DK1564464T3 - Piezoventil - Google Patents

Piezoventil

Info

Publication number
DK1564464T3
DK1564464T3 DK04002968T DK04002968T DK1564464T3 DK 1564464 T3 DK1564464 T3 DK 1564464T3 DK 04002968 T DK04002968 T DK 04002968T DK 04002968 T DK04002968 T DK 04002968T DK 1564464 T3 DK1564464 T3 DK 1564464T3
Authority
DK
Denmark
Prior art keywords
piezo valve
transducer
piezo
biased
opens
Prior art date
Application number
DK04002968T
Other languages
English (en)
Inventor
Herbert Frisch
Original Assignee
Festo Ag & Co
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Festo Ag & Co filed Critical Festo Ag & Co
Application granted granted Critical
Publication of DK1564464T3 publication Critical patent/DK1564464T3/da

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K31/00—Actuating devices; Operating means; Releasing devices
    • F16K31/004—Actuating devices; Operating means; Releasing devices actuated by piezoelectric means
    • F16K31/005—Piezoelectric benders
    • F16K31/006—Piezoelectric benders having a free end
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T137/00—Fluid handling
    • Y10T137/8593—Systems
    • Y10T137/86493—Multi-way valve unit
    • Y10T137/86574—Supply and exhaust
    • Y10T137/86622—Motor-operated
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T137/00—Fluid handling
    • Y10T137/8593—Systems
    • Y10T137/86493—Multi-way valve unit
    • Y10T137/86879—Reciprocating valve unit
    • Y10T137/86895—Plural disk or plug

Landscapes

  • Engineering & Computer Science (AREA)
  • General Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Electrically Driven Valve-Operating Means (AREA)
  • Fuel-Injection Apparatus (AREA)
DK04002968T 2004-02-11 2004-02-11 Piezoventil DK1564464T3 (da)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
EP20040002968 EP1564464B1 (de) 2004-02-11 2004-02-11 Piezoventil

Publications (1)

Publication Number Publication Date
DK1564464T3 true DK1564464T3 (da) 2006-05-29

Family

ID=34684658

Family Applications (1)

Application Number Title Priority Date Filing Date
DK04002968T DK1564464T3 (da) 2004-02-11 2004-02-11 Piezoventil

Country Status (5)

Country Link
US (1) US7322376B2 (da)
EP (1) EP1564464B1 (da)
AT (1) ATE323861T1 (da)
DE (1) DE502004000445D1 (da)
DK (1) DK1564464T3 (da)

