DE69414044T2 - Vorrichtung zur Gaserzeugung und Verfahren und Vorrichtung zum Herstellen eines optischen Wellenleiters und einer optischen Faservorform - Google Patents
Vorrichtung zur Gaserzeugung und Verfahren und Vorrichtung zum Herstellen eines optischen Wellenleiters und einer optischen FaservorformInfo
- Publication number
- DE69414044T2 DE69414044T2 DE69414044T DE69414044T DE69414044T2 DE 69414044 T2 DE69414044 T2 DE 69414044T2 DE 69414044 T DE69414044 T DE 69414044T DE 69414044 T DE69414044 T DE 69414044T DE 69414044 T2 DE69414044 T2 DE 69414044T2
- Authority
- DE
- Germany
- Prior art keywords
- making
- gas generating
- fiber preform
- optical fiber
- optical waveguide
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Revoked
Links
Classifications
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
- C23C16/448—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating characterised by the method used for generating reactive gas streams, e.g. by evaporation or sublimation of precursor materials
- C23C16/4487—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating characterised by the method used for generating reactive gas streams, e.g. by evaporation or sublimation of precursor materials by using a condenser
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
- C03B37/00—Manufacture or treatment of flakes, fibres, or filaments from softened glass, minerals, or slags
- C03B37/01—Manufacture of glass fibres or filaments
- C03B37/012—Manufacture of preforms for drawing fibres or filaments
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
- C03B19/00—Other methods of shaping glass
- C03B19/14—Other methods of shaping glass by gas- or vapour- phase reaction processes
- C03B19/1415—Reactant delivery systems
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
- C03B37/00—Manufacture or treatment of flakes, fibres, or filaments from softened glass, minerals, or slags
- C03B37/01—Manufacture of glass fibres or filaments
- C03B37/012—Manufacture of preforms for drawing fibres or filaments
- C03B37/014—Manufacture of preforms for drawing fibres or filaments made entirely or partially by chemical means, e.g. vapour phase deposition of bulk porous glass either by outside vapour deposition [OVD], or by outside vapour phase oxidation [OVPO] or by vapour axial deposition [VAD]
- C03B37/01413—Reactant delivery systems
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
- C23C16/448—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating characterised by the method used for generating reactive gas streams, e.g. by evaporation or sublimation of precursor materials
- C23C16/4481—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating characterised by the method used for generating reactive gas streams, e.g. by evaporation or sublimation of precursor materials by evaporation using carrier gas in contact with the source material
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
- C23C16/453—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating passing the reaction gases through burners or torches, e.g. atmospheric pressure CVD
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
- C03B2207/00—Glass deposition burners
- C03B2207/36—Fuel or oxidant details, e.g. flow rate, flow rate ratio, fuel additives
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
- C03B2207/00—Glass deposition burners
- C03B2207/80—Feeding the burner or the burner-heated deposition site
- C03B2207/85—Feeding the burner or the burner-heated deposition site with vapour generated from liquid glass precursors, e.g. directly by heating the liquid
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Materials Engineering (AREA)
- Organic Chemistry (AREA)
- Chemical Kinetics & Catalysis (AREA)
- General Chemical & Material Sciences (AREA)
- Manufacturing & Machinery (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Life Sciences & Earth Sciences (AREA)
- Geochemistry & Mineralogy (AREA)
- General Life Sciences & Earth Sciences (AREA)
- Physics & Mathematics (AREA)
- Plasma & Fusion (AREA)
- Optical Integrated Circuits (AREA)
- Manufacture, Treatment Of Glass Fibers (AREA)
- Glass Melting And Manufacturing (AREA)
- Physical Or Chemical Processes And Apparatus (AREA)
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP18150093 | 1993-07-22 | ||
JP6152222A JPH0781965A (ja) | 1993-07-22 | 1994-07-04 | ガス生成装置並びに光導波路及び光ファイバ母材を製造する方法及び装置 |
Publications (2)
Publication Number | Publication Date |
---|---|
DE69414044D1 DE69414044D1 (de) | 1998-11-26 |
DE69414044T2 true DE69414044T2 (de) | 1999-04-15 |
Family
ID=26481197
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE69414044T Revoked DE69414044T2 (de) | 1993-07-22 | 1994-07-20 | Vorrichtung zur Gaserzeugung und Verfahren und Vorrichtung zum Herstellen eines optischen Wellenleiters und einer optischen Faservorform |
Country Status (6)
Country | Link |
---|---|
EP (1) | EP0635460B1 (de) |
JP (1) | JPH0781965A (de) |
