DE69516495T2 - Beleuchtungsvorrichtung und Vorrichtungsherstellungsverfahren - Google Patents
Beleuchtungsvorrichtung und VorrichtungsherstellungsverfahrenInfo
- Publication number
- DE69516495T2 DE69516495T2 DE69516495T DE69516495T DE69516495T2 DE 69516495 T2 DE69516495 T2 DE 69516495T2 DE 69516495 T DE69516495 T DE 69516495T DE 69516495 T DE69516495 T DE 69516495T DE 69516495 T2 DE69516495 T2 DE 69516495T2
- Authority
- DE
- Germany
- Prior art keywords
- manufacturing
- lighting device
- lighting
- device manufacturing
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 238000004519 manufacturing process Methods 0.000 title 1
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/16—Production of nozzles
- B41J2/1621—Manufacturing processes
- B41J2/1632—Manufacturing processes machining
- B41J2/1634—Manufacturing processes machining laser machining
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
- B23K26/06—Shaping the laser beam, e.g. by masks or multi-focusing
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
- B23K26/06—Shaping the laser beam, e.g. by masks or multi-focusing
- B23K26/0604—Shaping the laser beam, e.g. by masks or multi-focusing by a combination of beams
- B23K26/0608—Shaping the laser beam, e.g. by masks or multi-focusing by a combination of beams in the same heat affected zone [HAZ]
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
- B23K26/06—Shaping the laser beam, e.g. by masks or multi-focusing
- B23K26/064—Shaping the laser beam, e.g. by masks or multi-focusing by means of optical elements, e.g. lenses, mirrors or prisms
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
- B23K26/06—Shaping the laser beam, e.g. by masks or multi-focusing
- B23K26/064—Shaping the laser beam, e.g. by masks or multi-focusing by means of optical elements, e.g. lenses, mirrors or prisms
- B23K26/0648—Shaping the laser beam, e.g. by masks or multi-focusing by means of optical elements, e.g. lenses, mirrors or prisms comprising lenses
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
- B23K26/06—Shaping the laser beam, e.g. by masks or multi-focusing
- B23K26/064—Shaping the laser beam, e.g. by masks or multi-focusing by means of optical elements, e.g. lenses, mirrors or prisms
- B23K26/0652—Shaping the laser beam, e.g. by masks or multi-focusing by means of optical elements, e.g. lenses, mirrors or prisms comprising prisms
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
- B23K26/06—Shaping the laser beam, e.g. by masks or multi-focusing
- B23K26/0665—Shaping the laser beam, e.g. by masks or multi-focusing by beam condensation on the workpiece, e.g. for focusing
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
- B23K26/06—Shaping the laser beam, e.g. by masks or multi-focusing
- B23K26/067—Dividing the beam into multiple beams, e.g. multifocusing
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/16—Production of nozzles
- B41J2/162—Manufacturing of the nozzle plates
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B13/00—Optical objectives specially designed for the purposes specified below
- G02B13/08—Anamorphotic objectives
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B27/00—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
- G02B27/10—Beam splitting or combining systems
- G02B27/106—Beam splitting or combining systems for splitting or combining a plurality of identical beams or images, e.g. image replication
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B27/00—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
