DE69825345D1 - Mikromotore, lineare Motore, Mikropumpe, Verfahren zur Anwendung derselben, Mikrobetätigungselemente, Geräte und Verfahren zur Steuerung von Flüssigkeitseigenschaften - Google Patents
Mikromotore, lineare Motore, Mikropumpe, Verfahren zur Anwendung derselben, Mikrobetätigungselemente, Geräte und Verfahren zur Steuerung von FlüssigkeitseigenschaftenInfo
- Publication number
- DE69825345D1 DE69825345D1 DE69825345T DE69825345T DE69825345D1 DE 69825345 D1 DE69825345 D1 DE 69825345D1 DE 69825345 T DE69825345 T DE 69825345T DE 69825345 T DE69825345 T DE 69825345T DE 69825345 D1 DE69825345 D1 DE 69825345D1
- Authority
- DE
- Germany
- Prior art keywords
- methods
- micromotors
- micropumps
- actuators
- micro
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
Classifications
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F15—FLUID-PRESSURE ACTUATORS; HYDRAULICS OR PNEUMATICS IN GENERAL
- F15C—FLUID-CIRCUIT ELEMENTS PREDOMINANTLY USED FOR COMPUTING OR CONTROL PURPOSES
- F15C5/00—Manufacture of fluid circuit elements; Manufacture of assemblages of such elements integrated circuits
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F15—FLUID-PRESSURE ACTUATORS; HYDRAULICS OR PNEUMATICS IN GENERAL
- F15B—SYSTEMS ACTING BY MEANS OF FLUIDS IN GENERAL; FLUID-PRESSURE ACTUATORS, e.g. SERVOMOTORS; DETAILS OF FLUID-PRESSURE SYSTEMS, NOT OTHERWISE PROVIDED FOR
- F15B21/00—Common features of fluid actuator systems; Fluid-pressure actuator systems or details thereof, not covered by any other group of this subclass
- F15B21/06—Use of special fluids, e.g. liquid metal; Special adaptations of fluid-pressure systems, or control of elements therefor, to the use of such fluids
- F15B21/065—Use of electro- or magnetosensitive fluids, e.g. electrorheological fluid
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F15—FLUID-PRESSURE ACTUATORS; HYDRAULICS OR PNEUMATICS IN GENERAL
- F15C—FLUID-CIRCUIT ELEMENTS PREDOMINANTLY USED FOR COMPUTING OR CONTROL PURPOSES
- F15C1/00—Circuit elements having no moving parts
- F15C1/02—Details, e.g. special constructional devices for circuits with fluid elements, such as resistances, capacitive circuit elements; devices preventing reaction coupling in composite elements ; Switch boards; Programme devices
- F15C1/04—Means for controlling fluid streams to fluid devices, e.g. by electric signals or other signals, no mixing taking place between the signal and the flow to be controlled
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
- F16K99/00—Subject matter not provided for in other groups of this subclass
- F16K99/0001—Microvalves
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
- F16K99/00—Subject matter not provided for in other groups of this subclass
- F16K99/0001—Microvalves
- F16K99/0003—Constructional types of microvalves; Details of the cutting-off member
- F16K99/0005—Lift valves
- F16K99/0007—Lift valves of cantilever type
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
- F16K99/00—Subject matter not provided for in other groups of this subclass
- F16K99/0001—Microvalves
- F16K99/0003—Constructional types of microvalves; Details of the cutting-off member
- F16K99/0013—Rotary valves
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
- F16K99/00—Subject matter not provided for in other groups of this subclass
