DE69707005D1 - METHOD FOR PRODUCING A PARYLENE COATING - Google Patents

METHOD FOR PRODUCING A PARYLENE COATING

Info

Publication number
DE69707005D1
DE69707005D1 DE69707005T DE69707005T DE69707005D1 DE 69707005 D1 DE69707005 D1 DE 69707005D1 DE 69707005 T DE69707005 T DE 69707005T DE 69707005 T DE69707005 T DE 69707005T DE 69707005 D1 DE69707005 D1 DE 69707005D1
Authority
DE
Germany
Prior art keywords
producing
parylene coating
parylene
coating
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE69707005T
Other languages
German (de)
Other versions
DE69707005T2 (en
Inventor
John Wary
A Olson
F Beach
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Specialty Coating Systems Inc
Original Assignee
Specialty Coating Systems Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Specialty Coating Systems Inc filed Critical Specialty Coating Systems Inc
Application granted granted Critical
Publication of DE69707005D1 publication Critical patent/DE69707005D1/en
Publication of DE69707005T2 publication Critical patent/DE69707005T2/en
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05D—PROCESSES FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05D1/00—Processes for applying liquids or other fluent materials
    • B05D1/60—Deposition of organic layers from vapour phase
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05D—PROCESSES FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05D7/00—Processes, other than flocking, specially adapted for applying liquids or other fluent materials to particular surfaces or for applying particular liquids or other fluent materials
    • B05D7/24—Processes, other than flocking, specially adapted for applying liquids or other fluent materials to particular surfaces or for applying particular liquids or other fluent materials for applying particular liquids or other fluent materials
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05D—PROCESSES FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05D1/00—Processes for applying liquids or other fluent materials
    • B05D1/62—Plasma-deposition of organic layers
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05D—PROCESSES FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05D3/00—Pretreatment of surfaces to which liquids or other fluent materials are to be applied; After-treatment of applied coatings, e.g. intermediate treating of an applied coating preparatory to subsequent applications of liquids or other fluent materials
    • B05D3/14—Pretreatment of surfaces to which liquids or other fluent materials are to be applied; After-treatment of applied coatings, e.g. intermediate treating of an applied coating preparatory to subsequent applications of liquids or other fluent materials by electrical means
    • B05D3/141—Plasma treatment
    • B05D3/145—After-treatment

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Plasma & Fusion (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Wood Science & Technology (AREA)
  • Physical Vapour Deposition (AREA)
  • Formation Of Insulating Films (AREA)
  • Polyoxymethylene Polymers And Polymers With Carbon-To-Carbon Bonds (AREA)
  • Chemical Vapour Deposition (AREA)
DE69707005T 1996-10-25 1997-10-24 METHOD FOR PRODUCING A PARYLENE COATING Expired - Fee Related DE69707005T2 (en)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US73831996A 1996-10-25 1996-10-25
US92893197A 1997-09-12 1997-09-12
PCT/US1997/019294 WO1998018570A1 (en) 1996-10-25 1997-10-24 Process for making a parylene coating

Publications (2)

Publication Number Publication Date
DE69707005D1 true DE69707005D1 (en) 2001-10-31
DE69707005T2 DE69707005T2 (en) 2002-07-04

Family

ID=27113349

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69707005T Expired - Fee Related DE69707005T2 (en) 1996-10-25 1997-10-24 METHOD FOR PRODUCING A PARYLENE COATING

Country Status (7)

Country Link
EP (1) EP0934127B1 (en)
JP (1) JP2002505803A (en)
KR (1) KR100517008B1 (en)
CN (1) CN1089281C (en)
AU (1) AU5087198A (en)
DE (1) DE69707005T2 (en)
WO (1) WO1998018570A1 (en)

