EP0067987A1 - Planar vacuum seal for isolating an air bearing - Google Patents
Planar vacuum seal for isolating an air bearingInfo
- Publication number
- EP0067987A1 EP0067987A1 EP81900255A EP81900255A EP0067987A1 EP 0067987 A1 EP0067987 A1 EP 0067987A1 EP 81900255 A EP81900255 A EP 81900255A EP 81900255 A EP81900255 A EP 81900255A EP 0067987 A1 EP0067987 A1 EP 0067987A1
- Authority
- EP
- European Patent Office
- Prior art keywords
- portions
- planar
- seal
- vacuum chamber
- plane
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Withdrawn
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/02—Details
- H01J37/18—Vacuum locks ; Means for obtaining or maintaining the desired pressure within the vessel
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
- F16C29/00—Bearings for parts moving only linearly
- F16C29/02—Sliding-contact bearings
- F16C29/025—Hydrostatic or aerostatic
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
- F16C32/00—Bearings not otherwise provided for
- F16C32/06—Bearings not otherwise provided for with moving member supported by a fluid cushion formed, at least to a large extent, otherwise than by movement of the shaft, e.g. hydrostatic air-cushion bearings
- F16C32/0603—Bearings not otherwise provided for with moving member supported by a fluid cushion formed, at least to a large extent, otherwise than by movement of the shaft, e.g. hydrostatic air-cushion bearings supported by a gas cushion, e.g. an air cushion
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
- F16C33/00—Parts of bearings; Special methods for making bearings or parts thereof
- F16C33/72—Sealings
- F16C33/74—Sealings of sliding-contact bearings
- F16C33/741—Sealings of sliding-contact bearings by means of a fluid
- F16C33/748—Sealings of sliding-contact bearings by means of a fluid flowing to or from the sealing gap, e.g. vacuum seals with differential exhaust
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16J—PISTONS; CYLINDERS; SEALINGS
- F16J15/00—Sealings
- F16J15/002—Sealings comprising at least two sealings in succession
- F16J15/006—Sealings comprising at least two sealings in succession with division of the pressure
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16J—PISTONS; CYLINDERS; SEALINGS
- F16J15/00—Sealings
- F16J15/16—Sealings between relatively-moving surfaces
- F16J15/40—Sealings between relatively-moving surfaces by means of fluid
- F16J15/406—Sealings between relatively-moving surfaces by means of fluid by at least one pump
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
- F16C2300/00—Application independent of particular apparatuses
- F16C2300/40—Application independent of particular apparatuses related to environment, i.e. operating conditions
- F16C2300/62—Application independent of particular apparatuses related to environment, i.e. operating conditions low pressure, e.g. elements operating under vacuum conditions
Definitions
- This invention relates to treating materials under high vacuum conditions, e.g., in electron beam lithography.
- electron beam lithography a substrate to be written on is supported in high vacuum on an x/y table. As the writing proceeds, the vacuum must be maintained while the motion of the table is accurately controlled in the x/y plane.
- My invention features a vacuum chamber defined by means including two closely spaced planar portions which in turn define a planar seal for the chamber.
- One of the planar portions at least partially encloses an interior volume of the chamber. Further, one of the planar portions, and with it the work element, is movable along the plane of the seal toward and away from that interior volume.
- Means are provided for evacuating gas from between the planar portions along a direction transverse to the plane to provide the seal.
- the seal is a graded seal between lapped surfaces of said planar portions, and a gas bearing is provided between said surfaces outwardly of said seal.
- Fig. 1 is a diagrammatic elevation, partly in section of electron beam lithography apparatus embodying the invention.
- Fig. 2 is a fragmentary plan view taken along 2-2 of Fig. 1.
- Fig. 3 is a sectional view through 3-3 of
- Fig. 4 is a sectional view through 4-4 of Fig. 2.
- Fig. 5 is an enlarged view taken along 5-5 of Fig. 4.
- Fig. 6 is a view similar to Fig. 1, of another embodiment.
