manufacture.
  • the background with regard to bubble-driven ink jet printing comprises U.K. patent application serial No. 8217720 and U.S. patent nos. 4,243,994; 4,296,421; 4,251,824; 4,313,124; 4,325,735; 4,330,787; 4,334,234; 4,335,389; 4,336,548; 4,338,611; 4,339,762; and 4,345,262.
  • the basic concept there disclosed is a device having an ink-containing capillary, an orifice plate with an orifice for ejecting ink, and an ink heating mechanism, generally a resistor, in close proximity to the orifice.
  • the ink heating mechanism is quickly heated, transferring a significant amount of energy to the ink, thereby vaporizing a small portion of the ink and producing a bubble in the capillary. This in turn creates a pressure wave which propels an ink droplet or droplets from the orifice onto a closeby writing surface.
  • the bubble quickly collapses before any ink vapor can escape from the orifice.
  • the construction of the devices is typically of multiple part structures.
  • a substance is provided on which resistors and conductors are deposited. Then, a separate orifice plate is attached to the substrate, with meticulous attention being paid to ensure accurate alignment of the various parts.
  • the orifices extend within the thickness of the orifice plate in direction parallel to the surface thereof.
  • the orifices open to a side edge of the orifice plate.
  • the critical distance between the resistor and the opening is established by cutting the tip end part of the orifice plate, which will create debris at the cutting area. This may result in misfunction of the orifice.
  • a problem underlying the invention is to provide a method of making a bubble-driven thermal ink jet print head in which the method steps and their sequence are chosen such that the making of the print heads is simplified in particular with respect to the critical alignment of the distance between the orifice openings and the resistors. This problem is accomplished by the features of claim 1.
  • a monolithic orifice plate/resistor combination for which the active elements can be easily aligned using standard mask aligning equipment.
  • an orifice plate is formed, typically a flat sheet with orifices therein.
  • a passivation layer is then grown on the sheet, and the resistors and conductors to supply them are deposited onto the passivation layer using standard IC techniques.
  • a spacer may then be attached to the passivation layer to define capillary channels for ink flow and to provide increased hydraulic impedance between resistors, thus completing the structure for the monolithic orifice plate/ resistor combination.
  • a completed print head is then made by attaching a sheet of material to the spacer to supply a back to the device and to form the closure for the capillary channels defined by the spacers.
  • FIG. 1 shown in Figure 1 is an orifice/ resistor combination having monolithic resistors 13 and 15, conductors 17, 19, and 21 and orifice 23 and 25 for use in constructing a bubble-driven ink jet printer.
  • the present invention begins with an orifice plate, and the resistors and conductors are formed thereon.
  • Figure 2 illustrates an early stage in the construction of the orifice/ resistor combination 11, the view being the cross-section A-A of Figure 1.
  • the construction typically begins with an orifice plate 27 made of a metal which has the orifices 23 and 25 formed therein.
  • the orifice plate 27 is made by electroforming, although sheet stock can also be used.
  • metals for the orifice plate 27 include nickel, copper, beryllium-copper, titanium, molybdenum, 300 series stainless steel, and alloy 42; the most preferable being nickel.
  • Typical thicknesses for the orifice plate 25 range from about 2 to 4 mils (.051 to .102 mm).
  • the orifices 23 and 25 can be formed by etching or laser drilling, but more preferably are formed at the same time that the orifice plate is formed by overplating onto a non-conductive barrier which defines the shape of the orifice. (See co-pending patent application EP-A-0110532).
  • a passivation layer 29 is grown on its surface to provide electrical insulation and to protect the orifice plate from chemical attack from the inks to be used.
  • Typical materials used for the passivation layer 29 include dielectrics such as Si0 2 , SiO x Ny, A1 2 0 3 and Ti0 2 , generally having a thickness in the range of 0.5 to 1.5 microns; the preferred thickness being dependent on the thermal conductivity of the chosen material.
  • the resistors 13 and 15, and the electrical conductors 17, 19, and 21 are formed on the passivation layer 29 according to standard thin film techniques.
  • the preferred resistance is about 60 ohms and the preferred surface dimensions of the resistors are about 2.5 x 6 mils (.064 x .152 mm).
  • a second passivation layer 30 is applied to the surface over the resistors and conductors to provide electrical insulation and cavitation protection according to standard techniques.
  • a patterned spacer layer 31 having thickness in the range of 1.5 to 5 mils (.038 x .127 mm) (preferably about 2 mils (.051)), is applied to the passivation layer 29.
  • Typical materials for the patterned spacer layer include resists such as Vacrel or Riston (tradenames of Dupont), solder glass, screened glass bead filled epoxy, polyimides, or even electroplated metals.
  • the purpose of the patterned spacer layer 31 is to provide a capillary channel for directing the flow of ink over the resistors and to provide a measure of hydraulic separation by interposing a system 33 between adjacent orifices to avoid cross-talk during operation.
  • the direction of ink flow is illustrated by the arrows labelled "D" in Figure 1.
  • a suitable back 35 as shown in Figure 4, is then attached firmly to the patterned spacer layer 31 to contain the ink and to provide an ink feed port 37.
  • the back 35 includes an ink manifold 39 as illustrated in Figures 4 and 5 for providing a closeby volume of ink.
  • Figure 5 shows a cross-section of the back 35 through the section line A-A.
  • the back 35 is shown as a sheet having a uniform thickness, such a uniform thickness is unnecessary and can vary considerably depending on the desired mechanical characteristics, e.g., if it is to serve as a stiffener or pin body.
  • FIG. 6 A cross-section of a completed print head constructed by the above method is illustrated in Figure 6 as it would appear at the section B-B shown in Figures 1 and 4. Shown therein is the back 35 and the manifold 39, atop the spacer 31 to create an ink capillary 43.
  • the typical distance "L” between the center of the resistor 13 and the closest point of the manifold 39 is about 20 mils (0.51 mm), with the typical height "T” of the manifold 39 being in the range of 2-: to 5 mils (.064 to .127 mm).
  • the distance "F” approximately 10 to 20 mils (.025 to .051 mm), corresponding to the distance between the midpoint of the resistor 13 and the center of the orifice 23.
  • the second passivation layer 30 is also best seen from this perspective.
  • Figure 7 is an illustration of the completed device as it appears from the side where ink is ejected, showing the orifices 23 and 25.

