DE69735457D1 - Antriebvorrichtung mit piezoelektrischem Element, Verfahren zur Herstellung derselben und Tintenstrahlaufzeichnungskopf - Google Patents

Antriebvorrichtung mit piezoelektrischem Element, Verfahren zur Herstellung derselben und Tintenstrahlaufzeichnungskopf

Info

Publication number
DE69735457D1
DE69735457D1 DE69735457T DE69735457T DE69735457D1 DE 69735457 D1 DE69735457 D1 DE 69735457D1 DE 69735457 T DE69735457 T DE 69735457T DE 69735457 T DE69735457 T DE 69735457T DE 69735457 D1 DE69735457 D1 DE 69735457D1
Authority
DE
Germany
Prior art keywords
producing
ink jet
drive device
piezoelectric element
same
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE69735457T
Other languages
English (en)
Other versions
DE69735457T2 (de
Inventor
Tsutomu Hashizume
Akira Matsuzawa
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Seiko Epson Corp
Original Assignee
Seiko Epson Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Seiko Epson Corp filed Critical Seiko Epson Corp
Application granted granted Critical
Publication of DE69735457D1 publication Critical patent/DE69735457D1/de
Publication of DE69735457T2 publication Critical patent/DE69735457T2/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/1626—Manufacturing processes etching
    • B41J2/1629—Manufacturing processes etching wet etching
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/14—Structure thereof only for on-demand ink jet heads
    • B41J2/14201—Structure of print heads with piezoelectric elements
    • B41J2/14233—Structure of print heads with piezoelectric elements of film type, deformed by bending and disposed on a diaphragm
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1607—Production of print heads with piezoelectric elements
    • B41J2/161—Production of print heads with piezoelectric elements of film type, deformed by bending and disposed on a diaphragm
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/164—Manufacturing processes thin film formation
    • B41J2/1642—Manufacturing processes thin film formation thin film formation by CVD [chemical vapor deposition]
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/164—Manufacturing processes thin film formation
    • B41J2/1643—Manufacturing processes thin film formation thin film formation by plating
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/164—Manufacturing processes thin film formation
    • B41J2/1646—Manufacturing processes thin film formation thin film formation by sputtering
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/20—Piezoelectric or electrostrictive devices with electrical input and mechanical output, e.g. functioning as actuators or vibrators
    • H10N30/204—Piezoelectric or electrostrictive devices with electrical input and mechanical output, e.g. functioning as actuators or vibrators using bending displacement, e.g. unimorph, bimorph or multimorph cantilever or membrane benders
    • H10N30/2047—Membrane type
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/14—Structure thereof only for on-demand ink jet heads
    • B41J2002/14387—Front shooter
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/14—Structure thereof only for on-demand ink jet heads
    • B41J2002/14491—Electrical connection

Landscapes

  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Particle Formation And Scattering Control In Inkjet Printers (AREA)
DE69735457T 1996-11-06 1997-11-06 Stellglied mit Piezoelektrischem Element, Verfahren zum Herstellen desselben und eines Tintenstrahl-Aufzeichnungskopfes Expired - Lifetime DE69735457T2 (de)

Applications Claiming Priority (4)

Application Number Priority Date Filing Date Title
JP29368696 1996-11-06
JP29368696 1996-11-06
JP9302792A JPH10211701A (ja) 1996-11-06 1997-11-05 圧電体素子を備えたアクチュエータ及びインクジェット式記録ヘッド、並びにこれらの製造方法
JP30279297 1997-11-05

Publications (2)

Publication Number Publication Date
DE69735457D1 true DE69735457D1 (de) 2006-05-11
DE69735457T2 DE69735457T2 (de) 2006-08-24

Family

ID=26559525

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69735457T Expired - Lifetime DE69735457T2 (de) 1996-11-06 1997-11-06 Stellglied mit Piezoelektrischem Element, Verfahren zum Herstellen desselben und eines Tintenstrahl-Aufzeichnungskopfes

Country Status (4)

Country Link
US (1) US6142614A (de)
EP (1) EP0841165B1 (de)
JP (1) JPH10211701A (de)
DE (1) DE69735457T2 (de)

