DK1789848T3 - Fleksibelt nano-prægende stempel - Google Patents

Fleksibelt nano-prægende stempel

Info

Publication number: DK1789848T3
Authority: DK; Denmark
Prior art keywords: embossed; piston; flexible nano; nano; flexible
Prior art date: 2004-09-08

Application number

DK05777919.1T

Other languages

English (en)

Inventor

Ole Hansen

Theodor Nielsen

Anders Kristensen

Original Assignee

Nil Technology Aps

Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)

2004-09-08

Filing date

2005-09-07

Publication date

2010-10-25

2005-09-07 Application filed by Nil Technology Aps filed Critical Nil Technology Aps

2010-10-25 Application granted granted Critical

2010-10-25 Publication of DK1789848T3 publication Critical patent/DK1789848T3/da

Links

Classifications

- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41F—PRINTING MACHINES OR PRESSES
- B41F17/00—Printing apparatus or machines of special types or for particular purposes, not otherwise provided for
- B41F17/001—Pad printing apparatus or machines
- B—PERFORMING OPERATIONS; TRANSPORTING
- B81—MICROSTRUCTURAL TECHNOLOGY
- B81C—PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS
- B81C99/00—Subject matter not provided for in other groups of this subclass
- B81C99/0075—Manufacture of substrate-free structures
- B81C99/009—Manufacturing the stamps or the moulds

Landscapes

Engineering & Computer Science (AREA)
Manufacturing & Machinery (AREA)
Microelectronics & Electronic Packaging (AREA)
Shaping Of Tube Ends By Bending Or Straightening (AREA)
Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)

DK05777919.1T 2004-09-08 2005-09-07 Fleksibelt nano-prægende stempel DK1789848T3 (da)

Applications Claiming Priority (3)

Application Number	Priority Date	Filing Date	Title
DKPA200401354		2004-09-08
US61252004P	2004-09-24	2004-09-24
PCT/DK2005/000570 WO2006026993A1 (en)	2004-09-08	2005-09-07	A flexible nano-imprint stamp

Publications (1)

Publication Number	Publication Date
DK1789848T3 true DK1789848T3 (da)	2010-10-25

Family

ID=38731729

Family Applications (1)

Application Number	Title	Priority Date	Filing Date
DK05777919.1T DK1789848T3 (da)	2004-09-08	2005-09-07	Fleksibelt nano-prægende stempel

Country Status (10)

Country	Link
US (1)	US8075298B2 (da)
EP (1)	EP1789848B1 (da)
JP (1)	JP4733134B2 (da)
CN (1)	CN101036086B (da)
AU (1)	AU2005282060A1 (da)
CA (1)	CA2579603A1 (da)
DK (1)	DK1789848T3 (da)
NO (1)	NO20071731L (da)
WO (1)	WO2006026993A1 (da)
ZA (1)	ZA200702713B (da)

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US9016221B2 (en)	2004-02-17	2015-04-28	University Of Florida Research Foundation, Inc.	Surface topographies for non-toxic bioadhesion control
US7676088B2 (en) *	2004-12-23	2010-03-09	Asml Netherlands B.V.	Imprint lithography
US8202075B2 (en) *	2005-08-12	2012-06-19	Canon Kabushiki Kaisha	Imprint apparatus and imprint method
JP5268239B2 (ja) *	2005-10-18	2013-08-21	キヤノン株式会社	パターン形成装置、パターン形成方法
US20070138699A1 (en) *	2005-12-21	2007-06-21	Asml Netherlands B.V.	Imprint lithography
US7517211B2 (en) *	2005-12-21	2009-04-14	Asml Netherlands B.V.	Imprint lithography
US7500431B2 (en) *	2006-01-12	2009-03-10	Tsai-Wei Wu	System, method, and apparatus for membrane, pad, and stamper architecture for uniform base layer and nanoimprinting pressure
JP4938365B2 (ja) *	2006-06-26	2012-05-23	パナソニック株式会社	カーボン金型、およびその製造方法
US20080315459A1 (en) *	2007-06-21	2008-12-25	3M Innovative Properties Company	Articles and methods for replication of microstructures and nanofeatures
US20090041986A1 (en) *	2007-06-21	2009-02-12	3M Innovative Properties Company	Method of making hierarchical articles
US20090114618A1 (en) *	2007-06-21	2009-05-07	3M Innovative Properties Company	Method of making hierarchical articles
SG185929A1 (en) *	2007-11-21	2012-12-28	Molecular Imprints Inc	Porous template and imprinting stack for nano-imprint lithography
US20090159936A1 (en) *	2007-12-20	2009-06-25	Uday Shah	Device with asymmetric spacers
JP2010009729A (ja) *	2008-06-30	2010-01-14	Toshiba Corp	インプリント用スタンパ、インプリント用スタンパの製造方法、磁気記録媒体、磁気記録媒体の製造方法及び磁気ディスク装置
EP2329319B1 (de) *	2008-08-27	2013-07-17	Amo Gmbh	Verbessertes nanoimprint-verfahren
US8145457B2 (en) *	2008-09-22	2012-03-27	Massachusetts Institute Of Technology	Method and apparatus for modeling deformation of a deformable body embossed with a stamp
US20100104852A1 (en) *	2008-10-23	2010-04-29	Molecular Imprints, Inc.	Fabrication of High-Throughput Nano-Imprint Lithography Templates
CN102245314B (zh) *	2008-11-11	2014-11-19	佛罗里达大学研究基金会有限公司	图案化表面的方法以及包含该表面的制品
WO2011038741A1 (en)	2009-10-02	2011-04-07	Danmarks Tekniske Universitet	Injection molding tools with micro/nano-meter pattern
US8585954B2 (en) *	2009-11-10	2013-11-19	Massachusetts Institute Of Technology	Method and apparatus for embossing a deformable body
FR2955520B1 (fr) *	2010-01-28	2012-08-31	Commissariat Energie Atomique	Moule pour la lithographie par nano-impression et procedes de realisation
JP5760714B2 (ja)	2011-06-03	2015-08-12	住友電気工業株式会社	ナノインプリント用モールド
US9937655B2 (en) *	2011-06-15	2018-04-10	University Of Florida Research Foundation, Inc.	Method of manufacturing catheter for antimicrobial control
RU2476917C1 (ru) *	2011-08-12	2013-02-27	Открытое акционерное общество "НИИ молекулярной электроники и завод "Микрон"	Способ изготовления штампа для наноимпринт литографии
JP5328869B2 (ja) *	2011-10-21	2013-10-30	東芝機械株式会社	転写用の型の製造方法
US9149958B2 (en) *	2011-11-14	2015-10-06	Massachusetts Institute Of Technology	Stamp for microcontact printing
CN104903793A (zh) *	2012-10-29	2015-09-09	西北大学	热启动和投影平版印刷***和方法
TWI665078B (zh)	2013-07-22	2019-07-11	皇家飛利浦有限公司	製造圖案化印模以圖案化輪廓表面之方法、供在壓印微影製程中使用之圖案化印模、壓印微影方法、包括圖案化輪廓表面之物件及圖案化印模用於壓印微影之用法
CN112445064A (zh) *	2014-04-22	2021-03-05	Ev 集团 E·索尔纳有限责任公司	用于压印纳米结构的方法和装置
SG11201702232RA (en)	2014-09-22	2017-04-27	Koninkl Philips Nv	Transfer method and apparatus and computer program product
US9704821B2 (en) *	2015-08-11	2017-07-11	X-Celeprint Limited	Stamp with structured posts
WO2020152345A1 (en) *	2019-01-24	2020-07-30	Nil Technology Aps	A component for liquid handling with self-cleaning properties

