DE69506050T2 - Mikro-Greifer - Google Patents

Mikro-Greifer

Info

Publication number
DE69506050T2
DE69506050T2 DE69506050T DE69506050T DE69506050T2 DE 69506050 T2 DE69506050 T2 DE 69506050T2 DE 69506050 T DE69506050 T DE 69506050T DE 69506050 T DE69506050 T DE 69506050T DE 69506050 T2 DE69506050 T2 DE 69506050T2
Authority
DE
Germany
Prior art keywords
micro gripper
gripper
micro
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE69506050T
Other languages
English (en)
Other versions
DE69506050D1 (de
Inventor
Yoshihiko Suzuki
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Nikon Corp
Original Assignee
Nikon Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from JP6190625A external-priority patent/JPH0852673A/ja
Priority claimed from JP7021207A external-priority patent/JPH08192382A/ja
Application filed by Nikon Corp filed Critical Nikon Corp
Publication of DE69506050D1 publication Critical patent/DE69506050D1/de
Application granted granted Critical
Publication of DE69506050T2 publication Critical patent/DE69506050T2/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81C—PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS
    • B81C99/00—Subject matter not provided for in other groups of this subclass
    • B81C99/0005—Apparatus specially adapted for the manufacture or treatment of microstructural devices or systems, or methods for manufacturing the same
    • B81C99/002—Apparatus for assembling MEMS, e.g. micromanipulators
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
    • B25J15/00—Gripping heads and other end effectors
    • B25J15/02—Gripping heads and other end effectors servo-actuated
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
    • B25J7/00—Micromanipulators
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
    • B25J9/00—Programme-controlled manipulators
    • B25J9/10—Programme-controlled manipulators characterised by positioning means for manipulator elements
    • B25J9/12—Programme-controlled manipulators characterised by positioning means for manipulator elements electric

Landscapes

  • Engineering & Computer Science (AREA)
  • Robotics (AREA)
  • Mechanical Engineering (AREA)
  • Manufacturing & Machinery (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Micromachines (AREA)
  • Manipulator (AREA)
DE69506050T 1994-08-12 1995-03-09 Mikro-Greifer Expired - Fee Related DE69506050T2 (de)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP6190625A JPH0852673A (ja) 1994-08-12 1994-08-12 探針付き超小型グリッパー
JP28014394 1994-11-15
JP7021207A JPH08192382A (ja) 1995-01-13 1995-01-13 マイクログリッパー

Publications (2)

Publication Number Publication Date
DE69506050D1 DE69506050D1 (de) 1998-12-24
DE69506050T2 true DE69506050T2 (de) 1999-05-20

Family

ID=27283335

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69506050T Expired - Fee Related DE69506050T2 (de) 1994-08-12 1995-03-09 Mikro-Greifer

Country Status (2)

Country Link
EP (1) EP0696497B1 (de)
DE (1) DE69506050T2 (de)

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE19737009B4 (de) * 1997-08-26 2007-01-11 INSTITUT FüR MIKROTECHNIK MAINZ GMBH Mikrogreifer und Verfahren für die Getriebemontage
WO2002016089A2 (en) * 2000-08-25 2002-02-28 Danmarks Tekniske Universitet Fabrication and application of nano-manipulators with induced growth
AU2002224125A1 (en) 2001-11-29 2003-06-10 Aoi Electronics., Co., Ltd Nano gripper and method of manufacturing the nano gripper
CA2551191C (en) * 2006-06-23 2016-04-05 Keekyoung Kim Electrothermally-driven mems microgrippers with integrated dual-axis capacitive force sensors
CN101837945A (zh) * 2010-03-22 2010-09-22 大连理工大学 电热微夹钳封装装置
CN108927483B (zh) * 2018-07-26 2023-11-03 江苏四达重工有限公司 用于铆银点机的银点夹取装置
CN114012632B (zh) * 2021-12-13 2023-05-19 昆山昆博智能感知产业技术研究院有限公司 一种平面微型线圈电磁微夹持器

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4610475A (en) * 1984-09-06 1986-09-09 Microflex Technology, Inc. Piezoelectric polymer micromanipulator
EP0198501B1 (de) * 1985-04-17 1992-07-01 Hitachi, Ltd. Greiferwerkzeug
DE3814617A1 (de) * 1988-04-29 1989-11-09 Fraunhofer Ges Forschung Greifvorrichtung
US5332275A (en) * 1991-11-27 1994-07-26 Microscience Group, Inc. Microgripper
JP3109220B2 (ja) * 1992-03-09 2000-11-13 株式会社ニコン マイクログリッパー
JPH0732276A (ja) * 1993-07-19 1995-02-03 Nikon Corp 超小型グリッパー及び超小型グリッパー駆動装置

Also Published As

Publication number Publication date
EP0696497B1 (de) 1998-11-18
DE69506050D1 (de) 1998-12-24
EP0696497A1 (de) 1996-02-14

Similar Documents

Publication Publication Date Title
DE69508160D1 (de) Verbesserte mikromechanische Geräte
DE69524816T2 (de) Verbesserte mikromechanische Geräte
DE69733561D1 (de) Mikroturbomaschinen
DE69813064D1 (de) Universalgreifer
DE59504866D1 (de) Abhebegreifer
DE69532166D1 (de) Mikrokatheter
FI955157A (fi) Mikrogyrometri
DE69519322T2 (de) Greifer
DE59502013D1 (de) Mikromechanischer aktor
DE69418190T2 (de) Vakuumgreifer
DE59809213D1 (de) Greiferwebmaschine
DE69506050T2 (de) Mikro-Greifer
DE69708023D1 (de) Greifer-Anschlag
DE59804524D1 (de) Greiferwebmaschine
DE59806626D1 (de) Greiferwebmaschine
KR960004092U (ko) 완력기
KR960006363U (ko) 그리퍼
KR960025066U (ko) 마이크로 스위치
NO952857D0 (no) Mikrotelefon
KR950028581U (ko) 마이크로 스위치 구조
KR970020924U (ko) 악력기
KR960002469U (ko) 전자레인지의 무조정 래치
KR970054599U (ko) 그립퍼
IT1287410B1 (it) Microelettrovalvola
SE9404246D0 (sv) Hydrauldrivet gripdon

Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8339 Ceased/non-payment of the annual fee