DE69820312D1 - Verfahren und Vorrichtung zur Verminderung von Abgasen - Google Patents
Verfahren und Vorrichtung zur Verminderung von AbgasenInfo
- Publication number
- DE69820312D1 DE69820312D1 DE69820312T DE69820312T DE69820312D1 DE 69820312 D1 DE69820312 D1 DE 69820312D1 DE 69820312 T DE69820312 T DE 69820312T DE 69820312 T DE69820312 T DE 69820312T DE 69820312 D1 DE69820312 D1 DE 69820312D1
- Authority
- DE
- Germany
- Prior art keywords
- exhaust gases
- reducing exhaust
- reducing
- gases
- exhaust
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
Classifications
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
- C23C16/4412—Details relating to the exhausts, e.g. pumps, filters, scrubbers, particle traps
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D53/00—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols
- B01D53/007—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols by irradiation
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D53/00—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols
- B01D53/34—Chemical or biological purification of waste gases
- B01D53/46—Removing components of defined structure
- B01D53/54—Nitrogen compounds
- B01D53/56—Nitrogen oxides
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D53/00—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols
- B01D53/34—Chemical or biological purification of waste gases
- B01D53/46—Removing components of defined structure
- B01D53/68—Halogens or halogen compounds
- B01D53/70—Organic halogen compounds
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D2251/00—Reactants
- B01D2251/10—Oxidants
- B01D2251/104—Ozone
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D2259/00—Type of treatment
- B01D2259/80—Employing electric, magnetic, electromagnetic or wave energy, or particle radiation
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02C—CAPTURE, STORAGE, SEQUESTRATION OR DISPOSAL OF GREENHOUSE GASES [GHG]
- Y02C20/00—Capture or disposal of greenhouse gases
- Y02C20/30—Capture or disposal of greenhouse gases of perfluorocarbons [PFC], hydrofluorocarbons [HFC] or sulfur hexafluoride [SF6]
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Chemical Kinetics & Catalysis (AREA)
- General Chemical & Material Sciences (AREA)
- Oil, Petroleum & Natural Gas (AREA)
- Health & Medical Sciences (AREA)
- Analytical Chemistry (AREA)
- Environmental & Geological Engineering (AREA)
- Biomedical Technology (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Toxicology (AREA)
- Treating Waste Gases (AREA)
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US805989 | 1997-02-24 | ||
US08/805,989 US6277347B1 (en) | 1997-02-24 | 1997-02-24 | Use of ozone in process effluent abatement |
Publications (2)
Publication Number | Publication Date |
---|---|
DE69820312D1 true DE69820312D1 (de) | 2004-01-22 |
DE69820312T2 DE69820312T2 (de) | 2004-11-18 |
Family
ID=25193043
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE1998620312 Expired - Fee Related DE69820312T2 (de) | 1997-02-24 | 1998-01-30 | Verfahren und Vorrichtung zur Verminderung von Abgasen |
Country Status (3)
Country | Link |
---|---|
US (1) | US6277347B1 (de) |
EP (1) | EP0861683B1 (de) |
DE (1) | DE69820312T2 (de) |