Families Citing this family (32)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE69804724T2 (de) * 1997-07-25 2002-08-14 Seiko Epson Corp Tintenstrahldruckkopf und sein Herstellungsverfahren
JP3868143B2 (ja) * 1999-04-06 2007-01-17 松下電器産業株式会社 圧電体薄膜素子及びこれを用いたインクジェット式記録ヘッド並びにこれらの製造方法
JP3208386B2 (ja) * 1999-09-29 2001-09-10 インターナショナル・ビジネス・マシーンズ・コーポレーション 圧電センサの取り付け方法、アクチュエータアーム、ディスク装置及び接続検査方法
JP4300565B2 (ja) * 2000-03-27 2009-07-22 富士フイルム株式会社 マルチノズルインクジェットヘッド及びその製造方法
JP3956607B2 (ja) * 2000-10-26 2007-08-08 ブラザー工業株式会社 圧電式インクジェットプリンタヘッド及び圧電式インクジェットプリンタヘッドの製造方法
US6536287B2 (en) * 2001-08-16 2003-03-25 Honeywell International, Inc. Simplified capacitance pressure sensor
TW506908B (en) * 2001-09-06 2002-10-21 Nanodynamics Inc Piezoelectric ink jet print head and the manufacturing process thereof
JP2004066496A (ja) * 2002-08-01 2004-03-04 Seiko Epson Corp 液体噴射ヘッド及び液体噴射装置
JP3997865B2 (ja) * 2002-08-29 2007-10-24 ブラザー工業株式会社 インクジェットプリンタヘッド
JP3925650B2 (ja) 2003-03-06 2007-06-06 ブラザー工業株式会社 インクジェットプリンタヘッド
GB0306746D0 (en) * 2003-03-24 2003-04-30 Medic To Medic Ltd A graphical user interface
US7559631B2 (en) 2003-09-24 2009-07-14 Seiko Epson Corporation Liquid-jet head, method for manufacturing the same, and liquid-jet apparatus
JP4161213B2 (ja) * 2004-01-23 2008-10-08 ブラザー工業株式会社 インクジェット記録ヘッドにおける配線基板の接合構造及びその接合方法
US7419252B2 (en) 2004-07-13 2008-09-02 Brother Kogyo Kabushiki Kaisha Ink jet head, piezo-electric actuator, and method of manufacturing them
CN100402293C (zh) * 2004-07-13 2008-07-16 兄弟工业株式会社 压电致动器和喷墨头以及其制造方法
EP1616700A1 (de) * 2004-07-13 2006-01-18 Brother Kogyo Kabushiki Kaisha Piezoelektrischer Aktor, Tintenstrahlkopf und dazugehöriges Herstellungsverfahren
JP4595418B2 (ja) * 2004-07-16 2010-12-08 ブラザー工業株式会社 インクジェットヘッド
JP4670495B2 (ja) * 2004-09-06 2011-04-13 Ｔｄｋ株式会社 電子デバイス及びその製造方法
JP2006231909A (ja) * 2005-01-26 2006-09-07 Seiko Epson Corp 液体噴射ヘッド及び液体噴射装置
EP1705012B1 (de) 2005-03-22 2010-11-17 Brother Kogyo Kabushiki Kaisha Piezoelektrischer Aktuator, Vorrichtung um Flüssigkeit zu transportieren, Verfahren um piezoelektrischen Aktuator herzustellen
JP5187609B2 (ja) * 2005-03-22 2013-04-24 ブラザー工業株式会社 圧電アクチュエータ、液体移送装置、及び、圧電アクチュエータの製造方法
JP4873132B2 (ja) * 2005-03-24 2012-02-08 セイコーエプソン株式会社 アクチュエータ装置の製造方法
JP4926596B2 (ja) * 2006-08-08 2012-05-09 スタンレー電気株式会社 光偏向器及びその製造方法
JP2009083464A (ja) * 2007-09-12 2009-04-23 Fuji Xerox Co Ltd 液滴吐出ヘッド、及び画像形成装置
JP5844026B2 (ja) 2008-03-21 2016-01-13 富士フイルム株式会社 圧電素子の製造方法
JP4897767B2 (ja) * 2008-10-21 2012-03-14 Ｔｄｋ株式会社 薄膜圧電体素子及びその製造方法並びにそれを用いたヘッドジンバルアセンブリ、及びそのヘッドジンバルアセンブリを用いたハードディスクドライブ
JP2010137485A (ja) 2008-12-15 2010-06-24 Seiko Epson Corp 液体噴射ヘッド、液体噴射装置及びアクチュエーター装置並びに液体噴射ヘッドの製造方法
EP2451647B1 (de) 2009-07-10 2019-04-24 Fujifilm Dimatix, Inc. Mems-strahlenstruktur für dichte verpackungen
US20120137787A1 (en) * 2009-08-14 2012-06-07 Kui Yao Piezoelectric sensor and a method of fabricating a piezoelectric sensor
JP5282753B2 (ja) * 2010-03-29 2013-09-04 ブラザー工業株式会社 圧電アクチュエータ、光スキャナ、光走査型画像表示装置、画像形成装置
BR112013031746B1 (pt) * 2011-06-29 2020-10-20 Hewlett-Packard Development Company, L.P pilha de pastilhas piezelétricas de jato de tinta e cabeçote impressor piezelétrico
JP5410486B2 (ja) * 2011-09-21 2014-02-05 富士フイルム株式会社 液体吐出ヘッド、液体吐出装置及び液体吐出ヘッドの異常検知方法

Family Cites Families (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6048112B2 (ja) * 1979-05-02 1985-10-25 ソニー株式会社 電気・機械変換素子
JPS58137317A (ja) * 1982-02-09 1983-08-15 Nec Corp 圧電薄膜複合振動子
WO1993022140A1 (en) * 1992-04-23 1993-11-11 Seiko Epson Corporation Liquid jet head and production thereof
JP3144949B2 (ja) * 1992-05-27 2001-03-12 日本碍子株式会社 圧電／電歪アクチュエータ
US5495137A (en) * 1993-09-14 1996-02-27 The Whitaker Corporation Proximity sensor utilizing polymer piezoelectric film with protective metal layer
EP0757939B1 (de) * 1994-03-29 1998-09-02 Citizen Watch Co. Ltd. Tintenstrahlkopf und verfahren zu dessen herstellung
EP0698490B1 (de) * 1994-08-25 1999-06-16 Seiko Epson Corporation Flüssigkeitsstrahlkopf
JP3501860B2 (ja) * 1994-12-21 2004-03-02 日本碍子株式会社 圧電／電歪膜型素子及びその製造方法
EP0736385B1 (de) * 1995-04-03 1998-02-25 Seiko Epson Corporation Tintenstrahldruckkopf und dessen Herstellungsverfahren
EP0800920B1 (de) * 1996-04-10 2002-02-06 Seiko Epson Corporation Tintenstrahlaufzeichnungskopf

Also Published As

Publication number Publication date
JPH10211701A (ja) 1998-08-11
EP0841165B1 (de) 2006-03-15
DE69735457T2 (de) 2006-08-24
EP0841165A3 (de) 2000-03-29
EP0841165A2 (de) 1998-05-13
US6142614A (en) 2000-11-07

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