DE69838794D1 - Verfahren zur herstellung eines leistungsbipolartransistors - Google Patents
Verfahren zur herstellung eines leistungsbipolartransistorsInfo
- Publication number
- DE69838794D1 DE69838794D1 DE69838794T DE69838794T DE69838794D1 DE 69838794 D1 DE69838794 D1 DE 69838794D1 DE 69838794 T DE69838794 T DE 69838794T DE 69838794 T DE69838794 T DE 69838794T DE 69838794 D1 DE69838794 D1 DE 69838794D1
- Authority
- DE
- Germany
- Prior art keywords
- producing
- bipolar transistor
- power bipolar
- power
- transistor
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 238000004519 manufacturing process Methods 0.000 title 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
- H01L29/68—Types of semiconductor device ; Multistep manufacturing processes therefor controllable by only the electric current supplied, or only the electric potential applied, to an electrode which does not carry the current to be rectified, amplified or switched
- H01L29/70—Bipolar devices
- H01L29/72—Transistor-type devices, i.e. able to continuously respond to applied control signals
- H01L29/73—Bipolar junction transistors
- H01L29/732—Vertical transistors
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
- H01L29/66007—Multistep manufacturing processes
- H01L29/66075—Multistep manufacturing processes of devices having semiconductor bodies comprising group 14 or group 13/15 materials
- H01L29/66227—Multistep manufacturing processes of devices having semiconductor bodies comprising group 14 or group 13/15 materials the devices being controllable only by the electric current supplied or the electric potential applied, to an electrode which does not carry the current to be rectified, amplified or switched, e.g. three-terminal devices
- H01L29/66234—Bipolar junction transistors [BJT]
- H01L29/66272—Silicon vertical transistors
- H01L29/66295—Silicon vertical transistors with main current going through the whole silicon substrate, e.g. power bipolar transistor
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/70—Manufacture or treatment of devices consisting of a plurality of solid state components formed in or on a common substrate or of parts thereof; Manufacture of integrated circuit devices or of parts thereof
- H01L21/71—Manufacture of specific parts of devices defined in group H01L21/70
- H01L21/74—Making of localized buried regions, e.g. buried collector layers, internal connections substrate contacts
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/02—Semiconductor bodies ; Multistep manufacturing processes therefor
- H01L29/06—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by their shape; characterised by the shapes, relative sizes, or dispositions of the semiconductor regions ; characterised by the concentration or distribution of impurities within semiconductor regions
- H01L29/08—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by their shape; characterised by the shapes, relative sizes, or dispositions of the semiconductor regions ; characterised by the concentration or distribution of impurities within semiconductor regions with semiconductor regions connected to an electrode carrying current to be rectified, amplified or switched and such electrode being part of a semiconductor device which comprises three or more electrodes
- H01L29/0821—Collector regions of bipolar transistors
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
- H01L29/66007—Multistep manufacturing processes
- H01L29/66075—Multistep manufacturing processes of devices having semiconductor bodies comprising group 14 or group 13/15 materials
- H01L29/66227—Multistep manufacturing processes of devices having semiconductor bodies comprising group 14 or group 13/15 materials the devices being controllable only by the electric current supplied or the electric potential applied, to an electrode which does not carry the current to be rectified, amplified or switched, e.g. three-terminal devices
- H01L29/66234—Bipolar junction transistors [BJT]
- H01L29/66272—Silicon vertical transistors
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
- H01L29/68—Types of semiconductor device ; Multistep manufacturing processes therefor controllable by only the electric current supplied, or only the electric potential applied, to an electrode which does not carry the current to be rectified, amplified or switched
- H01L29/70—Bipolar devices
- H01L29/72—Transistor-type devices, i.e. able to continuously respond to applied control signals
- H01L29/73—Bipolar junction transistors
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2223/00—Details relating to semiconductor or other solid state devices covered by the group H01L23/00
