DE9101682U1 - Device for interferometric measurement of object surfaces - Google Patents
Device for interferometric measurement of object surfacesInfo
- Publication number
- DE9101682U1 DE9101682U1 DE9101682U DE9101682U DE9101682U1 DE 9101682 U1 DE9101682 U1 DE 9101682U1 DE 9101682 U DE9101682 U DE 9101682U DE 9101682 U DE9101682 U DE 9101682U DE 9101682 U1 DE9101682 U1 DE 9101682U1
- Authority
- DE
- Germany
- Prior art keywords
- camera
- interferometric measurement
- objective
- lens
- object surfaces
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 238000005259 measurement Methods 0.000 title claims description 4
- 230000005855 radiation Effects 0.000 claims description 6
- 230000001427 coherent effect Effects 0.000 claims description 2
- 230000003287 optical effect Effects 0.000 description 4
- 238000005286 illumination Methods 0.000 description 3
- 230000006978 adaptation Effects 0.000 description 1
- 238000006243 chemical reaction Methods 0.000 description 1
- 230000008878 coupling Effects 0.000 description 1
- 238000010168 coupling process Methods 0.000 description 1
- 238000005859 coupling reaction Methods 0.000 description 1
- 239000013307 optical fiber Substances 0.000 description 1
- 230000005693 optoelectronics Effects 0.000 description 1
- 230000010363 phase shift Effects 0.000 description 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/24—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/16—Measuring arrangements characterised by the use of optical techniques for measuring the deformation in a solid, e.g. optical strain gauge
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01H—MEASUREMENT OF MECHANICAL VIBRATIONS OR ULTRASONIC, SONIC OR INFRASONIC WAVES
- G01H9/00—Measuring mechanical vibrations or ultrasonic, sonic or infrasonic waves by using radiation-sensitive means, e.g. optical means
- G01H9/002—Measuring mechanical vibrations or ultrasonic, sonic or infrasonic waves by using radiation-sensitive means, e.g. optical means for representing acoustic field distribution
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- Radar, Positioning & Navigation (AREA)
- Remote Sensing (AREA)
- Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
Description
7.2810 11.02.19917.2810 11.02.1991
Vorrichtung zur interferometrischen Messung von Objektoberflächen BeschreibungDevice for interferometric measurement of object surfaces Description
Die Neuerung bezieht sich auf eine Vorrichtung zur interferometrischen Analyse von Schwingungen und Deformationen von Objekten, bestehend aus einer Strahlenquelle zur Beleuchtung des Objektes mit kohärenter Strahlung und zur Bildung eines Referenzstrahles sowie aus einem Bildaufnahmesystem mit einem Kameraobjektiv.The innovation relates to a device for the interferometric analysis of vibrations and deformations of objects, consisting of a radiation source for illuminating the object with coherent radiation and for forming a reference beam, as well as an image recording system with a camera lens.
Vorrichtungen dieser Art sind in verschiedenen Ausführungen bekannt. Im allgemeinen wird für die Beleuchtung ein Laserstrahl verwendet, der mittels eines Strahlenteilers in einen Beleuchtungsstrahl und einen Referenzstrahl aufgeteilt wird. Über Spiegel und Linsen wird der Referenzstrahl und der vom Objekt gestreute Strahl mit einer Objektlinse fokusiert und mit einer in der Brennebene angeordneten Kamera aufgenommen, (DE 34 30 820).Devices of this type are known in various designs. In general, a laser beam is used for illumination, which is split into an illumination beam and a reference beam using a beam splitter. The reference beam and the beam scattered by the object are focused with an object lens using mirrors and lenses and recorded with a camera arranged in the focal plane (DE 34 30 820).
Der Neuerung liegt die Aufgabe zugrunde, eine Vorrichtung der eingangs genannten Art dahingehend zu verbessern, daß eine flexiblere Handhabung insbesondere bei Umrüstungen möglich ist.The innovation is based on the task of improving a device of the type mentioned at the beginning so that more flexible handling is possible, especially during conversions.
Die Aufgabe wird neuerungsgemäß mit den Merkmalen des Schutzanspruches 1 gelöst.The problem is solved according to the innovation with the features of claim 1.
Durch die Bildung einer Zwischenbildebene ist es möglich, vor der Kamera einen parallelen Strahlbündel zu erhalten, der den Einsatz von Blenden, Filtern, usw. sowie das Auswechseln derartiger optischer Elemente in einfacher Weise ermöglicht.By forming an intermediate image plane, it is possible to obtain a parallel beam of light in front of the camera, which enables the use of apertures, filters, etc. as well as the exchange of such optical elements in a simple manner.
Damit ist eine wesentliche Vereinfachung geschaffen, mit der Versuche sowie Anpassungen an verschiedene Anwendungsfälle ganz einfach dadurch ausführbar sind, daß entsprechende optische Elemente in den parallelen Strahlengang vor dem Kameraobjektiv eingesetzt bzw. ausgetauscht werden.This creates a significant simplification, with which tests and adaptations to different applications can be carried out very easily by inserting or exchanging appropriate optical elements in the parallel beam path in front of the camera lens.
2 7.28102 7.2810
11.02.199111.02.1991
In der Zeichnung ist ein Ausführungsbeispiel gemäß der Neuerung in schematischer Darstellung gezeigt.The drawing shows an embodiment according to the innovation in a schematic representation.
