EA201391292A1 - Способ получения подложки, обеспеченной покрытием - Google Patents

Способ получения подложки, обеспеченной покрытием

Info

Publication number
EA201391292A1
EA201391292A1 EA201391292A EA201391292A EA201391292A1 EA 201391292 A1 EA201391292 A1 EA 201391292A1 EA 201391292 A EA201391292 A EA 201391292A EA 201391292 A EA201391292 A EA 201391292A EA 201391292 A1 EA201391292 A1 EA 201391292A1
Authority
EA
Eurasian Patent Office
Prior art keywords
coating
obtaining
support provided
substrate
laser radiation
Prior art date
Application number
EA201391292A
Other languages
English (en)
Other versions
EA025255B1 (ru
Inventor
Маттье Билен
Ли-Я Йех
Original Assignee
Сэн-Гобэн Гласс Франс
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Сэн-Гобэн Гласс Франс filed Critical Сэн-Гобэн Гласс Франс
Publication of EA201391292A1 publication Critical patent/EA201391292A1/ru
Publication of EA025255B1 publication Critical patent/EA025255B1/ru

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
    • C23C16/48—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating by irradiation, e.g. photolysis, radiolysis, particle radiation
    • C23C16/483—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating by irradiation, e.g. photolysis, radiolysis, particle radiation using coherent light, UV to IR, e.g. lasers
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
    • B23K26/06—Shaping the laser beam, e.g. by masks or multi-focusing
    • B23K26/0604—Shaping the laser beam, e.g. by masks or multi-focusing by a combination of beams
    • B23K26/0608—Shaping the laser beam, e.g. by masks or multi-focusing by a combination of beams in the same heat affected zone [HAZ]
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
    • B23K26/06—Shaping the laser beam, e.g. by masks or multi-focusing
    • B23K26/064—Shaping the laser beam, e.g. by masks or multi-focusing by means of optical elements, e.g. lenses, mirrors or prisms
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C17/00—Surface treatment of glass, not in the form of fibres or filaments, by coating
    • C03C17/001—General methods for coating; Devices therefor
    • C03C17/002—General methods for coating; Devices therefor for flat glass, e.g. float glass
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C17/00—Surface treatment of glass, not in the form of fibres or filaments, by coating
    • C03C17/06—Surface treatment of glass, not in the form of fibres or filaments, by coating with metals
    • C03C17/09—Surface treatment of glass, not in the form of fibres or filaments, by coating with metals by deposition from the vapour phase
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C17/00—Surface treatment of glass, not in the form of fibres or filaments, by coating
    • C03C17/34—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions
    • C03C17/3411—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions with at least two coatings of inorganic materials
    • C03C17/3417—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions with at least two coatings of inorganic materials all coatings being oxide coatings
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C17/00—Surface treatment of glass, not in the form of fibres or filaments, by coating
    • C03C17/34—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions
    • C03C17/36—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions at least one coating being a metal
    • C03C17/3602—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions at least one coating being a metal the metal being present as a layer
    • C03C17/3657—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions at least one coating being a metal the metal being present as a layer the multilayer coating having optical properties
    • C03C17/366—Low-emissivity or solar control coatings
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C23/00—Other surface treatment of glass not in the form of fibres or filaments
    • C03C23/0005—Other surface treatment of glass not in the form of fibres or filaments by irradiation
    • C03C23/0025—Other surface treatment of glass not in the form of fibres or filaments by irradiation by a laser beam
    • C—CHEMISTRY; METALLURGY
    • C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
    • C08J—WORKING-UP; GENERAL PROCESSES OF COMPOUNDING; AFTER-TREATMENT NOT COVERED BY SUBCLASSES C08B, C08C, C08F, C08G or C08H
    • C08J7/00—Chemical treatment or coating of shaped articles made of macromolecular substances
    • C08J7/04—Coating
    • C—CHEMISTRY; METALLURGY
    • C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
    • C08J—WORKING-UP; GENERAL PROCESSES OF COMPOUNDING; AFTER-TREATMENT NOT COVERED BY SUBCLASSES C08B, C08C, C08F, C08G or C08H
    • C08J7/00—Chemical treatment or coating of shaped articles made of macromolecular substances
    • C08J7/04—Coating
    • C08J7/06—Coating with compositions not containing macromolecular substances
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/58—After-treatment
    • C23C14/5806—Thermal treatment
    • C23C14/5813—Thermal treatment using lasers
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/56—After-treatment
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01B—CABLES; CONDUCTORS; INSULATORS; SELECTION OF MATERIALS FOR THEIR CONDUCTIVE, INSULATING OR DIELECTRIC PROPERTIES
    • H01B5/00—Non-insulated conductors or conductive bodies characterised by their form
    • H01B5/14—Non-insulated conductors or conductive bodies characterised by their form comprising conductive layers or films on insulating-supports
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K2101/00—Articles made by soldering, welding or cutting
    • B23K2101/34—Coated articles, e.g. plated or painted; Surface treated articles
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C2218/00—Methods for coating glass
    • C03C2218/10—Deposition methods
    • C03C2218/15—Deposition methods from the vapour phase
    • C03C2218/154—Deposition methods from the vapour phase by sputtering
    • C03C2218/156—Deposition methods from the vapour phase by sputtering by magnetron sputtering
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C2218/00—Methods for coating glass
    • C03C2218/30—Aspects of methods for coating glass not covered above
    • C03C2218/32—After-treatment
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02T—CLIMATE CHANGE MITIGATION TECHNOLOGIES RELATED TO TRANSPORTATION
    • Y02T50/00—Aeronautics or air transport
    • Y02T50/60—Efficient propulsion technologies, e.g. for aircraft