- F16K99/0001—Microvalves
- F16K99/0034—Operating means specially adapted for microvalves
- F16K99/0042—Electric operating means therefor
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
- F16K99/00—Subject matter not provided for in other groups of this subclass
- F16K99/0001—Microvalves
- F16K99/0034—Operating means specially adapted for microvalves
- F16K99/0055—Operating means specially adapted for microvalves actuated by fluids
- F16K99/0057—Operating means specially adapted for microvalves actuated by fluids the fluid being the circulating fluid itself, e.g. check valves
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J41/00—Discharge tubes for measuring pressure of introduced gas or for detecting presence of gas; Discharge tubes for evacuation by diffusion of ions
- H01J41/12—Discharge tubes for evacuating by diffusion of ions, e.g. ion pumps, getter ion pumps
- H01J41/18—Discharge tubes for evacuating by diffusion of ions, e.g. ion pumps, getter ion pumps with ionisation by means of cold cathodes
-
- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
- H02N11/00—Generators or motors not provided for elsewhere; Alleged perpetua mobilia obtained by electric or magnetic means
- H02N11/006—Motors
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
- F16K99/00—Subject matter not provided for in other groups of this subclass
- F16K2099/0082—Microvalves adapted for a particular use
- F16K2099/0094—Micropumps
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10S137/00—Fluid handling
- Y10S137/909—Magnetic fluid valve
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T137/00—Fluid handling
- Y10T137/0318—Processes
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T137/00—Fluid handling
- Y10T137/206—Flow affected by fluid contact, energy field or coanda effect [e.g., pure fluid device or system]
- Y10T137/2082—Utilizing particular fluid
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T137/00—Fluid handling
- Y10T137/206—Flow affected by fluid contact, energy field or coanda effect [e.g., pure fluid device or system]
- Y10T137/218—Means to regulate or vary operation of device
- Y10T137/2191—By non-fluid energy field affecting input [e.g., transducer]
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T137/00—Fluid handling
- Y10T137/8593—Systems
- Y10T137/85978—With pump
Landscapes
- Engineering & Computer Science (AREA)
- General Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Chemical & Material Sciences (AREA)
- Dispersion Chemistry (AREA)
- Fluid Mechanics (AREA)
- Physics & Mathematics (AREA)
- Theoretical Computer Science (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Analytical Chemistry (AREA)
- Computer Hardware Design (AREA)
- Micromachines (AREA)
- Lubricants (AREA)
- Fluid-Pressure Circuits (AREA)
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP1997002201U JP3041928U (ja) | 1997-03-28 | 1997-03-28 | マイクロモータ |
JP25555797A JP3263346B2 (ja) | 1997-09-19 | 1997-09-19 | 液体の流動性を制御する方法およびこの方法に用いる流体流動制御装置 |
JP29082697A JP3245386B2 (ja) | 1997-10-23 | 1997-10-23 | マイクロポンプおよびこの使用方法並びに該マイクロポンプを利用するマイクロアクチュエータ |
Publications (1)
Publication Number | Publication Date |
---|---|
DE69825345D1 true DE69825345D1 (de) | 2004-09-09 |
Family
ID=27275244
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE69825345T Expired - Lifetime DE69825345D1 (de) | 1997-03-28 | 1998-02-09 | Mikromotore, lineare Motore, Mikropumpe, Verfahren zur Anwendung derselben, Mikrobetätigungselemente, Geräte und Verfahren zur Steuerung von Flüssigkeitseigenschaften |
Country Status (3)
Country | Link |
---|---|
US (3) | US6116257A (de) |
EP (1) | EP0867622B1 (de) |
DE (1) | DE69825345D1 (de) |
Families Citing this family (59)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US6359757B1 (en) * | 1999-06-02 | 2002-03-19 | Maxtor Corporation | Electrostatic actuator |
US6690568B2 (en) * | 2000-06-20 | 2004-02-10 | Tokyo Electron Limited | Fluid dielectric variable capacitor |
CN1443392A (zh) * | 2000-07-18 | 2003-09-17 | 伊利诺伊技术研究所 | 电流体力学传导泵 |
US6443704B1 (en) * | 2001-03-02 | 2002-09-03 | Jafar Darabi | Electrohydrodynamicly enhanced micro cooling system for integrated circuits |
JP4094265B2 (ja) * | 2001-09-25 | 2008-06-04 | 株式会社日立製作所 | 燃料電池発電装置とそれを用いた装置 |
US6827822B2 (en) * | 2001-11-09 | 2004-12-07 | Temple University Of The Commonwealth System Of Higher Education | Method and apparatus for increasing and modulating the yield shear stress of electrorheological fluids |
DE10210051B4 (de) * | 2002-03-07 | 2005-10-13 | Siemens Ag | Vorrichtung zum elektrochemischen Nachweis einer Nukleotidsequenz, Analyse-Kassette für eine solche Vorrichtung und Verfahren zur Herstellung einer solchen Analyse-Kassette |
US7052251B2 (en) * | 2002-04-22 | 2006-05-30 | Medtronic Minimed, Inc. | Shape memory alloy wire driven positive displacement micropump with pulsatile output |
US7235164B2 (en) | 2002-10-18 | 2007-06-26 | Eksigent Technologies, Llc | Electrokinetic pump having capacitive electrodes |
US6881039B2 (en) * | 2002-09-23 | 2005-04-19 | Cooligy, Inc. | Micro-fabricated electrokinetic pump |
US7201012B2 (en) * | 2003-01-31 | 2007-04-10 | Cooligy, Inc. | Remedies to prevent cracking in a liquid system |
US7044196B2 (en) * | 2003-01-31 | 2006-05-16 | Cooligy,Inc | Decoupled spring-loaded mounting apparatus and method of manufacturing thereof |
ITTO20030196A1 (it) * | 2003-03-14 | 2004-09-15 | Fiat Ricerche | Attuatore rotativo a passi discreti. |
EP1622657B1 (de) | 2003-04-23 | 2011-06-08 | Interrad Medical, Inc. | Dialyseventil |
US7591302B1 (en) | 2003-07-23 | 2009-09-22 | Cooligy Inc. | Pump and fan control concepts in a cooling system |
US7143597B2 (en) * | 2004-06-30 | 2006-12-05 | Speakman Company | Indirect-direct evaporative cooling system operable from sustainable energy source |
US7371052B2 (en) * | 2004-08-16 | 2008-05-13 | Harris Corporation | Embedded fluid mixing device using a homopolar motor |
KR100582893B1 (ko) * | 2004-09-10 | 2006-05-25 | 삼성전자주식회사 | Ehd기술을 이용한 유체 회전장치 |
US7578661B2 (en) * | 2004-09-16 | 2009-08-25 | Harris Corporation | Embedded fluid pump using a homopolar motor |
EP1896914B1 (de) * | 2005-06-24 | 2014-12-24 | TRUMPF Werkzeugmaschinen GmbH + Co. KG | Adaptiver spiegel einer optik einer laserbearbeitungsmaschine |
WO2007062068A2 (en) | 2005-11-23 | 2007-05-31 | Deon Anex, Llp | Electrokinetic pump designs and drug delivery systems |
FR2895046B1 (fr) * | 2005-12-21 | 2009-05-29 | Thales Sa | Dispositif d'amortissement |
US20070205359A1 (en) * | 2006-03-01 | 2007-09-06 | Ulrich Bonne | Electronic gas pump |
JP5073751B2 (ja) * | 2006-10-10 | 2012-11-14 | エーエスエム アメリカ インコーポレイテッド | 前駆体送出システム |
JP5277372B2 (ja) * | 2007-09-10 | 2013-08-28 | 理想科学工業株式会社 | 送液装置及び送液制御方法 |
US7981221B2 (en) | 2008-02-21 | 2011-07-19 | Micron Technology, Inc. | Rheological fluids for particle removal |
JP2012512629A (ja) * | 2008-12-17 | 2012-05-31 | ディスカバリー テクノロジー インターナショナル,インク. | 高トルク圧電モータ |
EP2377177B1 (de) * | 2008-12-19 | 2015-11-04 | Discovery Technology International, Inc. | Piezoelektrischer motor |
US20100211002A1 (en) * | 2009-02-18 | 2010-08-19 | Davis David L | Electromagnetic infusion pump with integral flow monitor |
US8353864B2 (en) | 2009-02-18 | 2013-01-15 | Davis David L | Low cost disposable infusion pump |
US8197235B2 (en) | 2009-02-18 | 2012-06-12 | Davis David L | Infusion pump with integrated permanent magnet |
WO2011028780A2 (en) * | 2009-09-01 | 2011-03-10 | Discovery Technology International, Lllp | Piezoelectric rotary motor with high rotation speed and bi- directional operation |
KR20110042455A (ko) * | 2009-10-19 | 2011-04-27 | 삼성전자주식회사 | 이어폰 삽입 오인식을 방지하기 위한 방법 및 장치 |
WO2012151586A1 (en) | 2011-05-05 | 2012-11-08 | Eksigent Technologies, Llc | Gel coupling for electrokinetic delivery systems |
US9180288B2 (en) | 2011-09-01 | 2015-11-10 | Zoll Medical Corporation | Medical equipment electrodes |
WO2013070272A1 (en) * | 2011-11-08 | 2013-05-16 | Rarecyte, Inc. | Systems and methods to analyze materials of a suspension by means of dielectrophoresis |
US9030824B2 (en) | 2012-10-02 | 2015-05-12 | Hamilton Sundstrand Corporation | Dielectrophoretic cooling solution for electronics |
US8848371B2 (en) | 2012-10-01 | 2014-09-30 | Hamilton Sundstrand Corporation | Dielectrophoretic restriction to prevent vapor backflow |
CN103555404B (zh) * | 2013-11-08 | 2016-08-17 | 中北大学 | 一种电共轭液 |
SE537790C2 (sv) * | 2013-12-04 | 2015-10-20 | Apr Technologies Ab | Elektrohydrodynamisk mikropumpsanordning samt förfarande förtillverkning av anordningen |
US10504656B2 (en) * | 2015-04-29 | 2019-12-10 | General Electric Company | Electrodes for linear switched capacitive devices |
US11042027B2 (en) * | 2016-03-07 | 2021-06-22 | King Abdullah University Of Science And Technology | Non thermal plasma surface cleaner and method of use |
US10951132B2 (en) * | 2016-05-17 | 2021-03-16 | Wisconsin Alumni Research Foundation | Electrostatic rotating-machine employing dielectric substrates with surface conductors |
US11926894B2 (en) | 2016-09-30 | 2024-03-12 | Asm Ip Holding B.V. | Reactant vaporizer and related systems and methods |
US10876205B2 (en) | 2016-09-30 | 2020-12-29 | Asm Ip Holding B.V. | Reactant vaporizer and related systems and methods |
US11278665B2 (en) | 2016-11-22 | 2022-03-22 | Eitan Medical Ltd. | Method for delivering a therapeutic substance |
CN108592879B (zh) * | 2018-05-31 | 2021-08-17 | 中冶东方工程技术有限公司 | 一种活塞类行走部件的水平度测量装置和方法 |
FR3084732B1 (fr) | 2018-08-06 | 2020-11-27 | Polyflam | Appareil de chauffage comprenant au moins une rampe d’injection d’air |
JP7376278B2 (ja) | 2018-08-16 | 2023-11-08 | エーエスエム・アイピー・ホールディング・ベー・フェー | 固体原料昇華器 |
EP3744368A1 (de) | 2018-10-05 | 2020-12-02 | Sorrel Medical Ltd. | Auslösesequenz |
US11404976B2 (en) * | 2019-09-06 | 2022-08-02 | Wisconsin Alumni Research Foundation | Dielectric nano-fluid for electrostatic machines and actuators |
US11624113B2 (en) | 2019-09-13 | 2023-04-11 | Asm Ip Holding B.V. | Heating zone separation for reactant evaporation system |
