DE69535122D1 - Vorrichtung zum Abscheiden von dünnen Schichten - Google Patents
Vorrichtung zum Abscheiden von dünnen SchichtenInfo
- Publication number
- DE69535122D1 DE69535122D1 DE69535122T DE69535122T DE69535122D1 DE 69535122 D1 DE69535122 D1 DE 69535122D1 DE 69535122 T DE69535122 T DE 69535122T DE 69535122 T DE69535122 T DE 69535122T DE 69535122 D1 DE69535122 D1 DE 69535122D1
- Authority
- DE
- Germany
- Prior art keywords
- thin layers
- depositing thin
- depositing
- layers
- thin
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
Classifications
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
- C23C16/54—Apparatus specially adapted for continuous coating
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/32—Gas-filled discharge tubes
- H01J37/32009—Arrangements for generation of plasma specially adapted for examination or treatment of objects, e.g. plasma sources
- H01J37/32192—Microwave generated discharge
- H01J37/32211—Means for coupling power to the plasma
- H01J37/3222—Antennas
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/32—Gas-filled discharge tubes
- H01J37/32009—Arrangements for generation of plasma specially adapted for examination or treatment of objects, e.g. plasma sources
- H01J37/32082—Radio frequency generated discharge
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/32—Gas-filled discharge tubes
- H01J37/32431—Constructional details of the reactor
- H01J37/32532—Electrodes
- H01J37/32541—Shape
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/32—Gas-filled discharge tubes
- H01J37/32431—Constructional details of the reactor
- H01J37/32532—Electrodes
- H01J37/3255—Material
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/32—Gas-filled discharge tubes
- H01J37/32431—Constructional details of the reactor
- H01J37/32532—Electrodes
- H01J37/32559—Protection means, e.g. coatings
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Plasma & Fusion (AREA)
- Analytical Chemistry (AREA)
- Chemical Kinetics & Catalysis (AREA)
- General Chemical & Material Sciences (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Chemical Vapour Deposition (AREA)
- Photoreceptors In Electrophotography (AREA)
Applications Claiming Priority (4)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP32300794 | 1994-12-26 | ||
JP32300794 | 1994-12-26 | ||
JP32871995 | 1995-12-18 | ||
JP7328719A JPH08232070A (ja) | 1994-12-26 | 1995-12-18 | 堆積膜形成装置及びそれに用いられる電極 |
Publications (2)
Publication Number | Publication Date |
---|---|
DE69535122D1 true DE69535122D1 (de) | 2006-09-07 |
DE69535122T2 DE69535122T2 (de) | 2007-01-04 |
Family
ID=26571016
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE69535122T Expired - Fee Related DE69535122T2 (de) | 1994-12-26 | 1995-12-27 | Vorrichtung zum Abscheiden von dünnen Schichten |
Country Status (6)
Country | Link |
---|---|
US (1) | US5961726A (de) |
EP (1) | EP0720205B1 (de) |
JP (1) | JPH08232070A (de) |
KR (1) | KR100222807B1 (de) |
CN (1) | CN1079843C (de) |
DE (1) | DE69535122T2 (de) |
Families Citing this family (10)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP4946156B2 (ja) * | 2006-05-01 | 2012-06-06 | 富士ゼロックス株式会社 | 半導体膜及びその製造方法、並びに、該半導体膜を用いた受光素子、電子写真用感光体、プロセスカートリッジ、画像形成装置 |
JP5517420B2 (ja) * | 2008-06-25 | 2014-06-11 | 京セラ株式会社 | 電子写真感光体および該電子写真感光体を備える画像形成装置 |
DE102008042139A1 (de) * | 2008-09-16 | 2010-03-18 | Robert Bosch Gmbh | Abgastaugliche Schutzschichten für Hochtemperatur ChemFET Abgassensoren |
DE102012103204A1 (de) * | 2012-04-13 | 2013-10-17 | Osram Opto Semiconductors Gmbh | Verfahren zur Beschichtung eines Substrates mit einem Halbleitermaterial |
CN103682031A (zh) * | 2012-09-07 | 2014-03-26 | 茂邦电子有限公司 | 具有绝缘散热层的散热基板及其制造方法 |
KR101482630B1 (ko) * | 2012-11-07 | 2015-01-14 | 삼성디스플레이 주식회사 | 기상 증착 장치 |
US20160362782A1 (en) * | 2015-06-15 | 2016-12-15 | Taiwan Semiconductor Manufacturing Co., Ltd. | Gas dispenser and deposition apparatus using the same |
CN106028022A (zh) * | 2016-05-27 | 2016-10-12 | 京东方科技集团股份有限公司 | 一种立体图像制作方法和设备 |
