DE69518092T2 - Verfahren zum herstellen von vorformen für optische fasern - Google Patents
Verfahren zum herstellen von vorformen für optische fasernInfo
- Publication number
- DE69518092T2 DE69518092T2 DE69518092T DE69518092T DE69518092T2 DE 69518092 T2 DE69518092 T2 DE 69518092T2 DE 69518092 T DE69518092 T DE 69518092T DE 69518092 T DE69518092 T DE 69518092T DE 69518092 T2 DE69518092 T2 DE 69518092T2
- Authority
- DE
- Germany
- Prior art keywords
- optical fibers
- producing preforms
- preforms
- producing
- fibers
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
- 238000004519 manufacturing process Methods 0.000 title 1
- 239000013307 optical fiber Substances 0.000 title 1
Classifications
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
- C03B19/00—Other methods of shaping glass
- C03B19/14—Other methods of shaping glass by gas- or vapour- phase reaction processes
- C03B19/1415—Reactant delivery systems
- C03B19/1423—Reactant deposition burners
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
- C03B37/00—Manufacture or treatment of flakes, fibres, or filaments from softened glass, minerals, or slags
- C03B37/01—Manufacture of glass fibres or filaments
- C03B37/012—Manufacture of preforms for drawing fibres or filaments
- C03B37/014—Manufacture of preforms for drawing fibres or filaments made entirely or partially by chemical means, e.g. vapour phase deposition of bulk porous glass either by outside vapour deposition [OVD], or by outside vapour phase oxidation [OVPO] or by vapour axial deposition [VAD]
- C03B37/01413—Reactant delivery systems
- C03B37/0142—Reactant deposition burners
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
- C23C16/453—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating passing the reaction gases through burners or torches, e.g. atmospheric pressure CVD
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F23—COMBUSTION APPARATUS; COMBUSTION PROCESSES
- F23D—BURNERS
- F23D14/00—Burners for combustion of a gas, e.g. of a gas stored under pressure as a liquid
- F23D14/02—Premix gas burners, i.e. in which gaseous fuel is mixed with combustion air upstream of the combustion zone
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F23—COMBUSTION APPARATUS; COMBUSTION PROCESSES
- F23D—BURNERS
- F23D14/00—Burners for combustion of a gas, e.g. of a gas stored under pressure as a liquid
- F23D14/32—Burners for combustion of a gas, e.g. of a gas stored under pressure as a liquid using a mixture of gaseous fuel and pure oxygen or oxygen-enriched air
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F23—COMBUSTION APPARATUS; COMBUSTION PROCESSES
- F23G—CREMATION FURNACES; CONSUMING WASTE PRODUCTS BY COMBUSTION
- F23G7/00—Incinerators or other apparatus for consuming industrial waste, e.g. chemicals
- F23G7/06—Incinerators or other apparatus for consuming industrial waste, e.g. chemicals of waste gases or noxious gases, e.g. exhaust gases
- F23G7/061—Incinerators or other apparatus for consuming industrial waste, e.g. chemicals of waste gases or noxious gases, e.g. exhaust gases with supplementary heating
- F23G7/065—Incinerators or other apparatus for consuming industrial waste, e.g. chemicals of waste gases or noxious gases, e.g. exhaust gases with supplementary heating using gaseous or liquid fuel
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F23—COMBUSTION APPARATUS; COMBUSTION PROCESSES
- F23L—SUPPLYING AIR OR NON-COMBUSTIBLE LIQUIDS OR GASES TO COMBUSTION APPARATUS IN GENERAL ; VALVES OR DAMPERS SPECIALLY ADAPTED FOR CONTROLLING AIR SUPPLY OR DRAUGHT IN COMBUSTION APPARATUS; INDUCING DRAUGHT IN COMBUSTION APPARATUS; TOPS FOR CHIMNEYS OR VENTILATING SHAFTS; TERMINALS FOR FLUES
- F23L7/00—Supplying non-combustible liquids or gases, other than air, to the fire, e.g. oxygen, steam
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
- C03B2207/00—Glass deposition burners
- C03B2207/04—Multi-nested ports
- C03B2207/06—Concentric circular ports
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
