EP0075709A3 - A secondary electron spectrometer for making measurements of the potential on a sample with an electron probe - Google Patents

A secondary electron spectrometer for making measurements of the potential on a sample with an electron probe Download PDF

Info

Publication number: EP0075709A3
Authority: EP; European Patent Office
Prior art keywords: potential; sample; electron; making measurements; spectrometer
Prior art date: 1981-09-30
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.): Granted

Application number

EP82107490A

Other languages

German (de)

Other versions

EP0075709A2 (en

EP0075709B1 (en

Inventor

Hans-Peter Dipl.-Phys. Feuerbaum

Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)

Siemens AG

Original Assignee

Siemens AG

Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)

1981-09-30

Filing date

1982-08-17

Publication date

1983-06-29

1982-08-17 Application filed by Siemens AG filed Critical Siemens AG

1983-04-06 Publication of EP0075709A2 publication Critical patent/EP0075709A2/en

1983-06-29 Publication of EP0075709A3 publication Critical patent/EP0075709A3/en

1987-04-08 Application granted granted Critical

1987-04-08 Publication of EP0075709B1 publication Critical patent/EP0075709B1/en

Status Expired legal-status Critical Current

Links

Classifications

- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J49/00—Particle spectrometers or separator tubes
- H01J49/02—Details
- H01J49/08—Electron sources, e.g. for generating photo-electrons, secondary electrons or Auger electrons
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J49/00—Particle spectrometers or separator tubes
- H01J49/44—Energy spectrometers, e.g. alpha-, beta-spectrometers

Landscapes

Chemical & Material Sciences (AREA)
Analytical Chemistry (AREA)
Analysing Materials By The Use Of Radiation (AREA)
Testing Of Individual Semiconductor Devices (AREA)
Tests Of Electronic Circuits (AREA)
Testing Or Measuring Of Semiconductors Or The Like (AREA)
Electron Tubes For Measurement (AREA)

EP82107490A 1981-09-30 1982-08-17 Spectrometer for detecting secondary electrons produced by an electron probe from a target Expired EP0075709B1 (en)

Applications Claiming Priority (2)

Application Number	Priority Date	Filing Date	Title
DE3138929		1981-09-30
DE19813138929 DE3138929A1 (en)	1981-09-30	1981-09-30	IMPROVED SECONDARY ELECTRON SPECTROMETER FOR POTENTIAL MEASUREMENT ON A SAMPLE WITH AN ELECTRON PROBE

Publications (3)

Publication Number	Publication Date
EP0075709A2 EP0075709A2 (en)	1983-04-06
EP0075709A3 true EP0075709A3 (en)	1983-06-29
EP0075709B1 EP0075709B1 (en)	1987-04-08

Family

ID=6143065

Family Applications (1)

Application Number	Title	Priority Date	Filing Date
EP82107490A Expired EP0075709B1 (en)	1981-09-30	1982-08-17	Spectrometer for detecting secondary electrons produced by an electron probe from a target

Country Status (4)

Country	Link
US (1)	US4514682A (en)
EP (1)	EP0075709B1 (en)
JP (1)	JPS5871542A (en)
DE (2)	DE3138929A1 (en)

Families Citing this family (10)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
JPS59211953A (en) *	1983-05-17	1984-11-30	Univ Osaka	Secondary electron spectral device
GB8327737D0 (en) *	1983-10-17	1983-11-16	Texas Instruments Ltd	Electron detector
DE3638682A1 (en) *	1986-11-13	1988-05-19	Siemens Ag	SPECTROMETER LENS FOR CARPUSULAR BEAM MEASUREMENT TECHNOLOGY
JPS63126148A (en) *	1986-11-14	1988-05-30	Hiroshi Daimon	Charged particle analyzer
JP2696216B2 (en) *	1988-01-11	1998-01-14	セイコーインスツルメンツ株式会社	Ion beam processing equipment
JPH03101041A (en) *	1989-09-14	1991-04-25	Hitachi Ltd	Voltage measuring device by use of electron beam
US6359451B1 (en)	2000-02-11	2002-03-19	Image Graphics Incorporated	System for contactless testing of printed circuit boards
WO2001058558A2 (en)	2000-02-14	2001-08-16	Eco 3 Max Inc.	Process for removing volatile organic compounds from an air stream and apparatus therefor
US10121633B2 (en) *	2014-09-24	2018-11-06	National Institute For Materials Science	Energy discriminating electron detector and scanning electron microscope using the same
US10319578B2 (en) *	2016-01-21	2019-06-11	Japan Synchrotron Radiation Research Institute	Retarding potential type energy analyzer

Citations (2)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
US3764898A (en) *	1971-07-28	1973-10-09	Ibm	Methods of testing the continuity of an electrical conductor by use of an electron beam
US4169244A (en) *	1978-02-03	1979-09-25	Plows Graham S	Electron probe testing, analysis and fault diagnosis in electronic circuits