- Fig. 7 is a view similar to Fig. 1, of another embodiment. Structure
- electron beam column assembly 10 including rectangular plate 12, is mounted for planar movement along x and y axes above rectangular plate 14. Recess 16 in plate 14 is evacuated through channel 18, to provide (with plate 12) a vacuum chamber. Workpiece 20 is supported in chamber 16.
- Figs. 2-5 show an air bearing and seal between plates 12 and 14.
- Each hole 22 and 24 communicates with a shallow air distribution groove 26 extending parallel to an edge of plate 14.
- Bent metering rods 28 fit in holes 22 and 24, which are .005 inch in diameter larger than the rods.
- Each rod has a groove 30 at its top.
- Air pumps 32 and 34 supply pressurized air through manifolding 36 and 38 to holes 22 and 24.
- Air filters 40 are located between pumps 32 and 34 and holes 22 and 24.
- Three spaced air evacuation channels 42, 44, and 46 surround the perimeter of chamber 16 inwardly of air supply holes 24.
- Channel 42 (1/2 inch deep and 1/8 inch wide) is connected directly by manifolding 48 to vacuum pump 50.
- Channels 44 and 46 are connected by spaced holes 52 (5/16 inch diameter, spaced on 7/16 and 1/2 inch centers, respectively) through the channel floors, and manifolds 54 and 56 to vacuum pumps 58 and 60.
- the facing surfaces 62 and 64 of plates 12 and 14 are lapped to a surface finish variation of no more than 4 micro-inches and to a flatness tolerance variation of no more than .0002 inch.
- electron beam column assembly 100 including plate 112, is stationary. Vacuum chamber and recess 114 is in the upper plate 116, which is movable along x and y axes.
- Plate 112 has two spaced rows of air delivery holes and three spaced air evacuation channels, respectively manifolded to air supply and vacuum pumps, all generally as in plate 14 of Figs. 1-5.
- Plate surfaces 118 and 120 are lapped and correspond to surfaces 62 and 64 of plates 12 and 14.
- electron beam column assembly 130 including plate 132, is stationary and supported by means not shown.
- Plate 132 has an opening 133 into vacuum chamber 134, which is evacuated through channel 136.
- Workpiece holder 138 in chamber 134 is connected by column 140 to plate 142, in turn supported from below for movement along x and y axes.
- a light pressure, sliding mechanical seal 144 is preferably provided between workpiece holder 138 and the upper surface 146 of plate 132 overhangs and is lapped with the upper surface 150 of plate 142. These surfaces correspond to surfaces 62 and 64 of plates 12 and 14.
- Plate 132 has the spaced rows of air delivery holes and air evacuation channels, respectively manifolded to air supply and vacuum pumps, all generally as in plate 14 of Figs. 1-5. Operation
- pressurized air flows through holes 22 and 24 and around the outside of rods 28 to form an air cushion (pressurized at about 3 atm. or 2280 torr in the embodiment disclosed, and preferably from 1 to 10 micrometers thick) which acts as an air bearing between plates 12 and 14.
- Air filters 40 remove dust from the pressurized air to protect the mating plate surfaces. Grooves 26 and 30 help distribute the air. The overall air supply arrangement promotes highly stable operation.
- Channels 42, 44, and 46 provide an effective graded seal between the vacuum chamber and the air bearing, even though there is relative movement of the sealed plates across the vacuum chamber boundary with the air bearing.
- the outermost air evacuation channel 42 reduces the air pressure to about 46.6 torr
- the middle channel 44 further reduces pressure to about .180 torr
- the innermost channel 46 reduces the pressure to about 3.2 x 10 -3 torr.
- the pressure in the vacuum chamber 16 is typically about 5 x 10 -6 torr.
- the air bearing pressure must be enough to at least counteract the tendency of plates 12 and 14 to approach each other because of the vacuum in chamber.
- the electron beam assembly 10 is moved along the x and y axes to write on workpiece 20 as desired. In the embodiment of Fig. 6 movement of the electron beam assembly 100 is avoided. In the embodiment of Fig. 7, the overhang of downardly facing surface 148 protects the graded seal from dust accumulation. Sliding seal 144 acts to seal the vacuum chamber when the graded seal is shut down for repair or maintenance.
