DE69714107D1 - Optische Wellenleitersonde und optisches System - Google Patents

Optische Wellenleitersonde und optisches System

Info

Publication number
DE69714107D1
DE69714107D1 DE69714107T DE69714107T DE69714107D1 DE 69714107 D1 DE69714107 D1 DE 69714107D1 DE 69714107 T DE69714107 T DE 69714107T DE 69714107 T DE69714107 T DE 69714107T DE 69714107 D1 DE69714107 D1 DE 69714107D1
Authority
DE
Germany
Prior art keywords
optical
waveguide probe
optical system
optical waveguide
probe
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE69714107T
Other languages
English (en)
Other versions
DE69714107T2 (de
Inventor
Hiroshi Muramatsu
Kunio Nakajima
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Seiko Instruments Inc
Original Assignee
Seiko Instruments Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Seiko Instruments Inc filed Critical Seiko Instruments Inc
Application granted granted Critical
Publication of DE69714107D1 publication Critical patent/DE69714107D1/de
Publication of DE69714107T2 publication Critical patent/DE69714107T2/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01Q—SCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBE MICROSCOPY [SPM]
    • G01Q60/00—Particular types of SPM [Scanning Probe Microscopy] or microscopes; Essential components thereof
    • G01Q60/18—SNOM [Scanning Near-Field Optical Microscopy] or apparatus therefor, e.g. SNOM probes
    • G01Q60/22—Probes, their manufacture, or their related instrumentation, e.g. holders
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S977/00—Nanotechnology
    • Y10S977/84—Manufacture, treatment, or detection of nanostructure
    • Y10S977/849—Manufacture, treatment, or detection of nanostructure with scanning probe
    • Y10S977/86—Scanning probe structure
    • Y10S977/862—Near-field probe

Landscapes

  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Nuclear Medicine, Radiotherapy & Molecular Imaging (AREA)
  • Radiology & Medical Imaging (AREA)
  • Length Measuring Devices By Optical Means (AREA)
DE69714107T 1996-03-19 1997-02-13 Optische Wellenleitersonde und optisches System Expired - Lifetime DE69714107T2 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP06344696A JP3260619B2 (ja) 1996-03-19 1996-03-19 光導波路プロ−ブおよび光システム

Publications (2)

Publication Number Publication Date
DE69714107D1 true DE69714107D1 (de) 2002-08-29
DE69714107T2 DE69714107T2 (de) 2002-11-28

Family

ID=13229492

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69714107T Expired - Lifetime DE69714107T2 (de) 1996-03-19 1997-02-13 Optische Wellenleitersonde und optisches System

Country Status (4)

Country Link
US (1) US5969821A (de)
EP (1) EP0797117B1 (de)
JP (1) JP3260619B2 (de)
DE (1) DE69714107T2 (de)

