DK2590802T3 - Fremgangsmåde og indretning til plasmabehandling med atmosfærisk tryk - Google Patents
Fremgangsmåde og indretning til plasmabehandling med atmosfærisk trykInfo
- Publication number
- DK2590802T3 DK2590802T3 DK11743201.3T DK11743201T DK2590802T3 DK 2590802 T3 DK2590802 T3 DK 2590802T3 DK 11743201 T DK11743201 T DK 11743201T DK 2590802 T3 DK2590802 T3 DK 2590802T3
- Authority
- DK
- Denmark
- Prior art keywords
- atmospheric pressure
- plasma treatment
- pressure plasma
- treatment
- atmospheric
- Prior art date
Links
Classifications
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
- C23C16/54—Apparatus specially adapted for continuous coating
- C23C16/545—Apparatus specially adapted for continuous coating for coating elongated substrates
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
- B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
- B29C59/00—Surface shaping of articles, e.g. embossing; Apparatus therefor
- B29C59/14—Surface shaping of articles, e.g. embossing; Apparatus therefor by plasma treatment
-
- D—TEXTILES; PAPER
- D06—TREATMENT OF TEXTILES OR THE LIKE; LAUNDERING; FLEXIBLE MATERIALS NOT OTHERWISE PROVIDED FOR
- D06M—TREATMENT, NOT PROVIDED FOR ELSEWHERE IN CLASS D06, OF FIBRES, THREADS, YARNS, FABRICS, FEATHERS OR FIBROUS GOODS MADE FROM SUCH MATERIALS
- D06M10/00—Physical treatment of fibres, threads, yarns, fabrics, or fibrous goods made from such materials, e.g. ultrasonic, corona discharge, irradiation, electric currents, or magnetic fields; Physical treatment combined with treatment with chemical compounds or elements
- D06M10/02—Physical treatment of fibres, threads, yarns, fabrics, or fibrous goods made from such materials, e.g. ultrasonic, corona discharge, irradiation, electric currents, or magnetic fields; Physical treatment combined with treatment with chemical compounds or elements ultrasonic or sonic; Corona discharge
- D06M10/025—Corona discharge or low temperature plasma
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/32—Gas-filled discharge tubes
- H01J37/32009—Arrangements for generation of plasma specially adapted for examination or treatment of objects, e.g. plasma sources
- H01J37/32082—Radio frequency generated discharge
- H01J37/32091—Radio frequency generated discharge the radio frequency energy being capacitively coupled to the plasma
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/32—Gas-filled discharge tubes
- H01J37/32431—Constructional details of the reactor
- H01J37/32532—Electrodes
- H01J37/32559—Protection means, e.g. coatings
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/32—Gas-filled discharge tubes
- H01J37/32431—Constructional details of the reactor
- H01J37/32733—Means for moving the material to be treated
- H01J37/32752—Means for moving the material to be treated for moving the material across the discharge
- H01J37/32761—Continuous moving
- H01J37/3277—Continuous moving of continuous material
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/32—Gas-filled discharge tubes
- H01J37/32431—Constructional details of the reactor
- H01J37/32798—Further details of plasma apparatus not provided for in groups H01J37/3244 - H01J37/32788; special provisions for cleaning or maintenance of the apparatus
- H01J37/32816—Pressure
- H01J37/32825—Working under atmospheric pressure or higher
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
- B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
- B29C59/00—Surface shaping of articles, e.g. embossing; Apparatus therefor
- B29C59/14—Surface shaping of articles, e.g. embossing; Apparatus therefor by plasma treatment
- B29C2059/145—Atmospheric plasma
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
- B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
- B29C59/00—Surface shaping of articles, e.g. embossing; Apparatus therefor
- B29C59/14—Surface shaping of articles, e.g. embossing; Apparatus therefor by plasma treatment