Families Citing this family (27)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US6322756B1 (en) * | 1996-12-31 | 2001-11-27 | Advanced Technology And Materials, Inc. | Effluent gas stream treatment system having utility for oxidation treatment of semiconductor manufacturing effluent gases |
US5955037A (en) | 1996-12-31 | 1999-09-21 | Atmi Ecosys Corporation | Effluent gas stream treatment system having utility for oxidation treatment of semiconductor manufacturing effluent gases |
KR100330749B1 (ko) * | 1999-12-17 | 2002-04-03 | 서성기 | 반도체 박막증착장치 |
US6649132B1 (en) * | 2002-07-23 | 2003-11-18 | The Boc Group, Inc. | Process for the removal of impurities from gas streams |
TWI230094B (en) * | 2003-01-14 | 2005-04-01 | Desiccant Technology Corp | Method for exhaust treatment of perfluoro compounds |
FR2864795B1 (fr) * | 2004-01-06 | 2008-04-18 | Air Liquide | Procede de traitement des gaz par des decharges hautes frequence |
US7141382B1 (en) | 2004-10-12 | 2006-11-28 | Parikh Chirag R | Methods for detection of IL-18 as an early marker for diagnosis of acute renal failure and predictor of mortality |
US7736599B2 (en) | 2004-11-12 | 2010-06-15 | Applied Materials, Inc. | Reactor design to reduce particle deposition during process abatement |
US20060147771A1 (en) * | 2005-01-04 | 2006-07-06 | Ion America Corporation | Fuel cell system with independent reformer temperature control |
JP5102217B2 (ja) | 2005-10-31 | 2012-12-19 | アプライド マテリアルズ インコーポレイテッド | プロセス削減反応器 |
US7462339B2 (en) * | 2005-12-29 | 2008-12-09 | Basf Catalysts Llc | Metallic foam trap for poisons: aircraft ozone |
JP6030278B2 (ja) | 2006-03-16 | 2016-11-24 | アプライド マテリアルズ インコーポレイテッドApplied Materials,Incorporated | 電子デバイス製造システムの操作を改善する方法及び装置 |
US20080081130A1 (en) * | 2006-09-29 | 2008-04-03 | Applied Materials, Inc. | Treatment of effluent in the deposition of carbon-doped silicon |
DE102007016026A1 (de) * | 2007-03-30 | 2008-10-02 | Sig Technology Ag | Vakuumbeschichtungsanlage mit Abscheidevorrichtung im Restgasstrang |
KR101560705B1 (ko) * | 2007-05-25 | 2015-10-16 | 어플라이드 머티어리얼스, 인코포레이티드 | 전자 디바이스 제조 시스템들을 조립하고 작동시키는 방법들 및 장치 |
CN101678407A (zh) * | 2007-05-25 | 2010-03-24 | 应用材料股份有限公司 | 用于减量***的有效操作的方法与装置 |
US20090018688A1 (en) * | 2007-06-15 | 2009-01-15 | Applied Materials, Inc. | Methods and systems for designing and validating operation of abatement systems |
CN101835521A (zh) * | 2007-10-26 | 2010-09-15 | 应用材料公司 | 利用改进燃料线路的用于智能减废的方法与设备 |
US9997325B2 (en) | 2008-07-17 | 2018-06-12 | Verity Instruments, Inc. | Electron beam exciter for use in chemical analysis in processing systems |
CN102959681B (zh) * | 2010-06-25 | 2015-09-16 | 株式会社爱发科 | 成膜装置、成膜装置的维护方法 |
US9440188B2 (en) | 2012-10-15 | 2016-09-13 | Linde Aktiengesellschaft | Method for removing contaminants from exhaust gases |
ES2628621T3 (es) * | 2012-10-15 | 2017-08-03 | Linde Aktiengesellschaft | Método para eliminar contaminantes a partir de gases de escape mediante la adición de ozono |
EP3012011A1 (de) | 2014-10-21 | 2016-04-27 | Linde Aktiengesellschaft | Verfahren und vorrichtung zum teilweisen entfernen von verunreinigungen aus prozessgasen durch ozonzugabe |
GB2533933A (en) * | 2015-01-06 | 2016-07-13 | Edwards Ltd | Improvements in or relating to vacuum pumping arrangements |
JP6552206B2 (ja) * | 2015-02-02 | 2019-07-31 | 東京エレクトロン株式会社 | 排気管無害化方法及び成膜装置 |
US10269600B2 (en) | 2016-03-15 | 2019-04-23 | Applied Materials, Inc. | Methods and assemblies for gas flow ratio control |
