DE69608380T2 - Beschleunigungsdetektionsvorrichtung - Google Patents

Beschleunigungsdetektionsvorrichtung

Info

Publication number
DE69608380T2
DE69608380T2 DE69608380T DE69608380T DE69608380T2 DE 69608380 T2 DE69608380 T2 DE 69608380T2 DE 69608380 T DE69608380 T DE 69608380T DE 69608380 T DE69608380 T DE 69608380T DE 69608380 T2 DE69608380 T2 DE 69608380T2
Authority
DE
Germany
Prior art keywords
detection device
acceleration detection
acceleration
detection
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE69608380T
Other languages
English (en)
Other versions
DE69608380D1 (de
Inventor
Yasuhiro Negoro
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Murata Manufacturing Co Ltd
Original Assignee
Murata Manufacturing Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Murata Manufacturing Co Ltd filed Critical Murata Manufacturing Co Ltd
Publication of DE69608380D1 publication Critical patent/DE69608380D1/de
Application granted granted Critical
Publication of DE69608380T2 publication Critical patent/DE69608380T2/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
    • G01P15/18—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration in two or more dimensions
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
    • G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
    • G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
    • G01P15/125—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values by capacitive pick-up
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
    • G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
    • G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
    • G01P2015/0805—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration
    • G01P2015/0822—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration for defining out-of-plane movement of the mass
    • G01P2015/0825—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration for defining out-of-plane movement of the mass for one single degree of freedom of movement of the mass
    • G01P2015/0828—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration for defining out-of-plane movement of the mass for one single degree of freedom of movement of the mass the mass being of the paddle type being suspended at one of its longitudinal ends

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Pressure Sensors (AREA)
  • Switches Operated By Changes In Physical Conditions (AREA)
DE69608380T 1995-09-04 1996-09-03 Beschleunigungsdetektionsvorrichtung Expired - Fee Related DE69608380T2 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP25022295 1995-09-04

Publications (2)

Publication Number Publication Date
DE69608380D1 DE69608380D1 (de) 2000-06-21
DE69608380T2 true DE69608380T2 (de) 2000-11-30

Family

ID=17204658

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69608380T Expired - Fee Related DE69608380T2 (de) 1995-09-04 1996-09-03 Beschleunigungsdetektionsvorrichtung

Country Status (4)

Country Link
US (1) US5892154A (de)
EP (1) EP0762128B1 (de)
CA (1) CA2184758C (de)
DE (1) DE69608380T2 (de)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FI119159B (fi) * 2003-02-11 2008-08-15 Vti Technologies Oy Kapasitiivinen kiihtyvyysanturirakenne
US7621185B2 (en) * 2005-07-28 2009-11-24 Sae Magnetics (H.K.) Ltd. Acceleration sensor and electronic device comprising the same
JP4817747B2 (ja) * 2005-07-28 2011-11-16 新科實業有限公司 加速度センサ及びこれを装備したハードディスクドライブ並びに加速度計測方法
US10495663B2 (en) * 2016-02-19 2019-12-03 The Regents Of The University Of Michigan High aspect-ratio low noise multi-axis accelerometers
US10712360B2 (en) 2017-09-27 2020-07-14 Azoteq (Pty) Ltd Differential charge transfer based accelerometer

Family Cites Families (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CH642461A5 (fr) * 1981-07-02 1984-04-13 Centre Electron Horloger Accelerometre.
US4699006A (en) * 1984-03-19 1987-10-13 The Charles Stark Draper Laboratory, Inc. Vibratory digital integrating accelerometer
GB8718004D0 (en) * 1987-07-29 1987-12-16 Marconi Co Ltd Accelerometer
JPH0623782B2 (ja) * 1988-11-15 1994-03-30 株式会社日立製作所 静電容量式加速度センサ及び半導体圧力センサ
DE3917611A1 (de) * 1989-05-31 1990-12-06 Deutsche Forsch Luft Raumfahrt Verfahren zur eichung eines beschleunigungsaufnehmers
US4955108A (en) * 1989-07-14 1990-09-11 Litton Systems, Inc. Protected hinge assembly for mechanical accelerometer
US5421213A (en) * 1990-10-12 1995-06-06 Okada; Kazuhiro Multi-dimensional force detector
US5396797A (en) * 1991-02-08 1995-03-14 Alliedsignal Inc. Triaxial angular rate and acceleration sensor
JPH04268725A (ja) * 1991-02-25 1992-09-24 Canon Inc 力学量検出センサおよびその製造方法
JP3151956B2 (ja) * 1992-09-04 2001-04-03 株式会社村田製作所 加速度センサ
US5412987A (en) * 1992-09-24 1995-05-09 Siemens Automotive L.P. Folded cantilever beam accelerometer
JP2549815B2 (ja) * 1993-06-03 1996-10-30 富士通テン株式会社 半導体加速度センサおよびその試験方法
US5425750A (en) * 1993-07-14 1995-06-20 Pacesetter, Inc. Accelerometer-based multi-axis physical activity sensor for a rate-responsive pacemaker and method of fabrication

Also Published As

Publication number Publication date
CA2184758C (en) 2000-02-08
DE69608380D1 (de) 2000-06-21
EP0762128B1 (de) 2000-05-17
US5892154A (en) 1999-04-06
EP0762128A1 (de) 1997-03-12
CA2184758A1 (en) 1997-03-05

Similar Documents

Publication Publication Date Title
DE69631750D1 (de) Objektdetektionsgerät
DE59608599D1 (de) Beschleunigungssensor
DE69623539D1 (de) Positionserfassungseinrichtung
DE69516234T2 (de) Münzerfassungsvorrichtung
DE59608134D1 (de) Positionserfassungsvorrichtung
DE59603447D1 (de) Beschleunigungssensor
DE69629150D1 (de) Beschleunigungsmessaufnehmer
DE69517353D1 (de) Momentfassungsgerät
DE69608380D1 (de) Beschleunigungsdetektionsvorrichtung
DE69606747D1 (de) Beschleunigungssensor
KR970005238A (ko) 진맥 검출장치
KR970045025U (ko) 이동물체위치검출장치
DE69603454T2 (de) Interferometrische detektionsvorrichtung
KR970045044U (ko) 충돌 감지용 센서
DE69623067T2 (de) Navigationseinrichtung
KR960034125U (ko) 차량의 물체 감지 장치
KR970014783U (ko) 쇼트상태검출장치
NO974003D0 (no) Posisjonsdeteksjonsanordning
KR960035429U (ko) 연기감지장치의 연기감지구 구조
DK96996A (da) Detektionssystem
KR970015684U (ko) 중요물건 탐지장치
KR970019129U (ko) 이동물체 검출장치
KR970002677U (ko) 경사도 감지 장치
KR970002697U (ko) 차량속도 검출장치
SE9503760D0 (sv) Sensoranordning

Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8339 Ceased/non-payment of the annual fee