DE69839952D1 - Säulenvorrichtung für Strahl aus geladenen Teilchen - Google Patents
Säulenvorrichtung für Strahl aus geladenen TeilchenInfo
- Publication number
- DE69839952D1 DE69839952D1 DE69839952T DE69839952T DE69839952D1 DE 69839952 D1 DE69839952 D1 DE 69839952D1 DE 69839952 T DE69839952 T DE 69839952T DE 69839952 T DE69839952 T DE 69839952T DE 69839952 D1 DE69839952 D1 DE 69839952D1
- Authority
- DE
- Germany
- Prior art keywords
- charged particle
- particle beam
- chamber
- pressure
- assembly
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/02—Details
- H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement, ion-optical arrangement
- H01J37/06—Electron sources; Electron guns
- H01J37/075—Electron guns using thermionic emission from cathodes heated by particle bombardment or by irradiation, e.g. by laser
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/02—Details
- H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement, ion-optical arrangement
- H01J37/06—Electron sources; Electron guns
- H01J37/063—Geometrical arrangement of electrodes for beam-forming
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/02—Details
- H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement, ion-optical arrangement
- H01J37/06—Electron sources; Electron guns
- H01J37/065—Construction of guns or parts thereof
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/30—Electron-beam or ion-beam tubes for localised treatment of objects
- H01J37/301—Arrangements enabling beams to pass between regions of different pressure
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
- H01J2237/30—Electron or ion beam tubes for processing objects
- H01J2237/31—Processing objects on a macro-scale
- H01J2237/3104—Welding
Landscapes
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Optics & Photonics (AREA)
- Physics & Mathematics (AREA)
- Electron Sources, Ion Sources (AREA)
- Radiation-Therapy Devices (AREA)
- Particle Accelerators (AREA)
- Electrostatic Spraying Apparatus (AREA)
- Secondary Cells (AREA)
- Cold Cathode And The Manufacture (AREA)
- Luminescent Compositions (AREA)
- Generation Of Surge Voltage And Current (AREA)
- Polyurethanes Or Polyureas (AREA)
- Polymerisation Methods In General (AREA)
- Electroluminescent Light Sources (AREA)
- Cookers (AREA)
- Electrophonic Musical Instruments (AREA)
- Analysing Materials By The Use Of Radiation (AREA)
- Lining Or Joining Of Plastics Or The Like (AREA)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
GBGB9720350.9A GB9720350D0 (en) | 1997-09-24 | 1997-09-24 | Improvements relating to charged particle beams |
Publications (1)
Publication Number | Publication Date |
---|---|
DE69839952D1 true DE69839952D1 (de) | 2008-10-09 |
Family
ID=10819590
Family Applications (3)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE69830664T Expired - Lifetime DE69830664T2 (de) | 1997-09-24 | 1998-09-24 | Vorrichtung zum emittieren eines geladenen teilchenstrahls |
DE69839952T Expired - Lifetime DE69839952D1 (de) | 1997-09-24 | 1998-09-24 | Säulenvorrichtung für Strahl aus geladenen Teilchen |
DE69840801T Expired - Lifetime DE69840801D1 (de) | 1997-09-24 | 1998-09-24 | Ladungsträgerteilchenstrahl Emittiervorrichtung |
Family Applications Before (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE69830664T Expired - Lifetime DE69830664T2 (de) | 1997-09-24 | 1998-09-24 | Vorrichtung zum emittieren eines geladenen teilchenstrahls |
Family Applications After (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE69840801T Expired - Lifetime DE69840801D1 (de) | 1997-09-24 | 1998-09-24 | Ladungsträgerteilchenstrahl Emittiervorrichtung |
Country Status (21)
Country | Link |
---|---|
US (1) | US6404115B1 (de) |
EP (3) | EP1587129B1 (de) |
JP (1) | JP4200656B2 (de) |
KR (1) | KR100586050B1 (de) |
CN (1) | CN1205646C (de) |
AT (3) | ATE298462T1 (de) |
AU (1) | AU730293B2 (de) |
BR (1) | BR9812505B1 (de) |
CA (1) | CA2303148C (de) |
