DE69506201D1 - Injektionsvorrichtung für beides positive und negative Ionen - Google Patents

Injektionsvorrichtung für beides positive und negative Ionen

Info

Publication number
DE69506201D1
DE69506201D1 DE69506201T DE69506201T DE69506201D1 DE 69506201 D1 DE69506201 D1 DE 69506201D1 DE 69506201 T DE69506201 T DE 69506201T DE 69506201 T DE69506201 T DE 69506201T DE 69506201 D1 DE69506201 D1 DE 69506201D1
Authority
DE
Germany
Prior art keywords
positive
injection device
negative ions
ions
negative
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE69506201T
Other languages
English (en)
Other versions
DE69506201T2 (de
Inventor
Izumi Sakai
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
High Energy Accelerator Research Organization
Original Assignee
High Energy Accelerator Research Organization
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by High Energy Accelerator Research Organization filed Critical High Energy Accelerator Research Organization
Publication of DE69506201D1 publication Critical patent/DE69506201D1/de
Application granted granted Critical
Publication of DE69506201T2 publication Critical patent/DE69506201T2/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05H—PLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
    • H05H7/00—Details of devices of the types covered by groups H05H9/00, H05H11/00, H05H13/00
    • H05H7/08—Arrangements for injecting particles into orbits

Landscapes

  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Particle Accelerators (AREA)
DE69506201T 1994-09-05 1995-09-04 Injektionsvorrichtung für beides positive und negative Ionen Expired - Fee Related DE69506201T2 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP6211261A JP2600109B2 (ja) 1994-09-05 1994-09-05 正イオン、負イオン両用入射装置

Publications (2)

Publication Number Publication Date
DE69506201D1 true DE69506201D1 (de) 1999-01-07
DE69506201T2 DE69506201T2 (de) 1999-04-22

Family

ID=16602988

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69506201T Expired - Fee Related DE69506201T2 (de) 1994-09-05 1995-09-04 Injektionsvorrichtung für beides positive und negative Ionen

Country Status (4)

Country Link
US (1) US5587632A (de)
EP (1) EP0700236B1 (de)
JP (1) JP2600109B2 (de)
DE (1) DE69506201T2 (de)

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3488915B2 (ja) 2001-03-08 2004-01-19 高エネルギー加速器研究機構長 ビーム偏向分離用セプタム電磁石、ビーム偏向分離用電磁石、及びビーム偏向方法
ATE535637T1 (de) 2009-03-27 2011-12-15 Groz Beckert Kg Einführhilfe zur bestückung von nadelbrettern
WO2013121503A1 (ja) * 2012-02-13 2013-08-22 三菱電機株式会社 セプタム電磁石および粒子線治療装置
JP6121748B2 (ja) * 2013-02-22 2017-04-26 株式会社東芝 イオン加速装置及び医療用装置
EP3285263B1 (de) * 2015-04-15 2023-05-10 Kaneka Corporation Verwendung eines kohlenstofffilms als ladestreifenfilm, der konfiguriert ist, teil einer ionenstrahl-ladestreifenvorrichtung zu sein
CN110169208B (zh) * 2017-01-25 2022-09-06 住友重机械工业株式会社 粒子加速***及粒子加速***的调整方法

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2979635A (en) * 1959-07-15 1961-04-11 Richard J Burleigh Clashing beam particle accelerator
DE3681841D1 (de) * 1985-07-19 1991-11-14 Mitsubishi Electric Corp Vorrichtung fuer geladene teilchen.
US5073913A (en) * 1988-04-26 1991-12-17 Acctek Associates, Inc. Apparatus for acceleration and application of negative ions and electrons
JP3125805B2 (ja) * 1991-10-16 2001-01-22 株式会社日立製作所 円形加速器
JPH0661000A (ja) * 1992-08-07 1994-03-04 Hitachi Ltd 円形加速器及び円形加速器の運転方法並びに半導体露光装置
US5315118A (en) * 1993-04-15 1994-05-24 High Voltage Engineering Europa B.V. Dual ion injector for tandem accelerators

Also Published As

Publication number Publication date
DE69506201T2 (de) 1999-04-22
JP2600109B2 (ja) 1997-04-16
US5587632A (en) 1996-12-24
EP0700236B1 (de) 1998-11-25
EP0700236A1 (de) 1996-03-06
JPH0878199A (ja) 1996-03-22

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8339 Ceased/non-payment of the annual fee