DE69405896D1 - Ladungsträger Analysator - Google Patents

Ladungsträger Analysator

Info

Publication number
DE69405896D1
DE69405896D1 DE69405896T DE69405896T DE69405896D1 DE 69405896 D1 DE69405896 D1 DE 69405896D1 DE 69405896 T DE69405896 T DE 69405896T DE 69405896 T DE69405896 T DE 69405896T DE 69405896 D1 DE69405896 D1 DE 69405896D1
Authority
DE
Germany
Prior art keywords
carrier analyzer
analyzer
carrier
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE69405896T
Other languages
English (en)
Inventor
Peter Coxon
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Thermo Instrument Systems Inc
Original Assignee
Thermo Instrument Systems Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from GB939306375A external-priority patent/GB9306375D0/en
Application filed by Thermo Instrument Systems Inc filed Critical Thermo Instrument Systems Inc
Application granted granted Critical
Publication of DE69405896D1 publication Critical patent/DE69405896D1/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J49/00—Particle spectrometers or separator tubes
    • H01J49/44—Energy spectrometers, e.g. alpha-, beta-spectrometers
    • H01J49/46—Static spectrometers
    • H01J49/48—Static spectrometers using electrostatic analysers, e.g. cylindrical sector, Wien filter
    • H01J49/484—Static spectrometers using electrostatic analysers, e.g. cylindrical sector, Wien filter with spherical mirrors
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement or ion-optical arrangement
    • H01J37/06—Electron sources; Electron guns
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/252—Tubes for spot-analysing by electron or ion beams; Microanalysers
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/26—Electron or ion microscopes; Electron or ion diffraction tubes
    • H01J37/285—Emission microscopes, e.g. field-emission microscopes
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/04—Means for controlling the discharge
    • H01J2237/049—Focusing means
    • H01J2237/0492—Lens systems
    • H01J2237/04926—Lens systems combined
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/25—Tubes for localised analysis using electron or ion beams
    • H01J2237/2505—Tubes for localised analysis using electron or ion beams characterised by their application
    • H01J2237/2516—Secondary particles mass or energy spectrometry
    • H01J2237/2522—Secondary particles mass or energy spectrometry of electrons (ESCA, XPS)
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/26—Electron or ion microscopes
    • H01J2237/285—Emission microscopes
    • H01J2237/2855—Photo-emission

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Analysing Materials By The Use Of Radiation (AREA)
DE69405896T 1993-03-26 1994-03-28 Ladungsträger Analysator Expired - Lifetime DE69405896D1 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
GB939306375A GB9306375D0 (en) 1993-03-26 1993-03-26 Charged-particle analyser
GB939320954A GB9320954D0 (en) 1993-03-26 1993-10-12 Charged-particle analyser

Publications (1)

Publication Number Publication Date
DE69405896D1 true DE69405896D1 (de) 1997-11-06

Family

ID=26302656

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69405896T Expired - Lifetime DE69405896D1 (de) 1993-03-26 1994-03-28 Ladungsträger Analysator

Country Status (3)

Country Link
US (1) US5506414A (de)
EP (1) EP0617453B1 (de)
DE (1) DE69405896D1 (de)

Families Citing this family (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB9718012D0 (en) * 1997-08-26 1997-10-29 Vg Systems Ltd A spectrometer and method of spectroscopy
JP3441955B2 (ja) * 1998-02-23 2003-09-02 株式会社日立製作所 投射方式の荷電粒子顕微鏡および基板検査システム
GB0225791D0 (en) * 2002-11-05 2002-12-11 Kratos Analytical Ltd Charged particle spectrometer and detector therefor
GB0801663D0 (en) * 2008-01-30 2008-03-05 Krizek Jiri G F Electromagnetic imaging analyzer
ES2602055T3 (es) 2012-03-06 2017-02-17 Scienta Omicron Ab Disposición de análisis para espectrómetro de partículas
CN103512912A (zh) * 2013-09-09 2014-01-15 长春理工大学 采用光学空间滤波器的便携x射线实时成像检测仪
US9754772B2 (en) * 2015-09-02 2017-09-05 Canon Kabushiki Kaisha Charged particle image measuring device and imaging mass spectrometry apparatus
CN111052298B (zh) * 2017-08-02 2022-09-02 Asml荷兰有限公司 用于带电粒子浸没以增强电压对比缺陷信号的***和方法
DE102019107327A1 (de) * 2019-03-21 2020-09-24 Specs Surface Nano Analysis Gmbh Vorrichtung und Verfahren zum Elektronentransfer von einer Probe zu einem Energieanalysator und Elektronen-Spektrometervorrichtung

Family Cites Families (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5129437B1 (de) * 1970-08-19 1976-08-25
GB1332207A (en) * 1971-05-07 1973-10-03 Ass Elect Ind Apparatus for charged particle spectroscopy
US3822382A (en) * 1971-08-17 1974-07-02 Jeol Ltd Apparatus for analyzing electron energy
DE2331091C3 (de) * 1973-06-19 1980-03-20 Leybold-Heraeus Gmbh, 5000 Koeln Einrichtung zur Bestimmung der Energie geladener Teilchen
DE3236273A1 (de) * 1982-09-30 1984-04-05 Siemens AG, 1000 Berlin und 8000 München Spektrometerobjektiv mit parallelen objektiv- und spektrometerfeldern fuer die potentialmesstechnik
US4737639A (en) * 1985-07-15 1988-04-12 The Perkin-Elmer Corporation Energy and analysis detection system for surface chemical analysis
GB8609740D0 (en) * 1986-04-22 1986-05-29 Spectros Ltd Charged particle energy analyser
GB8612099D0 (en) * 1986-05-19 1986-06-25 Vg Instr Group Spectrometer
US4810880A (en) * 1987-06-05 1989-03-07 The Perkin-Elmer Corporation Direct imaging monochromatic electron microscope
US4882487A (en) * 1987-06-05 1989-11-21 The Perkin-Elmer Corporation Direct imaging monochromatic electron microscope

Also Published As

Publication number Publication date
EP0617453A1 (de) 1994-09-28
US5506414A (en) 1996-04-09
EP0617453B1 (de) 1997-10-01

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Legal Events

Date Code Title Description
8332 No legal effect for de