US11453347B2 (en) * | 2020-03-12 | 2022-09-27 | Toyota Motor Engineering & Manufacturing North America, Inc. | Suction devices having artificial muscles |
US12018672B2 (en) | 2020-04-02 | 2024-06-25 | Idex Health And Science Llc | Precision volumetric pump with a bellows hermetic seal |
US11881359B2 (en) * | 2020-07-14 | 2024-01-23 | The Government Of The United States Of America, As Represented By The Secretary Of The Navy | 3D-printable artificial muscles based on microfluidic microcapacitors |
EP4309279A2 (de) * | 2021-03-17 | 2024-01-24 | Brian Faircloth | Verfahren und vorrichtungen zur herstellung von ultrastarken magnetfeldern sowie antriebssysteme und verfahren mit planetaren magnetfeldern |
EP4314556A1 (de) * | 2021-03-30 | 2024-02-07 | The American University in Cairo | Mikropumpe mit formgedächtnislegierungskapsel für wirkstofffreisetzungsanwendungen |
US11536255B1 (en) | 2022-03-10 | 2022-12-27 | Toyota Motor Engineering & Manufacturing North America, Inc. | Hybrid actuation device including fluidly cooled SMA wires |
US11592010B1 (en) | 2022-05-18 | 2023-02-28 | Toyota Motor Engineering & Manufacturing North America, Inc. | Shape-memory material actuators |
Family Cites Families (11)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3267859A (en) * | 1964-02-18 | 1966-08-23 | Sakari T Jutila | Liquid dielectric pump |
US3395720A (en) * | 1965-02-24 | 1968-08-06 | Navy Usa | Magnetohydrodynamic-vortex stream transducer |
US3599428A (en) * | 1970-04-29 | 1971-08-17 | Boeing Co | Electric fluid actuator |
SU630617A1 (ru) * | 1976-12-24 | 1978-10-30 | Предприятие П/Я А-7075 | Способ регулировани расхода жидких и газообразных сред |
SU781399A1 (ru) * | 1978-12-18 | 1980-11-23 | Предприятие П/Я А-3503 | Электроимпульсный насос |
US4532853A (en) * | 1979-10-24 | 1985-08-06 | The Secretary Of State For Defence In Her Britannic Majesty's Government Of The United Kingdom Of Great Britain And Northern Ireland | Fluid-powered actuators |
GB2118741B (en) * | 1981-12-15 | 1985-06-19 | Secr Defence | Electrically variable linkage joint |
DE3925749C1 (de) * | 1989-08-03 | 1990-10-31 | Fraunhofer-Gesellschaft Zur Foerderung Der Angewandten Forschung Ev, 8000 Muenchen, De | |
JPH08210240A (ja) * | 1994-07-27 | 1996-08-20 | Fujikura Kasei Co Ltd | アクチュエータ |
KR100199844B1 (ko) * | 1994-10-31 | 1999-06-15 | 배길훈 | 형상기억합금을 이용한 유압펌프 |
DE69717323D1 (de) * | 1996-02-01 | 2003-01-09 | New Technology Man Co | Die Verwendung elektrosensitiver beweglicher Flüssigkeiten, Verfahren zur Verwendung und Motoren für diese elektrosensitiven beweglichen Flüssigkeiten |
-
1998
- 1998-02-09 EP EP19980300914 patent/EP0867622B1/de not_active Expired - Lifetime
- 1998-02-09 US US09/020,725 patent/US6116257A/en not_active Expired - Lifetime
- 1998-02-09 DE DE69825345T patent/DE69825345D1/de not_active Expired - Lifetime
-
1999
- 1999-12-14 US US09/460,681 patent/US6260579B1/en not_active Expired - Lifetime
-
2001
- 2001-06-04 US US09/873,204 patent/US6530217B1/en not_active Expired - Fee Related
Also Published As
Publication number | Publication date |
---|---|
EP0867622B1 (de) | 2004-08-04 |
US6260579B1 (en) | 2001-07-17 |
EP0867622A3 (de) | 2000-03-01 |
US6116257A (en) | 2000-09-12 |
US6530217B1 (en) | 2003-03-11 |
EP0867622A2 (de) | 1998-09-30 |
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