EP0075709A3 - A secondary electron spectrometer for making measurements of the potential on a sample with an electron probe - Google Patents
A secondary electron spectrometer for making measurements of the potential on a sample with an electron probe Download PDFInfo
- Publication number
- EP0075709A3 EP0075709A3 EP82107490A EP82107490A EP0075709A3 EP 0075709 A3 EP0075709 A3 EP 0075709A3 EP 82107490 A EP82107490 A EP 82107490A EP 82107490 A EP82107490 A EP 82107490A EP 0075709 A3 EP0075709 A3 EP 0075709A3
- Authority
- EP
- European Patent Office
- Prior art keywords
- potential
- sample
- electron
- making measurements
- spectrometer
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J49/00—Particle spectrometers or separator tubes
- H01J49/02—Details
- H01J49/08—Electron sources, e.g. for generating photo-electrons, secondary electrons or Auger electrons
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J49/00—Particle spectrometers or separator tubes
- H01J49/44—Energy spectrometers, e.g. alpha-, beta-spectrometers
Landscapes
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Analysing Materials By The Use Of Radiation (AREA)
- Testing Of Individual Semiconductor Devices (AREA)
- Tests Of Electronic Circuits (AREA)
- Testing Or Measuring Of Semiconductors Or The Like (AREA)
- Electron Tubes For Measurement (AREA)
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
DE3138929 | 1981-09-30 | ||
DE19813138929 DE3138929A1 (en) | 1981-09-30 | 1981-09-30 | IMPROVED SECONDARY ELECTRON SPECTROMETER FOR POTENTIAL MEASUREMENT ON A SAMPLE WITH AN ELECTRON PROBE |
Publications (3)
Publication Number | Publication Date |
---|---|
EP0075709A2 EP0075709A2 (en) | 1983-04-06 |
EP0075709A3 true EP0075709A3 (en) | 1983-06-29 |
EP0075709B1 EP0075709B1 (en) | 1987-04-08 |
Family
ID=6143065
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
EP82107490A Expired EP0075709B1 (en) | 1981-09-30 | 1982-08-17 | Spectrometer for detecting secondary electrons produced by an electron probe from a target |
Country Status (4)
Country | Link |
---|---|
US (1) | US4514682A (en) |
EP (1) | EP0075709B1 (en) |
JP (1) | JPS5871542A (en) |
DE (2) | DE3138929A1 (en) |
Families Citing this family (10)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS59211953A (en) * | 1983-05-17 | 1984-11-30 | Univ Osaka | Secondary electron spectral device |
GB8327737D0 (en) * | 1983-10-17 | 1983-11-16 | Texas Instruments Ltd | Electron detector |
DE3638682A1 (en) * | 1986-11-13 | 1988-05-19 | Siemens Ag | SPECTROMETER LENS FOR CARPUSULAR BEAM MEASUREMENT TECHNOLOGY |
JPS63126148A (en) * | 1986-11-14 | 1988-05-30 | Hiroshi Daimon | Charged particle analyzer |
JP2696216B2 (en) * | 1988-01-11 | 1998-01-14 | セイコーインスツルメンツ株式会社 | Ion beam processing equipment |
JPH03101041A (en) * | 1989-09-14 | 1991-04-25 | Hitachi Ltd | Voltage measuring device by use of electron beam |
US6359451B1 (en) | 2000-02-11 | 2002-03-19 | Image Graphics Incorporated | System for contactless testing of printed circuit boards |
WO2001058558A2 (en) | 2000-02-14 | 2001-08-16 | Eco 3 Max Inc. | Process for removing volatile organic compounds from an air stream and apparatus therefor |
US10121633B2 (en) * | 2014-09-24 | 2018-11-06 | National Institute For Materials Science | Energy discriminating electron detector and scanning electron microscope using the same |
US10319578B2 (en) * | 2016-01-21 | 2019-06-11 | Japan Synchrotron Radiation Research Institute | Retarding potential type energy analyzer |
Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3764898A (en) * | 1971-07-28 | 1973-10-09 | Ibm | Methods of testing the continuity of an electrical conductor by use of an electron beam |
US4169244A (en) * | 1978-02-03 | 1979-09-25 | Plows Graham S | Electron probe testing, analysis and fault diagnosis in electronic circuits |
Family Cites Families (13)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US2946002A (en) * | 1958-02-17 | 1960-07-19 | Kingston Electronic Corp | Signal-pickup test probe |
