DE69915212D1 - Kapazitive Wegmesseinrichtung - Google Patents

Kapazitive Wegmesseinrichtung

Info

Publication number
DE69915212D1
DE69915212D1 DE69915212T DE69915212T DE69915212D1 DE 69915212 D1 DE69915212 D1 DE 69915212D1 DE 69915212 T DE69915212 T DE 69915212T DE 69915212 T DE69915212 T DE 69915212T DE 69915212 D1 DE69915212 D1 DE 69915212D1
Authority
DE
Germany
Prior art keywords
measuring device
displacement measuring
capacitive displacement
capacitive
measuring
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE69915212T
Other languages
English (en)
Other versions
DE69915212T2 (de
Inventor
Kouji Sasaki
Nobuyuki Hayashi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitutoyo Corp
Original Assignee
Mitutoyo Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitutoyo Corp filed Critical Mitutoyo Corp
Application granted granted Critical
Publication of DE69915212D1 publication Critical patent/DE69915212D1/de
Publication of DE69915212T2 publication Critical patent/DE69915212T2/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
    • G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
    • G01D5/12—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means
    • G01D5/14—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage
    • G01D5/24—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage by varying capacitance
    • G01D5/241—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage by varying capacitance by relative movement of capacitor electrodes
    • G01D5/2412—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage by varying capacitance by relative movement of capacitor electrodes by varying overlap
    • G01D5/2415—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage by varying capacitance by relative movement of capacitor electrodes by varying overlap adapted for encoders
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B7/00—Measuring arrangements characterised by the use of electric or magnetic techniques
    • G01B7/003—Measuring arrangements characterised by the use of electric or magnetic techniques for measuring position, not involving coordinate determination

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Power Engineering (AREA)
  • Transmission And Conversion Of Sensor Element Output (AREA)
  • Measurement Of Length, Angles, Or The Like Using Electric Or Magnetic Means (AREA)
  • Length Measuring Devices With Unspecified Measuring Means (AREA)
DE69915212T 1998-11-13 1999-11-05 Kapazitive Wegmesseinrichtung Expired - Lifetime DE69915212T2 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP32424498 1998-11-13
JP32424498A JP3246726B2 (ja) 1998-11-13 1998-11-13 静電容量式変位検出器及び測定装置

Publications (2)

Publication Number Publication Date
DE69915212D1 true DE69915212D1 (de) 2004-04-08
DE69915212T2 DE69915212T2 (de) 2004-07-29

Family

ID=18163649

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69915212T Expired - Lifetime DE69915212T2 (de) 1998-11-13 1999-11-05 Kapazitive Wegmesseinrichtung

Country Status (5)

Country Link
US (1) US6292001B1 (de)
EP (1) EP1001252B1 (de)
JP (1) JP3246726B2 (de)
CN (1) CN1157585C (de)
DE (1) DE69915212T2 (de)

Families Citing this family (19)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2001183163A (ja) * 1999-12-28 2001-07-06 Mitsutoyo Corp 変位測定装置
JP2001201308A (ja) * 2000-01-21 2001-07-27 Mitsutoyo Corp 静電容量式変位検出装置及びその製造方法
GB0114456D0 (en) * 2001-06-14 2001-08-08 Koninkl Philips Electronics Nv Object sensing
DE102005046099A1 (de) * 2005-09-27 2007-03-29 Valeo Schalter Und Sensoren Gmbh Vorrichtung zur Erfassung von Schaltstellungen eines Schaltmittels
CN101354231B (zh) * 2007-07-28 2011-07-27 深圳市联思精密机器有限公司 一种栅状电极位移传感器
JP5715060B2 (ja) * 2008-10-17 2015-05-07 フォルシア ブロック アバン 自動車両のための物体検出装置
US20110261344A1 (en) * 2009-12-31 2011-10-27 Mapper Lithography Ip B.V. Exposure method
US8653834B2 (en) * 2010-01-15 2014-02-18 Synaptics Incorporated Input device with floating electrodes having at least one aperture
JP2011163865A (ja) * 2010-02-08 2011-08-25 Seidensha Co Ltd 回転型静電エンコーダ
CN102538650A (zh) * 2010-12-29 2012-07-04 沈阳新松机器人自动化股份有限公司 一种纳米级微小位移测量装置
JP6327874B2 (ja) * 2014-02-04 2018-05-23 株式会社ミツトヨ 誘導型位置測定装置
CN104913712A (zh) * 2014-03-13 2015-09-16 深圳市联思精密机器有限公司 一种容栅位移传感器
CN103822571B (zh) * 2014-03-19 2016-11-02 重庆理工大学 基于单排多层结构的电场式时栅直线位移传感器
JP6475936B2 (ja) * 2014-08-19 2019-02-27 株式会社ミツトヨ エンコーダスケールおよびその製造方法
JP6611467B2 (ja) * 2015-05-19 2019-11-27 キヤノン株式会社 変位検出装置、レンズ鏡筒、および、撮像装置
US9704012B2 (en) * 2015-09-10 2017-07-11 Cypress Semiconductor Corporation Fingerprint sensor pattern
GB2550967A (en) * 2016-06-03 2017-12-06 Brandenburg (Uk) Ltd Sensing of objects
JP6823483B2 (ja) * 2017-02-02 2021-02-03 株式会社ミツトヨ 変位検出器
CN111739268A (zh) * 2020-07-01 2020-10-02 吴才远 一种智能门锁上锁提醒装置

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4959615A (en) 1988-05-31 1990-09-25 Micro Encoder, Inc. Electrode structure for capacitance-type measurement transducers
JPS62235504A (ja) 1986-04-04 1987-10-15 Mitsutoyo Corp 容量型位置測定トランスデユ−サ
US5691646A (en) * 1994-12-07 1997-11-25 Mitutoya Corporation Capacitance-type displacement measuring device with electrodes having spiral patterns
JP3256443B2 (ja) 1996-09-20 2002-02-12 株式会社ミツトヨ 静電容量式変位測定装置

Also Published As

Publication number Publication date
JP3246726B2 (ja) 2002-01-15
EP1001252A1 (de) 2000-05-17
JP2000146508A (ja) 2000-05-26
DE69915212T2 (de) 2004-07-29
US6292001B1 (en) 2001-09-18
EP1001252B1 (de) 2004-03-03
CN1254087A (zh) 2000-05-24
CN1157585C (zh) 2004-07-14

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Legal Events

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