Family Cites Families (13)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
US2946002A (en) *	1958-02-17	1960-07-19	Kingston Electronic Corp	Signal-pickup test probe
US3445708A (en) *	1967-02-06	1969-05-20	Gen Electric	Electron diffraction unit
US3531716A (en) *	1967-06-16	1970-09-29	Agency Ind Science Techn	Method of testing an electronic device by use of an electron beam
US3448377A (en) *	1967-10-12	1969-06-03	Atomic Energy Commission	Method utilizing an electron beam for nondestructively measuring the dielectric properties of a sample
US3549999A (en) *	1968-06-05	1970-12-22	Gen Electric	Method and apparatus for testing circuits by measuring secondary emission electrons generated by electron beam bombardment of the pulsed circuit
DE1946931A1 (en) *	1969-09-17	1971-03-18	Gen Electric	Method for testing circuits and devices for carrying out the method
DE2151167C3 (en) *	1971-10-14	1974-05-09	Siemens Ag, 1000 Berlin Und 8000 Muenchen	Electron beam micro analyzer with Auger electron detection
US3796947A (en) *	1973-02-27	1974-03-12	Bell Telephone Labor Inc	Electron beam testing of film integrated circuits
DE2814049A1 (en) *	1978-03-31	1979-10-18	Siemens Ag	METHOD FOR CONTACTLESS MEASUREMENT OF THE POTENTIAL DEVELOPMENT IN AN ELECTRONIC COMPONENT AND ARRANGEMENT FOR PERFORMING THE METHOD
DE2823642A1 (en) *	1978-05-30	1980-01-03	Siemens Ag	METHOD FOR CONTACTLESS POTENTIAL MEASUREMENT ON AN ELECTRONIC COMPONENT
US4179604A (en) *	1978-09-29	1979-12-18	The United States Of America As Represented By The Secretary Of The Navy	Electron collector for forming low-loss electron images
JPS55156867A (en) *	1979-05-28	1980-12-06	Hitachi Ltd	Potential measuring device
US4417203A (en) *	1981-05-26	1983-11-22	International Business Machines Corporation	System for contactless electrical property testing of multi-layer ceramics

1981
- 1981-09-30 DE DE19813138929 patent/DE3138929A1/en not_active Withdrawn
1982
- 1982-07-15 US US06/398,542 patent/US4514682A/en not_active Expired - Fee Related
- 1982-08-17 DE DE8282107490T patent/DE3276035D1/en not_active Expired
- 1982-08-17 EP EP82107490A patent/EP0075709B1/en not_active Expired
- 1982-09-27 JP JP57168239A patent/JPS5871542A/en active Granted

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
US3764898A (en) *	1971-07-28	1973-10-09	Ibm	Methods of testing the continuity of an electrical conductor by use of an electron beam
US4169244A (en) *	1978-02-03	1979-09-25	Plows Graham S	Electron probe testing, analysis and fault diagnosis in electronic circuits

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
"TECHNISCHES MESSEN TM", 48 Jahrgang 1981, Heft 1, R. Oldenbourg Verlag GmbH, München. P. FAZEKAS: "Elektronenstrahl pruft elektrische Potentiale in integrierten Schaltungen", Seiten 29-35 *

Also Published As

Publication number	Publication date
JPS5871542A (en)	1983-04-28
JPS6352428B2 (en)	1988-10-19
DE3138929A1 (en)	1983-04-14
US4514682A (en)	1985-04-30
DE3276035D1 (en)	1987-05-14
EP0075709A2 (en)	1983-04-06
EP0075709B1 (en)	1987-04-08

Legal Events

Date	Code	Title	Description
1983-02-05	PUAI	Public reference made under article 153(3) epc to a published international application that has entered the european phase	Free format text: ORIGINAL CODE: 0009012
1983-04-06	AK	Designated contracting states	Designated state(s): DE FR GB NL
1983-04-25	PUAL	Search report despatched	Free format text: ORIGINAL CODE: 0009013
1983-06-29	AK	Designated contracting states	Designated state(s): DE FR GB NL
1984-02-01	17P	Request for examination filed	Effective date: 19831128
1987-02-21	GRAA	(expected) grant	Free format text: ORIGINAL CODE: 0009210
1987-04-08	AK	Designated contracting states	Kind code of ref document: B1 Designated state(s): DE FR GB NL
1987-05-14	REF	Corresponds to:	Ref document number: 3276035 Country of ref document: DE Date of ref document: 19870514
1987-06-05	ET	Fr: translation filed
1987-08-31	PGFP	Annual fee paid to national office [announced via postgrant information from national office to epo]	Ref country code: NL Payment date: 19870831 Year of fee payment: 6
1988-03-18	PLBE	No opposition filed within time limit	Free format text: ORIGINAL CODE: 0009261
1988-03-18	STAA	Information on the status of an ep patent application or granted ep patent	Free format text: STATUS: NO OPPOSITION FILED WITHIN TIME LIMIT
1988-05-04	26N	No opposition filed
1988-08-17	PG25	Lapsed in a contracting state [announced via postgrant information from national office to epo]	Ref country code: GB Free format text: LAPSE BECAUSE OF NON-PAYMENT OF DUE FEES Effective date: 19880817
1989-03-01	PG25	Lapsed in a contracting state [announced via postgrant information from national office to epo]	Ref country code: NL Effective date: 19890301
1989-04-17	NLV4	Nl: lapsed or anulled due to non-payment of the annual fee
1989-04-28	PG25	Lapsed in a contracting state [announced via postgrant information from national office to epo]	Ref country code: FR Free format text: LAPSE BECAUSE OF NON-PAYMENT OF DUE FEES Effective date: 19890428
1989-05-03	PG25	Lapsed in a contracting state [announced via postgrant information from national office to epo]	Ref country code: DE Effective date: 19890503
1989-05-10	GBPC	Gb: european patent ceased through non-payment of renewal fee
1989-06-23	REG	Reference to a national code	Ref country code: FR Ref legal event code: ST

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