DE69615412T2 - Metallischer gegenstand mit oxidschicht und eine verbesserte haftschicht - Google Patents

Metallischer gegenstand mit oxidschicht und eine verbesserte haftschicht

Info

Publication number
DE69615412T2
DE69615412T2 DE69615412T DE69615412T DE69615412T2 DE 69615412 T2 DE69615412 T2 DE 69615412T2 DE 69615412 T DE69615412 T DE 69615412T DE 69615412 T DE69615412 T DE 69615412T DE 69615412 T2 DE69615412 T2 DE 69615412T2
Authority
DE
Germany
Prior art keywords
improved adhesive
metal item
adhesive layer
oxide layer
layer
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE69615412T
Other languages
English (en)
Other versions
DE69615412D1 (de
Inventor
Wolfram Beele
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Siemens AG
Original Assignee
Siemens AG
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Siemens AG filed Critical Siemens AG
Application granted granted Critical
Publication of DE69615412D1 publication Critical patent/DE69615412D1/de
Publication of DE69615412T2 publication Critical patent/DE69615412T2/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C28/00—Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D
    • C23C28/04—Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D only coatings of inorganic non-metallic material
    • C23C28/042—Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D only coatings of inorganic non-metallic material including a refractory ceramic layer, e.g. refractory metal oxides, ZrO2, rare earth oxides
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/02—Pretreatment of the material to be coated
    • C23C14/024—Deposition of sublayers, e.g. to promote adhesion of the coating
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
    • C23C14/08—Oxides
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C26/00—Coating not provided for in groups C23C2/00 - C23C24/00
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C28/00—Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C28/00—Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D
    • C23C28/04—Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D only coatings of inorganic non-metallic material
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T428/00—Stock material or miscellaneous articles
    • Y10T428/12—All metal or with adjacent metals
    • Y10T428/12493—Composite; i.e., plural, adjacent, spatially distinct metal components [e.g., layers, joint, etc.]
    • Y10T428/12535—Composite; i.e., plural, adjacent, spatially distinct metal components [e.g., layers, joint, etc.] with additional, spatially distinct nonmetal component
    • Y10T428/12542—More than one such component
    • Y10T428/12549—Adjacent to each other
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T428/00—Stock material or miscellaneous articles
    • Y10T428/12—All metal or with adjacent metals
    • Y10T428/12493—Composite; i.e., plural, adjacent, spatially distinct metal components [e.g., layers, joint, etc.]
    • Y10T428/12535—Composite; i.e., plural, adjacent, spatially distinct metal components [e.g., layers, joint, etc.] with additional, spatially distinct nonmetal component
    • Y10T428/12611—Oxide-containing component
    • Y10T428/12618—Plural oxides
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T428/00—Stock material or miscellaneous articles
    • Y10T428/12—All metal or with adjacent metals
    • Y10T428/12493—Composite; i.e., plural, adjacent, spatially distinct metal components [e.g., layers, joint, etc.]
    • Y10T428/12771—Transition metal-base component
    • Y10T428/12861—Group VIII or IB metal-base component
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T428/00—Stock material or miscellaneous articles
    • Y10T428/12—All metal or with adjacent metals
    • Y10T428/12493—Composite; i.e., plural, adjacent, spatially distinct metal components [e.g., layers, joint, etc.]
    • Y10T428/12771—Transition metal-base component
    • Y10T428/12861—Group VIII or IB metal-base component
    • Y10T428/12931—Co-, Fe-, or Ni-base components, alternative to each other
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T428/00—Stock material or miscellaneous articles
    • Y10T428/12—All metal or with adjacent metals
    • Y10T428/12493—Composite; i.e., plural, adjacent, spatially distinct metal components [e.g., layers, joint, etc.]
    • Y10T428/12771—Transition metal-base component
    • Y10T428/12861—Group VIII or IB metal-base component
    • Y10T428/12944—Ni-base component

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Inorganic Chemistry (AREA)
  • Ceramic Engineering (AREA)
  • Other Surface Treatments For Metallic Materials (AREA)
DE69615412T 1996-07-25 1996-07-25 Metallischer gegenstand mit oxidschicht und eine verbesserte haftschicht Expired - Fee Related DE69615412T2 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
PCT/EP1996/003287 WO1998004759A1 (en) 1996-04-12 1996-07-25 Metal substrate with an oxide layer and an improved anchoring layer

Publications (2)

Publication Number Publication Date
DE69615412D1 DE69615412D1 (de) 2001-10-25
DE69615412T2 true DE69615412T2 (de) 2002-06-20