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  • Physics & Mathematics (AREA)
  • Geometry (AREA)
  • Particle Formation And Scattering Control In Inkjet Printers (AREA)

Claims (11)

1. Verfahren zum Herstellen eines blasengetriebenen, thermischen Tintenstrahldruckkopfes mit einer Düsenplatte (27), in der mindestens eine Düse (23, 25) zum Ausstoßen von Tintentröpfchen ausgebildet ist, ist, mindestens einem Widerstand (13, 15), der auf der Düsenplatte nächst der Düse angeordnet ist, und elektrischen Leitern (17, 19, 21), die and der Düsenplatte (27) zum Speisen von Strom zum Widerstand (13, 15) angeordnet sind, dadurch gekennzeichnet, daß zuerst die Düsenplatte (27) durch Formen der Düse (23, 25) in Richtung quer durch die Düsenplatte hindurch vorbereitet wird und daß darauf die Düsenplatte als Substrat verwendet wird, um darauf den Widerstand (13, 15) aud die entsprechende Düse (23, 25) ausgerichtet auszubilden.
2. Verfahren nach Anspruch 1, dadurch gekennzeichnet, daß mehrere Düsen in der Düsenplatte ausgebildet werden.
3. Verfahren nach Anspruch 2, dadurch gekennzeichnet, daß mehrere Dünnfilmwiderstände auf der Düsenplatte ausgebildet werden, wobei jeder Widerstand einer entsprechenden Düse zugeordnet ist.
4. Verfahren nach Anspruch 3, dadurch gekennzeichnet, daß hydraulische Trennwände (31) an der Düsenplatte zwischen benachbarten Widerständen zum Erhöhen des hydraulischen Widerstandes zwischen den Widerstanden und zum Begrenzen von Tintenkanälen zum Speisen von Tinte zu den Widerständen ausgebildet werden.
5. Verfahren nach einem der vorangehenden Ansprüche, gekennzeichnet durch Anbringen der Düsenplatte auf einem Substrat zum Bilden eines blasengetriebenen Tintenstrahldruckkopfes.
6. Verfahren nach Anspruch 5, dadurch gekennzeichnet, daß die Düsenplatte an dem Substrat so mit Abstand angebracht wird, daß sie die Strömung von Tinte zu dem oder jedem Widerstand bzw. der oder jeder Düse zuläßt.
7. Verfahren nach einem der vorangehenden Ansprüche, dadurch gekennzeichnet, daß eine Passivierungsschicht (29) auf der Düsenplatte vor Ausbilden des oder jedes Widerstandes aufgebracht wird, wobei der Widerstand (die Widerstände) und elektrische Leiter auf der Passivierungsschicht ausgebildet werden.
8. Blasengetriebener, thermischer Tintenstrahldruckkopf mit einer Düsenplatte (27), in der mindestens eine Düse (23, 25) zum Ausstoßen von Tinte angeordnet ist, mindestens ein Widerstand (13, 15) nächst der Düse (23, 25) und elektrische Leiter (17, 19, 21) an der Düsenplatte (27) zum Speisen von Strom zu dem Widerstand (13, 15) vorgesehen sind, dadurch gekennzeichnet, daß der Widerstand (13, 15) und der Leiter (17,19,21) auf einer Passivierungsschicht (29) angeordnet sind, welche die Düsenplatte (27) bedeckt, und daß der Widerstand (13, 15) bezüglich der Düse (23, 25) ausgerichtet ist, welche sich quer durch die Dicke der Düsenplatte (27) erstreckt.
9. Tintenstrahldruckkopf nach Anspruch 8, dadurch gekennzeichnet, daß mehrere Düsen (23, 25) und Widerstände (13, 15) vorgesehen sind.
10. Tintenstrahldruckkopf nach Anspruch 9, dadurch gekennzeichnet, daß eine Trennschicht (31), die mehrere Tintenbarrieren zum Erzeugen eines hydraulischen Widerstandes zwischen den Widerständen (13,15) aufweist und zum Verteilen der Tinte zu den Widerständen (13, 15) dient, von der Düsenplatte (27) unterstützt ist.
11. Tintenstrahldruckkopf nach einem der Ansprüche 8 bis 10, dadurch gekennzeichnet, daß die Düsenplatte (27) zusammen mit den Widerständen (13, 15) eine Unterstützung für einen Tintenkanal (39) und eine Rückenplatte (35) bildet.
EP19830306269 1982-11-23 1983-10-14 Monolithische Tintenstrahldüsenöffnungsplatten/Widerstandskombination Expired EP0110534B1 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US44397282A 1982-11-23 1982-11-23
US443972 1982-11-23

