DE69408549D1 - Housing for a semiconductor device - Google Patents

Housing for a semiconductor device

Info

Publication number
DE69408549D1
DE69408549D1 DE69408549T DE69408549T DE69408549D1 DE 69408549 D1 DE69408549 D1 DE 69408549D1 DE 69408549 T DE69408549 T DE 69408549T DE 69408549 T DE69408549 T DE 69408549T DE 69408549 D1 DE69408549 D1 DE 69408549D1
Authority
DE
Germany
Prior art keywords
housing
semiconductor device
semiconductor
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE69408549T
Other languages
German (de)
Other versions
DE69408549T2 (en
Inventor
Frank Poradish
John T Mckinley
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Texas Instruments Inc
Original Assignee
Texas Instruments Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Texas Instruments Inc filed Critical Texas Instruments Inc
Application granted granted Critical
Publication of DE69408549D1 publication Critical patent/DE69408549D1/en
Publication of DE69408549T2 publication Critical patent/DE69408549T2/en
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L23/00—Details of semiconductor or other solid state devices
    • H01L23/02—Containers; Seals
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L23/00—Details of semiconductor or other solid state devices
    • H01L23/02—Containers; Seals
    • H01L23/10—Containers; Seals characterised by the material or arrangement of seals between parts, e.g. between cap and base of the container or between leads and walls of the container
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
    • G02B26/0816—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements
    • G02B26/0833—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L23/00—Details of semiconductor or other solid state devices
    • H01L23/02—Containers; Seals
    • H01L23/04—Containers; Seals characterised by the shape of the container or parts, e.g. caps, walls
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L23/00—Details of semiconductor or other solid state devices
    • H01L23/02—Containers; Seals
    • H01L23/04—Containers; Seals characterised by the shape of the container or parts, e.g. caps, walls
    • H01L23/053—Containers; Seals characterised by the shape of the container or parts, e.g. caps, walls the container being a hollow construction and having an insulating or insulated base as a mounting for the semiconductor body
    • H01L23/057—Containers; Seals characterised by the shape of the container or parts, e.g. caps, walls the container being a hollow construction and having an insulating or insulated base as a mounting for the semiconductor body the leads being parallel to the base
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L23/00—Details of semiconductor or other solid state devices
    • H01L23/16—Fillings or auxiliary members in containers or encapsulations, e.g. centering rings
    • H01L23/18—Fillings characterised by the material, its physical or chemical properties, or its arrangement within the complete device
    • H01L23/26—Fillings characterised by the material, its physical or chemical properties, or its arrangement within the complete device including materials for absorbing or reacting with moisture or other undesired substances, e.g. getters
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
    • H01L2224/42—Wire connectors; Manufacturing methods related thereto
    • H01L2224/47—Structure, shape, material or disposition of the wire connectors after the connecting process
    • H01L2224/48—Structure, shape, material or disposition of the wire connectors after the connecting process of an individual wire connector
    • H01L2224/4805—Shape
    • H01L2224/4809—Loop shape
    • H01L2224/48091—Arched
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
    • H01L2224/42—Wire connectors; Manufacturing methods related thereto
    • H01L2224/47—Structure, shape, material or disposition of the wire connectors after the connecting process
    • H01L2224/48—Structure, shape, material or disposition of the wire connectors after the connecting process of an individual wire connector
    • H01L2224/484—Connecting portions
    • H01L2224/48463—Connecting portions the connecting portion on the bonding area of the semiconductor or solid-state body being a ball bond
    • H01L2224/48465—Connecting portions the connecting portion on the bonding area of the semiconductor or solid-state body being a ball bond the other connecting portion not on the bonding area being a wedge bond, i.e. ball-to-wedge, regular stitch

