DE69509815T2 - Halbleiter-Druckwandler mit Polysilizium-Membran und Einkristall-Dehnungsmesstreifen und Herstellungsverfahren dazu - Google Patents
Halbleiter-Druckwandler mit Polysilizium-Membran und Einkristall-Dehnungsmesstreifen und Herstellungsverfahren dazuInfo
- Publication number
- DE69509815T2 DE69509815T2 DE69509815T DE69509815T DE69509815T2 DE 69509815 T2 DE69509815 T2 DE 69509815T2 DE 69509815 T DE69509815 T DE 69509815T DE 69509815 T DE69509815 T DE 69509815T DE 69509815 T2 DE69509815 T2 DE 69509815T2
- Authority
- DE
- Germany
- Prior art keywords
- manufacturing process
- single crystal
- pressure transducer
- strain gauges
- semiconductor pressure
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
- G01L9/0041—Transmitting or indicating the displacement of flexible diaphragms
- G01L9/0042—Constructional details associated with semiconductive diaphragm sensors, e.g. etching, or constructional details of non-semiconductive diaphragms
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
- G01L9/0041—Transmitting or indicating the displacement of flexible diaphragms
- G01L9/0051—Transmitting or indicating the displacement of flexible diaphragms using variations in ohmic resistance
- G01L9/0052—Transmitting or indicating the displacement of flexible diaphragms using variations in ohmic resistance of piezoresistive elements
- G01L9/0055—Transmitting or indicating the displacement of flexible diaphragms using variations in ohmic resistance of piezoresistive elements bonded on a diaphragm
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Pressure Sensors (AREA)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US08/210,422 US5589810A (en) | 1991-03-28 | 1994-03-18 | Semiconductor pressure sensor and related methodology with polysilicon diaphragm and single-crystal gage elements |
Publications (2)
Publication Number | Publication Date |
---|---|
DE69509815D1 DE69509815D1 (de) | 1999-07-01 |
DE69509815T2 true DE69509815T2 (de) | 2000-01-20 |
Family
ID=22782842
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE69509815T Expired - Fee Related DE69509815T2 (de) | 1994-03-18 | 1995-03-17 | Halbleiter-Druckwandler mit Polysilizium-Membran und Einkristall-Dehnungsmesstreifen und Herstellungsverfahren dazu |
Country Status (3)
Country | Link |
---|---|
US (1) | US5589810A (de) |
EP (1) | EP0672898B1 (de) |
DE (1) | DE69509815T2 (de) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE102015117044B3 (de) * | 2015-10-07 | 2016-12-08 | Sensor-Technik Wiedemann Gmbh | Elektrische Messanordnung zur Kraft- und/oder Druckmessung sowie Abstützeinrichtung mit einer derartigen elektrischen Messanordnung |
Families Citing this family (21)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US6860153B2 (en) * | 2000-02-22 | 2005-03-01 | Simon Fraser University | Gas pressure sensor based on short-distance heat conduction and method for fabricating same |
US20110301569A1 (en) | 2001-01-20 | 2011-12-08 | Gordon Wayne Dyer | Methods and apparatus for the CVCS |
DE10241450A1 (de) | 2002-09-06 | 2004-03-18 | Robert Bosch Gmbh | Verfahren zur Herstellung eines Bauteils mit einem Sensorelement, insbesondere eines Verformungssensors |
US7211873B2 (en) * | 2003-09-24 | 2007-05-01 | Denso Corporation | Sensor device having thin membrane and method of manufacturing the same |
US7884432B2 (en) * | 2005-03-22 | 2011-02-08 | Ametek, Inc. | Apparatus and methods for shielding integrated circuitry |
US7737612B1 (en) | 2005-05-25 | 2010-06-15 | Maxim Integrated Products, Inc. | BAW resonator bi-layer top electrode with zero etch undercut |
JP4897318B2 (ja) * | 2006-03-16 | 2012-03-14 | ラピスセミコンダクタ株式会社 | ピエゾ抵抗素子及びその製造方法 |
TWI305474B (en) * | 2006-04-10 | 2009-01-11 | Touch Micro System Tech | Method of fabricating a diaphragm of a capacitive microphone device |
US7600303B1 (en) | 2006-05-25 | 2009-10-13 | Maxim Integrated Products, Inc. | BAW resonator bi-layer top electrode with zero etch undercut |
US7612488B1 (en) * | 2007-01-16 | 2009-11-03 | Maxim Integrated Products, Inc. | Method to control BAW resonator top electrode edge during patterning |
US8240217B2 (en) * | 2007-10-15 | 2012-08-14 | Kavlico Corporation | Diaphragm isolation forming through subtractive etching |
JP5299254B2 (ja) * | 2009-12-14 | 2013-09-25 | 三菱電機株式会社 | 半導体圧力センサ及びその製造方法 |