CZ (1) | CZ294249B6 (de) |
DE (3) | DE69830664T2 (de) |
EE (1) | EE04694B1 (de) |
ES (1) | ES2244081T3 (de) |
GB (1) | GB9720350D0 (de) |
NO (1) | NO326142B1 (de) |
NZ (1) | NZ503060A (de) |
PT (1) | PT1018137E (de) |
RU (1) | RU2201006C2 (de) |
TR (1) | TR200000750T2 (de) |
UA (1) | UA69394C2 (de) |
WO (1) | WO1999016101A2 (de) |
Families Citing this family (29)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US6630774B2 (en) * | 2001-03-21 | 2003-10-07 | Advanced Electron Beams, Inc. | Electron beam emitter |
US7147900B2 (en) * | 2003-08-14 | 2006-12-12 | Asm Japan K.K. | Method for forming silicon-containing insulation film having low dielectric constant treated with electron beam radiation |
US8159118B2 (en) | 2005-11-02 | 2012-04-17 | United Technologies Corporation | Electron gun |
US8114528B2 (en) | 2006-10-02 | 2012-02-14 | Nippon Steel Corporation | Electron beam welded joint excellent in brittle fracture resistance |
WO2008140080A1 (ja) * | 2007-05-16 | 2008-11-20 | Denki Kagaku Kogyo Kabushiki Kaisha | 電子源 |
JP4636082B2 (ja) * | 2007-12-27 | 2011-02-23 | 日新イオン機器株式会社 | カソード保持構造およびそれを備えるイオン源 |
JP5471380B2 (ja) * | 2009-12-04 | 2014-04-16 | 新日鐵住金株式会社 | 洋上風力発電塔用大型溶接鋼管の高能率製造方法 |
EP2508291B1 (de) | 2009-12-04 | 2017-05-03 | Nippon Steel & Sumitomo Metal Corporation | Mittels elektronenstrahl stumpfgeschweisste verbindung |
CN102639278B (zh) | 2009-12-04 | 2014-07-09 | 新日铁住金株式会社 | 对接焊接接头及其制造方法 |
US8992109B2 (en) | 2009-12-04 | 2015-03-31 | Nippon Steel & Sumitomo Metal Corporation | Butt-welded joint of welded structure, and method for manufacturing the same |
JP2011246804A (ja) | 2010-04-30 | 2011-12-08 | Nippon Steel Corp | 電子ビーム溶接継手及び電子ビーム溶接用鋼材とその製造方法 |
JP2011246805A (ja) | 2010-04-30 | 2011-12-08 | Nippon Steel Corp | 電子ビーム溶接継手及び電子ビーム溶接用鋼材とその製造方法 |
WO2012070353A1 (ja) | 2010-11-22 | 2012-05-31 | 新日本製鐵株式会社 | 電子ビーム溶接継手及び電子ビーム溶接用鋼材とその製造方法 |
US20110294071A1 (en) * | 2010-05-28 | 2011-12-01 | Canon Kabushiki Kaisha | Electron gun, lithography apparatus, method of manufacturing article, and electron beam apparatus |
CN103210107B (zh) | 2010-11-22 | 2015-09-09 | 新日铁住金株式会社 | 电子束焊接接头以及电子束焊接用钢材及其制造方法 |
EP2594657B1 (de) | 2010-11-22 | 2016-11-30 | Nippon Steel & Sumitomo Metal Corporation | Elektronenstrahl-schweissverbindung, stahlmaterial zur verwendung in elektronenstrahl-schweissverbindung und herstellungsverfahren dafür. |
CN103180475B (zh) | 2010-11-22 | 2015-04-29 | 新日铁住金株式会社 | 电子束焊接接头以及电子束焊接用钢材及其制造方法 |
KR101423445B1 (ko) | 2010-11-22 | 2014-07-24 | 신닛테츠스미킨 카부시키카이샤 | 전자 빔 용접 조인트 및 전자 빔 용접용 강재와 그의 제조 방법 |
RU2478974C2 (ru) * | 2011-05-31 | 2013-04-10 | Федеральное государственное унитарное предприятие "Всероссийский научно-исследовательский институт метрологии им. Д.И. Менделеева" (ФГУП "ВНИИМ им. Д.И. Менделеева") | Способ воспроизведения единицы силы постоянного электрического тока и устройство для его осуществления |
WO2013122633A1 (en) * | 2011-10-18 | 2013-08-22 | Baldwin David A | Arc devices and moving arc couples |
EA019817B1 (ru) * | 2011-12-29 | 2014-06-30 | Федеральное Государственное Бюджетное Образовательное Учреждение Высшего Профессионального Образования "Национальный Исследовательский Томский Политехнический Университет" (Фгбоу Впо Ни Тпу) | Ионный диод с магнитной самоизоляцией |
RU2680150C1 (ru) * | 2017-12-27 | 2019-02-18 | федеральное государственное бюджетное образовательное учреждение высшего образования "Национальный исследовательский университет "МЭИ" (ФГБОУ ВО "НИУ "МЭИ") | Катодный блок сварочной электронной пушки |
WO2019180242A1 (en) | 2018-03-23 | 2019-09-26 | Freemelt Ab | Cathode assembly for electron gun |
RU183913U1 (ru) * | 2018-05-07 | 2018-10-09 | Федеральное государственное бюджетное образовательное учреждение высшего образования "Саратовский государственный технический университет имени Гагарина Ю.А." (СГТУ имени Гагарина Ю.А.) | Триодная электронная пушка с автокатодом |
GB2583359A (en) * | 2019-04-25 | 2020-10-28 | Aquasium Tech Limited | Electron beam emitting assembly |