- B29C2059/147—Low pressure plasma; Glow discharge plasma
Landscapes
- Engineering & Computer Science (AREA)
- Chemical & Material Sciences (AREA)
- Physics & Mathematics (AREA)
- Plasma & Fusion (AREA)
- Analytical Chemistry (AREA)
- Textile Engineering (AREA)
- General Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Plasma Technology (AREA)
- Chemical Vapour Deposition (AREA)
- Spectroscopy & Molecular Physics (AREA)
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US36272910P | 2010-07-09 | 2010-07-09 | |
EP10169063 | 2010-07-09 | ||
PCT/EP2011/060954 WO2012004175A1 (en) | 2010-07-09 | 2011-06-29 | Method and device for atmospheric pressure plasma treatment |
Publications (1)
Publication Number | Publication Date |
---|---|
DK2590802T3 true DK2590802T3 (da) | 2014-10-06 |
Family
ID=43478053
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DK11743201.3T DK2590802T3 (da) | 2010-07-09 | 2011-06-29 | Fremgangsmåde og indretning til plasmabehandling med atmosfærisk tryk |
Country Status (4)
Country | Link |
---|---|
US (1) | US9255330B2 (da) |
EP (1) | EP2590802B1 (da) |
DK (1) | DK2590802T3 (da) |
WO (1) | WO2012004175A1 (da) |
Families Citing this family (23)
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US9605376B2 (en) * | 2011-06-28 | 2017-03-28 | Mtix Ltd. | Treating materials with combined energy sources |
DK2666544T3 (da) | 2012-05-24 | 2018-01-02 | Vito Nv | Fremgangsmåde til deponering og karakterisering af en coating |
US10192722B2 (en) * | 2013-04-08 | 2019-01-29 | Sunline Co., Ltd. | Plasma treatment method, plasma treatment apparatus, and plasma-treated long object |
ITMI20130855A1 (it) * | 2013-05-27 | 2014-11-28 | Univ Milano Bicocca | Metodo di rivestimento con film polimerico di un substrato mediante deposizione e successiva polimerizzazione per trattamento a plasma di una composizione monomerica. |
EP3151981B1 (en) * | 2014-06-05 | 2021-11-17 | Illinois Tool Works, Inc. | System and method for cleaning an object |
DE102014217821A1 (de) * | 2014-09-05 | 2016-03-10 | Tesa Se | Verfahren zur Erhöhung der Adhäsion zwischen der ersten Oberfläche eines ersten bahnförmigen Materials und einer ersten Oberfläche eines zweiten bahnförmigen Materials |
SG11201705969VA (en) | 2015-01-22 | 2017-08-30 | Chia Sern Chan | Non-thermal soft plasma cleaning |
GR1009432B (el) * | 2015-09-09 | 2019-01-15 | Εθνικο Κεντρο Ερευνας Φυσικων Επιστημων "Δημοκριτος" | Διαταξη ατμοσφαιρικου πλασματος για ομοιομορφη επεξεργασια μεγαλων επιφανειων |
US11583689B2 (en) * | 2016-09-22 | 2023-02-21 | Ajou University Industry-Academic Cooperation Foundation | Composition for atopy or psoriasis treatment comprising liquid type plasma |
EP3336140B1 (en) | 2016-12-19 | 2019-07-24 | The Goodyear Tire & Rubber Company | Atmospheric plasma treatment of reinforcement cords and use in rubber articles |
EP3336141B1 (en) | 2016-12-19 | 2019-08-14 | The Goodyear Tire & Rubber Company | Atmospheric plasma treatment of reinforcement cords and use in rubber articles |
KR102120552B1 (ko) | 2017-09-18 | 2020-06-08 | 아주대학교산학협력단 | 액상 플라즈마를 포함하는 피부 진정용 조성물 |
WO2019180839A1 (ja) * | 2018-03-20 | 2019-09-26 | 株式会社Fuji | プラズマ装置、プラズマ生成方法 |
JP2021527170A (ja) * | 2018-06-14 | 2021-10-11 | アプライド マテリアルズ インコーポレイテッドApplied Materials,Incorporated | フレキシブル基板を誘導するためのローラデバイス、フレキシブル基板を搬送するためのローラデバイスの使用、真空処理装置、及びフレキシブル基板を処理する方法 |
KR102031713B1 (ko) * | 2019-01-29 | 2019-10-14 | (주)에스제이글로벌 | 창상치료용 플라즈마 전극 패드 및 플라즈마 치료 장치 |
US20220316064A1 (en) * | 2019-06-18 | 2022-10-06 | Molecular Plasma Group S.A. | Antimicrobial and/or antiviral polymer surfaces |
DE102019007935B4 (de) * | 2019-11-14 | 2023-06-29 | Elfolion Gmbh | Verfahren zum Bearbeiten flexibler Substrate und Vakuumbearbeitungsanlage zur Umsetzung des Verfahrens |
EP3865292B1 (en) * | 2020-02-12 | 2023-06-07 | The Goodyear Tire & Rubber Company | A plasma cord coating device |