JP5295388B2 (ja) * | 2009-12-25 | 2013-09-18 | アルプス電気株式会社 | フォースセンサ及びその製造方法 |
JP5445196B2 (ja) * | 2010-02-10 | 2014-03-19 | セイコーエプソン株式会社 | 応力検出素子、触覚センサー、および把持装置 |
JP5436404B2 (ja) * | 2010-12-17 | 2014-03-05 | 三菱電機株式会社 | 半導体圧力センサ及びその製造方法 |
US9162876B2 (en) | 2011-03-18 | 2015-10-20 | Stmicroelectronics S.R.L. | Process for manufacturing a membrane microelectromechanical device, and membrane microelectromechanical device |
CN103674354A (zh) * | 2012-08-30 | 2014-03-26 | 成都达瑞斯科技有限公司 | 高温多晶硅压力传感器 |
US9733142B2 (en) * | 2012-10-17 | 2017-08-15 | Kabushiki Kaisha Saginomiya Seisakusho | Pressure sensor, and sensor unit provided with same |
CN105241600B (zh) * | 2015-08-17 | 2017-12-29 | 中国科学院地质与地球物理研究所 | 一种mems压力计芯片及其制造工艺 |
US9804046B2 (en) | 2015-10-27 | 2017-10-31 | DunAn Sensing, LLC | Pressure sensor with support structure for non-silicon diaphragm |
CN109060201A (zh) * | 2018-08-25 | 2018-12-21 | 成都凯天电子股份有限公司 | 耐高温硅压阻压力敏感元件 |
Family Cites Families (18)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3930823A (en) * | 1972-03-14 | 1976-01-06 | Kulite Semiconductor Products, Inc. | High temperature transducers and housing including fabrication methods |
US3858150A (en) * | 1973-06-21 | 1974-12-31 | Motorola Inc | Polycrystalline silicon pressure sensor |
US3938175A (en) * | 1974-04-24 | 1976-02-10 | General Motors Corporation | Polycrystalline silicon pressure transducer |
US4320664A (en) * | 1980-02-25 | 1982-03-23 | Texas Instruments Incorporated | Thermally compensated silicon pressure sensor |
US4510671A (en) * | 1981-08-31 | 1985-04-16 | Kulite Semiconductor Products, Inc. | Dielectrically isolated transducer employing single crystal strain gages |
US4456901A (en) * | 1981-08-31 | 1984-06-26 | Kulite Semiconductor Products, Inc. | Dielectrically isolated transducer employing single crystal strain gages |
DE3319605A1 (de) * | 1983-05-30 | 1984-12-06 | Siemens AG, 1000 Berlin und 8000 München | Sensor mit polykristallinen silicium-widerstaenden |
US4672354A (en) * | 1985-12-05 | 1987-06-09 | Kulite Semiconductor Products, Inc. | Fabrication of dielectrically isolated fine line semiconductor transducers and apparatus |
US4975390A (en) * | 1986-12-18 | 1990-12-04 | Nippondenso Co. Ltd. | Method of fabricating a semiconductor pressure sensor |
US4721938A (en) * | 1986-12-22 | 1988-01-26 | Delco Electronics Corporation | Process for forming a silicon pressure transducer |
US4994781A (en) * | 1988-04-07 | 1991-02-19 | Sahagen Armen N | Pressure sensing transducer employing piezoresistive elements on sapphire |
US5095401A (en) * | 1989-01-13 | 1992-03-10 | Kopin Corporation | SOI diaphragm sensor |
US5088329A (en) * | 1990-05-07 | 1992-02-18 | Sahagen Armen N | Piezoresistive pressure transducer |
US5165289A (en) * | 1990-07-10 | 1992-11-24 | Johnson Service Company | Resonant mechanical sensor |
US5189777A (en) * | 1990-12-07 | 1993-03-02 | Wisconsin Alumni Research Foundation | Method of producing micromachined differential pressure transducers |
US5074152A (en) * | 1990-12-24 | 1991-12-24 | Motorola, Inc. | Piezoresistive transducer with low drift output voltage |
US5220838A (en) * | 1991-03-28 | 1993-06-22 | The Foxboro Company | Overpressure-protected, differential pressure sensor and method of making the same |
US5316619A (en) * | 1993-02-05 | 1994-05-31 | Ford Motor Company | Capacitive surface micromachine absolute pressure sensor and method for processing |
-
1994
- 1994-03-18 US US08/210,422 patent/US5589810A/en not_active Expired - Fee Related
-
1995
- 1995-03-17 DE DE69509815T patent/DE69509815T2/de not_active Expired - Fee Related
- 1995-03-17 EP EP95103970A patent/EP0672898B1/de not_active Expired - Lifetime
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE102015117044B3 (de) * | 2015-10-07 | 2016-12-08 | Sensor-Technik Wiedemann Gmbh | Elektrische Messanordnung zur Kraft- und/oder Druckmessung sowie Abstützeinrichtung mit einer derartigen elektrischen Messanordnung |
Also Published As
Publication number | Publication date |
---|---|
US5589810A (en) | 1996-12-31 |
EP0672898B1 (de) | 1999-05-26 |
DE69509815D1 (de) | 1999-07-01 |
EP0672898A2 (de) | 1995-09-20 |
EP0672898A3 (de) | 1996-06-26 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
8364 | No opposition during term of opposition | ||
8339 | Ceased/non-payment of the annual fee |