US3445708A (en) * | 1967-02-06 | 1969-05-20 | Gen Electric | Electron diffraction unit |
US3531716A (en) * | 1967-06-16 | 1970-09-29 | Agency Ind Science Techn | Method of testing an electronic device by use of an electron beam |
US3448377A (en) * | 1967-10-12 | 1969-06-03 | Atomic Energy Commission | Method utilizing an electron beam for nondestructively measuring the dielectric properties of a sample |
US3549999A (en) * | 1968-06-05 | 1970-12-22 | Gen Electric | Method and apparatus for testing circuits by measuring secondary emission electrons generated by electron beam bombardment of the pulsed circuit |
DE1946931A1 (en) * | 1969-09-17 | 1971-03-18 | Gen Electric | Method for testing circuits and devices for carrying out the method |
DE2151167C3 (en) * | 1971-10-14 | 1974-05-09 | Siemens Ag, 1000 Berlin Und 8000 Muenchen | Electron beam micro analyzer with Auger electron detection |
US3796947A (en) * | 1973-02-27 | 1974-03-12 | Bell Telephone Labor Inc | Electron beam testing of film integrated circuits |
DE2814049A1 (en) * | 1978-03-31 | 1979-10-18 | Siemens Ag | METHOD FOR CONTACTLESS MEASUREMENT OF THE POTENTIAL DEVELOPMENT IN AN ELECTRONIC COMPONENT AND ARRANGEMENT FOR PERFORMING THE METHOD |
DE2823642A1 (en) * | 1978-05-30 | 1980-01-03 | Siemens Ag | METHOD FOR CONTACTLESS POTENTIAL MEASUREMENT ON AN ELECTRONIC COMPONENT |
US4179604A (en) * | 1978-09-29 | 1979-12-18 | The United States Of America As Represented By The Secretary Of The Navy | Electron collector for forming low-loss electron images |
JPS55156867A (en) * | 1979-05-28 | 1980-12-06 | Hitachi Ltd | Potential measuring device |
US4417203A (en) * | 1981-05-26 | 1983-11-22 | International Business Machines Corporation | System for contactless electrical property testing of multi-layer ceramics |
-
1981
- 1981-09-30 DE DE19813138929 patent/DE3138929A1/en not_active Withdrawn
-
1982
- 1982-07-15 US US06/398,542 patent/US4514682A/en not_active Expired - Fee Related
- 1982-08-17 DE DE8282107490T patent/DE3276035D1/en not_active Expired
- 1982-08-17 EP EP82107490A patent/EP0075709B1/en not_active Expired
- 1982-09-27 JP JP57168239A patent/JPS5871542A/en active Granted
Patent Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3764898A (en) * | 1971-07-28 | 1973-10-09 | Ibm | Methods of testing the continuity of an electrical conductor by use of an electron beam |
US4169244A (en) * | 1978-02-03 | 1979-09-25 | Plows Graham S | Electron probe testing, analysis and fault diagnosis in electronic circuits |
Non-Patent Citations (1)
Title |
---|
"TECHNISCHES MESSEN TM", 48 Jahrgang 1981, Heft 1, R. Oldenbourg Verlag GmbH, München. P. FAZEKAS: "Elektronenstrahl pruft elektrische Potentiale in integrierten Schaltungen", Seiten 29-35 * |
Also Published As
Publication number | Publication date |
---|---|
JPS5871542A (en) | 1983-04-28 |
JPS6352428B2 (en) | 1988-10-19 |
DE3138929A1 (en) | 1983-04-14 |
US4514682A (en) | 1985-04-30 |
DE3276035D1 (en) | 1987-05-14 |
EP0075709A2 (en) | 1983-04-06 |
EP0075709B1 (en) | 1987-04-08 |
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Legal Events
Date | Code | Title | Description |
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PUAI | Public reference made under article 153(3) epc to a published international application that has entered the european phase |
Free format text: ORIGINAL CODE: 0009012 |
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AK | Designated contracting states |
Designated state(s): DE FR GB NL |
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PUAL | Search report despatched |
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AK | Designated contracting states |
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17P | Request for examination filed |
Effective date: 19831128 |
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STAA | Information on the status of an ep patent application or granted ep patent |
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