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • Engineering & Computer Science (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Optics & Photonics (AREA)
  • Mechanical Light Control Or Optical Switches (AREA)
  • Micromachines (AREA)
  • Light Receiving Elements (AREA)
  • Led Device Packages (AREA)
DE69408549T 1993-03-16 1994-03-15 Housing for a semiconductor device Expired - Fee Related DE69408549T2 (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US08/033,687 US5293511A (en) 1993-03-16 1993-03-16 Package for a semiconductor device

Publications (2)

Publication Number Publication Date
DE69408549D1 true DE69408549D1 (en) 1998-03-26
DE69408549T2 DE69408549T2 (en) 1998-09-10

Family

ID=21871861

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69408549T Expired - Fee Related DE69408549T2 (en) 1993-03-16 1994-03-15 Housing for a semiconductor device

Country Status (7)

Country Link
US (1) US5293511A (en)
EP (1) EP0616238B1 (en)
JP (1) JP2799288B2 (en)
KR (1) KR100319360B1 (en)
CN (1) CN1048093C (en)
DE (1) DE69408549T2 (en)
SG (1) SG43325A1 (en)

Families Citing this family (103)

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US6219015B1 (en) 1992-04-28 2001-04-17 The Board Of Directors Of The Leland Stanford, Junior University Method and apparatus for using an array of grating light valves to produce multicolor optical images
US5455386A (en) * 1994-01-14 1995-10-03 Olin Corporation Chamfered electronic package component
JP2600617B2 (en) * 1994-08-18 1997-04-16 日本電気株式会社 Semiconductor device and manufacturing method thereof
US5550398A (en) * 1994-10-31 1996-08-27 Texas Instruments Incorporated Hermetic packaging with optical
US5579151A (en) * 1995-02-17 1996-11-26 Texas Instruments Incorporated Spatial light modulator
US5610438A (en) * 1995-03-08 1997-03-11 Texas Instruments Incorporated Micro-mechanical device with non-evaporable getter
US5641713A (en) * 1995-03-23 1997-06-24 Texas Instruments Incorporated Process for forming a room temperature seal between a base cavity and a lid using an organic sealant and a metal seal ring
US5841579A (en) 1995-06-07 1998-11-24 Silicon Light Machines Flat diffraction grating light valve
US6969635B2 (en) * 2000-12-07 2005-11-29 Reflectivity, Inc. Methods for depositing, releasing and packaging micro-electromechanical devices on wafer substrates
US5837562A (en) * 1995-07-07 1998-11-17 The Charles Stark Draper Laboratory, Inc. Process for bonding a shell to a substrate for packaging a semiconductor
US5936758A (en) * 1996-04-12 1999-08-10 Texas Instruments Incorporated Method of passivating a micromechanical device within a hermetic package
US5939785A (en) * 1996-04-12 1999-08-17 Texas Instruments Incorporated Micromechanical device including time-release passivant
TW409192B (en) * 1996-07-23 2000-10-21 Ibm A spatial light modulator and a method of assembling the same
US6028351A (en) * 1996-10-09 2000-02-22 Texas Instruments Incorporated Gasket sealed integrated circuit package
US6025951A (en) * 1996-11-27 2000-02-15 National Optics Institute Light modulating microdevice and method
US5982553A (en) 1997-03-20 1999-11-09 Silicon Light Machines Display device incorporating one-dimensional grating light-valve array
US6088102A (en) 1997-10-31 2000-07-11 Silicon Light Machines Display apparatus including grating light-valve array and interferometric optical system
US6827449B1 (en) * 1997-12-31 2004-12-07 Texas Instruments Incorporated Adhesive-sealed window lid for micromechanical devices
