DE69827389D1 - Photothermischer mikrotechnologisch hergestellter gassensor - Google Patents
Photothermischer mikrotechnologisch hergestellter gassensorInfo
- Publication number
- DE69827389D1 DE69827389D1 DE69827389T DE69827389T DE69827389D1 DE 69827389 D1 DE69827389 D1 DE 69827389D1 DE 69827389 T DE69827389 T DE 69827389T DE 69827389 T DE69827389 T DE 69827389T DE 69827389 D1 DE69827389 D1 DE 69827389D1
- Authority
- DE
- Germany
- Prior art keywords
- photothermal
- gas sensor
- produced gas
- microtechnologically
- microtechnologically produced
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
- G01N21/171—Systems in which incident light is modified in accordance with the properties of the material investigated with calorimetric detection, e.g. with thermal lens detection
Landscapes
- Physics & Mathematics (AREA)
- Health & Medical Sciences (AREA)
- Life Sciences & Earth Sciences (AREA)
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Biochemistry (AREA)
- General Health & Medical Sciences (AREA)
- General Physics & Mathematics (AREA)
- Immunology (AREA)
- Pathology (AREA)
- Investigating Or Analysing Materials By Optical Means (AREA)
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US08/884,824 US5852308A (en) | 1997-06-30 | 1997-06-30 | Micromachined inferential opto-thermal gas sensor |
US884824 | 1997-06-30 | ||
PCT/US1998/013230 WO1999000659A1 (en) | 1997-06-30 | 1998-06-26 | Micromachined opto-thermal gas sensor |
Publications (2)
Publication Number | Publication Date |
---|---|
DE69827389D1 true DE69827389D1 (de) | 2004-12-09 |
DE69827389T2 DE69827389T2 (de) | 2005-11-24 |
Family
ID=25385485
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE69827389T Expired - Lifetime DE69827389T2 (de) | 1997-06-30 | 1998-06-26 | Photothermischer mikrotechnologisch hergestellter gassensor |
Country Status (6)
Country | Link |
---|---|
US (1) | US5852308A (de) |
EP (1) | EP0993602B1 (de) |
JP (1) | JP4054069B2 (de) |
CA (1) | CA2284836A1 (de) |
DE (1) | DE69827389T2 (de) |
WO (1) | WO1999000659A1 (de) |
Families Citing this family (30)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US6322670B2 (en) | 1996-12-31 | 2001-11-27 | Honeywell International Inc. | Flexible high performance microbolometer detector material fabricated via controlled ion beam sputter deposition process |
KR100377946B1 (ko) * | 2000-07-15 | 2003-03-29 | 한국과학기술원 | 덴드리머를 이용한 단분자막의 제조방법 |
US20060125092A1 (en) * | 2000-07-18 | 2006-06-15 | Marshall Paul N | High density integrated circuit package architecture |
US6474138B1 (en) | 2000-11-28 | 2002-11-05 | Honeywell International Inc. | Adsorption based carbon monoxide sensor and method |
US6550310B1 (en) | 2000-11-28 | 2003-04-22 | Honeywell International Inc. | Catalytic adsorption and oxidation based carbon monoxide sensor and detection method |
US6631638B2 (en) | 2001-01-30 | 2003-10-14 | Rosemount Aerospace Inc. | Fluid flow sensor |
US6885786B2 (en) * | 2001-02-07 | 2005-04-26 | Shipley Company, L.L.C. | Combined wet and dry etching process for micromachining of crystalline materials |
US6907150B2 (en) * | 2001-02-07 | 2005-06-14 | Shipley Company, L.L.C. | Etching process for micromachining crystalline materials and devices fabricated thereby |
US20030021572A1 (en) * | 2001-02-07 | 2003-01-30 | Steinberg Dan A. | V-groove with tapered depth and method for making |
US6964804B2 (en) * | 2001-02-14 | 2005-11-15 | Shipley Company, L.L.C. | Micromachined structures made by combined wet and dry etching |
US20020195417A1 (en) * | 2001-04-20 | 2002-12-26 | Steinberg Dan A. | Wet and dry etching process on <110> silicon and resulting structures |
JP2002328115A (ja) * | 2001-04-27 | 2002-11-15 | Yamatake Corp | 光音響ガスセンサ用ガス拡散フィルタの製造方法 |
JP2002328116A (ja) * | 2001-04-27 | 2002-11-15 | Yamatake Corp | 光音響ガスセンサ |
JP2002328118A (ja) * | 2001-04-27 | 2002-11-15 | Yamatake Corp | 光音響ガスセンサ用ガス拡散フィルタの製造方法 |
US7530257B2 (en) * | 2002-09-27 | 2009-05-12 | Honeywell International Inc. | Phased micro analyzer VIII |
US6792794B2 (en) * | 2002-09-27 | 2004-09-21 | Honeywell International Inc. | Low power gas leak detector |
TWI254025B (en) | 2003-05-23 | 2006-05-01 | Rohm & Haas Elect Mat | Etching process for micromachining crystalline materials and devices fabricated thereby |
CN100468029C (zh) * | 2005-03-03 | 2009-03-11 | 清华大学 | 标准漏孔及其制作方法 |
US7518380B2 (en) * | 2005-05-17 | 2009-04-14 | Honeywell International Inc. | Chemical impedance detectors for fluid analyzers |
DE102007006153A1 (de) * | 2007-02-07 | 2008-08-21 | Tyco Electronics Raychem Gmbh | Optische Gassensoranordnung in monolithisch integrierter Bauweise |
