DE69707005D1 - METHOD FOR PRODUCING A PARYLENE COATING - Google Patents
METHOD FOR PRODUCING A PARYLENE COATINGInfo
- Publication number
- DE69707005D1 DE69707005D1 DE69707005T DE69707005T DE69707005D1 DE 69707005 D1 DE69707005 D1 DE 69707005D1 DE 69707005 T DE69707005 T DE 69707005T DE 69707005 T DE69707005 T DE 69707005T DE 69707005 D1 DE69707005 D1 DE 69707005D1
- Authority
- DE
- Germany
- Prior art keywords
- producing
- parylene coating
- parylene
- coating
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05D—PROCESSES FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05D1/00—Processes for applying liquids or other fluent materials
- B05D1/60—Deposition of organic layers from vapour phase
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05D—PROCESSES FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05D7/00—Processes, other than flocking, specially adapted for applying liquids or other fluent materials to particular surfaces or for applying particular liquids or other fluent materials
- B05D7/24—Processes, other than flocking, specially adapted for applying liquids or other fluent materials to particular surfaces or for applying particular liquids or other fluent materials for applying particular liquids or other fluent materials
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05D—PROCESSES FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05D1/00—Processes for applying liquids or other fluent materials
- B05D1/62—Plasma-deposition of organic layers
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05D—PROCESSES FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05D3/00—Pretreatment of surfaces to which liquids or other fluent materials are to be applied; After-treatment of applied coatings, e.g. intermediate treating of an applied coating preparatory to subsequent applications of liquids or other fluent materials
- B05D3/14—Pretreatment of surfaces to which liquids or other fluent materials are to be applied; After-treatment of applied coatings, e.g. intermediate treating of an applied coating preparatory to subsequent applications of liquids or other fluent materials by electrical means
- B05D3/141—Plasma treatment
- B05D3/145—After-treatment
Landscapes
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Plasma & Fusion (AREA)
- Life Sciences & Earth Sciences (AREA)
- Wood Science & Technology (AREA)
- Physical Vapour Deposition (AREA)
- Formation Of Insulating Films (AREA)
- Polyoxymethylene Polymers And Polymers With Carbon-To-Carbon Bonds (AREA)
- Chemical Vapour Deposition (AREA)
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US73831996A | 1996-10-25 | 1996-10-25 | |
US92893197A | 1997-09-12 | 1997-09-12 | |
PCT/US1997/019294 WO1998018570A1 (en) | 1996-10-25 | 1997-10-24 | Process for making a parylene coating |
Publications (2)
Publication Number | Publication Date |
---|---|
DE69707005D1 true DE69707005D1 (en) | 2001-10-31 |
DE69707005T2 DE69707005T2 (en) | 2002-07-04 |
Family
ID=27113349
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE69707005T Expired - Fee Related DE69707005T2 (en) | 1996-10-25 | 1997-10-24 | METHOD FOR PRODUCING A PARYLENE COATING |
Country Status (7)
Country | Link |
---|---|
EP (1) | EP0934127B1 (en) |
JP (1) | JP2002505803A (en) |
KR (1) | KR100517008B1 (en) |
CN (1) | CN1089281C (en) |
AU (1) | AU5087198A (en) |
DE (1) | DE69707005T2 (en) |
WO (1) | WO1998018570A1 (en) |
Families Citing this family (22)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US6020458A (en) | 1997-10-24 | 2000-02-01 | Quester Technology, Inc. | Precursors for making low dielectric constant materials with improved thermal stability |
DE19859695A1 (en) * | 1998-12-23 | 2000-06-29 | Leybold Systems Gmbh | Coating plastic substrates with light reflective layer, e.g. in headlight reflector manufacture by precoating with low carbon content thin crosslinked hydrocarbon, silicon oxide, silicon nitride or silicon oxynitride barrier layer |
US6558315B1 (en) | 2000-03-15 | 2003-05-06 | Ams Research Corporation | Parylene-coated components for inflatable penile prosthesis |
US6729527B2 (en) | 2001-01-30 | 2004-05-04 | Kulicke & Soffa Investments, Inc. | Bonding tool with polymer coating |
KR100422570B1 (en) * | 2001-10-20 | 2004-03-11 | 최재영 | Resin Composition for Heat Sink and a Method of Manufacturing Sheets for Heat Sink Using the Same |
KR100468319B1 (en) * | 2002-03-12 | 2005-01-27 | (주)누리셀 | Apparatus for Coating Parylene Polymer Film |
KR20040051097A (en) * | 2002-12-11 | 2004-06-18 | 패럴린코리아(주) | Pretreatment method and its application device for promoting adhesion of parylene polymer |
US7271697B2 (en) * | 2004-12-07 | 2007-09-18 | Multi-Fineline Electronix | Miniature circuitry and inductive components and methods for manufacturing same |