Families Citing this family (29)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CA2613853A1 (en) * 2006-12-11 2008-06-11 Fisher & Paykel Appliances Limited Variable flow valve
DE102007038545A1 (de) * 2007-08-16 2009-02-19 Robert Bosch Gmbh Programmierbarer Filterprozessor
WO2010009435A1 (en) * 2008-07-17 2010-01-21 Schlumberger Canada Limited Downhole piezoelectric devices
US8978757B2 (en) 2008-07-17 2015-03-17 Schlumberger Technology Corporation Remote actuation testing tool for high pressure differential downhole environments
US8082952B2 (en) * 2008-08-22 2011-12-27 Hamilton Sundstrand Corporation Piezoelectric bending element actuator for servo valve
US8414366B2 (en) * 2008-10-20 2013-04-09 GM Global Technology Operations LLC Active material enabled pressure release valves and methods of use
TWI435196B (zh) * 2009-10-15 2014-04-21 Pivotal Systems Corp 氣體流量控制方法及裝置
US9400004B2 (en) 2010-11-29 2016-07-26 Pivotal Systems Corporation Transient measurements of mass flow controllers
US8631825B2 (en) 2010-12-22 2014-01-21 Inzi Controls Co., Ltd. Piezo valve
EP2518378B1 (en) * 2011-04-28 2013-12-25 Inzi Controls Co., Ltd. Piezo valve
EP2724061B1 (de) * 2011-12-02 2014-12-31 Festo AG & Co. KG Ventilanordnung
CN104508342B (zh) * 2012-08-16 2017-05-17 费斯托股份有限两合公司 流体阀
KR101386671B1 (ko) * 2012-11-29 2014-04-21 인지컨트롤스 주식회사 피에조밸브 및 이를 위한 제조방법
DE102012023532A1 (de) * 2012-11-30 2014-06-05 Wabco Gmbh Elektropneumatisches Ventil
WO2014201032A1 (en) * 2013-06-11 2014-12-18 Illinois Tool Works Inc. High flow piezo type valve
US10401202B2 (en) 2015-07-10 2019-09-03 Pivotal Systems Corporation Method and apparatus for gas flow control
US11199771B2 (en) 2016-10-20 2021-12-14 Asml Netherlands B.V. Pressure control valve, a fluid handling structure for lithographic apparatus and a lithographic apparatus
DE102017200308B4 (de) * 2017-01-10 2021-07-08 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. Mikromechanische Bauelemente mit mechanischen Aktuatoren
DE102017204662C5 (de) * 2017-03-21 2021-02-25 Conti Temic Microelectronic Gmbh Pneumatisches Ventil
US11794476B2 (en) 2018-05-11 2023-10-24 Matthews International Corporation Micro-valves for use in jetting assemblies
US11639057B2 (en) 2018-05-11 2023-05-02 Matthews International Corporation Methods of fabricating micro-valves and jetting assemblies including such micro-valves
CN112352123B (zh) 2018-05-11 2023-05-12 马修斯国际公司 用于在喷射组件中使用的微型阀的电极结构
JP7431751B2 (ja) 2018-05-11 2024-02-15 マシューズ インターナショナル コーポレイション 噴射アセンブリで使用する封止マイクロバルブのシステムおよび方法
US10994535B2 (en) 2018-05-11 2021-05-04 Matthews International Corporation Systems and methods for controlling operation of micro-valves for use in jetting assemblies
CN112066005B (zh) * 2020-08-17 2022-06-24 费尔顿技术(上海)有限公司 压电先导阀
CN112081971B (zh) * 2020-08-17 2022-05-20 费尔顿技术(上海)有限公司 压电式气体流量控制阀
TWM617111U (zh) * 2021-06-22 2021-09-11 科際精密股份有限公司 致動裝置
CN115507214A (zh) * 2021-06-22 2022-12-23 科际精密股份有限公司 气压调节装置及其气压调节方法
DE102022125517A1 (de) 2022-10-04 2024-04-04 Aventics Gmbh Systeme und Verfahren für piezoelektrische Ventile

Family Cites Families (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4474212A (en) * 1981-05-11 1984-10-02 Harper-Wyman Company Proportional flow control valve
US4492360A (en) * 1982-06-07 1985-01-08 The Lee Company Piezoelectric valve
US4450375A (en) * 1982-11-12 1984-05-22 Kiwi Coders Corporation Piezoelectric fluid control device
US4629926A (en) * 1985-10-21 1986-12-16 Kiwi Coders Corporation Mounting for piezoelectric bender of fluid control device
CH681168A5 (en) * 1989-11-10 1993-01-29 Westonbridge Int Ltd Micro-pump for medicinal dosing
AT396392B (de) * 1991-09-30 1993-08-25 Hoerbiger Fluidtechnik Gmbh Piezo-ventil
DE4320909C1 (de) * 1993-06-18 1994-06-01 Siemens Ag Servoventil
DE19648730C2 (de) * 1996-11-25 1998-11-19 Fraunhofer Ges Forschung Piezoelektrisch betätigtes Mikroventil
US6193029B1 (en) 1997-07-08 2001-02-27 Active Control Experts, Inc. Damper and valve
DE19854620C2 (de) * 1998-11-26 2001-05-17 Festo Ag & Co Ventileinrichtung, insbesondere Verstärker
EP1158182B1 (de) * 2000-05-25 2004-12-08 FESTO AG & Co Ventileinrichtung
ATE235661T1 (de) * 2000-11-20 2003-04-15 Festo Ag & Co Piezoventil
DE10311238A1 (de) * 2003-03-14 2004-10-07 Festo Ag & Co. Verfahren zur Herstellung eines Ventils

Also Published As

Publication number Publication date
US20050199301A1 (en) 2005-09-15
DE502004000445D1 (de) 2006-05-24
ATE323861T1 (de) 2006-05-15
EP1564464A1 (de) 2005-08-17
EP1564464B1 (de) 2006-04-19
US7322376B2 (en) 2008-01-29

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