DE69428802T2 - Verfahren zur herstellung einer frequenzregeleinrichtung - Google Patents

Verfahren zur herstellung einer frequenzregeleinrichtung

Info

Publication number
DE69428802T2
DE69428802T2 DE69428802T DE69428802T DE69428802T2 DE 69428802 T2 DE69428802 T2 DE 69428802T2 DE 69428802 T DE69428802 T DE 69428802T DE 69428802 T DE69428802 T DE 69428802T DE 69428802 T2 DE69428802 T2 DE 69428802T2
Authority
DE
Germany
Prior art keywords
producing
control device
frequency control
frequency
control
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE69428802T
Other languages
English (en)
Other versions
DE69428802D1 (de
Inventor
A Knecht
Jean-Robert Achille
K Adams
T Cox
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
CTS Corp
Original Assignee
CTS Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Family has litigation
First worldwide family litigation filed litigation Critical https://patents.darts-ip.com/?family=22436985&utm_source=***_patent&utm_medium=platform_link&utm_campaign=public_patent_search&patent=DE69428802(T2) "Global patent litigation dataset” by Darts-ip is licensed under a Creative Commons Attribution 4.0 International License.
Application filed by CTS Corp filed Critical CTS Corp
Application granted granted Critical
Publication of DE69428802D1 publication Critical patent/DE69428802D1/de
Publication of DE69428802T2 publication Critical patent/DE69428802T2/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
    • H03H9/02—Details
    • H03H9/02007—Details of bulk acoustic wave devices
    • H03H9/02086—Means for compensation or elimination of undesirable effects
    • H03H9/02102—Means for compensation or elimination of undesirable effects of temperature influence
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
    • H03H9/02—Details
    • H03H9/05—Holders; Supports
    • H03H9/0504—Holders; Supports for bulk acoustic wave devices
    • H03H9/0514—Holders; Supports for bulk acoustic wave devices consisting of mounting pads or bumps
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
    • H03H9/02—Details
    • H03H9/05—Holders; Supports
    • H03H9/0504—Holders; Supports for bulk acoustic wave devices
    • H03H9/0528—Holders; Supports for bulk acoustic wave devices consisting of clips
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
    • H03H9/02—Details
    • H03H9/05—Holders; Supports
    • H03H9/0538—Constructional combinations of supports or holders with electromechanical or other electronic elements
    • H03H9/0547—Constructional combinations of supports or holders with electromechanical or other electronic elements consisting of a vertical arrangement
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
    • H03H9/02—Details
    • H03H9/05—Holders; Supports
    • H03H9/10—Mounting in enclosures
    • H03H9/1007—Mounting in enclosures for bulk acoustic wave [BAW] devices
    • H03H9/1014—Mounting in enclosures for bulk acoustic wave [BAW] devices the enclosure being defined by a frame built on a substrate and a cap, the frame having no mechanical contact with the BAW device
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H3/00—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators
    • H03H3/007—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators for the manufacture of electromechanical resonators or networks
    • H03H3/02—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators for the manufacture of electromechanical resonators or networks for the manufacture of piezoelectric or electrostrictive resonators or networks
    • H03H3/04—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators for the manufacture of electromechanical resonators or networks for the manufacture of piezoelectric or electrostrictive resonators or networks for obtaining desired frequency or temperature coefficient
    • H03H2003/0414—Resonance frequency
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T29/00—Metal working
    • Y10T29/42—Piezoelectric device making

Landscapes

  • Physics & Mathematics (AREA)
  • Acoustics & Sound (AREA)
  • Oscillators With Electromechanical Resonators (AREA)
DE69428802T 1993-09-30 1994-07-25 Verfahren zur herstellung einer frequenzregeleinrichtung Expired - Lifetime DE69428802T2 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US08/128,790 US5446954A (en) 1993-09-30 1993-09-30 Method for manufacturing a frequency control device
PCT/US1994/008358 WO1995009446A1 (en) 1993-09-30 1994-07-25 Method for manufacturing a frequency control device

Publications (2)

Publication Number Publication Date
DE69428802D1 DE69428802D1 (de) 2001-11-29
DE69428802T2 true DE69428802T2 (de) 2002-06-27

Family

ID=22436985

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69428802T Expired - Lifetime DE69428802T2 (de) 1993-09-30 1994-07-25 Verfahren zur herstellung einer frequenzregeleinrichtung

Country Status (6)

Country Link
US (1) US5446954A (de)
EP (1) EP0721669B1 (de)
JP (1) JP3720355B2 (de)
AU (1) AU7474594A (de)
DE (1) DE69428802T2 (de)
WO (1) WO1995009446A1 (de)