DE602004006005T8 (en) * | 2004-12-16 | 2008-04-10 | Comelec S.A. | Method for producing a device with a plastic membrane and device thus obtained |
JP4831561B2 (en) * | 2005-05-16 | 2011-12-07 | 独立行政法人産業技術総合研究所 | Organic-inorganic hybrid thin film and manufacturing method thereof |
US20090142227A1 (en) * | 2005-07-01 | 2009-06-04 | Manfred Fuchs | Parylene Coating and Method for the Production Thereof |
DE102005040648A1 (en) * | 2005-08-27 | 2007-03-01 | Leybold Vacuum Gmbh | Process for coating valve metal or alloy for e.g. aluminum or alloy rotor for turbomolecular pump involves vapor coating with optionally halogenated xylylene dimer and polymerization in capillary system of surface film of oxide ceramic |
US20070148390A1 (en) * | 2005-12-27 | 2007-06-28 | Specialty Coating Systems, Inc. | Fluorinated coatings |
CN105400269A (en) * | 2008-04-16 | 2016-03-16 | Hzo股份有限公司 | Metal and electronic device coating process for marine use and other environments |
GB2479154A (en) * | 2010-03-30 | 2011-10-05 | Camvac Ltd | Electron flux coated substrate |
CN102140666A (en) * | 2011-01-14 | 2011-08-03 | 成都图南电子有限公司 | Binding neodymium iron boron magnet coating method and multi-layer structure prepared by utilizing same |
NL2015934B1 (en) * | 2015-12-10 | 2017-07-03 | Veco B V | Filter for brewing beverages. |
JP2019524510A (en) * | 2016-08-22 | 2019-09-05 | コーニング インコーポレイテッド | Controllably bonded sheet article and method of manufacturing the same |
KR102095363B1 (en) * | 2017-11-20 | 2020-04-02 | 주식회사 아이오에프 | Deposition equipment for parylene with |
DE102019200208A1 (en) | 2019-01-10 | 2020-07-16 | Carl Zeiss Smt Gmbh | Process for in situ dynamic protection of a surface and optical arrangement |
KR102643650B1 (en) * | 2021-10-14 | 2024-03-05 | 연세대학교 산학협력단 | Silica aerogel based insulation material having improved heat insulation property, method of manufacturing the silica aerogel based insulation material, and structure or mechanical equipment having the silica aerogel based insulation material |
CN114204133B (en) * | 2021-12-09 | 2024-07-12 | 惠州亿纬锂能股份有限公司 | Method for solving expansion of coiled battery cell |
Family Cites Families (11)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE2006702A1 (en) * | 1970-02-13 | 1971-08-19 | Siemens Ag | Process for covering bodies with insulating materials |
US3901994A (en) * | 1974-02-04 | 1975-08-26 | Rca Corp | Metallized video disc having a dielectric coating thereon |
US4500562A (en) * | 1983-03-02 | 1985-02-19 | The United States Of America As Represented By The United States Department Of Energy | Di-p-xylylene polymer and method for making the same |
JPS6391925A (en) * | 1986-10-03 | 1988-04-22 | Canon Inc | Electron emitting element |
US5154978A (en) * | 1989-03-22 | 1992-10-13 | Tdk Corporation | Highly corrosion-resistant rare-earth-iron magnets |
US5139813A (en) * | 1990-09-28 | 1992-08-18 | Union Carbide Chemicals & Plastics Technology Corporation | Method for inducing fluorescence in parylene films by an active plasma |
RU2002519C1 (en) * | 1991-04-01 | 1993-11-15 | Анатолий Михайлович Красовский | Method for production coating of poly-n-xylidene |
RU1819687C (en) * | 1991-04-01 | 1993-06-07 | Институт механики металлополимерных систем АН БССР | Method for application of poly-p-xylylene coating |
JP2797905B2 (en) * | 1993-06-25 | 1998-09-17 | 凸版印刷株式会社 | Organic thin film EL device |
JPH0971672A (en) * | 1995-09-08 | 1997-03-18 | Fuji Electric Co Ltd | Modification of polyparaxylylene thin film |
US5538758A (en) * | 1995-10-27 | 1996-07-23 | Specialty Coating Systems, Inc. | Method and apparatus for the deposition of parylene AF4 onto semiconductor wafers |
-
1997
- 1997-10-24 AU AU50871/98A patent/AU5087198A/en not_active Abandoned
- 1997-10-24 DE DE69707005T patent/DE69707005T2/en not_active Expired - Fee Related
- 1997-10-24 JP JP52062698A patent/JP2002505803A/en active Pending
- 1997-10-24 KR KR10-1999-7003622A patent/KR100517008B1/en not_active IP Right Cessation
- 1997-10-24 EP EP97913758A patent/EP0934127B1/en not_active Expired - Lifetime
- 1997-10-24 CN CN97181002A patent/CN1089281C/en not_active Expired - Fee Related
- 1997-10-24 WO PCT/US1997/019294 patent/WO1998018570A1/en active IP Right Grant
Also Published As
Publication number | Publication date |
---|---|
WO1998018570A1 (en) | 1998-05-07 |
CN1089281C (en) | 2002-08-21 |
EP0934127A1 (en) | 1999-08-11 |
CN1244143A (en) | 2000-02-09 |
DE69707005T2 (en) | 2002-07-04 |
KR100517008B1 (en) | 2005-09-27 |
JP2002505803A (en) | 2002-02-19 |
KR20000052803A (en) | 2000-08-25 |
AU5087198A (en) | 1998-05-22 |
EP0934127B1 (en) | 2001-09-26 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
8332 | No legal effect for de | ||
8370 | Indication of lapse of patent is to be deleted | ||
8364 | No opposition during term of opposition | ||
8339 | Ceased/non-payment of the annual fee |