US10453721B2 (en) | 2016-03-15 | 2019-10-22 | Applied Materials, Inc. | Methods and assemblies for gas flow ratio control |
Family Cites Families (19)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5111068A (ja) * | 1974-07-19 | 1976-01-28 | Morio Watanabe | Handotaihaigasushoriho |
US4941957A (en) * | 1986-10-22 | 1990-07-17 | Ultrox International | Decomposition of volatile ogranic halogenated compounds contained in gases and aqueous solutions |
US4872947A (en) * | 1986-12-19 | 1989-10-10 | Applied Materials, Inc. | CVD of silicon oxide using TEOS decomposition and in-situ planarization process |
US4793931A (en) | 1987-09-10 | 1988-12-27 | Solarchem Research, A Division Of Brolor Investments Limited | Process for treatment of organic contaminants in solid or liquid phase wastes |
JPH0321325A (ja) * | 1989-06-16 | 1991-01-30 | Mitsubishi Heavy Ind Ltd | フロン蒸気の処理方法 |
JPH0759970B2 (ja) * | 1989-07-19 | 1995-06-28 | 工業技術院長 | フロンの分解方法 |
JP2938118B2 (ja) * | 1990-03-20 | 1999-08-23 | 株式会社東芝 | 真空容器内の水素の排気方法とその装置 |
US5451378A (en) * | 1991-02-21 | 1995-09-19 | The United States Of America As Represented By The Secretary Of The Navy | Photon controlled decomposition of nonhydrolyzable ambients |
US5468356A (en) * | 1991-08-23 | 1995-11-21 | The United States Of America As Represented By The Secretary Of The Navy | Large scale purification of contaminated air |
DE4202158C1 (de) * | 1992-01-27 | 1993-07-22 | Siemens Ag, 8000 Muenchen, De | |
JPH05335256A (ja) * | 1992-06-03 | 1993-12-17 | Fujitsu Ltd | 半導体製造装置及びその清掃方法 |
US5417826A (en) * | 1992-06-15 | 1995-05-23 | Micron Technology, Inc. | Removal of carbon-based polymer residues with ozone, useful in the cleaning of plasma reactors |
US5430228A (en) | 1993-02-24 | 1995-07-04 | Hughes Aircraft Company | Ozone methods for the destruction of chemical weapons |
JP3051611B2 (ja) | 1993-08-20 | 2000-06-12 | 日本表面化学株式会社 | アルカリ現像装置の洗浄液と洗浄方法 |
US5453125A (en) | 1994-02-17 | 1995-09-26 | Krogh; Ole D. | ECR plasma source for gas abatement |
US5569810A (en) * | 1994-03-18 | 1996-10-29 | Samco International, Inc. | Method of and system for processing halogenated hydrocarbons |
US5663476A (en) * | 1994-04-29 | 1997-09-02 | Motorola, Inc. | Apparatus and method for decomposition of chemical compounds by increasing residence time of a chemical compound in a reaction chamber |
JP3021325B2 (ja) | 1995-07-26 | 2000-03-15 | 日本碍子株式会社 | 排ガスダクトの閉塞防止方法 |
US6045618A (en) * | 1995-09-25 | 2000-04-04 | Applied Materials, Inc. | Microwave apparatus for in-situ vacuum line cleaning for substrate processing equipment |
-
1997
- 1997-02-24 US US08/805,989 patent/US6277347B1/en not_active Expired - Lifetime
-
1998
- 1998-01-30 DE DE1998620312 patent/DE69820312T2/de not_active Expired - Fee Related
- 1998-01-30 EP EP98101650A patent/EP0861683B1/de not_active Expired - Lifetime
Also Published As
Publication number | Publication date |
---|---|
EP0861683A2 (de) | 1998-09-02 |
DE69820312T2 (de) | 2004-11-18 |
US6277347B1 (en) | 2001-08-21 |
EP0861683A3 (de) | 2000-11-15 |
EP0861683B1 (de) | 2003-12-10 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
8364 | No opposition during term of opposition | ||
8328 | Change in the person/name/address of the agent |
Representative=s name: PUSCHMANN & BORCHERT, 82041 OBERHACHING |
|
8339 | Ceased/non-payment of the annual fee |