Die Vorrichtung 10 zur interferometrischen Analyse bzw. Messung der Oberfläche, Schwingungen und Deformationen eines Objektes 11 enthält einen auf einer Grundplatte 12 montierten Diodenlaser 13, der aber auch durch einen externen Laser 14 ersetzt werden kann, für den eine Einkoppelfassung 15 für einen Lichtwellenleiter 16 vorgesehen ist. Mitteies eines Spiegels 17 kann die Strahlung 18 des externen Lasers 14 in die Bahn 19 des fest installierten Lasers 13 gelenkt werden. The device 10 for interferometric analysis or measurement of the surface, vibrations and deformations of an object 11 contains a diode laser 13 mounted on a base plate 12, which can also be replaced by an external laser 14, for which a coupling socket 15 for an optical fiber 16 is provided. The radiation 18 of the external laser 14 can be directed into the path 19 of the permanently installed laser 13 by means of a mirror 17.
In dem Strahlengang 19 ist ferner ein Strahlenteiler 20 vorgesehen, um von dem Strahl 19 einen Referenzstrahl 21 abzuzweigen. Der Referenzstrahl 21 wird mittels Spiegel 22 und 23, einer Aufweitungslinse 24, einer Sammellinse 25 und einer planparallelen Platte 26 auf eine Kamera 27 der Vorrichtung 10 gelenkt. Die Kamera 27 kann eine bekannte optische oder optoelektronische Einrichtung zur Aufnahme von Bildern sein. Der Laserstrahl 19" für die Objektbeleuchtung wird mittels einer Linse 30 aufgeweitet. Die vom Objekt 11 reflektierte Streustrahlung 35 wird vor deren Bündelung mittels eines der Kamera 27 zugeordneten Objektivs 31 geometrisch modifiziert. Dies geschieht durch ein als Sammellinse ausgebildetes zweites Objektiv 32, das eine Zwischenbildebene 33 erzeugt, der eine Sammellinse 34 für parallelen Strahlengang nachgeschaltet ist, deren Brennpunkt in der Zwischenbildebene 33 liegt. Auf diese Weise werden die Streustrahlen 35 in einen parallelen Strahlenbündel 36 umgewandelt. Das zweite Objektiv 32 ist vom Kameraobjektiv 31 soweit entfernt, daß im parallelen Strahlengang 36 genügend Raum für zusätzliche optische Elemente 40, wie Blenden, Filter und dergleichen, zur Verfügung steht. In dem parallelen Strahlengang 36 ist außerdem die teildurchlässige, planparallele Platte 26 zur Umlenkung des Referenzstrahles 21 angeordnet.A beam splitter 20 is also provided in the beam path 19 in order to branch off a reference beam 21 from the beam 19. The reference beam 21 is directed to a camera 27 of the device 10 by means of mirrors 22 and 23, an expansion lens 24, a converging lens 25 and a plane-parallel plate 26. The camera 27 can be a known optical or optoelectronic device for recording images. The laser beam 19" for object illumination is expanded by means of a lens 30. The scattered radiation 35 reflected by the object 11 is geometrically modified before it is bundled by means of an objective 31 assigned to the camera 27. This is done by a second objective 32 designed as a converging lens, which creates an intermediate image plane 33, followed by a converging lens 34 for parallel beam paths, the focal point of which lies in the intermediate image plane 33. In this way, the scattered rays 35 are converted into a parallel beam bundle 36. The second objective 32 is far enough away from the camera objective 31 that there is enough space in the parallel beam path 36 for additional optical elements 40, such as apertures, filters and the like. The partially transparent, plane-parallel plate 26 for deflecting the reference beam 21 is also arranged in the parallel beam path 36.
Für die Phasenverschiebung des Referenzstrahles 21 ist am Spiegel 22 ein Piezoelement41 vorgesehen. Anstelle auf den Umlenkspiegel 22 kann das Piezoelementauch auf die Aufweitungslinse 24 einwirken.A piezo element 41 is provided on the mirror 22 for the phase shift of the reference beam 21. Instead of acting on the deflection mirror 22, the piezo element can also act on the expansion lens 24.
Claims (1)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| DE9101682U DE9101682U1 (en) | 1991-01-19 | 1991-01-19 | Device for interferometric measurement of object surfaces |
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| DE9101682U DE9101682U1 (en) | 1991-01-19 | 1991-01-19 | Device for interferometric measurement of object surfaces |
| DE4101536 | 1991-01-19 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| DE9101682U1 true DE9101682U1 (en) | 1991-05-29 |
Family
ID=25900357
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| DE9101682U Expired - Lifetime DE9101682U1 (en) | 1991-01-19 | 1991-01-19 | Device for interferometric measurement of object surfaces |
Country Status (1)
| Country | Link |
|---|---|
| DE (1) | DE9101682U1 (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE10047495B4 (en) * | 1999-10-09 | 2005-06-09 | Robert Bosch Gmbh | Interferometric measuring device for shape measurement |
| US6943895B2 (en) | 2000-03-30 | 2005-09-13 | Robert Bosch Gmbh | Interferometric measuring device |
-
1991
- 1991-01-19 DE DE9101682U patent/DE9101682U1/en not_active Expired - Lifetime
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE10047495B4 (en) * | 1999-10-09 | 2005-06-09 | Robert Bosch Gmbh | Interferometric measuring device for shape measurement |
| US6943895B2 (en) | 2000-03-30 | 2005-09-13 | Robert Bosch Gmbh | Interferometric measuring device |
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