US20180163296A1 (en) * | 2016-12-12 | 2018-06-14 | National Chung Shan Institute Of Science And Technology | Equipment for producing film |
KR102415202B1 (ko) | 2021-10-25 | 2022-06-30 | (주)한국이엔이 | 진공 증착 장치 |
Family Cites Families (21)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4515107A (en) * | 1982-11-12 | 1985-05-07 | Sovonics Solar Systems | Apparatus for the manufacture of photovoltaic devices |
FR2538987A1 (fr) * | 1983-01-05 | 1984-07-06 | Commissariat Energie Atomique | Enceinte pour le traitement et notamment la gravure de substrats par la methode du plasma reactif |
US4513815A (en) * | 1983-10-17 | 1985-04-30 | Texaco Inc. | System for providing RF energy into a hydrocarbon stratum |
DE3401791A1 (de) * | 1984-01-19 | 1985-08-01 | WTW Wissenschaftlich-technische Werkstätten GmbH, 8120 Weilheim | Verfahren zum im wesentlichen spaltfreien einbetten der elektroden eines elektroanalytischen sensors in einen isolator und elektroanalytischer sensor |
JPS60168156A (ja) * | 1984-02-13 | 1985-08-31 | Canon Inc | 光受容部材 |
JPS60178457A (ja) * | 1984-02-27 | 1985-09-12 | Canon Inc | 光受容部材 |
JPS60225854A (ja) * | 1984-04-24 | 1985-11-11 | Canon Inc | 光受容部材用の支持体及び光受容部材 |
US4566403A (en) * | 1985-01-30 | 1986-01-28 | Sovonics Solar Systems | Apparatus for microwave glow discharge deposition |
US5129359A (en) * | 1988-11-15 | 1992-07-14 | Canon Kabushiki Kaisha | Microwave plasma CVD apparatus for the formation of functional deposited film with discharge space provided with gas feed device capable of applying bias voltage between the gas feed device and substrate |
JPH02180703A (ja) * | 1989-01-05 | 1990-07-13 | Noritake Co Ltd | オゾナイザ |
JP2994652B2 (ja) * | 1989-01-26 | 1999-12-27 | キヤノン株式会社 | マイクロ波プラズマcvd法による堆積膜形成装置 |
JPH02298024A (ja) * | 1989-05-12 | 1990-12-10 | Tadahiro Omi | リアクティブイオンエッチング装置 |
US5114770A (en) * | 1989-06-28 | 1992-05-19 | Canon Kabushiki Kaisha | Method for continuously forming functional deposited films with a large area by a microwave plasma cvd method |
US5209182A (en) * | 1989-12-01 | 1993-05-11 | Kawasaki Steel Corporation | Chemical vapor deposition apparatus for forming thin film |
US5443645A (en) * | 1990-05-19 | 1995-08-22 | Canon Kabushiki Kaisha | Microwave plasma CVD apparatus comprising coaxially aligned multiple gas pipe gas feed structure |
JP2963169B2 (ja) * | 1990-08-10 | 1999-10-12 | アプライド・マテリアルズ・ジャパン株式会社 | 高周波プラズマ発生用電極 |
JP2841243B2 (ja) * | 1990-11-19 | 1998-12-24 | キヤノン株式会社 | マイクロ波プラズマcvd法による堆積膜形成装置 |
JP3073327B2 (ja) * | 1992-06-30 | 2000-08-07 | キヤノン株式会社 | 堆積膜形成方法 |
JP3155413B2 (ja) * | 1992-10-23 | 2001-04-09 | キヤノン株式会社 | 光受容部材の形成方法、該方法による光受容部材および堆積膜の形成装置 |
FR2702119B1 (fr) * | 1993-02-25 | 1995-07-13 | Metal Process | Dispositif d'excitation d'un plasma à la résonance cyclotronique électronique par l'intermédiaire d'un applicateur filaire d'un champ micro-onde et d'un champ magnétique statique. |
JP3236111B2 (ja) * | 1993-03-31 | 2001-12-10 | キヤノン株式会社 | プラズマ処理装置及び処理方法 |
-
1995
- 1995-12-18 JP JP7328719A patent/JPH08232070A/ja active Pending
- 1995-12-22 US US08/577,816 patent/US5961726A/en not_active Expired - Lifetime
- 1995-12-26 KR KR1019950056931A patent/KR100222807B1/ko not_active IP Right Cessation
- 1995-12-26 CN CN95119797A patent/CN1079843C/zh not_active Expired - Fee Related
- 1995-12-27 DE DE69535122T patent/DE69535122T2/de not_active Expired - Fee Related
- 1995-12-27 EP EP95120558A patent/EP0720205B1/de not_active Expired - Lifetime
Also Published As
Publication number | Publication date |
---|---|
EP0720205A1 (de) | 1996-07-03 |
CN1079843C (zh) | 2002-02-27 |
US5961726A (en) | 1999-10-05 |
EP0720205B1 (de) | 2006-07-26 |
KR960023227A (ko) | 1996-07-18 |
JPH08232070A (ja) | 1996-09-10 |
DE69535122T2 (de) | 2007-01-04 |
CN1131204A (zh) | 1996-09-18 |
KR100222807B1 (ko) | 1999-10-01 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
8364 | No opposition during term of opposition | ||
8339 | Ceased/non-payment of the annual fee |