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Organic Chemistry (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Materials Engineering (AREA)
  • General Chemical & Material Sciences (AREA)
  • Mechanical Engineering (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Geochemistry & Mineralogy (AREA)
  • Metallurgy (AREA)
  • Plasma & Fusion (AREA)
  • Health & Medical Sciences (AREA)
  • Thermal Sciences (AREA)
  • Toxicology (AREA)
  • Medicinal Chemistry (AREA)
  • Polymers & Plastics (AREA)
  • Surface Treatment Of Glass (AREA)
  • Application Of Or Painting With Fluid Materials (AREA)

Abstract

Предметом изобретения является способ получения подложки (1), обеспеченной по меньшей мере на одной из ее сторон покрытием (2), содержащий этап осаждения указанного покрытия (2), затем этап термической обработки указанного покрытия при использовании основного лазерного излучения (4), при этом указанный способ отличается тем, что по меньшей мере одну часть (5, 14) основного лазерного излучения (4), проходящую через указанную подложку (1) и/или отражаемую указанным покрытием (2), перенаправляют в направлении указанной подложки, чтобы сформировать по меньшей мере одно вторичное лазерное излучение (6, 7, 18).
EA201391292A 2011-03-08 2012-03-07 Способ получения подложки, обеспеченной покрытием EA025255B1 (ru)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
FR1151897A FR2972447B1 (fr) 2011-03-08 2011-03-08 Procede d'obtention d'un substrat muni d'un revetement
PCT/FR2012/050476 WO2012120238A1 (fr) 2011-03-08 2012-03-07 Procede d'obtention d'un substrat muni d'un revêtement

Publications (2)

Publication Number Publication Date
EA201391292A1 true EA201391292A1 (ru) 2014-01-30
EA025255B1 EA025255B1 (ru) 2016-12-30

Family

ID=45930908

Family Applications (1)

Application Number Title Priority Date Filing Date
EA201391292A EA025255B1 (ru) 2011-03-08 2012-03-07 Способ получения подложки, обеспеченной покрытием

Country Status (17)

