DE69900384T2 - Kostengünstiger mikrobiegebalken aus photoplastischem material - Google Patents
Kostengünstiger mikrobiegebalken aus photoplastischem materialInfo
- Publication number
- DE69900384T2 DE69900384T2 DE69900384T DE69900384T DE69900384T2 DE 69900384 T2 DE69900384 T2 DE 69900384T2 DE 69900384 T DE69900384 T DE 69900384T DE 69900384 T DE69900384 T DE 69900384T DE 69900384 T2 DE69900384 T2 DE 69900384T2
- Authority
- DE
- Germany
- Prior art keywords
- cost
- effective microbial
- photoplastic material
- photoplastic
- microbial
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01Q—SCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBE MICROSCOPY [SPM]
- G01Q70/00—General aspects of SPM probes, their manufacture or their related instrumentation, insofar as they are not specially adapted to a single SPM technique covered by group G01Q60/00
- G01Q70/08—Probe characteristics
- G01Q70/14—Particular materials
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01Q—SCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBE MICROSCOPY [SPM]
- G01Q70/00—General aspects of SPM probes, their manufacture or their related instrumentation, insofar as they are not specially adapted to a single SPM technique covered by group G01Q60/00
- G01Q70/16—Probe manufacture
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/20—Exposure; Apparatus therefor
- G03F7/2049—Exposure; Apparatus therefor using a cantilever
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10S977/00—Nanotechnology
- Y10S977/84—Manufacture, treatment, or detection of nanostructure
- Y10S977/849—Manufacture, treatment, or detection of nanostructure with scanning probe
- Y10S977/86—Scanning probe structure
- Y10S977/875—Scanning probe structure with tip detail
- Y10S977/879—Material
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Health & Medical Sciences (AREA)
- General Health & Medical Sciences (AREA)
- Nuclear Medicine, Radiotherapy & Molecular Imaging (AREA)
- Radiology & Medical Imaging (AREA)
- Micromachines (AREA)
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
EP98107662 | 1998-04-28 | ||
PCT/IB1999/000765 WO1999056176A1 (en) | 1998-04-28 | 1999-04-28 | Low-cost photoplastic cantilever |
Publications (2)
Publication Number | Publication Date |
---|---|
DE69900384D1 DE69900384D1 (de) | 2001-11-29 |
DE69900384T2 true DE69900384T2 (de) | 2003-02-27 |
Family
ID=8231839
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE69900384T Expired - Fee Related DE69900384T2 (de) | 1998-04-28 | 1999-04-28 | Kostengünstiger mikrobiegebalken aus photoplastischem material |
Country Status (4)
Country | Link |
---|---|
US (1) | US6291140B1 (de) |
EP (1) | EP0990195B1 (de) |
DE (1) | DE69900384T2 (de) |
WO (1) | WO1999056176A1 (de) |
Families Citing this family (17)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US6368275B1 (en) * | 1999-10-07 | 2002-04-09 | Acuson Corporation | Method and apparatus for diagnostic medical information gathering, hyperthermia treatment, or directed gene therapy |
JP3514207B2 (ja) * | 2000-03-15 | 2004-03-31 | 株式会社村田製作所 | 強誘電体薄膜素子ならびにセンサ、および強誘電体薄膜素子の製造方法 |
DE10027060B4 (de) * | 2000-06-05 | 2006-11-30 | Nanosurf Ag | Abtastspitzen,Verfahren zur Herstellung und Verwendung derselben, insbesondere für die Rastersondenmikroskopie |
EP1191331B1 (de) * | 2000-09-18 | 2016-02-24 | Imec | Herstellungsverfahren für Spitzen und Probenköpfe von STM's oder AFM's |
DE50201728D1 (de) * | 2002-05-03 | 2005-01-13 | Nanoworld Ag Neuchatel | SPM-Sensor und Verfahren zu dessen Herstellung |
