Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Himecs Corp
Original Assignee
Himecs Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Himecs CorpfiledCriticalHimecs Corp
Priority claimed from EP95304436Aexternal-prioritypatent/EP0749925B1/de
Application grantedgrantedCritical
Publication of DE69507130D1publicationCriticalpatent/DE69507130D1/de
Publication of DE69507130T2publicationCriticalpatent/DE69507130T2/de