DE69410313T2 - Weggeber - Google Patents

Weggeber

Info

Publication number
DE69410313T2
DE69410313T2 DE69410313T DE69410313T DE69410313T2 DE 69410313 T2 DE69410313 T2 DE 69410313T2 DE 69410313 T DE69410313 T DE 69410313T DE 69410313 T DE69410313 T DE 69410313T DE 69410313 T2 DE69410313 T2 DE 69410313T2
Authority
DE
Germany
Prior art keywords
displacement sensor
displacement
sensor
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE69410313T
Other languages
English (en)
Other versions
DE69410313D1 (de
Inventor
Julian D White
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Europe Ltd
Original Assignee
Hitachi Europe Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Europe Ltd filed Critical Hitachi Europe Ltd
Application granted granted Critical
Publication of DE69410313D1 publication Critical patent/DE69410313D1/de
Publication of DE69410313T2 publication Critical patent/DE69410313T2/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01Q—SCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBE MICROSCOPY [SPM]
    • G01Q20/00—Monitoring the movement or position of the probe
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B7/00—Measuring arrangements characterised by the use of electric or magnetic techniques
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
    • G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
    • G01D5/12—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means
    • G01D5/14—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage
    • G01D5/18—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage by varying effective impedance of discharge tubes or semiconductor devices

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • General Health & Medical Sciences (AREA)
  • Nuclear Medicine, Radiotherapy & Molecular Imaging (AREA)
  • Radiology & Medical Imaging (AREA)
  • Pressure Sensors (AREA)
  • Investigating Or Analyzing Materials By The Use Of Electric Means (AREA)
DE69410313T 1993-02-17 1994-01-27 Weggeber Expired - Fee Related DE69410313T2 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
GB939303111A GB9303111D0 (en) 1993-02-17 1993-02-17 Displacement transducer

Publications (2)

Publication Number Publication Date
DE69410313D1 DE69410313D1 (de) 1998-06-25
DE69410313T2 true DE69410313T2 (de) 1998-11-12

Family

ID=10730533

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69410313T Expired - Fee Related DE69410313T2 (de) 1993-02-17 1994-01-27 Weggeber

Country Status (3)

Country Link
EP (1) EP0612973B1 (de)
DE (1) DE69410313T2 (de)
GB (1) GB9303111D0 (de)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
SI9600141B (sl) * 1996-04-30 2002-12-31 Fakulteta Za Elektroniko Integriran kapacitivni merilnik nanometrijskih razdalj

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4767973A (en) * 1987-07-06 1988-08-30 Sarcos Incorporated Systems and methods for sensing position and movement

Also Published As

Publication number Publication date
GB9303111D0 (en) 1993-03-31
EP0612973B1 (de) 1998-05-20
EP0612973A1 (de) 1994-08-31
DE69410313D1 (de) 1998-06-25

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8339 Ceased/non-payment of the annual fee