CN118180416A (zh) * | 2019-09-23 | 2024-06-14 | 弗里曼特有限公司 | 电子枪阴极技术 |
US11965494B2 (en) | 2021-02-17 | 2024-04-23 | Accion Systems, Inc. | Electrospray emission apparatus |
GB202102555D0 (en) | 2021-02-23 | 2021-04-07 | Twi Ltd | An electron gun cathode mount |
WO2024059296A1 (en) * | 2022-09-15 | 2024-03-21 | Elve Inc. | Cathode heater assembly for vacuum electronic devices and methods of manufacture |
Family Cites Families (11)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
FR1599106A (de) | 1968-11-29 | 1970-07-15 | ||
US4041316A (en) | 1974-09-20 | 1977-08-09 | Hitachi, Ltd. | Field emission electron gun with an evaporation source |
GB1549127A (en) | 1977-05-11 | 1979-08-01 | Inst Elektroswarki Patona | Electron beam welding guns |
US4333214A (en) | 1980-03-31 | 1982-06-08 | Western Electric Company, Inc. | Wire weldment deflashing tool |
DE3031839C2 (de) | 1980-08-23 | 1983-10-20 | Dynamit Nobel Ag, 5210 Troisdorf | Verfahren zum kontinuierlichen Herstellen einer gemusterten Bahn aus thermoplastischem Kunststoff |
DE3227974A1 (de) | 1982-07-27 | 1984-02-09 | Messer Griesheim Gmbh, 6000 Frankfurt | Elektronenstrahlerzeuger, insbesondere zweielektroden-elektronenstrahlerzeuger |
JPS6139976A (ja) | 1984-07-31 | 1986-02-26 | Nippon Gakki Seizo Kk | 記録信号の再生装置におけるジツタ吸収回路 |
US4792688A (en) | 1987-06-15 | 1988-12-20 | The Perkin-Elmer Corporation | Differentially pumped seal apparatus |
JP2732961B2 (ja) | 1991-07-18 | 1998-03-30 | 株式会社日立製作所 | 荷電粒子線装置 |
GB9224602D0 (en) | 1992-11-24 | 1993-01-13 | Welding Inst | Charged particle generation |
US5623183A (en) * | 1995-03-22 | 1997-04-22 | Litton Systems, Inc. | Diverging beam electron gun for a toxic remediation device with a dome-shaped focusing electrode |
-
1997
- 1997-09-24 GB GBGB9720350.9A patent/GB9720350D0/en not_active Ceased
-
1998
- 1998-09-24 KR KR1020007003112A patent/KR100586050B1/ko not_active IP Right Cessation
- 1998-09-24 NZ NZ503060A patent/NZ503060A/en not_active IP Right Cessation
- 1998-09-24 TR TR2000/00750T patent/TR200000750T2/xx unknown
- 1998-09-24 DE DE69830664T patent/DE69830664T2/de not_active Expired - Lifetime
- 1998-09-24 AT AT98944099T patent/ATE298462T1/de not_active IP Right Cessation
- 1998-09-24 EP EP05009210A patent/EP1587129B1/de not_active Expired - Lifetime
- 1998-09-24 AU AU91765/98A patent/AU730293B2/en not_active Expired
- 1998-09-24 DE DE69839952T patent/DE69839952D1/de not_active Expired - Lifetime
- 1998-09-24 DE DE69840801T patent/DE69840801D1/de not_active Expired - Lifetime
- 1998-09-24 RU RU2000110116/09A patent/RU2201006C2/ru active
- 1998-09-24 BR BRPI9812505-2A patent/BR9812505B1/pt not_active IP Right Cessation
- 1998-09-24 AT AT05009210T patent/ATE430375T1/de not_active IP Right Cessation
- 1998-09-24 AT AT05009209T patent/ATE406666T1/de not_active IP Right Cessation
- 1998-09-24 ES ES98944099T patent/ES2244081T3/es not_active Expired - Lifetime
- 1998-09-24 CN CNB988094827A patent/CN1205646C/zh not_active Expired - Lifetime
- 1998-09-24 CZ CZ2000749A patent/CZ294249B6/cs not_active IP Right Cessation
- 1998-09-24 EP EP98944099A patent/EP1018137B1/de not_active Expired - Lifetime
- 1998-09-24 US US09/508,914 patent/US6404115B1/en not_active Expired - Lifetime
- 1998-09-24 WO PCT/GB1998/002882 patent/WO1999016101A2/en active IP Right Grant
- 1998-09-24 CA CA002303148A patent/CA2303148C/en not_active Expired - Lifetime
- 1998-09-24 PT PT98944099T patent/PT1018137E/pt unknown
- 1998-09-24 EP EP05009209A patent/EP1587130B1/de not_active Expired - Lifetime
- 1998-09-24 UA UA2000042306A patent/UA69394C2/uk unknown
- 1998-09-24 EE EEP200000153A patent/EE04694B1/xx unknown
- 1998-09-24 JP JP2000513304A patent/JP4200656B2/ja not_active Expired - Lifetime
-
2000
- 2000-03-23 NO NO20001513A patent/NO326142B1/no not_active IP Right Cessation
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
8364 | No opposition during term of opposition |