DE69839773D1 - Vorrichtung zur anregung eines gases durch oberflächenwellenplasma - Google Patents
Vorrichtung zur anregung eines gases durch oberflächenwellenplasmaInfo
- Publication number
- DE69839773D1 DE69839773D1 DE69839773T DE69839773T DE69839773D1 DE 69839773 D1 DE69839773 D1 DE 69839773D1 DE 69839773 T DE69839773 T DE 69839773T DE 69839773 T DE69839773 T DE 69839773T DE 69839773 D1 DE69839773 D1 DE 69839773D1
- Authority
- DE
- Germany
- Prior art keywords
- holding
- gas
- surface wave
- wave plasma
- plasma
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/32—Gas-filled discharge tubes
- H01J37/32009—Arrangements for generation of plasma specially adapted for examination or treatment of objects, e.g. plasma sources
- H01J37/32192—Microwave generated discharge
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/32—Gas-filled discharge tubes
- H01J37/32009—Arrangements for generation of plasma specially adapted for examination or treatment of objects, e.g. plasma sources
- H01J37/32192—Microwave generated discharge
- H01J37/32211—Means for coupling power to the plasma
- H01J37/32229—Waveguides
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05H—PLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
- H05H1/00—Generating plasma; Handling plasma
- H05H1/24—Generating plasma
- H05H1/26—Plasma torches
- H05H1/30—Plasma torches using applied electromagnetic fields, e.g. high frequency or microwave energy
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05H—PLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
- H05H1/00—Generating plasma; Handling plasma
- H05H1/24—Generating plasma
- H05H1/46—Generating plasma using applied electromagnetic fields, e.g. high frequency or microwave energy
Landscapes
- Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- Plasma & Fusion (AREA)
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Electromagnetism (AREA)
- Spectroscopy & Molecular Physics (AREA)
- Plasma Technology (AREA)
- Physical Or Chemical Processes And Apparatus (AREA)
- Drying Of Semiconductors (AREA)
- Electron Sources, Ion Sources (AREA)
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
FR9709025A FR2766321B1 (fr) | 1997-07-16 | 1997-07-16 | Dispositif d'excitation d'un gaz par plasma d'onde de surface |
PCT/FR1998/001453 WO1999004608A1 (fr) | 1997-07-16 | 1998-07-07 | Dispositif d'excitation d'un gaz par plasma d'onde de surface |
Publications (1)
Publication Number | Publication Date |
---|---|
DE69839773D1 true DE69839773D1 (de) | 2008-09-04 |
Family
ID=9509278
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE69839773T Expired - Lifetime DE69839773D1 (de) | 1997-07-16 | 1998-07-07 | Vorrichtung zur anregung eines gases durch oberflächenwellenplasma |
Country Status (9)
Country | Link |
---|---|
US (1) | US6298806B1 (de) |
EP (1) | EP0995345B1 (de) |
JP (1) | JP4619530B2 (de) |
KR (1) | KR20010021935A (de) |
AU (1) | AU8544798A (de) |
DE (1) | DE69839773D1 (de) |
FR (1) | FR2766321B1 (de) |
TW (1) | TW384628B (de) |
WO (1) | WO1999004608A1 (de) |
Families Citing this family (15)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US7696404B2 (en) | 1996-08-19 | 2010-04-13 | Advanced Cell Technology, Inc. | Embryonic or stem-like cell lines produced by cross species nuclear transplantation and methods for enhancing embryonic development by genetic alteration of donor cells or by tissue culture conditions |
FR2815888B1 (fr) * | 2000-10-27 | 2003-05-30 | Air Liquide | Dispositif de traitement de gaz par plasma |
US20040216845A1 (en) * | 2003-05-02 | 2004-11-04 | Czeslaw Golkowski | Non-thermal plasma generator device |
US20060027539A1 (en) * | 2003-05-02 | 2006-02-09 | Czeslaw Golkowski | Non-thermal plasma generator device |
GB0516695D0 (en) | 2005-08-15 | 2005-09-21 | Boc Group Plc | Microwave plasma reactor |
US8800483B2 (en) * | 2009-05-08 | 2014-08-12 | Peter F. Vandermeulen | Methods and systems for plasma deposition and treatment |
DE102010043940B4 (de) * | 2010-11-15 | 2012-08-30 | Forschungsverbund Berlin E.V. | Mikrowellen-ICP-Resonator |
US9397380B2 (en) * | 2011-01-28 | 2016-07-19 | Applied Materials, Inc. | Guided wave applicator with non-gaseous dielectric for plasma chamber |