- G02B27/10—Beam splitting or combining systems
- G02B27/1073—Beam splitting or combining systems characterized by manufacturing or alignment methods
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B27/00—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
- G02B27/10—Beam splitting or combining systems
- G02B27/12—Beam splitting or combining systems operating by refraction only
- G02B27/126—The splitting element being a prism or prismatic array, including systems based on total internal reflection
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/70—Microphotolithographic exposure; Apparatus therefor
- G03F7/70058—Mask illumination systems
- G03F7/70083—Non-homogeneous intensity distribution in the mask plane
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/70—Microphotolithographic exposure; Apparatus therefor
- G03F7/70216—Mask projection systems
- G03F7/7035—Proximity or contact printers
Landscapes
- Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Engineering & Computer Science (AREA)
- Plasma & Fusion (AREA)
- Mechanical Engineering (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Laser Beam Processing (AREA)
- Particle Formation And Scattering Control In Inkjet Printers (AREA)
- Lenses (AREA)
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP34038894 | 1994-12-27 | ||
JP07346015A JP3082652B2 (ja) | 1994-12-27 | 1995-12-11 | 照明装置及びそれを用いたデバイスの製造方法 |
Publications (2)
Publication Number | Publication Date |
---|---|
DE69516495D1 DE69516495D1 (de) | 2000-05-31 |
DE69516495T2 true DE69516495T2 (de) | 2001-01-11 |
Family
ID=26576692
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE69516495T Expired - Lifetime DE69516495T2 (de) | 1994-12-27 | 1995-12-22 | Beleuchtungsvorrichtung und Vorrichtungsherstellungsverfahren |
Country Status (4)
Country | Link |
---|---|
US (1) | US5946024A (de) |
EP (1) | EP0720035B1 (de) |
JP (1) | JP3082652B2 (de) |
DE (1) | DE69516495T2 (de) |
Families Citing this family (9)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
GB9601049D0 (en) | 1996-01-18 | 1996-03-20 | Xaar Ltd | Methods of and apparatus for forming nozzles |
JP3689490B2 (ja) * | 1996-06-07 | 2005-08-31 | キヤノン株式会社 | ノズル部材の製造方法及びそれを用いた加工装置 |
US6158843A (en) * | 1997-03-28 | 2000-12-12 | Lexmark International, Inc. | Ink jet printer nozzle plates with ink filtering projections |
JP2001010067A (ja) * | 1999-06-29 | 2001-01-16 | Canon Inc | 液体噴射記録ヘッドの吐出ノズル加工方法および液体噴射記録ヘッドの製造方法 |
EP1065058A3 (de) * | 1999-06-30 | 2003-04-09 | Canon Kabushiki Kaisha | Verfahren zur Herstellung eines Tintenstrahlaufzeichnungskopfes, mittels eines solchen Verfahrens hergestellter Tintenstrahlaufzeichnungskopf, und Laserbearbeitungsverfahren |
JP2001092989A (ja) * | 1999-07-21 | 2001-04-06 | Sega Corp | 画像処理方法及びその装置 |
US6283584B1 (en) | 2000-04-18 | 2001-09-04 | Lexmark International, Inc. | Ink jet flow distribution system for ink jet printer |
JP4884148B2 (ja) * | 2005-09-28 | 2012-02-29 | 株式会社半導体エネルギー研究所 | レーザー処理装置、露光装置及び露光方法 |
EP1770443B1 (de) * | 2005-09-28 | 2016-01-20 | Semiconductor Energy Laboratory Co., Ltd. | Laserbearbeitungsvorrichtung und Laserbelichtungsverfahren |
Family Cites Families (32)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
GB1523033A (en) * | 1976-03-03 | 1978-08-31 | Crosfield Electronics Ltd | Image reproducing systems |
JPS5754914A (en) * | 1980-09-18 | 1982-04-01 | Canon Inc | Plural beam scanning optical system having variable magnification function |
JPS57181873A (en) * | 1981-05-02 | 1982-11-09 | Ricoh Co Ltd | Manufacture of ink jet head |
