DE69506616D1 - Verschleissbeständiger Film - Google Patents

Verschleissbeständiger Film

Info

Publication number
DE69506616D1
DE69506616D1 DE69506616T DE69506616T DE69506616D1 DE 69506616 D1 DE69506616 D1 DE 69506616D1 DE 69506616 T DE69506616 T DE 69506616T DE 69506616 T DE69506616 T DE 69506616T DE 69506616 D1 DE69506616 D1 DE 69506616D1
Authority
DE
Germany
Prior art keywords
wear
resistant film
resistant
film
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE69506616T
Other languages
English (en)
Other versions
DE69506616T2 (de
Inventor
Hiroshi Yamagata
Shinichiro Maruyama
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
YKK Corp
Original Assignee
YKK Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by YKK Corp filed Critical YKK Corp
Application granted granted Critical
Publication of DE69506616D1 publication Critical patent/DE69506616D1/de
Publication of DE69506616T2 publication Critical patent/DE69506616T2/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
    • C23C14/08—Oxides
    • C23C14/081—Oxides of aluminium, magnesium or beryllium
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
    • C23C14/10—Glass or silica
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T428/00—Stock material or miscellaneous articles
    • Y10T428/24—Structurally defined web or sheet [e.g., overall dimension, etc.]
    • Y10T428/24942—Structurally defined web or sheet [e.g., overall dimension, etc.] including components having same physical characteristic in differing degree
    • Y10T428/2495—Thickness [relative or absolute]
    • Y10T428/24967—Absolute thicknesses specified
    • Y10T428/24975—No layer or component greater than 5 mils thick
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T428/00—Stock material or miscellaneous articles
    • Y10T428/26—Web or sheet containing structurally defined element or component, the element or component having a specified physical dimension
    • Y10T428/263—Coating layer not in excess of 5 mils thick or equivalent
    • Y10T428/264—Up to 3 mils
    • Y10T428/265—1 mil or less

Landscapes

  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Physical Vapour Deposition (AREA)
DE69506616T 1994-06-01 1995-05-11 Verschleissbeständiger Film Expired - Fee Related DE69506616T2 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP6140749A JPH07331414A (ja) 1994-06-01 1994-06-01 耐摩耗性膜

Publications (2)

Publication Number Publication Date
DE69506616D1 true DE69506616D1 (de) 1999-01-28
DE69506616T2 DE69506616T2 (de) 1999-06-24

Family

ID=15275846

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69506616T Expired - Fee Related DE69506616T2 (de) 1994-06-01 1995-05-11 Verschleissbeständiger Film

Country Status (4)

Country Link
US (1) US5595814A (de)
EP (1) EP0685570B1 (de)
JP (1) JPH07331414A (de)
DE (1) DE69506616T2 (de)

Families Citing this family (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH09112448A (ja) * 1995-10-18 1997-05-02 Matsushita Electric Ind Co Ltd スクロール圧縮機
US6905578B1 (en) * 1998-04-27 2005-06-14 Cvc Products, Inc. Apparatus and method for multi-target physical-vapor deposition of a multi-layer material structure
KR100300850B1 (ko) * 1999-06-14 2001-09-22 이장무 알루미늄 나이트라이드의 표면 개질 방법
US7250196B1 (en) 1999-10-26 2007-07-31 Basic Resources, Inc. System and method for plasma plating
US6503379B1 (en) 2000-05-22 2003-01-07 Basic Research, Inc. Mobile plating system and method
US6521104B1 (en) 2000-05-22 2003-02-18 Basic Resources, Inc. Configurable vacuum system and method
US20030180450A1 (en) * 2002-03-22 2003-09-25 Kidd Jerry D. System and method for preventing breaker failure
US20050126497A1 (en) * 2003-09-30 2005-06-16 Kidd Jerry D. Platform assembly and method
KR101409617B1 (ko) * 2010-03-26 2014-06-18 캐논 아네르바 가부시키가이샤 스퍼터링 장치

Family Cites Families (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3649359A (en) * 1969-10-27 1972-03-14 Optical Coating Laboratory Inc Multilayer filter with metal dielectric period
US3687713A (en) * 1971-03-15 1972-08-29 Denton Vacuum Corp Protective coating for surfaces of silver and mirror fabrication
FR2276601A1 (fr) * 1974-06-27 1976-01-23 France Etat Filtres de bande et application a la fabrication de lunettes de protection
US4517217A (en) * 1980-09-09 1985-05-14 Westinghouse Electric Corp. Protective coating means for articles such as gold-plated jewelry and wristwatch components
US4673248A (en) * 1983-04-11 1987-06-16 Nippon Soken, Inc. Reflecting mirror for an automobile
JPS60195502A (ja) * 1984-03-19 1985-10-04 Canon Inc 金属回転多面鏡
DE3608734C1 (de) * 1986-03-15 1987-01-02 Feldmuehle Ag Beschichtete Keramik-Wendeschneidplatte
JPS63121652A (ja) * 1986-11-08 1988-05-25 Sony Corp プラスチツク成形用金型
JPH02267285A (ja) * 1989-04-05 1990-11-01 Fujisash Co アルミニウム製品の製造方法
JPH04329866A (ja) * 1991-05-01 1992-11-18 Kobe Steel Ltd 耐食性に優れたＡｌまたはＡｌ合金板

Also Published As

Publication number Publication date
EP0685570B1 (de) 1998-12-16
EP0685570A1 (de) 1995-12-06
JPH07331414A (ja) 1995-12-19
DE69506616T2 (de) 1999-06-24
US5595814A (en) 1997-01-21

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8339 Ceased/non-payment of the annual fee