US6271808B1 (en) 1998-06-05 2001-08-07 Silicon Light Machines Stereo head mounted display using a single display device
US6130770A (en) 1998-06-23 2000-10-10 Silicon Light Machines Electron gun activated grating light valve
US6101036A (en) 1998-06-23 2000-08-08 Silicon Light Machines Embossed diffraction grating alone and in combination with changeable image display
US6215579B1 (en) 1998-06-24 2001-04-10 Silicon Light Machines Method and apparatus for modulating an incident light beam for forming a two-dimensional image
US6303986B1 (en) 1998-07-29 2001-10-16 Silicon Light Machines Method of and apparatus for sealing an hermetic lid to a semiconductor die
US6962419B2 (en) 1998-09-24 2005-11-08 Reflectivity, Inc Micromirror elements, package for the micromirror elements, and projection system therefor
FR2785449B1 (en) 1998-10-29 2002-11-29 Commissariat Energie Atomique SUBSTRATE ASSEMBLY SYSTEM WITH CAVITY HANGING AREAS
JP3695260B2 (en) * 1999-11-04 2005-09-14 株式会社日立製作所 Semiconductor module
US7026710B2 (en) * 2000-01-21 2006-04-11 Texas Instruments Incorporated Molded package for micromechanical devices and method of fabrication
US6489178B2 (en) 2000-01-26 2002-12-03 Texas Instruments Incorporated Method of fabricating a molded package for micromechanical devices
US6656768B2 (en) * 2001-02-08 2003-12-02 Texas Instruments Incorporated Flip-chip assembly of protected micromechanical devices
US6507082B2 (en) * 2000-02-22 2003-01-14 Texas Instruments Incorporated Flip-chip assembly of protected micromechanical devices
KR100332967B1 (en) * 2000-05-10 2002-04-19 윤종용 Method for manufacturing digital micro-mirror device(DMD) package
US7006275B2 (en) * 2000-08-30 2006-02-28 Reflectivity, Inc Packaged micromirror array for a projection display
WO2002027874A2 (en) * 2000-09-29 2002-04-04 Cielo Communications, Inc. High speed optical subassembly with ceramic carrier
US7307775B2 (en) * 2000-12-07 2007-12-11 Texas Instruments Incorporated Methods for depositing, releasing and packaging micro-electromechanical devices on wafer substrates
US20050048688A1 (en) * 2000-12-07 2005-03-03 Patel Satyadev R. Methods for depositing, releasing and packaging micro-electromechanical devices on wafer substrates
US6649435B2 (en) * 2000-12-29 2003-11-18 Texas Instruments Incorporated Precision micromirror positioning
WO2002072495A2 (en) * 2001-03-09 2002-09-19 Datec Coating Corporation Sol-gel derived resistive and conductive coating
US6534850B2 (en) * 2001-04-16 2003-03-18 Hewlett-Packard Company Electronic device sealed under vacuum containing a getter and method of operation
US6974517B2 (en) * 2001-06-13 2005-12-13 Raytheon Company Lid with window hermetically sealed to frame, and a method of making it
US6747781B2 (en) 2001-06-25 2004-06-08 Silicon Light Machines, Inc. Method, apparatus, and diffuser for reducing laser speckle
US6782205B2 (en) 2001-06-25 2004-08-24 Silicon Light Machines Method and apparatus for dynamic equalization in wavelength division multiplexing
US7023606B2 (en) * 2001-08-03 2006-04-04 Reflectivity, Inc Micromirror array for projection TV
US6829092B2 (en) 2001-08-15 2004-12-07 Silicon Light Machines, Inc. Blazed grating light valve
US6745449B2 (en) * 2001-11-06 2004-06-08 Raytheon Company Method and apparatus for making a lid with an optically transmissive window
KR20030059705A (en) * 2002-01-04 2003-07-10 엘지전자 주식회사 A photo maskless facing exposure
US6800238B1 (en) 2002-01-15 2004-10-05 Silicon Light Machines, Inc. Method for domain patterning in low coercive field ferroelectrics
US6767751B2 (en) 2002-05-28 2004-07-27 Silicon Light Machines, Inc. Integrated driver process flow
