DE69837418D1 - Verdrängungspumpe - Google Patents

Verdrängungspumpe

Info

Publication number
DE69837418D1
DE69837418D1 DE69837418T DE69837418T DE69837418D1 DE 69837418 D1 DE69837418 D1 DE 69837418D1 DE 69837418 T DE69837418 T DE 69837418T DE 69837418 T DE69837418 T DE 69837418T DE 69837418 D1 DE69837418 D1 DE 69837418D1
Authority
DE
Germany
Prior art keywords
displacement pump
displacement
pump
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE69837418T
Other languages
English (en)
Other versions
DE69837418T2 (de
Inventor
Kiyozumi Fukui
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
T D ENGINEERING CO Ltd
Original Assignee
T D ENGINEERING CO Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by T D ENGINEERING CO Ltd filed Critical T D ENGINEERING CO Ltd
Application granted granted Critical
Publication of DE69837418D1 publication Critical patent/DE69837418D1/de
Publication of DE69837418T2 publication Critical patent/DE69837418T2/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C18/00—Rotary-piston pumps specially adapted for elastic fluids
    • F04C18/08—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing
    • F04C18/12—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type
    • F04C18/14—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type with toothed rotary pistons
    • F04C18/16—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type with toothed rotary pistons with helical teeth, e.g. chevron-shaped, screw type
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C23/00—Combinations of two or more pumps, each being of rotary-piston or oscillating-piston type, specially adapted for elastic fluids; Pumping installations specially adapted for elastic fluids; Multi-stage pumps specially adapted for elastic fluids
    • F04C23/001—Combinations of two or more pumps, each being of rotary-piston or oscillating-piston type, specially adapted for elastic fluids; Pumping installations specially adapted for elastic fluids; Multi-stage pumps specially adapted for elastic fluids of similar working principle
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C28/00—Control of, monitoring of, or safety arrangements for, pumps or pumping installations specially adapted for elastic fluids
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C29/00—Component parts, details or accessories of pumps or pumping installations, not provided for in groups F04C18/00 - F04C28/00
    • F04C29/04—Heating; Cooling; Heat insulation
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C2270/00—Control; Monitoring or safety arrangements
    • F04C2270/19—Temperature

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Applications Or Details Of Rotary Compressors (AREA)
  • Rotary Pumps (AREA)
DE69837418T 1997-05-22 1998-05-20 Verdrängungspumpe Expired - Fee Related DE69837418T2 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP13207497 1997-05-22
JP9132074A JPH10318168A (ja) 1997-05-22 1997-05-22 容積移送型ポンプ

Publications (2)

Publication Number Publication Date
DE69837418D1 true DE69837418D1 (de) 2007-05-10
DE69837418T2 DE69837418T2 (de) 2007-07-12

Family

ID=15072913

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69837418T Expired - Fee Related DE69837418T2 (de) 1997-05-22 1998-05-20 Verdrängungspumpe

Country Status (6)

Country Link
US (1) US6126425A (de)
EP (1) EP0879964B1 (de)
JP (1) JPH10318168A (de)
KR (1) KR100567006B1 (de)
DE (1) DE69837418T2 (de)
TW (1) TW389812B (de)

Families Citing this family (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE19858137B4 (de) * 1998-12-16 2016-12-15 BSH Hausgeräte GmbH Heizung zum Erwärmen der Spülflüssigkeit in einer Geschirrspülmaschine
FR2807477B1 (fr) * 2000-04-06 2002-07-12 Cit Alcatel Systeme de refroidissement de pompe a vide, et procede pour sa realisation
JP3758550B2 (ja) * 2001-10-24 2006-03-22 アイシン精機株式会社 多段真空ポンプ
DE10156179A1 (de) * 2001-11-15 2003-05-28 Leybold Vakuum Gmbh Kühlung einer Schraubenvakuumpumpe
WO2003098047A1 (fr) * 2002-05-20 2003-11-27 Ts Corporation Pompe a vide
AU2003269250A1 (en) * 2002-10-14 2004-05-04 The Boc Group Plc Rotary piston vacuum pump with washing installation
EP1917441B1 (de) * 2005-08-25 2016-07-13 Ateliers Busch S.A. Pumpengehäuse
DE202010015439U1 (de) * 2010-11-16 2012-02-17 Hugo Vogelsang Maschinenbau Gmbh Drehkolbenpumpe und Gehäuse-Halbschale für selbige
JP5793004B2 (ja) * 2011-06-02 2015-10-14 株式会社荏原製作所 真空ポンプ
JP6125242B2 (ja) * 2013-01-24 2017-05-10 株式会社荏原製作所 真空ポンプ装置およびその運転方法
CN114542425A (zh) * 2020-11-26 2022-05-27 中国科学院微电子研究所 半导体加工工艺、抽真空装置和半导体工艺设备

Family Cites Families (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US1590964A (en) * 1925-07-14 1926-06-29 Edward T Street Pump
GB821947A (en) * 1955-12-19 1959-10-14 Svenska Rotor Maskiner Ab Improvements in or relating to rotary devices and casing structures therefor
GB1435578A (en) * 1973-09-15 1976-05-12 Rolls Royce Motors Ltd Engine housings
GB1427053A (en) * 1973-09-18 1976-03-03 Rolls Royce Motors Ltd Engine housings
US3923433A (en) * 1974-07-18 1975-12-02 Curtiss Wright Corp Die-cast rotor housing for rotary combustion engines
JPS535307A (en) * 1976-07-02 1978-01-18 Toyota Motor Corp Rotary piston engine
US4228654A (en) * 1978-12-07 1980-10-21 Hill Craig C Heat recuperative engine with improved recuperator
JPS56167894A (en) * 1980-05-27 1981-12-23 Matsushita Electric Ind Co Ltd Compressor
DE3022147A1 (de) * 1980-06-13 1982-01-07 Klöckner-Humboldt-Deutz AG, 5000 Köln Verdichter
DE8021440U1 (de) * 1980-08-09 1980-12-04 Fa. Hartwig Paulsen, 7500 Karlsruhe Beheizbare zahnradpumpe
JPH06100188B2 (ja) * 1984-09-05 1994-12-12 株式会社日立製作所 オイルフリースクリュー真空ポンプ
JPH02294574A (ja) * 1989-05-10 1990-12-05 Hitachi Ltd 真空排気装置
KR950007378B1 (ko) * 1990-04-06 1995-07-10 가부시끼 가이샤 히다찌 세이사꾸쇼 진공펌프
US5533566A (en) * 1992-02-18 1996-07-09 Fineblum; Solomon S. Constant volume regenerative heat exchanger

Also Published As

Publication number Publication date
EP0879964B1 (de) 2007-03-28
DE69837418T2 (de) 2007-07-12
EP0879964A1 (de) 1998-11-25
US6126425A (en) 2000-10-03
KR19980087165A (ko) 1998-12-05
JPH10318168A (ja) 1998-12-02
KR100567006B1 (ko) 2007-11-30
TW389812B (en) 2000-05-11

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8339 Ceased/non-payment of the annual fee