Family

ID=8166275

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69615412T Expired - Fee Related DE69615412T2 (de) 1996-07-25 1996-07-25 Metallischer gegenstand mit oxidschicht und eine verbesserte haftschicht

Country Status (5)

Country Link
US (1) US6127048A (de)
EP (1) EP0914498B1 (de)
JP (1) JP3466627B2 (de)
DE (1) DE69615412T2 (de)
WO (1) WO1998004759A1 (de)

Families Citing this family (17)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6258467B1 (en) * 2000-08-17 2001-07-10 Siemens Westinghouse Power Corporation Thermal barrier coating having high phase stability
US6764771B1 (en) * 1997-11-03 2004-07-20 Siemens Aktiengesellschaft Product, especially a gas turbine component, with a ceramic heat insulating layer
EP1029100B1 (de) * 1997-11-03 2001-09-19 Siemens Aktiengesellschaft Erzeugnis mit einem schichtsystem zum schutz gegen ein heisses aggressives gas
US6435830B1 (en) * 1999-12-20 2002-08-20 United Technologies Corporation Article having corrosion resistant coating
US6602548B2 (en) 2001-06-20 2003-08-05 Honeywell International Inc. Ceramic turbine blade attachment having high temperature, high stress compliant layers and method of fabrication thereof
US20030211245A1 (en) * 2001-08-31 2003-11-13 Irene Spitsberg Fabrication of an article having a thermal barrier coating system, and the article
DE10200803A1 (de) * 2002-01-11 2003-07-31 Forschungszentrum Juelich Gmbh Herstellung eines keramischen Werkstoffes für eine Wärmedämmschicht sowie eine den Werkstoff enthaltene Wärmedämmschicht
GB0226686D0 (en) * 2002-11-15 2002-12-24 Rolls Royce Plc Method of damping vibration in metallic articles
JP5697829B2 (ja) * 2002-12-04 2015-04-08 ライボルト オプティクス ゲゼルシャフト ミット ベシュレンクテル ハフツングＬｅｙｂｏｌｄ Ｏｐｔｉｃｓ ＧｍｂＨ 多層膜を製造する方法および前記方法を実施するための装置
DE10347521A1 (de) * 2002-12-04 2004-06-24 Leybold Optics Gmbh Verfahren zur Herstellung Multilayerschicht und Vorrichtung zur Durchführung des Verfahrens
US6803135B2 (en) 2003-02-24 2004-10-12 Chromalloy Gas Turbine Corporation Thermal barrier coating having low thermal conductivity
US6969555B2 (en) * 2003-10-06 2005-11-29 General Electric Company Aluminate coating for a silicon containing substrate
US20050153160A1 (en) * 2004-01-12 2005-07-14 Yourong Liu Durable thermal barrier coating having low thermal conductivity
JP2005343768A (ja) * 2004-06-07 2005-12-15 Toyota Central Res & Dev Lab Inc 金属／セラミック接合体及びその製造方法
EP1850412A1 (de) 2006-04-26 2007-10-31 Technical University of Denmark Eine mehrlagige Beschichtung
GB2519047B (en) * 2012-08-14 2018-08-22 Snecma A method of measuring the temperature reached by a part, in particular a turbine engine part
CN103861662B (zh) * 2012-12-13 2016-12-21 通用电气公司 带有氧化铝阻隔层的防结焦催化剂涂层