KR (1) | KR950003201A (de) |
AU (1) | AU675543B2 (de) |
CA (1) | CA2128188C (de) |
DE (1) | DE69414044T2 (de) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE102018118771A1 (de) * | 2018-08-02 | 2020-02-06 | Leoni Kabel Gmbh | Verfahren und Vorrichtung zum reproduzierbaren Erzeugen einer Preform für die Glasfaserherstellung |
Families Citing this family (16)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5954911A (en) * | 1995-10-12 | 1999-09-21 | Semitool, Inc. | Semiconductor processing using vapor mixtures |
US6195504B1 (en) * | 1996-11-20 | 2001-02-27 | Ebara Corporation | Liquid feed vaporization system and gas injection device |
JPH11116247A (ja) * | 1997-10-09 | 1999-04-27 | Nikon Corp | 合成石英ガラス製造方法 |
US6094940A (en) * | 1997-10-09 | 2000-08-01 | Nikon Corporation | Manufacturing method of synthetic silica glass |
JP4038866B2 (ja) * | 1998-03-11 | 2008-01-30 | 株式会社ニコン | 合成石英ガラス製造方法 |
KR100308795B1 (ko) * | 1999-01-27 | 2001-09-26 | 최만수 | 화염과 레이저를 이용한 미세입자 제조방법 및 미세입자 증착방법 |
KR20010073495A (ko) * | 2000-01-15 | 2001-08-01 | 이형종 | 고온 분위기에서 광대역 불꽃 가수분해 증착법을 이용한광소자용 평판형 실리카 박막의 제조법 |
DE10007059A1 (de) * | 2000-02-16 | 2001-08-23 | Aixtron Ag | Verfahren und Vorrichtung zur Herstellung von beschichteten Substraten mittels Kondensationsbeschichtung |
KR100402678B1 (ko) * | 2000-12-29 | 2003-10-22 | 주식회사 세미텔 | 광섬유 및 광소자용 기상 증착 기화 시스템 |
WO2004002909A1 (en) * | 2002-06-28 | 2004-01-08 | Pirelli & C. S.P.A. | Method and device for vaporizing a liquid reactant in manufacturing a glass preform |
US8069690B2 (en) * | 2005-12-16 | 2011-12-06 | Ofs Fitel, Llc | Apparatus and method for fabricating glass bodies using an aerosol delivery system |
JP4750866B2 (ja) * | 2009-02-18 | 2011-08-17 | 信越化学工業株式会社 | 石英ガラスの製造方法及び装置 |
JP2017036172A (ja) * | 2015-08-07 | 2017-02-16 | 株式会社フジクラ | 光ファイバ母材の製造方法 |
KR101704335B1 (ko) | 2016-01-19 | 2017-02-08 | 이종훈 | 광통신 선번 자동화 서비스 방법 |
CN107010823A (zh) * | 2017-05-18 | 2017-08-04 | 长飞光纤潜江有限公司 | 一种用于光纤预制棒外部沉积的omcts蒸发装置 |
WO2023038124A1 (ja) * | 2021-09-10 | 2023-03-16 | 住友電気工業株式会社 | 光ファイバ用ガラス母材の製造装置および光ファイバ用ガラス母材の製造方法 |
Family Cites Families (10)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4529427A (en) * | 1977-05-19 | 1985-07-16 | At&T Bell Laboratories | Method for making low-loss optical waveguides on an industrial scale |
US4230744A (en) * | 1979-02-21 | 1980-10-28 | Corning Glass Works | System for delivering materials to deposition site on optical waveguide blank |
EP0058571A1 (de) * | 1981-02-18 | 1982-08-25 | National Research Development Corporation | Verfahren und Vorrichtung zum Zuführen einer kontrollierten Menge eines Reaktanten bei einem Dampfphasen-Abscheidungsverfahren |
JPS60122735A (ja) * | 1983-12-02 | 1985-07-01 | Sumitomo Electric Ind Ltd | 原料ガス供給装置 |
AU563417B2 (en) * | 1984-02-07 | 1987-07-09 | Nippon Telegraph & Telephone Public Corporation | Optical fibre manufacture |
JPS60244333A (ja) * | 1984-05-21 | 1985-12-04 | Sumitomo Electric Ind Ltd | 原料液補給装置 |
US4604118A (en) * | 1985-08-13 | 1986-08-05 | Corning Glass Works | Method for synthesizing MgO--Al2 O3 --SiO2 glasses and ceramics |
JPH0354130A (ja) * | 1989-07-20 | 1991-03-08 | Fujikura Ltd | 原料ガス供給装置 |
US5090985A (en) * | 1989-10-17 | 1992-02-25 | Libbey-Owens-Ford Co. | Method for preparing vaporized reactants for chemical vapor deposition |
US5078092A (en) * | 1989-12-22 | 1992-01-07 | Corning Incorporated | Flash vaporizer system for use in manufacturing optical waveguide fiber |
-
1994
- 1994-07-04 JP JP6152222A patent/JPH0781965A/ja active Pending
- 1994-07-15 CA CA002128188A patent/CA2128188C/en not_active Expired - Fee Related
- 1994-07-19 AU AU67580/94A patent/AU675543B2/en not_active Ceased
- 1994-07-20 DE DE69414044T patent/DE69414044T2/de not_active Revoked
- 1994-07-20 EP EP94111295A patent/EP0635460B1/de not_active Revoked
- 1994-07-22 KR KR1019940017721A patent/KR950003201A/ko not_active Application Discontinuation
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE102018118771A1 (de) * | 2018-08-02 | 2020-02-06 | Leoni Kabel Gmbh | Verfahren und Vorrichtung zum reproduzierbaren Erzeugen einer Preform für die Glasfaserherstellung |
DE102018118771B4 (de) | 2018-08-02 | 2022-07-07 | Leoni Kabel Gmbh | Verfahren und Vorrichtung zum reproduzierbaren Erzeugen einer Preform für die Glasfaserherstellung |
US11702358B2 (en) | 2018-08-02 | 2023-07-18 | J-Fiber Gmbh | Method and apparatus for reproducibly producing a preform for glass fiber manufacture |
Also Published As
Publication number | Publication date |
---|---|
CA2128188C (en) | 2004-12-28 |
DE69414044D1 (de) | 1998-11-26 |
KR950003201A (ko) | 1995-02-16 |
AU675543B2 (en) | 1997-02-06 |
CA2128188A1 (en) | 1995-01-23 |
EP0635460A2 (de) | 1995-01-25 |
EP0635460A3 (de) | 1995-08-09 |
EP0635460B1 (de) | 1998-10-21 |
JPH0781965A (ja) | 1995-03-28 |
AU6758094A (en) | 1995-02-02 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
8363 | Opposition against the patent | ||
8331 | Complete revocation |