Publications (3)

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EP0110534A2 EP0110534A2 (de) 1984-06-13
EP0110534A3 EP0110534A3 (en) 1985-01-09
EP0110534B1 true EP0110534B1 (de) 1987-08-19

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EP19830306269 Expired EP0110534B1 (de) 1982-11-23 1983-10-14 Monolithische Tintenstrahldüsenöffnungsplatten/Widerstandskombination

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EP (1) EP0110534B1 (de)
JP (1) JPS5995157A (de)
DE (1) DE3373069D1 (de)

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE69111936T2 (de) * 1990-08-16 1996-04-11 Hewlett Packard Co Photo-ablatierte Bauteile für Farbstrahldruckkopf.
US5451251A (en) * 1993-02-26 1995-09-19 Canon Kabushiki Kaisha Ink, and ink-jet recording method and instrument using the same
US6435659B1 (en) 2000-06-05 2002-08-20 Hewlett-Packard Company Inkjet inks which improve drop-velocity stability and prolong resistor life in inkjet pens
KR100438842B1 (ko) * 2002-10-12 2004-07-05 삼성전자주식회사 금속 노즐 플레이트를 가진 일체형 잉크젯 프린트헤드 및그 제조방법
US7121646B2 (en) * 2003-12-30 2006-10-17 Dimatix, Inc. Drop ejection assembly
EP2415606A3 (de) * 2003-12-30 2012-05-09 Dimatix, Inc. Tröpfchenausstoßanordnung
JP5058719B2 (ja) * 2007-08-30 2012-10-24 キヤノン株式会社 液体吐出ヘッド及びインクジェット記録装置

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5590376A (en) * 1978-12-28 1980-07-08 Canon Inc Multicolor liquid jet device
JPS55121080A (en) * 1979-03-14 1980-09-17 Canon Inc Recording head
US4336548A (en) * 1979-07-04 1982-06-22 Canon Kabushiki Kaisha Droplets forming device
US4429321A (en) * 1980-10-23 1984-01-31 Canon Kabushiki Kaisha Liquid jet recording device
JPS57102366A (en) * 1980-12-18 1982-06-25 Canon Inc Ink jet head

Also Published As

Publication number Publication date
DE3373069D1 (en) 1987-09-24
EP0110534A2 (de) 1984-06-13
EP0110534A3 (en) 1985-01-09
JPS5995157A (ja) 1984-06-01

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