RU2468544C1 (ru) * | 2011-03-21 | 2012-11-27 | Общество с ограниченной ответственностью "Фиберус" | Устройство для возбуждения и поддержания свч-разрядов в плазмохимических реакторах |
WO2012158443A2 (en) | 2011-05-13 | 2012-11-22 | Sheperak Thomas J | Plasma directed electron beam wound care system apparatus and method |
RU2474094C1 (ru) * | 2011-06-23 | 2013-01-27 | Государственное образовательное учреждение высшего профессионального образования "Казанский государственный технологический университет" | Устройство для получения высокочастотного емкостного газового разряда |
JP6635575B2 (ja) * | 2014-04-25 | 2020-01-29 | 日鉄ケミカル&マテリアル株式会社 | 安定性の良いフェノール化合物及びその製造方法 |
US10861667B2 (en) | 2017-06-27 | 2020-12-08 | Peter F. Vandermeulen | Methods and systems for plasma deposition and treatment |
US10490386B2 (en) | 2017-06-27 | 2019-11-26 | Peter F. Vandermeulen | Methods and systems for plasma deposition and treatment |
CN117545163A (zh) * | 2023-08-25 | 2024-02-09 | 盐城工学院 | 一种基于不规则表面波导管的大气压表面波等离子体*** |
Family Cites Families (18)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS50146551A (de) * | 1974-05-16 | 1975-11-25 | ||
JPS5939178B2 (ja) * | 1977-04-25 | 1984-09-21 | 株式会社東芝 | 活性化ガス発生装置 |
JPS54118081U (de) * | 1978-02-07 | 1979-08-18 | ||
FR2533397A2 (fr) * | 1982-09-16 | 1984-03-23 | Anvar | Perfectionnements aux torches a plasma |
JPS6161029U (de) * | 1984-09-26 | 1986-04-24 | ||
US4988644A (en) * | 1989-05-23 | 1991-01-29 | Texas Instruments Incorporated | Method for etching semiconductor materials using a remote plasma generator |
JPH03193880A (ja) * | 1989-08-03 | 1991-08-23 | Mikakutou Seimitsu Kogaku Kenkyusho:Kk | 高圧力下でのマイクロ波プラズマcvdによる高速成膜方法及びその装置 |
JPH0441675A (ja) * | 1990-06-07 | 1992-02-12 | Matsushita Electric Ind Co Ltd | マイクロ波プラズマ装置 |
US5262610A (en) * | 1991-03-29 | 1993-11-16 | The United States Of America As Represented By The Air Force | Low particulate reliability enhanced remote microwave plasma discharge device |
FR2677841B1 (fr) * | 1991-06-12 | 1997-01-10 | Air Liquide | Reacteur pour depot plasma en phase gazeuse de composes inorganiques sur un substrat polymere. |
JP3212172B2 (ja) * | 1993-01-29 | 2001-09-25 | アネルバ株式会社 | プラズマ処理装置 |
JPH0722500U (ja) * | 1993-09-28 | 1995-04-21 | 新日本無線株式会社 | マイクロ波プラズマcvd装置 |
JP2942138B2 (ja) * | 1994-03-22 | 1999-08-30 | 三菱電機株式会社 | プラズマ処理装置及びプラズマ処理方法 |
FR2733384B1 (fr) * | 1995-04-21 | 1997-07-04 | Univ Lille Sciences Tech | Dispositif pour creer deux ou plusieurs decharges plasma dans un meme tube guide d'onde |
JPH08315998A (ja) * | 1995-05-23 | 1996-11-29 | Hitachi Ltd | マイクロ波プラズマ処理装置 |
US5702530A (en) * | 1995-06-23 | 1997-12-30 | Applied Materials, Inc. | Distributed microwave plasma reactor for semiconductor processing |
JPH09270421A (ja) * | 1996-04-01 | 1997-10-14 | Mitsubishi Electric Corp | 表面処理装置および表面処理方法 |
JPH09134797A (ja) * | 1996-09-13 | 1997-05-20 | Hitachi Ltd | マイクロ波プラズマ処理装置 |
-
1997
- 1997-07-16 FR FR9709025A patent/FR2766321B1/fr not_active Expired - Fee Related
-
1998
- 1998-07-07 WO PCT/FR1998/001453 patent/WO1999004608A1/fr active IP Right Grant
- 1998-07-07 TW TW087110958A patent/TW384628B/zh not_active IP Right Cessation
- 1998-07-07 AU AU85447/98A patent/AU8544798A/en not_active Abandoned
- 1998-07-07 JP JP2000503693A patent/JP4619530B2/ja not_active Expired - Fee Related
- 1998-07-07 KR KR1020007000500A patent/KR20010021935A/ko not_active Application Discontinuation
- 1998-07-07 DE DE69839773T patent/DE69839773D1/de not_active Expired - Lifetime
- 1998-07-07 EP EP98936460A patent/EP0995345B1/de not_active Expired - Lifetime
- 1998-07-07 US US09/446,980 patent/US6298806B1/en not_active Expired - Lifetime
Also Published As
Publication number | Publication date |
---|---|
JP4619530B2 (ja) | 2011-01-26 |
WO1999004608A1 (fr) | 1999-01-28 |
US6298806B1 (en) | 2001-10-09 |
JP2001510939A (ja) | 2001-08-07 |
TW384628B (en) | 2000-03-11 |
FR2766321B1 (fr) | 1999-09-03 |
KR20010021935A (ko) | 2001-03-15 |
EP0995345B1 (de) | 2008-07-23 |
FR2766321A1 (fr) | 1999-01-22 |
AU8544798A (en) | 1999-02-10 |
EP0995345A1 (de) | 2000-04-26 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
8364 | No opposition during term of opposition |