Family Cites Families (18)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB1159823A (en) * 1965-08-06 1969-07-30 Montedison Spa Protective Coatings
FR1536493A (fr) * 1966-07-22 1968-08-16 Montedison Spa Enduits protecteurs de grande résistance et procédé correspondant pour leur application sur des surfaces intérieurs de réacteurs de craquage d'hydrocarbure
US4055705A (en) * 1976-05-14 1977-10-25 The United States Of America As Represented By The Administrator Of The National Aeronautics And Space Administration Thermal barrier coating system
US4321311A (en) * 1980-01-07 1982-03-23 United Technologies Corporation Columnar grain ceramic thermal barrier coatings
US4321310A (en) * 1980-01-07 1982-03-23 United Technologies Corporation Columnar grain ceramic thermal barrier coatings on polished substrates
US4622120A (en) * 1984-01-31 1986-11-11 Ppg Industries, Inc. Sputtered indium oxide films
EP0185603B1 (de) * 1984-11-28 1989-11-08 United Technologies Corporation Verbesserung der Lebensdauer von metallvulkanischen Turbinenabdichtungen
NO850403L (no) * 1985-02-01 1986-08-04 Ingard Kvernes Aluminiumbasert artikkel med beskyttelsesbelegg og fremgangsmaate til fremstilling derav.
JPS63274751A (ja) * 1987-05-01 1988-11-11 Toyota Motor Corp セラミック溶射部材
US5262245A (en) * 1988-08-12 1993-11-16 United Technologies Corporation Advanced thermal barrier coated superalloy components
US5268238A (en) * 1989-08-10 1993-12-07 Siemens Aktiengesellschaft Highly corrosion and/or oxidation-resistant protective coating containing rhenium applied to gas turbine component surface and method thereof
US5273712A (en) * 1989-08-10 1993-12-28 Siemens Aktiengesellschaft Highly corrosion and/or oxidation-resistant protective coating containing rhenium
JPH03157349A (ja) * 1989-11-14 1991-07-05 Lion Corp 乳化組成物
EP0430874A1 (de) * 1989-11-22 1991-06-05 Balzers Aktiengesellschaft Gegenstand mit einer Dekorschicht
US5087477A (en) * 1990-02-05 1992-02-11 United Technologies Corporation Eb-pvd method for applying ceramic coatings
US5238752A (en) * 1990-05-07 1993-08-24 General Electric Company Thermal barrier coating system with intermetallic overlay bond coat
US5401307A (en) * 1990-08-10 1995-03-28 Siemens Aktiengesellschaft High temperature-resistant corrosion protection coating on a component, in particular a gas turbine component
IN187185B (de) * 1995-04-25 2002-02-23 Siemens Ag

Also Published As

Publication number Publication date
US6127048A (en) 2000-10-03
EP0914498A1 (de) 1999-05-12
EP0914498B1 (de) 2001-09-19
DE69615412D1 (de) 2001-10-25
JP2000515202A (ja) 2000-11-14
WO1998004759A1 (en) 1998-02-05
JP3466627B2 (ja) 2003-11-17

Similar Documents

Publication Publication Date Title
DE69731522D1 (de) Gegenstand mit holographischen und rückstrahlendfen merkmalen
DE69615412T2 (de) Metallischer gegenstand mit oxidschicht und eine verbesserte haftschicht
DE69532924D1 (de) Elektrochromische schicht und vorrichtungen mit derselben
DE69706850T2 (de) Artikel mit schutzschicht, enthaltend eine verbesserte verankerungsschicht und seine herstellung
DE69801976D1 (de) Zusammensetzung und Gegenstand mit verbessertem Druckverformungsrest
DE69705141T2 (de) Wärmehemmende Beschichtung mit verbesserter Unterschicht und Gegenstände mit dieser Wärmehemmende Beschichtung
DE69401488D1 (de) Persönlicher gegenstand mit medizinischen informationen
FI944624A (fi) 4-aryyliaminobentsopyraani- ja niiden kaltaisia yhdisteitä
ITTO930338A0 (it) Composizione adesiva, relativi procedimenti ed impiego
DE69718902D1 (de) Wälz-und gleitelement
DE59801946D1 (de) Kreuzfahrt-luftschiff mit ankereinrichtung und helium-temperiereinrichtung
DE69932884D1 (de) Polyesterverbundfilm und magnetischer Aufzeignungsträger
DE69826386D1 (de) Anzeigevorrichtung und zeitmessgerät mit derselben
FI972134A0 (fi) Liimakerros ja sen levittäminen hockeymailojen lavoille
DE69738269D1 (de) Fluorcopolymer und daraus hergestellter film
DE69813998D1 (de) Aufzeichnungsvorrichtung mit Ladungsfunktion und Ladungsverfahren
DE59804716D1 (de) Drehkantenvorrichtung mit Hebelitzen und Halblitze
IT1288262B1 (it) Fresa bitagliente monoinserto ad elevata robustezza e precisione
DE69821204D1 (de) Haarfarbemittel mit 3-Alkyl-4-aminophenol und 2-substituiertes-1-Naphtol
DE50013994D1 (de) Symmetrischer Thyristor mit verringerter Dicke und Herstellungsverfahren dafür
DE69410389D1 (de) Bauelement mit kontrollierbarer Leitung und mit Mehrfachtunnelübergang
DE59905838D1 (de) Selbstklebende knopfscheibe und deren anwendung
IL135446A0 (en) Dakar nucleic acids and polypeptides and methods utilizing the same
FI972010A0 (fi) Arrangemang i en borrningsanordning
KR960017149U (ko) 우산겸용 파라솔이 장착된 자동차

Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8339 Ceased/non-payment of the annual fee