SE534685C2 (sv) * | 2008-12-12 | 2011-11-15 | Senseair Ab | Gassensorarrangemang för kretskort |
SE533551C2 (sv) * | 2009-02-12 | 2010-10-26 | Senseair Ab | En ljusdetektor anpassad att som diskret enhet fästas på en bärare |
US9759610B2 (en) * | 2012-08-01 | 2017-09-12 | General Electric Company | Method and device for dissolved gas analysis |
EP2762857B1 (de) * | 2012-12-19 | 2018-05-02 | General Electric Company | Verfahren und Vorrichtung zur Analyse von aufgelöstem Gas |
DE102014200583B3 (de) * | 2014-01-15 | 2015-05-13 | Robert Bosch Gmbh | Verfahren zum herstellen eines integrierten mikromechanischen fluidsensor-bauteils, integriertes mikromechanisches fluidsensor-bauteil und verfahren zum detektieren eines fluids mittels eines integrierten mikromechanischen fluidsensor-bauteils |
DE102016103646B4 (de) * | 2016-01-22 | 2023-03-02 | Infineon Technologies Ag | Integriertes photoakustisches gassensormodul |
US9927360B2 (en) | 2016-08-29 | 2018-03-27 | Apple Inc. | Electronic devices with environmental sensors |
WO2019079878A1 (en) * | 2017-10-27 | 2019-05-02 | Rostrum Medical Innovations Inc. | AIR QUALITY AND AIR COMPOSITION SENSOR |
CN114325997B (zh) * | 2021-11-24 | 2023-10-27 | 中国航空工业集团公司洛阳电光设备研究所 | 宽温范围精确温控的超窄带滤光片温控构型及其装调方法 |
DE102022128472A1 (de) * | 2022-10-27 | 2024-05-02 | Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung eingetragener Verein | Anordnung und Verfahren zur Bestimmung der Konzentration eines oder mehrerer Stoffe in einem flüssigen oder gasförmigen Medium |
Family Cites Families (18)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE2109568A1 (de) * | 1971-03-01 | 1972-09-14 | Siemens Ag | Nachweissystem für ein Ultrarot-Gasanalysegerät |
US4048499A (en) * | 1975-02-20 | 1977-09-13 | Diax Corporation | Infrared absorption spectroscopy of liquids employing a thermal detector |
US4067653A (en) * | 1976-08-27 | 1978-01-10 | Nasa | Differential optoacoustic absorption detector |
DE2927432A1 (de) * | 1978-07-08 | 1980-01-24 | Fuji Electric Co Ltd | Photoakustisches spektrometer |
US4899053A (en) * | 1987-10-21 | 1990-02-06 | Criticare Systems, Inc. | Solid state non-dispersive IR analyzer using electrical current-modulated microsources |
WO1989007753A1 (en) * | 1988-02-19 | 1989-08-24 | Koch High Tech Ag | Ultrasonic temperature measurement and applications in optical spectroscopy and calorimetry |
DE9006169U1 (de) * | 1990-05-31 | 1991-07-18 | Siemens AG, 1000 Berlin und 8000 München | Gasanalysator |
DE4208135A1 (de) * | 1992-03-13 | 1993-09-16 | Siemens Ag | Vorrichtung zur messung einer gas- oder fluessigkeitsstroemung |
DE4224518C2 (de) * | 1992-07-24 | 1996-03-14 | Siemens Ag | Strömungssensor und Verfahren zu seiner Herstellung |
JPH07140075A (ja) * | 1993-09-24 | 1995-06-02 | Fuji Electric Co Ltd | 赤外線ガス分析計 |
US5444249A (en) * | 1994-02-14 | 1995-08-22 | Telaire Systems, Inc. | NDIR gas sensor |
US5747808A (en) * | 1994-02-14 | 1998-05-05 | Engelhard Sensor Technologies | NDIR gas sensor |
EP0685728B1 (de) * | 1994-06-04 | 2002-12-11 | Orbisphere Laboratories Neuchatel Sa | Photoakustisches Analysegerät |
JPH08184560A (ja) * | 1994-12-28 | 1996-07-16 | Hoechst Japan Ltd | 有機溶剤蒸気を検出するための光センサ装置 |
US5600148A (en) * | 1994-12-30 | 1997-02-04 | Honeywell Inc. | Low power infrared scene projector array and method of manufacture |
US5550373A (en) * | 1994-12-30 | 1996-08-27 | Honeywell Inc. | Fabry-Perot micro filter-detector |
FI102696B1 (fi) * | 1995-02-22 | 1999-01-29 | Instrumentarium Oy | Kaksoissäteilylähdekokoonpano ja mittausanturi |
US5650624A (en) * | 1995-04-13 | 1997-07-22 | Engelhard Sensor Technologies, Inc. | Passive infrared analysis gas sensor |
-
1997
- 1997-06-30 US US08/884,824 patent/US5852308A/en not_active Expired - Lifetime
-
1998
- 1998-06-26 EP EP98931592A patent/EP0993602B1/de not_active Expired - Lifetime
- 1998-06-26 CA CA002284836A patent/CA2284836A1/en not_active Abandoned
- 1998-06-26 JP JP50572699A patent/JP4054069B2/ja not_active Expired - Fee Related
- 1998-06-26 WO PCT/US1998/013230 patent/WO1999000659A1/en active IP Right Grant
- 1998-06-26 DE DE69827389T patent/DE69827389T2/de not_active Expired - Lifetime
Also Published As
Publication number | Publication date |
---|---|
US5852308A (en) | 1998-12-22 |
DE69827389T2 (de) | 2005-11-24 |
EP0993602B1 (de) | 2004-11-03 |
JP4054069B2 (ja) | 2008-02-27 |
CA2284836A1 (en) | 1999-01-07 |
WO1999000659A1 (en) | 1999-01-07 |
JP2002511936A (ja) | 2002-04-16 |
EP0993602A1 (de) | 2000-04-19 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
8364 | No opposition during term of opposition |