Abstract
Un joint d'etancheite plat etage est monte entre des surfaces planes opposees (62, 64) pour l'isolation d'un palier pneumatique dans un environnement sous vide (16). Le palier pneumatique (22, 24, 26, 62, 64) supporte une structure (20) telle qu'un masque de semi-conducteur ou tranche et fonctionne dans un environnement sous vide sans degrader serieusement la qualite du vide. Le palier pneumatique est isole du vide en utilisant le joint d'etancheite plat etage qui etablit un gradient de pression depuis le niveau de l'air qui support le palier pneumatique (22, 24, 26, 62, 64) jusqu'au niveau de l'environnement sous vide (16). Le gradiant est etabli de part et d'autre du joint d'etancheite en evacuant le gaz au travers des orifices successifs (42, 44, 46, 52) amenages dans des organes plats opposes (12, 14).A flat stage seal is mounted between opposing planar surfaces (62, 64) for the isolation of a pneumatic bearing in a vacuum environment (16). The pneumatic bearing (22, 24, 26, 62, 64) supports a structure (20) such as a semiconductor mask or wafer and operates in a vacuum environment without seriously degrading the quality of the vacuum. The pneumatic bearing is isolated from vacuum using the flat stage seal which establishes a pressure gradient from the level of the air which supports the pneumatic bearing (22, 24, 26, 62, 64) to the level of the vacuum environment (16). The gradient is established on either side of the seal by evacuating the gas through successive orifices (42, 44, 46, 52) supplied in opposite flat members (12, 14).
Description
Claims
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US10720779A | 1979-12-26 | 1979-12-26 | |
US107207 | 1979-12-26 |
Publications (2)
Publication Number | Publication Date |
---|---|
EP0067987A1 true EP0067987A1 (en) | 1983-01-05 |
EP0067987A4 EP0067987A4 (en) | 1983-04-06 |
Family
ID=22315423
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
EP19810900255 Withdrawn EP0067987A4 (en) | 1979-12-26 | 1980-12-23 | Planar vacuum seal for isolating an air bearing. |
Country Status (3)
Country | Link |
---|---|
EP (1) | EP0067987A4 (en) |
JP (1) | JPS58500134A (en) |
WO (1) | WO1982002235A1 (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR101160714B1 (en) * | 2003-08-29 | 2012-06-28 | 송쎄보 에스아 | Universal actuator particularly for dashboards |
Families Citing this family (14)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4425508A (en) * | 1982-05-07 | 1984-01-10 | Gca Corporation | Electron beam lithographic apparatus |
EP0106510B1 (en) * | 1982-10-19 | 1991-11-13 | Varian Associates, Inc. | Envelope apparatus for localized vacuum processing |
EP0109147A3 (en) * | 1982-10-19 | 1986-04-16 | Varian Associates, Inc. | Charged particle beam lithography machine incorporating localized vacuum envelope |
US4528451A (en) * | 1982-10-19 | 1985-07-09 | Varian Associates, Inc. | Gap control system for localized vacuum processing |
US4524261A (en) * | 1983-09-19 | 1985-06-18 | Varian Associates, Inc. | Localized vacuum processing apparatus |
US4634043A (en) * | 1984-09-20 | 1987-01-06 | At&T Technologies, Inc. | Engaging second articles to engaged first articles |
US4801352A (en) * | 1986-12-30 | 1989-01-31 | Image Micro Systems, Inc. | Flowing gas seal enclosure for processing workpiece surface with controlled gas environment and intense laser irradiation |
US5103102A (en) * | 1989-02-24 | 1992-04-07 | Micrion Corporation | Localized vacuum apparatus and method |
US5898179A (en) * | 1997-09-10 | 1999-04-27 | Orion Equipment, Inc. | Method and apparatus for controlling a workpiece in a vacuum chamber |
US6126169A (en) * | 1998-01-23 | 2000-10-03 | Nikon Corporation | Air bearing operable in a vacuum region |
