DK373076A - Fremgangsmade til fjernelse af specifikke krystalstrukturfejl fra halvlederskiver - Google Patents

Fremgangsmade til fjernelse af specifikke krystalstrukturfejl fra halvlederskiver

Info

Publication number
DK373076A
DK373076A DK373076A DK373076A DK373076A DK 373076 A DK373076 A DK 373076A DK 373076 A DK373076 A DK 373076A DK 373076 A DK373076 A DK 373076A DK 373076 A DK373076 A DK 373076A
Authority
DK
Denmark
Prior art keywords
procedure
crystal structure
specific crystal
removing specific
semiconductor discs
Prior art date
Application number
DK373076A
Other languages
Danish (da)
English (en)
Inventor
W Heinke
D Reimann
H Kirschner
Original Assignee
Wacker Chemitronic
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Wacker Chemitronic filed Critical Wacker Chemitronic
Publication of DK373076A publication Critical patent/DK373076A/da

Links

Classifications

    • CCHEMISTRY; METALLURGY
    • C30CRYSTAL GROWTH
    • C30BSINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
    • C30B29/00Single crystals or homogeneous polycrystalline material with defined structure characterised by the material or by their shape
    • C30B29/02Elements
    • C30B29/06Silicon
    • CCHEMISTRY; METALLURGY
    • C30CRYSTAL GROWTH
    • C30BSINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
    • C30B33/00After-treatment of single crystals or homogeneous polycrystalline material with defined structure
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/04Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
    • H01L21/18Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
    • H01L21/30Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
    • H01L21/322Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26 to modify their internal properties, e.g. to produce internal imperfections
    • H01L21/3221Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26 to modify their internal properties, e.g. to produce internal imperfections of silicon bodies, e.g. for gettering
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10STECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S148/00Metal treatment
    • Y10S148/061Gettering-armorphous layers

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Organic Chemistry (AREA)
  • Metallurgy (AREA)
  • Materials Engineering (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • General Physics & Mathematics (AREA)
  • Power Engineering (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Computer Hardware Design (AREA)
  • Manufacturing & Machinery (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • Mechanical Treatment Of Semiconductor (AREA)
  • Crystals, And After-Treatments Of Crystals (AREA)
DK373076A 1975-08-22 1976-08-18 Fremgangsmade til fjernelse af specifikke krystalstrukturfejl fra halvlederskiver DK373076A (da)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE19752537464 DE2537464A1 (de) 1975-08-22 1975-08-22 Verfahren zur entfernung spezifischer kristallbaufehler aus halbleiterscheiben

Publications (1)

Publication Number Publication Date
DK373076A true DK373076A (da) 1977-02-23

Family

ID=5954629

Family Applications (1)

Application Number Title Priority Date Filing Date
DK373076A DK373076A (da) 1975-08-22 1976-08-18 Fremgangsmade til fjernelse af specifikke krystalstrukturfejl fra halvlederskiver

Country Status (9)

Country Link
US (1) US4042419A (fr)
JP (1) JPS5226160A (fr)
BE (1) BE845381A (fr)
CH (1) CH596879A5 (fr)
DE (1) DE2537464A1 (fr)
DK (1) DK373076A (fr)
FR (1) FR2321325A1 (fr)
IT (1) IT1076467B (fr)
NL (1) NL7608324A (fr)

Families Citing this family (17)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4144099A (en) * 1977-10-31 1979-03-13 International Business Machines Corporation High performance silicon wafer and fabrication process
JPS54110783A (en) * 1978-02-20 1979-08-30 Hitachi Ltd Semiconductor substrate and its manufacture
US4177084A (en) * 1978-06-09 1979-12-04 Hewlett-Packard Company Method for producing a low defect layer of silicon-on-sapphire wafer
US4231809A (en) * 1979-05-25 1980-11-04 Bell Telephone Laboratories, Incorporated Method of removing impurity metals from semiconductor devices
DE2927220A1 (de) * 1979-07-05 1981-01-15 Wacker Chemitronic Verfahren zur stapelfehlerinduzierenden oberflaechenzerstoerung von halbleiterscheiben
US4257827A (en) * 1979-11-13 1981-03-24 International Business Machines Corporation High efficiency gettering in silicon through localized superheated melt formation
JPS5680139A (en) * 1979-12-05 1981-07-01 Chiyou Lsi Gijutsu Kenkyu Kumiai Manufacture of semiconductor device
JPS57104228A (en) * 1980-12-22 1982-06-29 Nec Corp Manufacture of semiconductor device
US4665695A (en) 1981-03-13 1987-05-19 Trw Inc. Hydrostatic load sense steering system
DE3148957C2 (de) * 1981-12-10 1987-01-02 Wacker-Chemitronic Gesellschaft für Elektronik-Grundstoffe mbH, 8263 Burghausen Verfahren zum Herstellen rückseitig oberflächengestörter Halbleiterscheiben
JPS61159371A (ja) * 1984-12-28 1986-07-19 Fuji Seiki Seizosho:Kk Icの基板用シリコンウェーハのブラスト装置
US4659400A (en) * 1985-06-27 1987-04-21 General Instrument Corp. Method for forming high yield epitaxial wafers
DE3737815A1 (de) * 1987-11-06 1989-05-18 Wacker Chemitronic Siliciumscheiben zur erzeugung von oxidschichten hoher durchschlagsfestigkeit und verfahren zur ihrer herstellung
DE3934140A1 (de) * 1989-10-12 1991-04-18 Wacker Chemitronic Verfahren zur die ausbildung von getterfaehigen zentren induzierenden oberflaechenbehandlung von halbleiterscheiben und dadurch erhaeltliche beidseitig polierte scheiben
KR100231607B1 (ko) * 1996-12-31 1999-11-15 김영환 반도체 소자의 초저접합 형성방법
JP2000294549A (ja) * 1999-02-02 2000-10-20 Nec Corp 半導体装置及びその製造方法
TW462085B (en) * 2000-10-26 2001-11-01 United Microelectronics Corp Planarization of organic silicon low dielectric constant material by chemical mechanical polishing

Family Cites Families (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3701696A (en) * 1969-08-20 1972-10-31 Gen Electric Process for simultaneously gettering,passivating and locating a junction within a silicon crystal
GB1334520A (en) * 1970-06-12 1973-10-17 Atomic Energy Authority Uk Formation of electrically insulating layers in semiconducting materials
FR2191272A1 (fr) * 1972-06-27 1974-02-01 Ibm France
JPS5037348A (fr) * 1973-08-06 1975-04-08
JPS5051665A (fr) * 1973-09-07 1975-05-08
US3929529A (en) * 1974-12-09 1975-12-30 Ibm Method for gettering contaminants in monocrystalline silicon
US3933530A (en) * 1975-01-28 1976-01-20 Rca Corporation Method of radiation hardening and gettering semiconductor devices
US3997368A (en) * 1975-06-24 1976-12-14 Bell Telephone Laboratories, Incorporated Elimination of stacking faults in silicon devices: a gettering process

Also Published As

Publication number Publication date
FR2321325B1 (fr) 1978-11-03
JPS5226160A (en) 1977-02-26
US4042419A (en) 1977-08-16
IT1076467B (it) 1985-04-27
FR2321325A1 (fr) 1977-03-18
NL7608324A (nl) 1977-02-24
CH596879A5 (fr) 1978-03-31
DE2537464A1 (de) 1977-03-03
BE845381A (fr) 1977-02-21

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