- C03B2207/00—Glass deposition burners
- C03B2207/04—Multi-nested ports
- C03B2207/12—Nozzle or orifice plates
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
- C03B2207/00—Glass deposition burners
- C03B2207/04—Multi-nested ports
- C03B2207/14—Tapered or flared nozzles or ports angled to central burner axis
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
- C03B2207/00—Glass deposition burners
- C03B2207/20—Specific substances in specified ports, e.g. all gas flows specified
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
- C03B2207/00—Glass deposition burners
- C03B2207/20—Specific substances in specified ports, e.g. all gas flows specified
- C03B2207/22—Inert gas details
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
- C03B2207/00—Glass deposition burners
- C03B2207/30—For glass precursor of non-standard type, e.g. solid SiH3F
- C03B2207/32—Non-halide
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
- C03B2207/00—Glass deposition burners
- C03B2207/36—Fuel or oxidant details, e.g. flow rate, flow rate ratio, fuel additives
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
- C03B2207/00—Glass deposition burners
- C03B2207/42—Assembly details; Material or dimensions of burner; Manifolds or supports
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F23—COMBUSTION APPARATUS; COMBUSTION PROCESSES
- F23L—SUPPLYING AIR OR NON-COMBUSTIBLE LIQUIDS OR GASES TO COMBUSTION APPARATUS IN GENERAL ; VALVES OR DAMPERS SPECIALLY ADAPTED FOR CONTROLLING AIR SUPPLY OR DRAUGHT IN COMBUSTION APPARATUS; INDUCING DRAUGHT IN COMBUSTION APPARATUS; TOPS FOR CHIMNEYS OR VENTILATING SHAFTS; TERMINALS FOR FLUES
- F23L2900/00—Special arrangements for supplying or treating air or oxidant for combustion; Injecting inert gas, water or steam into the combustion chamber
- F23L2900/07002—Injecting inert gas, other than steam or evaporated water, into the combustion chambers
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
- Y02P40/00—Technologies relating to the processing of minerals
- Y02P40/50—Glass production, e.g. reusing waste heat during processing or shaping
- Y02P40/57—Improving the yield, e-g- reduction of reject rates
Landscapes
- Engineering & Computer Science (AREA)
- Chemical & Material Sciences (AREA)
- Mechanical Engineering (AREA)
- General Engineering & Computer Science (AREA)
- Organic Chemistry (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Combustion & Propulsion (AREA)
- Materials Engineering (AREA)
- Manufacturing & Machinery (AREA)
- General Chemical & Material Sciences (AREA)
- Environmental & Geological Engineering (AREA)
- Metallurgy (AREA)
- Plasma & Fusion (AREA)
- Physics & Mathematics (AREA)
- Geochemistry & Mineralogy (AREA)
- General Life Sciences & Earth Sciences (AREA)
- Life Sciences & Earth Sciences (AREA)
- Glass Melting And Manufacturing (AREA)
- Manufacture, Treatment Of Glass Fibers (AREA)
- Silicon Compounds (AREA)
- Gas Burners (AREA)
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US08/367,047 US5599371A (en) | 1994-12-30 | 1994-12-30 | Method of using precision burners for oxidizing halide-free, silicon-containing compounds |
PCT/US1995/016738 WO1996020898A2 (en) | 1994-12-30 | 1995-12-19 | Precision burners for oxidizing halide-free, silicon-containing compounds |
Publications (2)
Publication Number | Publication Date |
---|---|
DE69518092D1 DE69518092D1 (de) | 2000-08-24 |
DE69518092T2 true DE69518092T2 (de) | 2000-12-21 |
Family
ID=23445723
Family Applications (2)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE69529778T Expired - Lifetime DE69529778D1 (de) | 1994-12-30 | 1995-12-19 | Präzisionsbrenner zum Oxidieren von halogenidfreien, Silizium enthaltenden Verbindungen |
DE69518092T Expired - Fee Related DE69518092T2 (de) | 1994-12-30 | 1995-12-19 | Verfahren zum herstellen von vorformen für optische fasern |
Family Applications Before (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE69529778T Expired - Lifetime DE69529778D1 (de) | 1994-12-30 | 1995-12-19 | Präzisionsbrenner zum Oxidieren von halogenidfreien, Silizium enthaltenden Verbindungen |
