DE69822038D1 - Verfahren zum Herstellen eines Tintenstrahlkopfes - Google Patents
Verfahren zum Herstellen eines TintenstrahlkopfesInfo
- Publication number
- DE69822038D1 DE69822038D1 DE69822038T DE69822038T DE69822038D1 DE 69822038 D1 DE69822038 D1 DE 69822038D1 DE 69822038 T DE69822038 T DE 69822038T DE 69822038 T DE69822038 T DE 69822038T DE 69822038 D1 DE69822038 D1 DE 69822038D1
- Authority
- DE
- Germany
- Prior art keywords
- manufacturing
- ink jet
- jet head
- head
- ink
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 238000004519 manufacturing process Methods 0.000 title 1
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/16—Production of nozzles
- B41J2/1621—Manufacturing processes
- B41J2/1626—Manufacturing processes etching
- B41J2/1628—Manufacturing processes etching dry etching
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/16—Production of nozzles
- B41J2/1601—Production of bubble jet print heads
- B41J2/1603—Production of bubble jet print heads of the front shooter type
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/16—Production of nozzles
- B41J2/1621—Manufacturing processes
- B41J2/1626—Manufacturing processes etching
- B41J2/1629—Manufacturing processes etching wet etching
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/16—Production of nozzles
- B41J2/1621—Manufacturing processes
- B41J2/1635—Manufacturing processes dividing the wafer into individual chips
Landscapes
- Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
- Particle Formation And Scattering Control In Inkjet Printers (AREA)
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP16419897 | 1997-06-20 | ||
JP16419897A JP3416467B2 (ja) | 1997-06-20 | 1997-06-20 | インクジェットヘッドの製造方法、インクジェットヘッドおよびインクジェットプリント装置 |
Publications (2)
Publication Number | Publication Date |
---|---|
DE69822038D1 true DE69822038D1 (de) | 2004-04-08 |
DE69822038T2 DE69822038T2 (de) | 2004-08-19 |
Family
ID=15788549
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE69822038T Expired - Lifetime DE69822038T2 (de) | 1997-06-20 | 1998-06-18 | Verfahren zum Herstellen eines Tintenstrahlkopfes |
Country Status (5)
Country | Link |
---|---|
US (1) | US6245245B1 (de) |
EP (1) | EP0885725B1 (de) |
JP (1) | JP3416467B2 (de) |
DE (1) | DE69822038T2 (de) |
ES (1) | ES2214661T3 (de) |
Families Citing this family (9)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2001179987A (ja) * | 1999-12-22 | 2001-07-03 | Samsung Electro Mech Co Ltd | ノズルプレート及びその製造方法 |
US7323115B2 (en) | 2003-02-13 | 2008-01-29 | Canon Kabushiki Kaisha | Substrate processing method and ink jet recording head substrate manufacturing method |
US7429335B2 (en) | 2004-04-29 | 2008-09-30 | Shen Buswell | Substrate passage formation |
US7387370B2 (en) * | 2004-04-29 | 2008-06-17 | Hewlett-Packard Development Company, L.P. | Microfluidic architecture |
JP4560391B2 (ja) * | 2004-12-08 | 2010-10-13 | キヤノン株式会社 | 液体吐出ヘッドの製造方法 |
JP4617150B2 (ja) * | 2004-12-09 | 2011-01-19 | キヤノン株式会社 | ウエハのダイシング方法 |
US7824560B2 (en) * | 2006-03-07 | 2010-11-02 | Canon Kabushiki Kaisha | Manufacturing method for ink jet recording head chip, and manufacturing method for ink jet recording head |
US8329046B2 (en) * | 2009-02-05 | 2012-12-11 | Asia Union Electronic Chemical Corporation | Methods for damage etch and texturing of silicon single crystal substrates |
JP5197724B2 (ja) * | 2009-12-22 | 2013-05-15 | キヤノン株式会社 | 液体吐出ヘッド用基板及び液体吐出ヘッドの製造方法 |
Family Cites Families (9)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS57102366A (en) * | 1980-12-18 | 1982-06-25 | Canon Inc | Ink jet head |
JPS57116656A (en) * | 1981-01-14 | 1982-07-20 | Sharp Corp | Manufacture of orifice for ink jet printer |
US5030971B1 (en) | 1989-11-29 | 2000-11-28 | Xerox Corp | Precisely aligned mono- or multi-color roofshooter type printhead |
JPH042790A (ja) * | 1990-04-18 | 1992-01-07 | Seiko Epson Corp | シリコン基板の加工方法 |
JPH05116325A (ja) * | 1991-10-30 | 1993-05-14 | Canon Inc | インクジエツト記録ヘツドの製造方法 |
US5387314A (en) | 1993-01-25 | 1995-02-07 | Hewlett-Packard Company | Fabrication of ink fill slots in thermal ink-jet printheads utilizing chemical micromachining |
JP3343875B2 (ja) | 1995-06-30 | 2002-11-11 | キヤノン株式会社 | インクジェットヘッドの製造方法 |
JP3460218B2 (ja) | 1995-11-24 | 2003-10-27 | セイコーエプソン株式会社 | インクジェットプリンタヘッドおよびその製造方法 |
JPH09207341A (ja) * | 1996-02-07 | 1997-08-12 | Seiko Epson Corp | インクジェットヘッド用ノズルプレートおよびその製造方法 |
-
1997
- 1997-06-20 JP JP16419897A patent/JP3416467B2/ja not_active Expired - Fee Related
-
1998
- 1998-06-17 US US09/098,327 patent/US6245245B1/en not_active Expired - Lifetime
- 1998-06-18 EP EP98111245A patent/EP0885725B1/de not_active Expired - Lifetime
- 1998-06-18 ES ES98111245T patent/ES2214661T3/es not_active Expired - Lifetime
- 1998-06-18 DE DE69822038T patent/DE69822038T2/de not_active Expired - Lifetime
Also Published As
Publication number | Publication date |
---|---|
JPH1110895A (ja) | 1999-01-19 |
DE69822038T2 (de) | 2004-08-19 |
JP3416467B2 (ja) | 2003-06-16 |
EP0885725A3 (de) | 2000-03-22 |
EP0885725A2 (de) | 1998-12-23 |
EP0885725B1 (de) | 2004-03-03 |
ES2214661T3 (es) | 2004-09-16 |
US6245245B1 (en) | 2001-06-12 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
8381 | Inventor (new situation) |
Inventor name: SATO, TAMAKI, OHTA-KU, TOKYO, JP |
|
8364 | No opposition during term of opposition |