EP0066432A3 (de) * | 1981-05-21 | 1984-05-09 | Lexel Corporation | Düse zum Formen eines freien Strahles, ein Farblaser mit einer Farbstrahldüse und Verfahren zur Herstellung |
JPS5998525A (ja) * | 1982-11-26 | 1984-06-06 | Canon Inc | 分割焼付け装置のアライメント方法 |
US4653903A (en) * | 1984-01-24 | 1987-03-31 | Canon Kabushiki Kaisha | Exposure apparatus |
US5091744A (en) * | 1984-02-13 | 1992-02-25 | Canon Kabushiki Kaisha | Illumination optical system |
JPS60218635A (ja) * | 1984-04-13 | 1985-11-01 | Canon Inc | 照明装置 |
JPS60219744A (ja) * | 1984-04-17 | 1985-11-02 | Canon Inc | 投影露光装置 |
JPS60232552A (ja) * | 1984-05-02 | 1985-11-19 | Canon Inc | 照明光学系 |
JPS622540A (ja) * | 1985-06-28 | 1987-01-08 | Canon Inc | ライトインテグレ−タとそれを含むケ−ラ−照明系 |
JPS62115718A (ja) * | 1985-11-14 | 1987-05-27 | Canon Inc | 照明光学系 |
JPS62115719A (ja) * | 1985-11-14 | 1987-05-27 | Canon Inc | 照明光学系 |
US4851882A (en) * | 1985-12-06 | 1989-07-25 | Canon Kabushiki Kaisha | Illumination optical system |
US4733944A (en) * | 1986-01-24 | 1988-03-29 | Xmr, Inc. | Optical beam integration system |
EP0266203B1 (de) * | 1986-10-30 | 1994-07-06 | Canon Kabushiki Kaisha | Belichtungseinrichtung |
JPH0786647B2 (ja) * | 1986-12-24 | 1995-09-20 | 株式会社ニコン | 照明装置 |
US4874954A (en) * | 1987-02-02 | 1989-10-17 | Canon Kabushiki Kaisha | Projection exposure apparatus |
US4872747A (en) * | 1987-04-15 | 1989-10-10 | Cyberoptics Corporation | Use of prisms to obtain anamorphic magnification |
JPH01313196A (ja) * | 1988-06-13 | 1989-12-18 | Toshiba Corp | レーザ加工装置 |
US5208604A (en) * | 1988-10-31 | 1993-05-04 | Canon Kabushiki Kaisha | Ink jet head and manufacturing method thereof, and ink jet apparatus with ink jet head |
US5270851A (en) * | 1989-01-09 | 1993-12-14 | Canon Kabushiki Kaisha | Achromatic-type laser scanning optical system |
JPH02201386A (ja) * | 1989-01-30 | 1990-08-09 | Canon Inc | 画像記録装置 |
US5121160A (en) * | 1989-03-09 | 1992-06-09 | Canon Kabushiki Kaisha | Exposure method and apparatus |
US5251055A (en) * | 1989-03-23 | 1993-10-05 | Canon Kabushiki Kaisha | Optical scanning apparatus |
US5153773A (en) * | 1989-06-08 | 1992-10-06 | Canon Kabushiki Kaisha | Illumination device including amplitude-division and beam movements |
JP2657957B2 (ja) * | 1990-04-27 | 1997-09-30 | キヤノン株式会社 | 投影装置及び光照射方法 |
EP0967524A3 (de) * | 1990-11-15 | 2000-01-05 | Nikon Corporation | Verfahren und Vorrichtung zur Projektionsbelichtung |
US5097291A (en) * | 1991-04-22 | 1992-03-17 | Nikon Corporation | Energy amount control device |
GB9202434D0 (en) * | 1992-02-05 | 1992-03-18 | Xaar Ltd | Method of and apparatus for forming nozzles |
JPH06123592A (ja) * | 1992-10-12 | 1994-05-06 | Mitsubishi Heavy Ind Ltd | 伝熱管の外面付着物の除去方法 |
EP0660158B1 (de) * | 1993-12-22 | 2000-10-04 | Canon Kabushiki Kaisha | Vorrichtung zur optischen Beleuchtung |
-
1995
- 1995-12-11 JP JP07346015A patent/JP3082652B2/ja not_active Expired - Fee Related
- 1995-12-21 US US08/576,459 patent/US5946024A/en not_active Expired - Lifetime
- 1995-12-22 DE DE69516495T patent/DE69516495T2/de not_active Expired - Lifetime
- 1995-12-22 EP EP95120488A patent/EP0720035B1/de not_active Expired - Lifetime
Also Published As
Publication number | Publication date |
---|---|
DE69516495D1 (de) | 2000-05-31 |
US5946024A (en) | 1999-08-31 |
EP0720035A2 (de) | 1996-07-03 |
EP0720035A3 (de) | 1997-05-07 |
EP0720035B1 (de) | 2000-04-26 |
JP3082652B2 (ja) | 2000-08-28 |
JPH08240787A (ja) | 1996-09-17 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
8364 | No opposition during term of opposition |