Country Status (7)
Country | Link |
---|---|
US (2) | US5599371A (de) |
EP (3) | EP0800490B1 (de) |
JP (1) | JP3182730B2 (de) |
AU (1) | AU689699B2 (de) |
CA (1) | CA2208066A1 (de) |
DE (2) | DE69529778D1 (de) |
WO (1) | WO1996020898A2 (de) |
Families Citing this family (84)
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US5599371A (en) * | 1994-12-30 | 1997-02-04 | Corning Incorporated | Method of using precision burners for oxidizing halide-free, silicon-containing compounds |
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KR20010022069A (ko) * | 1997-07-21 | 2001-03-15 | 알프레드 엘. 미첼슨 | 저유량 공급원료 증기 제조장치 및 그 방법 |
GB9725878D0 (en) * | 1997-12-05 | 1998-02-04 | Imperial College | Vapour deposition |
ID25479A (id) * | 1997-12-19 | 2000-10-05 | Corning Inc | Pembakar dan metoda untuk memproduksi arang oksida logam |
EP1049475A4 (de) * | 1998-01-08 | 2003-06-04 | Univ California | Aus meeresschwämmen -i(adocia) gewonnene kinesinmotor-modulatoren |
US6161398A (en) * | 1998-04-09 | 2000-12-19 | Lucent Technologies, Inc. | Methods of and systems for vapor delivery control in optical preform manufacture |
KR20010079889A (ko) * | 1998-09-22 | 2001-08-22 | 알프레드 엘. 미첼슨 | 용융 실리카 유리의 보울을 생성하는 버너 |
US6751987B1 (en) * | 1998-09-22 | 2004-06-22 | Corning Incorporated | Burners for producing boules of fused silica glass |
US6736633B1 (en) * | 1998-12-17 | 2004-05-18 | Corning Incorporated | Burner manifold apparatus for use in a chemical vapor deposition process |
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US6265115B1 (en) | 1999-03-15 | 2001-07-24 | Corning Incorporated | Projection lithography photomask blanks, preforms and methods of making |
US6242136B1 (en) | 1999-02-12 | 2001-06-05 | Corning Incorporated | Vacuum ultraviolet transmitting silicon oxyfluoride lithography glass |
US6682859B2 (en) * | 1999-02-12 | 2004-01-27 | Corning Incorporated | Vacuum ultraviolet trasmitting silicon oxyfluoride lithography glass |
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JP6756759B2 (ja) * | 2018-03-22 | 2020-09-16 | 信越化学工業株式会社 | 光ファイバ母材の製造装置 |
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CN112689616A (zh) * | 2018-09-14 | 2021-04-20 | 住友电气工业株式会社 | 玻璃微粒沉积体的制造方法以及玻璃母材的制造方法 |
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-
1994
- 1994-12-30 US US08/367,047 patent/US5599371A/en not_active Expired - Fee Related
-
1995
- 1995-12-19 AU AU46439/96A patent/AU689699B2/en not_active Ceased
- 1995-12-19 EP EP95944371A patent/EP0800490B1/de not_active Expired - Lifetime
- 1995-12-19 EP EP99203799A patent/EP0978491B1/de not_active Expired - Lifetime
- 1995-12-19 DE DE69529778T patent/DE69529778D1/de not_active Expired - Lifetime
- 1995-12-19 JP JP52109696A patent/JP3182730B2/ja not_active Expired - Fee Related
- 1995-12-19 EP EP02078244A patent/EP1254867A3/de not_active Withdrawn
- 1995-12-19 WO PCT/US1995/016738 patent/WO1996020898A2/en active IP Right Grant
- 1995-12-19 DE DE69518092T patent/DE69518092T2/de not_active Expired - Fee Related
- 1995-12-19 CA CA002208066A patent/CA2208066A1/en not_active Abandoned
-
1996
- 1996-10-15 US US08/729,305 patent/US5922100A/en not_active Expired - Fee Related
Also Published As
Publication number | Publication date |
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JP3182730B2 (ja) | 2001-07-03 |
EP1254867A2 (de) | 2002-11-06 |
WO1996020898A2 (en) | 1996-07-11 |
JPH11510778A (ja) | 1999-09-21 |
DE69518092D1 (de) | 2000-08-24 |
EP1254867A3 (de) | 2004-01-28 |
EP0978491B1 (de) | 2003-02-26 |
US5922100A (en) | 1999-07-13 |
EP0800490A2 (de) | 1997-10-15 |
EP0978491A3 (de) | 2000-03-01 |
CA2208066A1 (en) | 1996-07-11 |
US5599371A (en) | 1997-02-04 |
EP0800490B1 (de) | 2000-07-19 |
AU689699B2 (en) | 1998-04-02 |
DE69529778D1 (de) | 2003-04-03 |
WO1996020898A3 (en) | 1996-12-05 |
EP0978491A2 (de) | 2000-02-09 |
AU4643996A (en) | 1996-07-24 |
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