DE69624896D1 - Dichtung und Kammer mit einer Dichtung - Google Patents

Dichtung und Kammer mit einer Dichtung

Info

Publication number
DE69624896D1
DE69624896D1 DE69624896T DE69624896T DE69624896D1 DE 69624896 D1 DE69624896 D1 DE 69624896D1 DE 69624896 T DE69624896 T DE 69624896T DE 69624896 T DE69624896 T DE 69624896T DE 69624896 D1 DE69624896 D1 DE 69624896D1
Authority
DE
Germany
Prior art keywords
seal
chamber
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE69624896T
Other languages
English (en)
Other versions
DE69624896T2 (de
Inventor
John Arthur Spencer
David Stafford Rickerby
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Rolls Royce PLC
Original Assignee
Rolls Royce PLC
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Rolls Royce PLC filed Critical Rolls Royce PLC
Publication of DE69624896D1 publication Critical patent/DE69624896D1/de
Application granted granted Critical
Publication of DE69624896T2 publication Critical patent/DE69624896T2/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
    • C23C16/54—Apparatus specially adapted for continuous coating
    • C23C16/545—Apparatus specially adapted for continuous coating for coating elongated substrates
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/56—Apparatus specially adapted for continuous coating; Arrangements for maintaining the vacuum, e.g. vacuum locks
    • C23C14/562—Apparatus specially adapted for continuous coating; Arrangements for maintaining the vacuum, e.g. vacuum locks for coating elongated substrates

Landscapes

  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • General Chemical & Material Sciences (AREA)
  • Physical Vapour Deposition (AREA)
  • Chemical Vapour Deposition (AREA)
  • Application Of Or Painting With Fluid Materials (AREA)
DE69624896T 1995-10-27 1996-10-16 Dichtung und Kammer mit einer Dichtung Expired - Lifetime DE69624896T2 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
GBGB9522062.0A GB9522062D0 (en) 1995-10-27 1995-10-27 A seal and a chamber having a seal

Publications (2)

Publication Number Publication Date
DE69624896D1 true DE69624896D1 (de) 2003-01-02
DE69624896T2 DE69624896T2 (de) 2003-04-03

Family

ID=10783007

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69624896T Expired - Lifetime DE69624896T2 (de) 1995-10-27 1996-10-16 Dichtung und Kammer mit einer Dichtung

Country Status (4)

Country Link
US (1) US5665165A (de)
EP (1) EP0770703B1 (de)
DE (1) DE69624896T2 (de)
GB (1) GB9522062D0 (de)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB9821903D0 (en) * 1998-10-09 1998-12-02 Rolls Royce Plc A method of applying a coating to a metallic article and an apparatus for applying a coating to a metallic article
GB2462843B (en) * 2008-08-22 2013-03-20 Tisics Ltd Coated filaments and their manufacture
US9718080B1 (en) * 2016-05-06 2017-08-01 RADCO Infusion Technologies, LLC Linear substrate infusion compartment
DE102018206646B4 (de) * 2018-04-27 2023-07-20 Ecocoat Gmbh Vorrichtung und Verfahren zur Beschichtung zumindest einer Faser
US11961717B2 (en) * 2018-12-21 2024-04-16 Ozone 1 Pty Ltd Plasma reactors

Family Cites Families (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3667626A (en) * 1969-05-13 1972-06-06 Sandco Ltd Sealing means
GB1512837A (en) * 1975-06-24 1978-06-01 Electricity Council Seals for the passage of wire between regions of different pressure
US3952568A (en) * 1974-09-04 1976-04-27 The Electricity Council Vacuum processing of rod, wire or strip material
FR2521044A1 (fr) * 1982-02-11 1983-08-12 Stephanois Rech Mec Dispositif pour l'introduction et/ou le retrait d'une maniere etanche, de solides a travers au moins un orifice d'une enceinte de traitement a basse pression notamment
US4480585A (en) * 1983-06-23 1984-11-06 Energy Conversion Devices, Inc. External isolation module
EP0142083A3 (de) * 1983-11-11 1987-04-29 Hoesch Aktiengesellschaft Verfahren und Einrichtung zum Herstellen metallischer Überzüge
NL8602660A (nl) * 1986-10-23 1988-05-16 Bekaert Sa Nv Doorvoerelement voor toepassing in een vacuuminrichting en vacuuminrichting voorzien van een of meer van dergelijke doorvoerelementen.
NL8602661A (nl) * 1986-10-23 1988-05-16 Bekaert Sa Nv Doorvoerelement voor vacuuminrichting alsmede inrichting voorzien van dergelijke doorvoerelementen.
GB9009742D0 (en) * 1990-05-01 1990-06-20 Atomic Energy Authority Uk Production of composite precursor wires by sputter ion-plating onto an electrically conducting filament

Also Published As

Publication number Publication date
EP0770703A3 (de) 2000-03-15
EP0770703A2 (de) 1997-05-02
EP0770703B1 (de) 2002-11-20
US5665165A (en) 1997-09-09
DE69624896T2 (de) 2003-04-03
GB9522062D0 (en) 1996-01-03

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition