DK0471276T3 - Fremgangsmåde til fremstilling af et nitrid- eller carbonnitridlag - Google Patents

Fremgangsmåde til fremstilling af et nitrid- eller carbonnitridlag

Info

Publication number
DK0471276T3
DK0471276T3 DK91113221.5T DK91113221T DK0471276T3 DK 0471276 T3 DK0471276 T3 DK 0471276T3 DK 91113221 T DK91113221 T DK 91113221T DK 0471276 T3 DK0471276 T3 DK 0471276T3
Authority
DK
Denmark
Prior art keywords
nitride
preparing
carbon
nitride layer
layer
Prior art date
Application number
DK91113221.5T
Other languages
English (en)
Inventor
Tohru Arai
Kazuyuki Nakanishi
Hiromasa Takeda
Hideo Tachikawa
Original Assignee
Toyoda Chuo Kenkyusho Kk
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toyoda Chuo Kenkyusho Kk filed Critical Toyoda Chuo Kenkyusho Kk
Application granted granted Critical
Publication of DK0471276T3 publication Critical patent/DK0471276T3/da

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C10/00—Solid state diffusion of only metal elements or silicon into metallic material surfaces
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
    • C23C16/442—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating using fluidised bed process
DK91113221.5T 1990-08-10 1991-08-06 Fremgangsmåde til fremstilling af et nitrid- eller carbonnitridlag DK0471276T3 (da)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP21181190 1990-08-10

Publications (1)

Publication Number Publication Date
DK0471276T3 true DK0471276T3 (da) 1996-03-18

Family

ID=16611988

Family Applications (1)

Application Number Title Priority Date Filing Date
DK91113221.5T DK0471276T3 (da) 1990-08-10 1991-08-06 Fremgangsmåde til fremstilling af et nitrid- eller carbonnitridlag

Country Status (8)

Country Link
US (1) US5443662A (da)
EP (1) EP0471276B1 (da)
JP (1) JP3173054B2 (da)
KR (1) KR100252406B1 (da)
CA (1) CA2048872C (da)
DE (1) DE69117385T2 (da)
DK (1) DK0471276T3 (da)
ES (1) ES2087933T3 (da)

Families Citing this family (21)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3189507B2 (ja) * 1992-06-30 2001-07-16 株式会社豊田中央研究所 表面処理装置
DE4443914A1 (de) * 1994-12-09 1996-06-13 Bayerische Motoren Werke Ag Thermochemische Wärmebehandlung eines Metall-Bauteiles mittels Diffusion eines Elementes in einer Wirbelbett-Vorrichtung
KR0165869B1 (ko) * 1995-10-17 1998-12-15 김은영 내 저온열화 지르코니아 재료 및 그것의 제조방법
US5628806A (en) * 1995-11-22 1997-05-13 Minnesota Mining And Manufacturing Company Method of making alumina abrasive grain having a metal carbide coating thereon
US5641330A (en) * 1995-11-28 1997-06-24 Minnesota Mining And Manufacturing Company Method of making alumina abrasive grain having a metal nitride coating thereon
US5611828A (en) * 1995-11-28 1997-03-18 Minnesota Mining And Manufacturing Company Method of making alumina abrasive grain having a metal boride coating thereon
DE69838575T2 (de) * 1997-11-28 2008-07-24 Maizuru Corp. Verfahren zur Oberflächenbehandlung von Eisenmaterial und Salzbadofen dafür verwendet
EP1165852A4 (en) * 1999-02-08 2003-05-02 Quality Heat Technologies Pty SURFACE TREATMENT METHOD AND APPARATUS
AU2010236044B2 (en) * 2005-07-21 2012-09-27 Hard Technologies Pty Ltd Duplex Surface Treatment of Metal Objects
CN101268209B (zh) * 2005-07-21 2012-07-18 哈德技术有限公司 金属物体的双重表面处理
KR101134589B1 (ko) 2005-11-30 2012-04-09 삼성코닝정밀소재 주식회사 아민화제로 표면처리된 알루미나를 포함하는 금속 배선용 연마 슬러리
BRPI0703141B1 (pt) * 2007-08-02 2018-10-16 Petroleo Brasileiro S/A Petrobras processo de obtenção de um composto intermetálico.
US8011912B2 (en) * 2008-06-16 2011-09-06 Gala Industries, Inc. Positionable gas injection nozzle assembly for an underwater pelletizing system
US8007701B2 (en) * 2008-06-16 2011-08-30 Gala Industries, Inc. Positionable gas injection nozzle assembly for an underwater pelletizing system
CN103314132B (zh) * 2010-11-17 2015-08-12 哈德技术有限公司 金属物体的表面处理
JP5835256B2 (ja) * 2013-03-21 2015-12-24 株式会社デンソー フェライト系ステンレス鋼製品の製造方法
WO2016019088A1 (en) * 2014-07-31 2016-02-04 Williams Peter C Enhanced activation of self-passivating metals
DE102016215709A1 (de) * 2015-08-28 2017-03-02 Tsubakimoto Chain Co. Kettenkomponente und Kette
US10480070B2 (en) * 2016-05-12 2019-11-19 Versum Materials Us, Llc Delivery container with flow distributor
JP7450557B2 (ja) 2018-06-11 2024-03-15 スウェージロック カンパニー 自己不動態化金属の化学活性化
US11885027B2 (en) 2020-04-29 2024-01-30 Swagelok Company Activation of self-passivating metals using reagent coatings for low temperature nitrocarburization

Family Cites Families (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5913586B2 (ja) * 1978-11-07 1984-03-30 三菱マテリアル株式会社 炭化物または炭窒化物による基体表面被覆方法
JPS55164072A (en) * 1979-06-08 1980-12-20 Sumitomo Electric Ind Ltd Coating
AU570799B2 (en) * 1984-05-17 1988-03-24 Toyota Chuo Kenkyusho K.K. Vapour phase coating of carbide in fluidised bed
JPS60251274A (ja) * 1984-05-28 1985-12-11 Toyota Central Res & Dev Lab Inc 窒化物被覆方法
US4623400A (en) * 1985-02-22 1986-11-18 Procedyne Corp. Hard surface coatings for metals in fluidized beds
DE3668913D1 (de) * 1985-06-17 1990-03-15 Toyoda Chuo Kenkyusho Kk Verfahren zur behandlung der oberflaeche von eisenlegierungsmaterialien.
JPH0819514B2 (ja) * 1986-07-07 1996-02-28 株式会社豊田中央研究所 表面処理方法およびその装置
JP2584217B2 (ja) * 1986-11-18 1997-02-26 株式会社豊田中央研究所 表面処理方法
JPS6447844A (en) * 1987-08-12 1989-02-22 Toyota Central Res & Dev Method and apparatus for treating surface

Also Published As

Publication number Publication date
KR100252406B1 (ko) 2000-04-15
JP3173054B2 (ja) 2001-06-04
ES2087933T3 (es) 1996-08-01
EP0471276B1 (en) 1996-02-28
EP0471276A1 (en) 1992-02-19
CA2048872C (en) 2000-03-14
CA2048872A1 (en) 1992-02-11
DE69117385D1 (de) 1996-04-04
US5443662A (en) 1995-08-22
KR920004604A (ko) 1992-03-27
JPH055172A (ja) 1993-01-14
DE69117385T2 (de) 1996-07-11

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