- H01L2223/58—Structural electrical arrangements for semiconductor devices not otherwise provided for
- H01L2223/64—Impedance arrangements
- H01L2223/66—High-frequency adaptations
- H01L2223/6644—Packaging aspects of high-frequency amplifiers
Landscapes
- Engineering & Computer Science (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Computer Hardware Design (AREA)
- Ceramic Engineering (AREA)
- Manufacturing & Machinery (AREA)
- Bipolar Transistors (AREA)
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
SE9703129A SE511891C2 (sv) | 1997-08-29 | 1997-08-29 | Bipolär effekttransistor och framställningsförfarande |
SE9703129 | 1997-08-29 | ||
PCT/SE1998/001479 WO1999012211A1 (en) | 1997-08-29 | 1998-08-18 | Bipolar power transistors and manufacturing method |
Publications (2)
Publication Number | Publication Date |
---|---|
DE69838794D1 true DE69838794D1 (de) | 2008-01-10 |
DE69838794T2 DE69838794T2 (de) | 2008-11-20 |
Family
ID=20408089
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE69838794T Expired - Lifetime DE69838794T2 (de) | 1997-08-29 | 1998-08-18 | Verfahren zur herstellung eines leistungsbipolartransistors |
Country Status (11)
Country | Link |
---|---|
US (1) | US6198156B1 (de) |
EP (1) | EP1021835B1 (de) |
JP (1) | JP2001515278A (de) |
KR (1) | KR20010023436A (de) |
CN (1) | CN100358154C (de) |
AU (1) | AU8821498A (de) |
CA (1) | CA2300127A1 (de) |
DE (1) | DE69838794T2 (de) |
SE (1) | SE511891C2 (de) |
TW (1) | TW358987B (de) |
WO (1) | WO1999012211A1 (de) |
Families Citing this family (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US6559517B2 (en) | 2000-04-27 | 2003-05-06 | En Jun Zhu | Structure for a semiconductor device |
SE0103036D0 (sv) * | 2001-05-04 | 2001-09-13 | Ericsson Telefon Ab L M | Semiconductor process and integrated circuit |
DE10160509A1 (de) * | 2001-11-30 | 2003-06-12 | Ihp Gmbh | Halbleitervorrichtung und Verfahren zu ihrer Herstellung |
CN102403223B (zh) * | 2011-10-25 | 2013-04-17 | 丹东安顺微电子有限公司 | 改善贮存时间Ts一致性的功率晶体管制造方法 |
CN103606554A (zh) * | 2013-11-13 | 2014-02-26 | 江苏博普电子科技有限责任公司 | 一种提高了BVceo的双极型晶体管及其生产工艺 |
Family Cites Families (9)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5237200A (en) * | 1989-07-28 | 1993-08-17 | Hitachi, Ltd. | Semiconductor bipolar transistor with concentric regions |
US5071778A (en) * | 1990-06-26 | 1991-12-10 | National Semiconductor Corporation | Self-aligned collector implant for bipolar transistors |
GB2255226B (en) * | 1991-04-23 | 1995-03-01 | Intel Corp | Bicmos process for counter doped collector |
US5270223A (en) * | 1991-06-28 | 1993-12-14 | Texas Instruments Incorporated | Multiple layer wide bandgap collector structure for bipolar transistors |
JPH07507180A (ja) * | 1992-02-25 | 1995-08-03 | マイクロユニティ システムズ エンジニアリング,インコーポレイテッド | カーク効果を抑制するバイポーラ接合トランジスタ |
US5637910A (en) * | 1994-02-02 | 1997-06-10 | Rohm Co., Ltd. | Multi-emitter or a multi-base transistor |
US5488252A (en) * | 1994-08-16 | 1996-01-30 | Telefonaktiebolaget L M Erricsson | Layout for radio frequency power transistors |
JP2748898B2 (ja) * | 1995-08-31 | 1998-05-13 | 日本電気株式会社 | 半導体装置およびその製造方法 |
JP3366919B2 (ja) * | 1997-06-27 | 2003-01-14 | エヌイーシー化合物デバイス株式会社 | 半導体装置 |
-
1997
- 1997-08-29 SE SE9703129A patent/SE511891C2/sv not_active IP Right Cessation
- 1997-11-11 TW TW086116819A patent/TW358987B/zh active
-
1998
- 1998-08-18 WO PCT/SE1998/001479 patent/WO1999012211A1/en active IP Right Grant
- 1998-08-18 EP EP98939842A patent/EP1021835B1/de not_active Expired - Lifetime
- 1998-08-18 CA CA002300127A patent/CA2300127A1/en not_active Abandoned
- 1998-08-18 KR KR1020007002079A patent/KR20010023436A/ko not_active Application Discontinuation
- 1998-08-18 CN CNB988086875A patent/CN100358154C/zh not_active Expired - Fee Related
- 1998-08-18 DE DE69838794T patent/DE69838794T2/de not_active Expired - Lifetime
- 1998-08-18 JP JP2000509119A patent/JP2001515278A/ja not_active Withdrawn
- 1998-08-18 AU AU88214/98A patent/AU8821498A/en not_active Abandoned
- 1998-08-28 US US09/141,537 patent/US6198156B1/en not_active Expired - Lifetime
Also Published As
Publication number | Publication date |
---|---|
KR20010023436A (ko) | 2001-03-26 |
JP2001515278A (ja) | 2001-09-18 |
CA2300127A1 (en) | 1999-03-11 |
TW358987B (en) | 1999-05-21 |
EP1021835A1 (de) | 2000-07-26 |
CN1269054A (zh) | 2000-10-04 |
SE511891C2 (sv) | 1999-12-13 |
AU8821498A (en) | 1999-03-22 |
EP1021835B1 (de) | 2007-11-28 |
CN100358154C (zh) | 2007-12-26 |
WO1999012211A1 (en) | 1999-03-11 |
SE9703129D0 (sv) | 1997-08-29 |
US6198156B1 (en) | 2001-03-06 |
SE9703129L (sv) | 1999-03-01 |
DE69838794T2 (de) | 2008-11-20 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
8364 | No opposition during term of opposition |