Families Citing this family (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TW275594B (en) * 1994-11-14 1996-05-11 Yoshino Denki Kk Ultrasonic cleaning device
US5952894A (en) * 1995-11-07 1999-09-14 Nec Corporation Resonant circuit having a reactance for temperature compensation
WO1998019349A1 (en) * 1996-10-29 1998-05-07 Motorola Inc. An ultrasonically mounted piezoelectric device and method of making same
US5883844A (en) * 1997-05-23 1999-03-16 Stmicroelectronics, Inc. Method of stress testing integrated circuit having memory and integrated circuit having stress tester for memory thereof
US6608531B2 (en) 2000-10-31 2003-08-19 Cts Corporation Temperature compensated crystal oscillator package
US6580332B2 (en) 2000-11-30 2003-06-17 Cts Corporation Dual-function connection pads for TCXO integrated circuit
US6946919B2 (en) 2002-01-14 2005-09-20 Cts Corporation Controllable crystal oscillator component
US6664864B2 (en) 2001-10-31 2003-12-16 Cts Corporation Cavity design printed circuit board for a temperature compensated crystal oscillator and a temperature compensated crystal oscillator employing the same
US6700448B1 (en) 2002-08-30 2004-03-02 Cts Corporation High performance dual range oscillator module
JP2009188633A (ja) * 2008-02-05 2009-08-20 Nippon Dempa Kogyo Co Ltd 表面実装発振器
JP2009194725A (ja) * 2008-02-15 2009-08-27 Nippon Dempa Kogyo Co Ltd 表面実装用の水晶発振器
WO2010023801A1 (ja) * 2008-08-27 2010-03-04 株式会社村田製作所 振動装置
JP6436280B2 (ja) 2014-03-27 2018-12-12 セイコーエプソン株式会社 恒温槽型発振器の製造方法

Family Cites Families (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2278966A (en) * 1938-11-14 1942-04-07 Brush Dev Co Piezoelectric apparatus
AU413304B2 (en) * 1968-03-28 1971-05-17 Amalgamated Wireless (Australasia) Limited Improvements in quartz crystal units
DE2755116C2 (de) * 1977-12-10 1984-08-02 Standard Elektrik Lorenz Ag, 7000 Stuttgart Oszillator mit einem in einem Gehäuse dicht eingebauten Resonator
GB1580600A (en) * 1978-05-09 1980-12-03 Philips Electronic Associated Kpiezoelectric devices
JPS5628512A (en) * 1979-08-16 1981-03-20 Seikosha Co Ltd Production for thickness slip crystal resonator
DE3038263A1 (de) * 1980-10-10 1982-04-29 Standard Elektrik Lorenz Ag, 7000 Stuttgart Baueinheit mit piezoelektrischem schwinger
EP0092428B1 (de) * 1982-04-20 1990-04-04 Fujitsu Limited Herstellungsverfahrenfür einen Piezoelektrischen Resonator
US4454639A (en) * 1982-06-03 1984-06-19 Motorola, Inc. Method for tuning piezoelectric resonators
US4750246A (en) * 1984-10-29 1988-06-14 Hughes Aircraft Company Method of making compensated crystal oscillator
JPH04165652A (ja) * 1990-10-30 1992-06-11 Nippon Dempa Kogyo Co Ltd 電子部品用容器及びこれを用いた圧電装置

Also Published As

Publication number Publication date
JPH09503361A (ja) 1997-03-31
EP0721669B1 (de) 2001-10-24
EP0721669A1 (de) 1996-07-17
AU7474594A (en) 1995-04-18
EP0721669A4 (de) 1997-11-26
US5446954A (en) 1995-09-05
DE69428802D1 (de) 2001-11-29
JP3720355B2 (ja) 2005-11-24
WO1995009446A1 (en) 1995-04-06

Similar Documents

Publication Publication Date Title
DE69621335D1 (de) Verfahren zur herstellung einer membranhaltenden mikrostruktur
DE69619691T2 (de) Verfahren zur herstellung einer beugungsstruktur
DE69636338D1 (de) Verfahren zur herstellung einer halbleitervorrichtung
DE59406156D1 (de) Verfahren zur Herstellung einer dreidimensionalen Schaltungsanordnung
DE69422265D1 (de) Verfahren zur Herstellung einer strahlungsgeschützten Silizium-auf-Isolator Halbleiteranordnung
DE69504104T2 (de) Verbessertes verfahren zur herstellung einer weichen spitze
DE59609364D1 (de) Verfahren zur herstellung einer lochscheibe
DE69607546D1 (de) Verfahren zur Herstellung einer Schaltungsanordnung
DE69434695D1 (de) Verfahren zur Herstellung einer Halbleiteranordnung
DE69731614D1 (de) Netzübergreifende einrichtung und verfahren zur herstellung einer solchen einrichtung
DE69125789D1 (de) Verfahren zur herstellung einer polyoxyalkylenverbindungen
DE69319112D1 (de) Verfahren zur herstellung einer stabilen bioziddispersion
DE69428802D1 (de) Verfahren zur herstellung einer frequenzregeleinrichtung
DE59408258D1 (de) Verfahren zur herstellung einer hartstoffschicht
DE69722661D1 (de) Verfahren zur herstellung einer halbleitervorrichtung
DE59408695D1 (de) Verfahren zur herstellung einer austragvorrichtung
DE69414862T2 (de) Verfahren zur herstellung einer zuendspulenanordnung
ATE145751T1 (de) Verfahren zur herstellung einer kühleinrichtung
DE59400082D1 (de) Verfahren zur herstellung einer riemenscheibe
DE69530698D1 (de) Verfahren zur herstellung einer leiterplatte
DE59305240D1 (de) Verfahren und Vorrichtung zur Herstellung einer Wellenwicklung
DE948435T1 (de) Verfahren zur herstellung einer anzeige
DE59401214D1 (de) Verfahren und Vorrichtung zur Herstellung einer Wellenwicklung
DE59309045D1 (de) Verfahren zur herstellung einer halbleiterstruktur
DE59206612D1 (de) Verfahren zur herstellung einer vorform

Legal Events

Date Code Title Description
8363 Opposition against the patent