Country Link
US (1) US9580807B2 (ru)
EP (1) EP2683669B1 (ru)
JP (1) JP6054890B2 (ru)
KR (1) KR101982357B1 (ru)
CN (1) CN103402940B (ru)
AU (1) AU2012226643B2 (ru)
BR (1) BR112013017834A8 (ru)
CA (1) CA2823906C (ru)
DK (1) DK2683669T3 (ru)
EA (1) EA025255B1 (ru)
ES (1) ES2645936T3 (ru)
FR (1) FR2972447B1 (ru)
MX (1) MX359230B (ru)
NO (1) NO2683669T3 (ru)
PL (1) PL2683669T3 (ru)
PT (1) PT2683669T (ru)
WO (1) WO2012120238A1 (ru)

Families Citing this family (26)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US10000965B2 (en) 2010-01-16 2018-06-19 Cardinal Cg Company Insulating glass unit transparent conductive coating technology
US10000411B2 (en) 2010-01-16 2018-06-19 Cardinal Cg Company Insulating glass unit transparent conductivity and low emissivity coating technology
US10060180B2 (en) 2010-01-16 2018-08-28 Cardinal Cg Company Flash-treated indium tin oxide coatings, production methods, and insulating glass unit transparent conductive coating technology
US8815059B2 (en) * 2010-08-31 2014-08-26 Guardian Industries Corp. System and/or method for heat treating conductive coatings using wavelength-tuned infrared radiation
DE102011089884B4 (de) * 2011-08-19 2016-03-10 Von Ardenne Gmbh Niedrigemittierende Beschichtung und Verfahren zur Herstellung eines niedrigemittierenden Schichtsystems
FR3002768B1 (fr) * 2013-03-01 2015-02-20 Saint Gobain Procede de traitement thermique d'un revetement
FR3021967B1 (fr) * 2014-06-06 2021-04-23 Saint Gobain Procede d'obtention d'un substrat revetu d'une couche fonctionnelle
CN105448681B (zh) * 2014-07-04 2018-11-09 上海微电子装备（集团）股份有限公司 激光退火装置
AP2017009793A0 (en) * 2014-09-09 2017-03-31 Aurora Labs Pty Ltd 3d printing method and apparatus
KR101617019B1 (ko) * 2015-03-12 2016-04-29 주식회사 코윈디에스티 유리 기판 어닐링 장치
CN107848288B (zh) 2015-06-23 2020-02-28 极光实验室企业有限公司 3d打印方法和装置
FR3048244B1 (fr) * 2016-02-26 2018-03-16 Saint-Gobain Glass France Procede de gravure selective d'une couche ou d'un empilement de couches sur substrat verrier
EP3535109A4 (en) 2016-11-02 2020-04-22 Aurora Labs Limited 3D PRINTING METHOD AND DEVICE
US11148228B2 (en) * 2017-07-10 2021-10-19 Guardian Glass, LLC Method of making insulated glass window units
DE102017007939A1 (de) * 2017-08-21 2019-02-21 Ernst-Abbe-Hochschule Jena Vorrichtung und Verfahren zur Rekuperation elektromagnetischer Strahlung
BR112020007955B1 (pt) * 2017-10-25 2022-08-02 Nikon Corporation Aparelho de processamento
CN108793766B (zh) * 2018-06-12 2021-05-25 西安理工大学 一种有效调制中红外透射率的电致变色薄膜及其制备方法
KR102148013B1 (ko) * 2018-07-24 2020-08-25 (주) 큐알에스 레이어 분리장치
KR102061424B1 (ko) * 2018-07-27 2019-12-31 주식회사 코윈디에스티 로이 유리 어닐링 장치
US10822270B2 (en) 2018-08-01 2020-11-03 Guardian Glass, LLC Coated article including ultra-fast laser treated silver-inclusive layer in low-emissivity thin film coating, and/or method of making the same
US11028012B2 (en) 2018-10-31 2021-06-08 Cardinal Cg Company Low solar heat gain coatings, laminated glass assemblies, and methods of producing same
CN111945115A (zh) * 2019-05-17 2020-11-17 常州星宇车灯股份有限公司 一种车灯零件表面膜的处理方法
US11081343B2 (en) 2019-07-19 2021-08-03 International Business Machines Corporation Sub-stoichiometric metal-oxide thin films
KR102208057B1 (ko) * 2019-08-29 2021-01-27 주식회사 코윈디에스티 열 차단 챔버를 구비하는 유리 기판 어닐링 장치
FR3111892B1 (fr) * 2020-06-24 2022-07-22 Saint Gobain Materiau comportant un empilement a sous-couche dielectrique fine d’oxide a base de zinc et procede de depot de ce materiau
FR3111891A1 (fr) * 2020-06-24 2021-12-31 Saint-Gobain Glass France Materiau comportant un empilement a sous-couche dielectrique fine d’oxide a base de zinc et procede de depot de ce materiau