Families Citing this family (22)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6020458A (en) 1997-10-24 2000-02-01 Quester Technology, Inc. Precursors for making low dielectric constant materials with improved thermal stability
DE19859695A1 (en) * 1998-12-23 2000-06-29 Leybold Systems Gmbh Coating plastic substrates with light reflective layer, e.g. in headlight reflector manufacture by precoating with low carbon content thin crosslinked hydrocarbon, silicon oxide, silicon nitride or silicon oxynitride barrier layer
US6558315B1 (en) 2000-03-15 2003-05-06 Ams Research Corporation Parylene-coated components for inflatable penile prosthesis
US6729527B2 (en) 2001-01-30 2004-05-04 Kulicke & Soffa Investments, Inc. Bonding tool with polymer coating
KR100422570B1 (en) * 2001-10-20 2004-03-11 최재영 Resin Composition for Heat Sink and a Method of Manufacturing Sheets for Heat Sink Using the Same
KR100468319B1 (en) * 2002-03-12 2005-01-27 (주)누리셀 Apparatus for Coating Parylene Polymer Film
KR20040051097A (en) * 2002-12-11 2004-06-18 패럴린코리아(주) Pretreatment method and its application device for promoting adhesion of parylene polymer
US7271697B2 (en) * 2004-12-07 2007-09-18 Multi-Fineline Electronix Miniature circuitry and inductive components and methods for manufacturing same
DE602004006005T8 (en) * 2004-12-16 2008-04-10 Comelec S.A. Method for producing a device with a plastic membrane and device thus obtained
JP4831561B2 (en) * 2005-05-16 2011-12-07 独立行政法人産業技術総合研究所 Organic-inorganic hybrid thin film and manufacturing method thereof
US20090142227A1 (en) * 2005-07-01 2009-06-04 Manfred Fuchs Parylene Coating and Method for the Production Thereof
DE102005040648A1 (en) * 2005-08-27 2007-03-01 Leybold Vacuum Gmbh Process for coating valve metal or alloy for e.g. aluminum or alloy rotor for turbomolecular pump involves vapor coating with optionally halogenated xylylene dimer and polymerization in capillary system of surface film of oxide ceramic
US20070148390A1 (en) * 2005-12-27 2007-06-28 Specialty Coating Systems, Inc. Fluorinated coatings
CN105400269A (en) * 2008-04-16 2016-03-16 Hzo股份有限公司 Metal and electronic device coating process for marine use and other environments
GB2479154A (en) * 2010-03-30 2011-10-05 Camvac Ltd Electron flux coated substrate
CN102140666A (en) * 2011-01-14 2011-08-03 成都图南电子有限公司 Binding neodymium iron boron magnet coating method and multi-layer structure prepared by utilizing same
NL2015934B1 (en) * 2015-12-10 2017-07-03 Veco B V Filter for brewing beverages.
JP2019524510A (en) * 2016-08-22 2019-09-05 コーニング インコーポレイテッド Controllably bonded sheet article and method of manufacturing the same
KR102095363B1 (en) * 2017-11-20 2020-04-02 주식회사 아이오에프 Deposition equipment for parylene with
DE102019200208A1 (en) 2019-01-10 2020-07-16 Carl Zeiss Smt Gmbh Process for in situ dynamic protection of a surface and optical arrangement
KR102643650B1 (en) * 2021-10-14 2024-03-05 연세대학교 산학협력단 Silica aerogel based insulation material having improved heat insulation property, method of manufacturing the silica aerogel based insulation material, and structure or mechanical equipment having the silica aerogel based insulation material
CN114204133B (en) * 2021-12-09 2024-07-12 惠州亿纬锂能股份有限公司 Method for solving expansion of coiled battery cell

Family Cites Families (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE2006702A1 (en) * 1970-02-13 1971-08-19 Siemens Ag Process for covering bodies with insulating materials
US3901994A (en) * 1974-02-04 1975-08-26 Rca Corp Metallized video disc having a dielectric coating thereon
US4500562A (en) * 1983-03-02 1985-02-19 The United States Of America As Represented By The United States Department Of Energy Di-p-xylylene polymer and method for making the same
JPS6391925A (en) * 1986-10-03 1988-04-22 Canon Inc Electron emitting element
US5154978A (en) * 1989-03-22 1992-10-13 Tdk Corporation Highly corrosion-resistant rare-earth-iron magnets
US5139813A (en) * 1990-09-28 1992-08-18 Union Carbide Chemicals & Plastics Technology Corporation Method for inducing fluorescence in parylene films by an active plasma
RU2002519C1 (en) * 1991-04-01 1993-11-15 Анатолий Михайлович Красовский Method for production coating of poly-n-xylidene
RU1819687C (en) * 1991-04-01 1993-06-07 Институт механики металлополимерных систем АН БССР Method for application of poly-p-xylylene coating
JP2797905B2 (en) * 1993-06-25 1998-09-17 凸版印刷株式会社 Organic thin film EL device
JPH0971672A (en) * 1995-09-08 1997-03-18 Fuji Electric Co Ltd Modification of polyparaxylylene thin film
US5538758A (en) * 1995-10-27 1996-07-23 Specialty Coating Systems, Inc. Method and apparatus for the deposition of parylene AF4 onto semiconductor wafers

Also Published As

Publication number Publication date
WO1998018570A1 (en) 1998-05-07
CN1089281C (en) 2002-08-21
EP0934127A1 (en) 1999-08-11
CN1244143A (en) 2000-02-09
DE69707005T2 (en) 2002-07-04
KR100517008B1 (en) 2005-09-27
JP2002505803A (en) 2002-02-19
KR20000052803A (en) 2000-08-25
AU5087198A (en) 1998-05-22
EP0934127B1 (en) 2001-09-26

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Legal Events

Date Code Title Description
8332 No legal effect for de
8370 Indication of lapse of patent is to be deleted
8364 No opposition during term of opposition
8339 Ceased/non-payment of the annual fee