Families Citing this family (26)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2903211B2 (ja) * 1996-04-09 1999-06-07 セイコーインスツルメンツ株式会社 プローブとプローブ製造方法及び走査型プローブ顕微鏡
WO1999031514A1 (en) * 1997-12-15 1999-06-24 Seiko Instruments Inc. Optical waveguide probe and its manufacturing method
JP4083330B2 (ja) * 1998-02-25 2008-04-30 セイコーインスツル株式会社 近視野光メモリヘッド
JP4020229B2 (ja) * 1998-05-11 2007-12-12 セイコーインスツル株式会社 近視野光学ヘッド
DE69817329T2 (de) * 1998-06-02 2004-06-09 International Business Machines Corp. Vorrichtung und Verfahren zur Identifikation einer Substanz durch Oberflächenwechselwirkungen
JP3399841B2 (ja) * 1998-06-25 2003-04-21 科学技術振興事業団 光導波路付き探針及びその製造方法
JP3002977B1 (ja) * 1998-07-08 2000-01-24 セイコーインスツルメンツ株式会社 走査用プローブおよび走査型プローブ顕微鏡
DE69940577D1 (de) * 1998-11-09 2009-04-23 Seiko Instr Inc Nahfeld Abtastkopf und Herstellungsverfahren dafür
JP3387846B2 (ja) * 1999-03-04 2003-03-17 セイコーインスツルメンツ株式会社 走査型プローブ顕微鏡
US6852968B1 (en) * 1999-03-08 2005-02-08 Canon Kabushiki Kaisha Surface-type optical apparatus
JP2000329677A (ja) * 1999-03-17 2000-11-30 Seiko Instruments Inc 光マイクロカンチレバーとその製造方法および光マイクロカンチレバーホルダ
JP4611436B2 (ja) * 1999-03-17 2011-01-12 セイコーインスツル株式会社 光マイクロカンチレバー
JP2008233109A (ja) * 1999-05-10 2008-10-02 Jasco Corp 近接場光学用プローブ
JP2002005810A (ja) * 2000-06-16 2002-01-09 Canon Inc プローブ及びその製造方法、表面観察装置、露光装置、情報処理装置
JP2003057162A (ja) * 2001-08-16 2003-02-26 Kanagawa Acad Of Sci & Technol 振動型プローブセンサ
US6903023B2 (en) * 2002-09-16 2005-06-07 International Business Machines Corporation In-situ plasma etch for TERA hard mask materials
JP4067504B2 (ja) 2004-03-17 2008-03-26 三洋電機株式会社 光導波路及びその製造方法
US7348786B2 (en) * 2004-08-31 2008-03-25 Georgia Tech Research Corporation Probe module for testing chips with electrical and optical input/output interconnects, methods of use, and methods of fabrication
JP2007139466A (ja) * 2005-11-15 2007-06-07 Tokyo Institute Of Technology 近接場光顕微鏡、近接場光イメージング方法、近接場光イメージング装置、近接場光イメージング法をコンピュータに実行させるプログラム、記録媒体および高密度記録情報メディア読み取り装置
US7347085B2 (en) * 2005-11-16 2008-03-25 Agilent Technologies, Inc. Nanoscale displacement detector
US7594443B2 (en) * 2006-10-09 2009-09-29 The Board Of Regents, University Of Texas System Mechanically tunable optical-encoded force sensor
JP2010233339A (ja) * 2009-03-26 2010-10-14 Seiko Epson Corp 圧電モーター、液体噴射装置及び時計
US9114248B2 (en) * 2010-10-04 2015-08-25 Nervomatrix Ltd. Electrode for finding points of low impedance and applying electrical stimulation thereto
ES2438021B1 (es) * 2011-08-02 2014-12-12 Universidad De Castilla La Mancha Micropalanca para microscopio de fuerzas atómicas y microscopio que incorpora dicha micropalanca
US8997258B2 (en) 2013-05-23 2015-03-31 National Institute Of Standards And Technology Microscope probe and method for use of same
CN111665375A (zh) * 2020-06-28 2020-09-15 深圳市繁华物创科技有限公司 一种基于波导布拉格光栅的原子力显微镜探针及***

Family Cites Families (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0112401B1 (de) * 1982-12-27 1987-04-22 International Business Machines Corporation Optisches Nahfeldabtastmikroskop
DE3276917D1 (en) * 1982-12-27 1987-09-10 Ibm Light waveguide with a submicron aperture, method for manufacturing the waveguide and application of the waveguide in an optical memory
DE3477271D1 (en) * 1984-12-28 1989-04-20 Ibm Waveguide for an optical near-field microscope
US5018865A (en) * 1988-10-21 1991-05-28 Ferrell Thomas L Photon scanning tunneling microscopy
US5288999A (en) * 1990-11-19 1994-02-22 At&T Bell Laboratories Manufacturing method including near-field optical microscopic examination of a semiconductor wafer
US5272330A (en) * 1990-11-19 1993-12-21 At&T Bell Laboratories Near field scanning optical microscope having a tapered waveguide
JP3000491B2 (ja) * 1991-04-10 2000-01-17 キヤノン株式会社 カンチレバーユニット及びこれを用いた情報処理装置、原子間力顕微鏡、磁力顕微鏡
JP3074357B2 (ja) 1991-10-03 2000-08-07 セイコーインスツルメンツ株式会社 微細表面観察装置
JP3268797B2 (ja) * 1991-10-09 2002-03-25 オリンパス光学工業株式会社 光導入装置
US5354985A (en) * 1993-06-03 1994-10-11 Stanford University Near field scanning optical and force microscope including cantilever and optical waveguide
EP0710370B1 (de) 1993-07-22 1998-12-02 Btg International Limited Intelligenter optischer sensor für optische nahfeldvorrichtung
DE19531465C2 (de) * 1995-03-30 1997-12-18 Zeiss Carl Jena Gmbh Rastersonde für die optische Nahfeldmikroskopie
US5633972A (en) * 1995-11-29 1997-05-27 Trustees Of Tufts College Superresolution imaging fiber for subwavelength light energy generation and near-field optical microscopy

Also Published As

Publication number Publication date
EP0797117B1 (de) 2002-07-24
DE69714107T2 (de) 2002-11-28
EP0797117A1 (de) 1997-09-24
JP3260619B2 (ja) 2002-02-25
US5969821A (en) 1999-10-19
JPH09257814A (ja) 1997-10-03

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8328 Change in the person/name/address of the agent

Representative=s name: WIESE KONNERTH FISCHER PATENTANWAELTE PARTNERSCHAF

8328 Change in the person/name/address of the agent

Representative=s name: SCHROETER LEHMANN FISCHER & NEUGEBAUER, 81479 MUEN