Family Cites Families (15)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2002261013A (ja) * 2000-11-29 2002-09-13 Semiconductor Energy Lab Co Ltd レーザ照射方法並びに半導体装置の作製方法
US7217605B2 (en) 2000-11-29 2007-05-15 Semiconductor Energy Laboratory Co., Ltd. Laser irradiation method and method of manufacturing a semiconductor device
US6844523B2 (en) * 2001-09-07 2005-01-18 Semiconductor Energy Laboratory Co., Ltd. Laser apparatus, laser irradiation method, manufacturing method for a semiconductor device, semiconductor device and electronic equipment
FR2833107B1 (fr) 2001-12-05 2004-02-20 Saint Gobain Electrode de dispositifs electrochimiques/electrocommandables
EP1326273B1 (en) * 2001-12-28 2012-01-18 Semiconductor Energy Laboratory Co., Ltd. Semiconductor device
JP4387099B2 (ja) * 2001-12-28 2009-12-16 株式会社半導体エネルギー研究所 半導体装置の生産方法
JP4660074B2 (ja) * 2003-05-26 2011-03-30 富士フイルム株式会社 レーザアニール装置
US7098155B2 (en) * 2003-09-29 2006-08-29 Ultratech, Inc. Laser thermal annealing of lightly doped silicon substrates
KR100577795B1 (ko) * 2003-12-30 2006-05-11 비오이 하이디스 테크놀로지 주식회사 다결정 실리콘막 형성방법
FI20050216A0 (fi) * 2005-02-23 2005-02-23 Ruuttu Jari Menetelmä valmistaa timanttia, muita jalokiviä, kuten safiiria, rubiinia jne. ja suorittaa näillä pinnoituksia sekä suorittaa pinnoituksia muilla aineilla, kuten boriideillä, oksideillä, nitrideillä jne.
FR2911130B1 (fr) * 2007-01-05 2009-11-27 Saint Gobain Procede de depot de couche mince et produit obtenu
FR2946335B1 (fr) 2009-06-05 2011-09-02 Saint Gobain Procede de depot de couche mince et produit obtenu.
FR2946639B1 (fr) 2009-06-12 2011-07-15 Saint Gobain Procede de depot de couche mince et produit obtenu.
FR2950878B1 (fr) 2009-10-01 2011-10-21 Saint Gobain Procede de depot de couche mince
FR2969391B1 (fr) 2010-12-17 2013-07-05 Saint Gobain Procédé de fabrication d'un dispositif oled

