DE69834847D1 - Reflektierender räumlicher lichtmodulator mit doppelsubstrat und selbstbeschränkenden mikromechanischen elementen - Google Patents
Reflektierender räumlicher lichtmodulator mit doppelsubstrat und selbstbeschränkenden mikromechanischen elementenInfo
- Publication number
- DE69834847D1 DE69834847D1 DE69834847T DE69834847T DE69834847D1 DE 69834847 D1 DE69834847 D1 DE 69834847D1 DE 69834847 T DE69834847 T DE 69834847T DE 69834847 T DE69834847 T DE 69834847T DE 69834847 D1 DE69834847 D1 DE 69834847D1
- Authority
- DE
- Germany
- Prior art keywords
- restricting
- self
- light modulator
- spatial light
- reflective spatial
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
Classifications
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
- G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
- G02B26/0816—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements
- G02B26/0833—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD
- G02B26/0841—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD the reflecting element being moved or deformed by electrostatic means
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Mechanical Light Control Or Optical Switches (AREA)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
PCT/US1998/020161 WO2000017695A1 (en) | 1998-09-24 | 1998-09-24 | A double substrate reflective spatial light modulator with self-limiting micro-mechanical elements |
Publications (2)
Publication Number | Publication Date |
---|---|
DE69834847D1 true DE69834847D1 (de) | 2006-07-20 |
DE69834847T2 DE69834847T2 (de) | 2007-02-15 |
Family
ID=22267939
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE69834847T Expired - Lifetime DE69834847T2 (de) | 1998-09-24 | 1998-09-24 | Reflektierender räumlicher lichtmodulator mit doppelsubstrat und selbstbeschränkenden mikromechanischen elementen |
Country Status (7)
Country | Link |
---|---|
EP (1) | EP1116063B1 (de) |
JP (1) | JP2002525676A (de) |
KR (1) | KR100635589B1 (de) |
CN (1) | CN1232858C (de) |
AU (1) | AU9583798A (de) |
DE (1) | DE69834847T2 (de) |
WO (1) | WO2000017695A1 (de) |
Families Citing this family (32)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US6611377B1 (en) * | 2000-07-10 | 2003-08-26 | Intel Corporation | Micromechanical diffraction phase grating |
US7307775B2 (en) * | 2000-12-07 | 2007-12-11 | Texas Instruments Incorporated | Methods for depositing, releasing and packaging micro-electromechanical devices on wafer substrates |
US20040069742A1 (en) * | 2002-06-19 | 2004-04-15 | Pan Shaoher X. | Fabrication of a reflective spatial light modulator |
US6862127B1 (en) * | 2003-11-01 | 2005-03-01 | Fusao Ishii | High performance micromirror arrays and methods of manufacturing the same |
US6903860B2 (en) * | 2003-11-01 | 2005-06-07 | Fusao Ishii | Vacuum packaged micromirror arrays and methods of manufacturing the same |
US20050094241A1 (en) * | 2003-11-01 | 2005-05-05 | Fusao Ishii | Electromechanical micromirror devices and methods of manufacturing the same |
JP4651302B2 (ja) * | 2004-04-28 | 2011-03-16 | よこはまティーエルオー株式会社 | マイクロミラー素子の製造方法 |
US7184202B2 (en) * | 2004-09-27 | 2007-02-27 | Idc, Llc | Method and system for packaging a MEMS device |
US8310442B2 (en) | 2005-02-23 | 2012-11-13 | Pixtronix, Inc. | Circuits for controlling display apparatus |
US20070205969A1 (en) | 2005-02-23 | 2007-09-06 | Pixtronix, Incorporated | Direct-view MEMS display devices and methods for generating images thereon |
US9261694B2 (en) | 2005-02-23 | 2016-02-16 | Pixtronix, Inc. | Display apparatus and methods for manufacture thereof |
US9082353B2 (en) | 2010-01-05 | 2015-07-14 | Pixtronix, Inc. | Circuits for controlling display apparatus |
US8519945B2 (en) | 2006-01-06 | 2013-08-27 | Pixtronix, Inc. | Circuits for controlling display apparatus |
CN101128765B (zh) * | 2005-02-23 | 2010-12-01 | 皮克斯特罗尼克斯公司 | 显示方法和装置 |
US7999994B2 (en) | 2005-02-23 | 2011-08-16 | Pixtronix, Inc. | Display apparatus and methods for manufacture thereof |