US6835589B2 (en) * | 2002-11-14 | 2004-12-28 | International Business Machines Corporation | Three-dimensional integrated CMOS-MEMS device and process for making the same |
US7217396B2 (en) * | 2003-05-05 | 2007-05-15 | The Board Of Trustees Of The University Of Illinois | Microfabricated micro fluid channels |
US20040228962A1 (en) * | 2003-05-16 | 2004-11-18 | Chang Liu | Scanning probe microscopy probe and method for scanning probe contact printing |
US7460462B2 (en) * | 2003-12-17 | 2008-12-02 | Hewlett-Packard Development Company, L.P. | Contact probe storage fet sensor and write heater arrangements |
US7449280B2 (en) * | 2004-05-26 | 2008-11-11 | Microchem Corp. | Photoimageable coating composition and composite article thereof |
US7541219B2 (en) * | 2004-07-02 | 2009-06-02 | Seagate Technology Llc | Integrated metallic contact probe storage device |
US7533561B2 (en) * | 2005-08-19 | 2009-05-19 | Arthur Beyder | Oscillator for atomic force microscope and other applications |
US7281419B2 (en) * | 2005-09-21 | 2007-10-16 | The Board Of Trustees Of The University Of Illinois | Multifunctional probe array system |
JP4660726B2 (ja) * | 2006-03-16 | 2011-03-30 | セイコーインスツル株式会社 | カンチレバー及びカンチレバーの製造方法 |
US8539905B2 (en) * | 2008-11-07 | 2013-09-24 | The Research Foundation For The State University Of New York | Polymeric micro-cantilevers for ultra-low volume fluid and living cell deposition |
EP2477038A1 (de) * | 2011-01-14 | 2012-07-18 | Centre National de la Recherche Scientifique | Herstellung einer optischen Nahfeldsonde mittels Organomineralmaterial und Sol-Gel-Verfahren |
US8479309B2 (en) | 2011-04-28 | 2013-07-02 | The Board Of Trustees Of The University Of Illinois | Ultra-low damping imaging mode related to scanning probe microscopy in liquid |
Family Cites Families (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE3842354A1 (de) * | 1988-12-16 | 1990-06-21 | Kernforschungsz Karlsruhe | Verfahren zur lithographischen herstellung von galvanisch abformbaren mikrostrukturen mit dreieckigem oder trapezfoermigem querschnitt |
US4968585A (en) * | 1989-06-20 | 1990-11-06 | The Board Of Trustees Of The Leland Stanford Jr. University | Microfabricated cantilever stylus with integrated conical tip |
EP0413042B1 (de) * | 1989-08-16 | 1992-12-16 | International Business Machines Corporation | Verfahren für die Herstellung mikromechanischer Messfühler für AFM/STM-Profilometrie und mikromechanischer Messfühlerkopf |
JP3053456B2 (ja) * | 1990-08-31 | 2000-06-19 | オリンパス光学工業株式会社 | 走査型プローブ顕微鏡用カンチレバー及びその作製方法 |
JP2508928B2 (ja) * | 1991-03-11 | 1996-06-19 | 日本電装株式会社 | 半導体加速度センサの製造方法 |
DE4435635A1 (de) * | 1994-10-06 | 1996-06-05 | Inst Physikalische Hochtech Ev | Mikrobiegebalken für die atomare Kraftmikroskopie und Verfahren zu seiner Herstellung |
-
1999
- 1999-04-28 US US09/300,990 patent/US6291140B1/en not_active Expired - Fee Related
- 1999-04-28 WO PCT/IB1999/000765 patent/WO1999056176A1/en active IP Right Grant
- 1999-04-28 DE DE69900384T patent/DE69900384T2/de not_active Expired - Fee Related
- 1999-04-28 EP EP99918200A patent/EP0990195B1/de not_active Expired - Lifetime
Also Published As
Publication number | Publication date |
---|---|
EP0990195A1 (de) | 2000-04-05 |
EP0990195B1 (de) | 2001-10-24 |
WO1999056176A1 (en) | 1999-11-04 |
US6291140B1 (en) | 2001-09-18 |
DE69900384D1 (de) | 2001-11-29 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
8327 | Change in the person/name/address of the patent owner |
Owner name: NANO WORLD AG, NEUCHATEL, CH |
|
8364 | No opposition during term of opposition | ||
8339 | Ceased/non-payment of the annual fee |