Also Published As

Publication number Publication date
NO2683669T3 (ru) 2018-01-13
EP2683669B1 (fr) 2017-08-16
EA025255B1 (ru) 2016-12-30
DK2683669T3 (en) 2017-10-23
PT2683669T (pt) 2017-10-31
ES2645936T3 (es) 2017-12-11
WO2012120238A1 (fr) 2012-09-13
CN103402940B (zh) 2016-09-28
PL2683669T3 (pl) 2018-01-31
US20140106088A1 (en) 2014-04-17
BR112013017834A8 (pt) 2018-09-04
FR2972447A1 (fr) 2012-09-14
MX2013010285A (es) 2013-10-01
JP6054890B2 (ja) 2016-12-27
MX359230B (es) 2018-09-20
AU2012226643B2 (en) 2015-10-29
AU2012226643A1 (en) 2013-10-10
KR101982357B1 (ko) 2019-05-27
US9580807B2 (en) 2017-02-28
CN103402940A (zh) 2013-11-20
EP2683669A1 (fr) 2014-01-15
CA2823906A1 (fr) 2012-09-13
KR20140052965A (ko) 2014-05-07
CA2823906C (fr) 2019-09-03
JP2014515719A (ja) 2014-07-03
BR112013017834A2 (pt) 2016-10-11
FR2972447B1 (fr) 2019-06-07

Similar Documents

Publication Publication Date Title
EA201391292A1 (ru) Способ получения подложки, обеспеченной покрытием
CY1119676T1 (el) Συνθεσεις και μεθοδοι για τη θεραπεια του καρκινου
EA201690210A1 (ru) Структура сборки стекла и способ сборки стекла, использующий эту структуру
BR112016005816A2 (pt) Combinação de anticorpos anti-lag-3 e anticorpos anti-pd-1 para tratar tumores
EA201591347A1 (ru) Способ получения подложки, снабженной покрытием
EA201591750A1 (ru) Антитела против b7-h4 и иммуноконъюгаты
MX356565B (es) Modificación de consultas de busqueda estructuradas en redes sociales en línea.
UY34676A (es) ?cuchillo para tratamiento de madera, métodos para galvanizado y tratamiento de superficies de cuchillo para tratamiento de madera?.
CA143954S (en) Solar light
CA143953S (en) Solar light
AR098465A1 (es) ANTICUERPOS ANTI-a-SINUCLEÍNA Y MÉTODOS DE UTILIZACIÓN
EA201400222A1 (ru) Способ и устройство для формирования слоистой системы с низкой излучательной способностью
EA201400712A1 (ru) Основа со структурированной поверхностью, способ изготовления такой основы, а также способ определения ее смачиваемости
EA201300819A1 (ru) Молекулы антител, которые связываются с il-17a и il-17f
DK3020418T3 (da) Konjugat af biologisk aktiv polypeptidmonomer og immunoglobulin-Fc-fragment med reduceret receptormedieret clearance og fremgangsmåde til fremstilling af samme
EA201490778A1 (ru) АНТИТЕЛА ПРОТИВ HtrA1 И СПОСОБЫ ПРИМЕНЕНИЯ
BR112017008151A2 (pt) construção de gerenciamento de luz
EA201391389A1 (ru) Кристаллы антител против склеростина и составы на их основе
EA201301130A1 (ru) Имидазопиридазины в качестве ингибиторов акт киназы
BR112013016250A2 (pt) processo de geração de vapor de emissão zero.
BR112014032799A2 (pt) plataforma semi-submersível com viga de contraventamento estabilizadora, e central de energia a partir de ondas em alto mar, integrando essa plataforma
GB201305712D0 (en) Ordered multipoint geostatistics simulation using non-symmetric search mask
EA201891628A1 (ru) Ингибирование аллергической реакции с использованием ингибитора il-33
EA201301090A1 (ru) Антидоты антикоагулянтов
EA201400939A1 (ru) Способ получения медетомидина с использованием хлорацетона

Legal Events

Date Code Title Description
MM4A Lapse of a eurasian patent due to non-payment of renewal fees within the time limit in the following designated state(s)

Designated state(s): AM AZ BY KZ KG MD TJ TM

MM4A Lapse of a eurasian patent due to non-payment of renewal fees within the time limit in the following designated state(s)

Designated state(s): RU