US9158106B2 (en) | 2005-02-23 | 2015-10-13 | Pixtronix, Inc. | Display methods and apparatus |
US8159428B2 (en) | 2005-02-23 | 2012-04-17 | Pixtronix, Inc. | Display methods and apparatus |
US8482496B2 (en) | 2006-01-06 | 2013-07-09 | Pixtronix, Inc. | Circuits for controlling MEMS display apparatus on a transparent substrate |
CN103345058A (zh) * | 2005-02-23 | 2013-10-09 | 皮克斯特隆尼斯有限公司 | 用于作动显示器的方法和装置 |
US9229222B2 (en) | 2005-02-23 | 2016-01-05 | Pixtronix, Inc. | Alignment methods in fluid-filled MEMS displays |
JP4743630B2 (ja) | 2005-10-20 | 2011-08-10 | 株式会社リコー | 光偏向装置、光偏向装置アレイおよび画像投影表示装置 |
US8526096B2 (en) | 2006-02-23 | 2013-09-03 | Pixtronix, Inc. | Mechanical light modulators with stressed beams |
JP2007233065A (ja) | 2006-03-01 | 2007-09-13 | Ricoh Co Ltd | 光偏向装置とその製造方法並びに光投影装置 |
US7528933B2 (en) * | 2006-04-06 | 2009-05-05 | Asml Netherlands B.V. | Lithographic apparatus and device manufacturing method utilizing a MEMS mirror with large deflection using a non-linear spring arrangement |
US9176318B2 (en) | 2007-05-18 | 2015-11-03 | Pixtronix, Inc. | Methods for manufacturing fluid-filled MEMS displays |
US8520285B2 (en) | 2008-08-04 | 2013-08-27 | Pixtronix, Inc. | Methods for manufacturing cold seal fluid-filled display apparatus |
US8169679B2 (en) | 2008-10-27 | 2012-05-01 | Pixtronix, Inc. | MEMS anchors |
BR112012019383A2 (pt) | 2010-02-02 | 2017-09-12 | Pixtronix Inc | Circuitos para controlar aparelho de exibição |
CN102236224B (zh) * | 2010-04-30 | 2014-01-15 | 北京京东方光电科技有限公司 | 显示面板及制造方法和显示器 |
US9134552B2 (en) | 2013-03-13 | 2015-09-15 | Pixtronix, Inc. | Display apparatus with narrow gap electrostatic actuators |
US9580304B2 (en) * | 2015-05-07 | 2017-02-28 | Texas Instruments Incorporated | Low-stress low-hydrogen LPCVD silicon nitride |
TWI638419B (zh) * | 2016-04-18 | 2018-10-11 | 村田製作所股份有限公司 | 一種掃描鏡設備與其製造方法 |
Family Cites Families (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4229732A (en) * | 1978-12-11 | 1980-10-21 | International Business Machines Corporation | Micromechanical display logic and array |
CH633902A5 (fr) * | 1980-03-11 | 1982-12-31 | Centre Electron Horloger | Dispositif de modulation de lumiere. |
FR2710161B1 (fr) * | 1993-09-13 | 1995-11-24 | Suisse Electronique Microtech | Réseau miniature d'obturateurs de lumière. |
US5454906A (en) * | 1994-06-21 | 1995-10-03 | Texas Instruments Inc. | Method of providing sacrificial spacer for micro-mechanical devices |
US5784190A (en) * | 1995-04-27 | 1998-07-21 | John M. Baker | Electro-micro-mechanical shutters on transparent substrates |
US5768009A (en) * | 1997-04-18 | 1998-06-16 | E-Beam | Light valve target comprising electrostatically-repelled micro-mirrors |
US5808780A (en) * | 1997-06-09 | 1998-09-15 | Texas Instruments Incorporated | Non-contacting micromechanical optical switch |
-
1998
- 1998-09-24 EP EP98949533A patent/EP1116063B1/de not_active Expired - Lifetime
- 1998-09-24 KR KR1020017003698A patent/KR100635589B1/ko not_active IP Right Cessation
- 1998-09-24 DE DE69834847T patent/DE69834847T2/de not_active Expired - Lifetime
- 1998-09-24 AU AU95837/98A patent/AU9583798A/en not_active Abandoned
- 1998-09-24 CN CNB988142236A patent/CN1232858C/zh not_active Expired - Fee Related
- 1998-09-24 WO PCT/US1998/020161 patent/WO2000017695A1/en active IP Right Grant
- 1998-09-24 JP JP2000571299A patent/JP2002525676A/ja active Pending
Also Published As
Publication number | Publication date |
---|---|
CN1232858C (zh) | 2005-12-21 |
EP1116063A1 (de) | 2001-07-18 |
KR20010106484A (ko) | 2001-11-29 |
EP1116063A4 (de) | 2003-08-20 |
AU9583798A (en) | 2000-04-10 |
KR100635589B1 (ko) | 2006-10-18 |
DE69834847T2 (de) | 2007-02-15 |
CN1309782A (zh) | 2001-08-22 |
WO2000017695A1 (en) | 2000-03-30 |
JP2002525676A (ja) | 2002-08-13 |
EP1116063B1 (de) | 2006-06-07 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
8332 | No legal effect for de | ||
8370 | Indication of lapse of patent is to be deleted | ||
8364 | No opposition during term of opposition |