DK0881477T3 - Vibrationsbölgedetekteringsfremgangsmåde og vibrationsbölgedetektor - Google Patents

Vibrationsbölgedetekteringsfremgangsmåde og vibrationsbölgedetektor

Info

Publication number
DK0881477T3
DK0881477T3 DK98304095T DK98304095T DK0881477T3 DK 0881477 T3 DK0881477 T3 DK 0881477T3 DK 98304095 T DK98304095 T DK 98304095T DK 98304095 T DK98304095 T DK 98304095T DK 0881477 T3 DK0881477 T3 DK 0881477T3
Authority
DK
Denmark
Prior art keywords
vibration wave
detection method
detector
wave detection
wave detector
Prior art date
Application number
DK98304095T
Other languages
English (en)
Inventor
Shigeru Ando
Takaya Miyano
Toshiyuki Matsumoto
Muneo Harada
Original Assignee
Tokyo Electron Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Tokyo Electron Ltd filed Critical Tokyo Electron Ltd
Application granted granted Critical
Publication of DK0881477T3 publication Critical patent/DK0881477T3/da

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01H—MEASUREMENT OF MECHANICAL VIBRATIONS OR ULTRASONIC, SONIC OR INFRASONIC WAVES
    • G01H11/00—Measuring mechanical vibrations or ultrasonic, sonic or infrasonic waves by detecting changes in electric or magnetic properties
    • G01H11/06—Measuring mechanical vibrations or ultrasonic, sonic or infrasonic waves by detecting changes in electric or magnetic properties by electric means
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01H—MEASUREMENT OF MECHANICAL VIBRATIONS OR ULTRASONIC, SONIC OR INFRASONIC WAVES
    • G01H3/00—Measuring characteristics of vibrations by using a detector in a fluid
    • G01H3/04—Frequency
    • G01H3/08—Analysing frequencies present in complex vibrations, e.g. comparing harmonics present

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Measurement Of Mechanical Vibrations Or Ultrasonic Waves (AREA)
  • Micromachines (AREA)
DK98304095T 1997-05-26 1998-05-22 Vibrationsbölgedetekteringsfremgangsmåde og vibrationsbölgedetektor DK0881477T3 (da)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP13556497A JP3248452B2 (ja) 1997-05-26 1997-05-26 音響センサ
EP98304095A EP0881477B1 (en) 1997-05-26 1998-05-22 Vibration wave detecting method and vibration wave detector

Publications (1)

Publication Number Publication Date
DK0881477T3 true DK0881477T3 (da) 2004-12-06

Family

ID=15154771

Family Applications (1)

Application Number Title Priority Date Filing Date
DK98304095T DK0881477T3 (da) 1997-05-26 1998-05-22 Vibrationsbölgedetekteringsfremgangsmåde og vibrationsbölgedetektor

Country Status (9)

Country Link
US (2) US6012334A (da)
EP (1) EP0881477B1 (da)
JP (1) JP3248452B2 (da)
KR (1) KR100283358B1 (da)
AU (1) AU709224B2 (da)
CA (1) CA2238205C (da)
DE (1) DE69825363T2 (da)
DK (1) DK0881477T3 (da)
TW (1) TW369597B (da)

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JP3958206B2 (ja) * 2002-12-27 2007-08-15 独立行政法人科学技術振興機構 マルチカンチレバーの振動周波数の計測方法及び装置
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DE102005042085A1 (de) * 2005-09-05 2007-03-15 Siemens Ag Vibrationsmesssystem
DE102005050351A1 (de) * 2005-10-20 2007-04-26 Siemens Ag Vibrationsmesssystem
JP2008008683A (ja) * 2006-06-27 2008-01-17 Univ Of Tokyo 振動波検出方法及び装置
KR100804513B1 (ko) 2006-07-28 2008-02-20 한국표준과학연구원 압전 외팔보를 이용한 음향센서
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KR102207928B1 (ko) 2014-08-13 2021-01-26 삼성전자주식회사 음향 센싱 소자 및 주파수 정보 획득 방법
KR20180037841A (ko) * 2016-10-05 2018-04-13 삼성전자주식회사 공진기를 포함하는 필터 시스템
JP7048619B2 (ja) 2016-12-29 2022-04-05 サムスン エレクトロニクス カンパニー リミテッド 共振器を利用した話者認識方法及びその装置
KR102623514B1 (ko) 2017-10-23 2024-01-11 삼성전자주식회사 음성신호 처리장치 및 그 동작방법
CN108562360B (zh) * 2018-03-20 2020-11-27 上海集成电路研发中心有限公司 一种新型红外传感器结构
DE102018221181A1 (de) * 2018-12-07 2020-06-10 Zf Friedrichshafen Ag Resonatoranordnung
CN111829646B (zh) * 2020-07-27 2022-06-28 中国电子科技集团公司第三研究所 一种宽响应频带的质点振速传感器
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Also Published As

Publication number Publication date
TW369597B (en) 1999-09-11
AU6710798A (en) 1998-12-03
EP0881477B1 (en) 2004-08-04
AU709224B2 (en) 1999-08-26
DE69825363D1 (de) 2004-09-09
US6227054B1 (en) 2001-05-08
JP3248452B2 (ja) 2002-01-21
DE69825363T2 (de) 2005-07-28
KR100283358B1 (ko) 2001-03-02
US6012334A (en) 2000-01-11
EP0881477A3 (en) 2000-06-14
EP0881477A2 (en) 1998-12-02
CA2238205A1 (en) 1998-11-26
CA2238205C (en) 2003-02-25
JPH10325753A (ja) 1998-12-08

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