US6323496B1 (en) * | 1999-04-19 | 2001-11-27 | Applied Materials, Inc. | Apparatus for reducing distortion in fluid bearing surfaces |
US6515288B1 (en) | 2000-03-16 | 2003-02-04 | Applied Materials, Inc. | Vacuum bearing structure and a method of supporting a movable member |
US6661009B1 (en) * | 2002-05-31 | 2003-12-09 | Fei Company | Apparatus for tilting a beam system |
WO2006023595A2 (en) * | 2004-08-18 | 2006-03-02 | New Way Machine Components, Inc. | Moving vacuum chamber stage with air bearing and differentially pumped grooves |
Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
FR1152577A (en) * | 1955-01-14 | 1958-02-20 | Thomson Houston Comp Francaise | Improvements to vacuum-tight joints |
US4118042A (en) * | 1977-09-27 | 1978-10-03 | The United States Of America As Represented By The United States Department Of Energy | Air bearing vacuum seal assembly |
Family Cites Families (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3201188A (en) * | 1961-03-29 | 1965-08-17 | Varian Associates | Rotary exhaust apparatus |
US3520055A (en) * | 1967-04-26 | 1970-07-14 | Western Electric Co | Method for holding workpieces for radiant energy bonding |
US3648383A (en) * | 1969-12-01 | 1972-03-14 | Eastman Kodak Co | Sealing apparatus for transport of material between regions at different pressures |
US3691720A (en) * | 1970-10-12 | 1972-09-19 | Western Electric Co | Apparatus for frequency adjusting and assembling monolithic crystal filters |
US3704504A (en) * | 1971-08-06 | 1972-12-05 | Stromberg Carlson Corp | Apparatus for inserting small articles in a matrix plate |
US4142004A (en) * | 1976-01-22 | 1979-02-27 | Bell Telephone Laboratories, Incorporated | Method of coating semiconductor substrates |
US4141456A (en) * | 1976-08-30 | 1979-02-27 | Rca Corp. | Apparatus and method for aligning wafers |
US4191385A (en) * | 1979-05-15 | 1980-03-04 | Fox Wayne L | Vacuum-sealed gas-bearing assembly |
-
1980
- 1980-12-23 WO PCT/US1980/001718 patent/WO1982002235A1/en not_active Application Discontinuation
- 1980-12-23 EP EP19810900255 patent/EP0067987A4/en not_active Withdrawn
- 1980-12-23 JP JP50043581A patent/JPS58500134A/en active Pending
Patent Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
FR1152577A (en) * | 1955-01-14 | 1958-02-20 | Thomson Houston Comp Francaise | Improvements to vacuum-tight joints |
US4118042A (en) * | 1977-09-27 | 1978-10-03 | The United States Of America As Represented By The United States Department Of Energy | Air bearing vacuum seal assembly |
Non-Patent Citations (1)
Title |
---|
See also references of WO8202235A1 * |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR101160714B1 (en) * | 2003-08-29 | 2012-06-28 | 송쎄보 에스아 | Universal actuator particularly for dashboards |
Also Published As
Publication number | Publication date |
---|---|
JPS58500134A (en) | 1983-01-20 |
WO1982002235A1 (en) | 1982-07-08 |
EP0067987A4 (en) | 1983-04-06 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
PUAI | Public reference made under article 153(3) epc to a published international application that has entered the european phase |
Free format text: ORIGINAL CODE: 0009012 |
|
17P | Request for examination filed |
Effective date: 19820927 |
|
AK | Designated contracting states |
Designated state(s): DE FR GB |
|
EL | Fr: translation of claims filed | ||
DET | De: translation of patent claims | ||
STAA | Information on the status of an ep patent application or granted ep patent |
Free format text: STATUS: THE APPLICATION IS DEEMED TO BE WITHDRAWN |
|
18D | Application deemed to be withdrawn |
Effective date: 19840915 |
|
RIN1 | Information on inventor provided before grant (corrected) |
Inventor name: FOX, WAYNE, L. |