US6822797B1 (en) 2002-05-31 2004-11-23 Silicon Light Machines, Inc. Light modulator structure for producing high-contrast operation using zero-order light
US6829258B1 (en) 2002-06-26 2004-12-07 Silicon Light Machines, Inc. Rapidly tunable external cavity laser
US6714337B1 (en) 2002-06-28 2004-03-30 Silicon Light Machines Method and device for modulating a light beam and having an improved gamma response
US6813059B2 (en) 2002-06-28 2004-11-02 Silicon Light Machines, Inc. Reduced formation of asperities in contact micro-structures
DE10229038B4 (en) * 2002-06-28 2013-08-14 Robert Bosch Gmbh Verkappes microstructure device with high-frequency feedthrough
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US6801354B1 (en) 2002-08-20 2004-10-05 Silicon Light Machines, Inc. 2-D diffraction grating for substantially eliminating polarization dependent losses
US6712480B1 (en) 2002-09-27 2004-03-30 Silicon Light Machines Controlled curvature of stressed micro-structures
US6988338B1 (en) 2002-10-10 2006-01-24 Raytheon Company Lid with a thermally protected window
US7405860B2 (en) * 2002-11-26 2008-07-29 Texas Instruments Incorporated Spatial light modulators with light blocking/absorbing areas
US7042622B2 (en) * 2003-10-30 2006-05-09 Reflectivity, Inc Micromirror and post arrangements on substrates
US6885494B2 (en) * 2003-02-12 2005-04-26 Reflectivity, Inc. High angle micro-mirrors and processes
US6806997B1 (en) 2003-02-28 2004-10-19 Silicon Light Machines, Inc. Patterned diffractive light modulator ribbon for PDL reduction
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US6988924B2 (en) * 2003-04-14 2006-01-24 Hewlett-Packard Development Company, L.P. Method of making a getter structure
US20040232535A1 (en) * 2003-05-22 2004-11-25 Terry Tarn Microelectromechanical device packages with integral heaters
US8619352B2 (en) * 2003-07-29 2013-12-31 Silicon Quest Kabushiki-Kaisha Projection display system using laser light source
US20050093134A1 (en) * 2003-10-30 2005-05-05 Terry Tarn Device packages with low stress assembly process
US20090207324A1 (en) * 2003-11-01 2009-08-20 Naoya Sugimoto Circuit for SLM's pixel
US20090180038A1 (en) * 2003-11-01 2009-07-16 Naoya Sugimoto Mirror control within time slot for SLM
US8194305B2 (en) * 2003-11-01 2012-06-05 Silicon Quest Kabushiki-Kaisha Package for micromirror device
US8228595B2 (en) 2003-11-01 2012-07-24 Silicon Quest Kabushiki-Kaisha Sequence and timing control of writing and rewriting pixel memories with substantially lower data rate
US20090207325A1 (en) * 2003-11-01 2009-08-20 Naoya Sugimoto Algorithm for SLM of single hinge type
US20090207164A1 (en) * 2003-11-01 2009-08-20 Naoya Sugimoto Mirror control within time slot for SLM
US20090195858A1 (en) * 2003-11-01 2009-08-06 Naoya Sugimoto Changing an electrode function
US7957050B2 (en) 2003-11-01 2011-06-07 Silicon Quest Kabushiki-Kaisha Mirror device comprising layered electrode
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US5061049A (en) * 1984-08-31 1991-10-29 Texas Instruments Incorporated Spatial light modulator and method

Also Published As

Publication number Publication date
US5293511A (en) 1994-03-08
KR100319360B1 (en) 2002-04-06
KR940022805A (en) 1994-10-21
SG43325A1 (en) 1997-10-17
EP0616238B1 (en) 1998-02-18
EP0616238A1 (en) 1994-09-21
CN1099520A (en) 1995-03-01
DE69408549T2 (en) 1998-09-10
JP2799288B2 (en) 1998-09-17
CN1048093C (en) 2000-01-05
JPH06318646A (en) 1994-11-15

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8339 Ceased/non-payment of the annual fee