DE69815699D1 - Laserbearbeitungsvorrichtung - Google Patents

Laserbearbeitungsvorrichtung

Info

Publication number
DE69815699D1
DE69815699D1 DE69815699T DE69815699T DE69815699D1 DE 69815699 D1 DE69815699 D1 DE 69815699D1 DE 69815699 T DE69815699 T DE 69815699T DE 69815699 T DE69815699 T DE 69815699T DE 69815699 D1 DE69815699 D1 DE 69815699D1
Authority
DE
Germany
Prior art keywords
laser
optics
focusing
processing device
laser processing
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE69815699T
Other languages
English (en)
Other versions
DE69815699T2 (de
Inventor
Leonard Offerhaus
Antonius Kleijhorst
Der Slot Johannes Van
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NL CT VOOR LASER RES BV
Original Assignee
NL CT VOOR LASER RES BV
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by NL CT VOOR LASER RES BV filed Critical NL CT VOOR LASER RES BV
Application granted granted Critical
Publication of DE69815699D1 publication Critical patent/DE69815699D1/de
Publication of DE69815699T2 publication Critical patent/DE69815699T2/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
    • B23K26/06—Shaping the laser beam, e.g. by masks or multi-focusing
    • B23K26/0665—Shaping the laser beam, e.g. by masks or multi-focusing by beam condensation on the workpiece, e.g. for focusing
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
    • B23K26/03—Observing, e.g. monitoring, the workpiece
    • B23K26/032—Observing, e.g. monitoring, the workpiece using optical means
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
    • B23K26/06—Shaping the laser beam, e.g. by masks or multi-focusing
    • B23K26/062—Shaping the laser beam, e.g. by masks or multi-focusing by direct control of the laser beam
    • B23K26/0622—Shaping the laser beam, e.g. by masks or multi-focusing by direct control of the laser beam by shaping pulses
    • B23K26/0624—Shaping the laser beam, e.g. by masks or multi-focusing by direct control of the laser beam by shaping pulses using ultrashort pulses, i.e. pulses of 1ns or less
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
    • B23K26/06—Shaping the laser beam, e.g. by masks or multi-focusing
    • B23K26/064—Shaping the laser beam, e.g. by masks or multi-focusing by means of optical elements, e.g. lenses, mirrors or prisms
    • B23K26/0643—Shaping the laser beam, e.g. by masks or multi-focusing by means of optical elements, e.g. lenses, mirrors or prisms comprising mirrors

Landscapes

  • Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Mechanical Engineering (AREA)
  • Laser Beam Processing (AREA)
  • Electrical Discharge Machining, Electrochemical Machining, And Combined Machining (AREA)
  • Laser Surgery Devices (AREA)
DE69815699T 1997-09-18 1998-09-18 Laserbearbeitungsvorrichtung Expired - Fee Related DE69815699T2 (de)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
NL1007068A NL1007068C2 (nl) 1997-09-18 1997-09-18 Laserbewerkingsapparaat.
NL1007068 1997-09-18
PCT/NL1998/000543 WO1999014009A1 (en) 1997-09-18 1998-09-18 Laser processing device

Publications (2)

Publication Number Publication Date
DE69815699D1 true DE69815699D1 (de) 2003-07-24
DE69815699T2 DE69815699T2 (de) 2004-04-29

Family

ID=19765699

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69815699T Expired - Fee Related DE69815699T2 (de) 1997-09-18 1998-09-18 Laserbearbeitungsvorrichtung

Country Status (7)

Country Link
US (1) US6437287B1 (de)
EP (1) EP1015164B1 (de)
JP (1) JP2001516647A (de)
AT (1) ATE243088T1 (de)
DE (1) DE69815699T2 (de)
NL (1) NL1007068C2 (de)
WO (1) WO1999014009A1 (de)

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20040144760A1 (en) 2002-05-17 2004-07-29 Cahill Steven P. Method and system for marking a workpiece such as a semiconductor wafer and laser marker for use therein
JP2005125339A (ja) * 2003-10-21 2005-05-19 Hitachi Via Mechanics Ltd レーザ加工装置
CN100352593C (zh) * 2004-06-02 2007-12-05 上海大众汽车有限公司 激光器的对焦设备
JP2006167728A (ja) * 2004-12-13 2006-06-29 Yamazaki Mazak Corp レーザ加工機における集光レンズの汚れ検出方法及び装置
DE602006004331D1 (de) * 2005-04-19 2009-01-29 Koninkl Philips Electronics Nv Vorrichtung zur strahlungslenkung auf eine schicht, gerät mit einer derartigen vorrichtung und verfahren unter verwendung eines derartigen geräts
EP2465877A1 (de) 2010-12-20 2012-06-20 Ineos Commercial Services UK Limited Verfahren
US10290118B2 (en) * 2015-08-06 2019-05-14 Cognex Corporation System and method for tying together machine vision coordinate spaces in a guided assembly environment

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4573467A (en) * 1983-05-13 1986-03-04 The United States Of America As Represented By The Department Of Health And Human Services Optical coupling device for biomicroscope
US4611115A (en) * 1985-01-14 1986-09-09 Richland Glass Company, Inc. Laser etch monitoring system
US4769523A (en) * 1985-03-08 1988-09-06 Nippon Kogaku K.K. Laser processing apparatus
US5382770A (en) * 1993-01-14 1995-01-17 Reliant Laser Corporation Mirror-based laser-processing system with visual tracking and position control of a moving laser spot
US5609780A (en) * 1994-11-14 1997-03-11 International Business Machines, Corporation Laser system
JP3162254B2 (ja) * 1995-01-17 2001-04-25 三菱電機株式会社 レーザ加工装置
US6040550A (en) * 1996-10-28 2000-03-21 Chang; Dale U. Apparatus and method for laser welding the outer joints of metal bellows

Also Published As

Publication number Publication date
NL1007068C2 (nl) 1999-03-22
JP2001516647A (ja) 2001-10-02
ATE243088T1 (de) 2003-07-15
EP1015164A1 (de) 2000-07-05
EP1015164B1 (de) 2003-06-18
US6437287B1 (en) 2002-08-20
DE69815699T2 (de) 2004-04-29
WO1999014009A1 (en) 1999-03-25

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8339 Ceased/non-payment of the annual fee