Family Cites Families (10)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
JP3372258B2 (ja) *	1995-08-04	2003-01-27	インターナシヨナル・ビジネス・マシーンズ・コーポレーシヨン	リソグラフィ・プロセス用のスタンプ
US6482742B1 (en)	2000-07-18	2002-11-19	Stephen Y. Chou	Fluid pressure imprint lithography
US6365059B1 (en)	2000-04-28	2002-04-02	Alexander Pechenik	Method for making a nano-stamp and for forming, with the stamp, nano-size elements on a substrate
SE516414C2 (sv) *	2000-05-24	2002-01-15	Obducat Ab	Metod vid tillverkning av en mall, samt mallen tillverkad därav
US20030017424A1 (en)	2001-07-18	2003-01-23	Miri Park	Method and apparatus for fabricating complex grating structures
US20030071016A1 (en) *	2001-10-11	2003-04-17	Wu-Sheng Shih	Patterned structure reproduction using nonsticking mold
US6743368B2 (en) *	2002-01-31	2004-06-01	Hewlett-Packard Development Company, L.P.	Nano-size imprinting stamp using spacer technique
JP3821069B2 (ja) *	2002-08-01	2006-09-13	株式会社日立製作所	転写パターンによる構造体の形成方法
US6916511B2 (en) *	2002-10-24	2005-07-12	Hewlett-Packard Development Company, L.P.	Method of hardening a nano-imprinting stamp
KR100585951B1 (ko) *	2004-02-18	2006-06-01	한국기계연구원	조합/분리형 독립구동이 가능한 복수 개의 모듈을 갖는 임프린팅 장치

2005
- 2005-09-07 EP EP05777919A patent/EP1789848B1/en active Active
- 2005-09-07 DK DK05777919.1T patent/DK1789848T3/da active
- 2005-09-07 CA CA002579603A patent/CA2579603A1/en not_active Abandoned
- 2005-09-07 US US11/574,645 patent/US8075298B2/en not_active Expired - Fee Related
- 2005-09-07 CN CN2005800300768A patent/CN101036086B/zh not_active Expired - Fee Related
- 2005-09-07 AU AU2005282060A patent/AU2005282060A1/en not_active Abandoned
- 2005-09-07 JP JP2007530583A patent/JP4733134B2/ja not_active Expired - Fee Related
- 2005-09-07 WO PCT/DK2005/000570 patent/WO2006026993A1/en active Application Filing
2007
- 2007-03-30 ZA ZA200702713A patent/ZA200702713B/xx unknown
- 2007-04-02 NO NO20071731A patent/NO20071731L/no not_active Application Discontinuation

Also Published As

Publication number	Publication date
WO2006026993A1 (en)	2006-03-16
EP1789848A1 (en)	2007-05-30
WO2006026993A9 (en)	2006-09-21
JP4733134B2 (ja)	2011-07-27
ZA200702713B (en)	2008-08-27
CN101036086B (zh)	2011-01-19
US20080000375A1 (en)	2008-01-03
AU2005282060A1 (en)	2006-03-16
EP1789848B1 (en)	2010-06-30
CN101036086A (zh)	2007-09-12
CA2579603A1 (en)	2006-03-16
US8075298B2 (en)	2011-12-13
NO20071731L (no)	2007-04-02
JP2008512274A (ja)	2008-04-24

Publication	Publication Date	Title
DK1789848T3 (da)	2010-10-25	Fleksibelt nano-prægende stempel
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DE112005001624A5 (de)	2007-05-24	Brillengestell
ATE392425T1 (de)	2008-05-15	Thiazolyl-dihydro-indazole
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DE502005002602D1 (de)	2008-03-13	Fahrzeugtemperiersystem
DE502005004695D1 (de)	2008-08-28	Sicherheitsfangseil
DE502004012213D1 (de)	2011-03-31	Flachdichtung
DE602005012921D1 (de)	2009-04-09	Flachbildschirm
AT500198B1 (de)	2006-09-15	Ladewagen
DE202004017327U1 (de)	2005-04-07	Fitnessrad
ATE389633T1 (de)	2008-04-15	Omega-phenyloctanamide
DE112005000794T5 (de)	2007-05-16	Urethanspritzpistolenanordnung
DE502005007686D1 (de)	2009-08-27	Gutverteileinrichtung