EP3881941A1 (en) * | 2020-03-17 | 2021-09-22 | Molecular Plasma Group SA | Plasma coating method and apparatus for biological surface modification |
US11910726B2 (en) * | 2021-02-26 | 2024-02-20 | Metox International, Inc. | Multi-stack susceptor reactor for high-throughput superconductor manufacturing |
US20240066161A1 (en) * | 2021-08-09 | 2024-02-29 | TellaPure, LLC | Methods and apparatus for generating atmospheric pressure, low temperature plasma |
CN113737510B (zh) * | 2021-09-30 | 2024-02-23 | 昆山豆奇电子科技有限公司 | 一种冷态等离子体高分子聚合物表面处理方法 |
CN115142255A (zh) * | 2022-06-24 | 2022-10-04 | 青岛华世洁环保科技有限公司 | 碳纤维表面处理装置及对碳纤维进行表面处理的方法 |
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JPS59219927A (ja) * | 1983-05-27 | 1984-12-11 | Fuji Electric Corp Res & Dev Ltd | プラズマcvd装置 |
JP2714247B2 (ja) * | 1990-10-29 | 1998-02-16 | キヤノン株式会社 | マイクロ波プラズマcvd法による大面積の機能性堆積膜を連続的に形成する方法及び装置 |
US5472509A (en) * | 1993-11-30 | 1995-12-05 | Neomecs Incorporated | Gas plasma apparatus with movable film liners |
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JP2001279457A (ja) | 2000-01-24 | 2001-10-10 | Sekisui Chem Co Ltd | 常圧プラズマを用いた連続表面処理法又は連続成膜法及び連続表面処理装置又は連続成膜装置 |
US20040050685A1 (en) | 2000-11-14 | 2004-03-18 | Takuya Yara | Method and device for atmospheric plasma processing |
FR2816726B1 (fr) | 2000-11-16 | 2006-06-23 | Air Liquide | Installation dans laquelle est realisee une operation necessitant un controle de l'atmosphere a l'interieur d'une enceinte |
WO2002043781A1 (de) | 2000-11-29 | 2002-06-06 | Fraunhofer Gesellschaft zur Förderung der angewandten Forschung e.V. | Verfahren und vorrichtung zur oberflächenbehandlung von objekten |
JP4000830B2 (ja) * | 2001-04-27 | 2007-10-31 | コニカミノルタホールディングス株式会社 | プラズマ放電処理装置 |
JP5050299B2 (ja) * | 2001-05-17 | 2012-10-17 | コニカミノルタホールディングス株式会社 | 長尺基材の表面処理方法及びその方法により製造された光学フィルム |
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EP1582270A1 (en) | 2004-03-31 | 2005-10-05 | Vlaamse Instelling voor Technologisch Onderzoek | Method and apparatus for coating a substrate using dielectric barrier discharge |
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JP2007073333A (ja) | 2005-09-07 | 2007-03-22 | Konica Minolta Holdings Inc | プラズマ放電処理装置、プラズマ放電処理方法 |
EP1785198A1 (en) | 2005-11-14 | 2007-05-16 | Vlaamse Instelling voor Technologisch Onderzoek | A method for atmospheric plasma deposition of conjugated polymer coatings |
JP2009525381A (ja) * | 2006-02-02 | 2009-07-09 | フジフィルム マニュファクチャリング ユーロプ ビー.ブイ. | プラズマによる表面処理方法及び表面処理装置 |
JP2007332426A (ja) | 2006-06-15 | 2007-12-27 | Kobe Steel Ltd | 成膜方法及び装置 |
JP5262723B2 (ja) | 2006-11-27 | 2013-08-14 | コニカミノルタビジネステクノロジーズ株式会社 | 大気圧プラズマ処理装置及び大気圧プラズマ処理方法 |
EP1978038A1 (en) | 2007-04-02 | 2008-10-08 | Vlaamse Instelling Voor Technologisch Onderzoek (Vito) | A method for producing a coating by atmospheric pressure plasma technology |
JP2009046710A (ja) * | 2007-08-16 | 2009-03-05 | Fuji Electric Systems Co Ltd | 半導体素子の連続的製造装置 |
WO2009061610A1 (en) | 2007-11-08 | 2009-05-14 | Enercon Industries Corporation | Atmospheric treater with roller confined discharge chamber |
WO2009104579A1 (ja) | 2008-02-22 | 2009-08-27 | コニカミノルタホールディングス株式会社 | プラズマ放電処理装置及び薄膜積層体 |
DE102008027461B4 (de) * | 2008-06-09 | 2011-07-21 | Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V., 80686 | Vorrichtung und Verfahren zur mikrostrukturierten Plasmabehandlung |
-
2011
- 2011-06-29 US US13/704,163 patent/US9255330B2/en active Active
- 2011-06-29 DK DK11743201.3T patent/DK2590802T3/da active
- 2011-06-29 WO PCT/EP2011/060954 patent/WO2012004175A1/en active Application Filing
- 2011-06-29 EP EP11743201.3A patent/EP2590802B1/en active Active
Also Published As
Publication number | Publication date |
---|---|
EP2590802A1 (en) | 2013-05-15 |
WO2012004175A1 (en) | 2012-01-12 |
EP2590802B1 (en) | 2014-07-02 |
US9255330B2 (en) | 2016-02-09 |
US20130084409A1 (en) | 2013-04-04 |
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